CN102315388A - 薄膜晶体管及其制造方法、显示装置及电子设备 - Google Patents
薄膜晶体管及其制造方法、显示装置及电子设备 Download PDFInfo
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- CN102315388A CN102315388A CN2011101815326A CN201110181532A CN102315388A CN 102315388 A CN102315388 A CN 102315388A CN 2011101815326 A CN2011101815326 A CN 2011101815326A CN 201110181532 A CN201110181532 A CN 201110181532A CN 102315388 A CN102315388 A CN 102315388A
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- 239000010409 thin film Substances 0.000 title claims abstract description 104
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 238000013459 approach Methods 0.000 title abstract description 14
- 239000004065 semiconductor Substances 0.000 claims abstract description 229
- 239000000463 material Substances 0.000 claims abstract description 198
- 239000010408 film Substances 0.000 claims description 88
- 238000000034 method Methods 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 32
- 238000005516 engineering process Methods 0.000 claims description 22
- 230000015572 biosynthetic process Effects 0.000 claims description 20
- 238000000859 sublimation Methods 0.000 claims description 9
- 230000008022 sublimation Effects 0.000 claims description 9
- 239000011368 organic material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 311
- 230000008569 process Effects 0.000 description 27
- 238000005530 etching Methods 0.000 description 17
- 238000001259 photo etching Methods 0.000 description 14
- 239000011810 insulating material Substances 0.000 description 12
- 239000007772 electrode material Substances 0.000 description 10
- 239000012535 impurity Substances 0.000 description 10
- 238000007639 printing Methods 0.000 description 10
- 239000010949 copper Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 9
- 238000000059 patterning Methods 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- 239000010931 gold Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 7
- -1 poly-naphthalene dicarboxylic acid glycol ester Chemical class 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 230000006872 improvement Effects 0.000 description 6
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 6
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000001039 wet etching Methods 0.000 description 5
- 229940005561 1,4-benzoquinone Drugs 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 230000011218 segmentation Effects 0.000 description 4
- FHCPAXDKURNIOZ-UHFFFAOYSA-N tetrathiafulvalene Chemical class S1C=CSC1=C1SC=CS1 FHCPAXDKURNIOZ-UHFFFAOYSA-N 0.000 description 4
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 150000004054 benzoquinones Chemical group 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000007641 inkjet printing Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000004020 luminiscence type Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- OHBQPCCCRFSCAX-UHFFFAOYSA-N 1,4-Dimethoxybenzene Chemical compound COC1=CC=C(OC)C=C1 OHBQPCCCRFSCAX-UHFFFAOYSA-N 0.000 description 2
- MYKLQMNSFPAPLZ-UHFFFAOYSA-N 2,5-dimethylcyclohexa-2,5-diene-1,4-dione Chemical compound CC1=CC(=O)C(C)=CC1=O MYKLQMNSFPAPLZ-UHFFFAOYSA-N 0.000 description 2
- WOGWYSWDBYCVDY-UHFFFAOYSA-N 2-chlorocyclohexa-2,5-diene-1,4-dione Chemical compound ClC1=CC(=O)C=CC1=O WOGWYSWDBYCVDY-UHFFFAOYSA-N 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 239000004695 Polyether sulfone Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 125000005605 benzo group Chemical group 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- XLJMAIOERFSOGZ-UHFFFAOYSA-N cyanic acid Chemical compound OC#N XLJMAIOERFSOGZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- GGSUCNLOZRCGPQ-UHFFFAOYSA-N diethylaniline Chemical compound CCN(CC)C1=CC=CC=C1 GGSUCNLOZRCGPQ-UHFFFAOYSA-N 0.000 description 2
- DMBHHRLKUKUOEG-UHFFFAOYSA-N diphenylamine Chemical compound C=1C=CC=CC=1NC1=CC=CC=C1 DMBHHRLKUKUOEG-UHFFFAOYSA-N 0.000 description 2
- 238000010828 elution Methods 0.000 description 2
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 2
- 229910003472 fullerene Inorganic materials 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical class CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 2
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920006393 polyether sulfone Polymers 0.000 description 2
- 229920005644 polyethylene terephthalate glycol copolymer Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 2
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 2
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- GXDOGWCPOURDSL-UHFFFAOYSA-N 1,2,3,4,5,6-hexamethoxytriphenylene Chemical compound COC1=C(OC)C(OC)=C2C3=C(OC)C(OC)=CC=C3C3=CC=CC=C3C2=C1OC GXDOGWCPOURDSL-UHFFFAOYSA-N 0.000 description 1
- 150000004057 1,4-benzoquinones Chemical class 0.000 description 1
- KIAJWKWOKTWTIZ-UHFFFAOYSA-N 1,4-dioxonaphthalene-2,3-dicarbonitrile Chemical class C1=CC=C2C(=O)C(C#N)=C(C#N)C(=O)C2=C1 KIAJWKWOKTWTIZ-UHFFFAOYSA-N 0.000 description 1
- FRASJONUBLZVQX-UHFFFAOYSA-N 1,4-naphthoquinone Chemical class C1=CC=C2C(=O)C=CC(=O)C2=C1 FRASJONUBLZVQX-UHFFFAOYSA-N 0.000 description 1
- 150000000191 1,4-naphthoquinones Chemical class 0.000 description 1
- GFVNAHBXHPMMQH-UHFFFAOYSA-N 1-methylidene-2,4,7-trinitrofluorene Chemical class C=C1C(=CC(=C2C3=CC=C(C=C3C=C12)[N+](=O)[O-])[N+](=O)[O-])[N+](=O)[O-] GFVNAHBXHPMMQH-UHFFFAOYSA-N 0.000 description 1
- BDLNCFCZHNKBGI-UHFFFAOYSA-N 1-nitro-4-(4-nitrophenyl)benzene Chemical group C1=CC([N+](=O)[O-])=CC=C1C1=CC=C([N+]([O-])=O)C=C1 BDLNCFCZHNKBGI-UHFFFAOYSA-N 0.000 description 1
- LWHDQPLUIFIFFT-UHFFFAOYSA-N 2,3,5,6-tetrabromocyclohexa-2,5-diene-1,4-dione Chemical compound BrC1=C(Br)C(=O)C(Br)=C(Br)C1=O LWHDQPLUIFIFFT-UHFFFAOYSA-N 0.000 description 1
- JKLYZOGJWVAIQS-UHFFFAOYSA-N 2,3,5,6-tetrafluorocyclohexa-2,5-diene-1,4-dione Chemical compound FC1=C(F)C(=O)C(F)=C(F)C1=O JKLYZOGJWVAIQS-UHFFFAOYSA-N 0.000 description 1
- YBGORPOETHYSFS-UHFFFAOYSA-N 2,3,5,6-tetraiodocyclohexa-2,5-diene-1,4-dione Chemical compound IC1=C(I)C(=O)C(I)=C(I)C1=O YBGORPOETHYSFS-UHFFFAOYSA-N 0.000 description 1
- JOERSAVCLPYNIZ-UHFFFAOYSA-N 2,4,5,7-tetranitrofluoren-9-one Chemical compound O=C1C2=CC([N+]([O-])=O)=CC([N+]([O-])=O)=C2C2=C1C=C([N+](=O)[O-])C=C2[N+]([O-])=O JOERSAVCLPYNIZ-UHFFFAOYSA-N 0.000 description 1
- VHQGURIJMFPBKS-UHFFFAOYSA-N 2,4,7-trinitrofluoren-9-one Chemical compound [O-][N+](=O)C1=CC([N+]([O-])=O)=C2C3=CC=C([N+](=O)[O-])C=C3C(=O)C2=C1 VHQGURIJMFPBKS-UHFFFAOYSA-N 0.000 description 1
- UFBJCMHMOXMLKC-UHFFFAOYSA-N 2,4-dinitrophenol Chemical compound OC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O UFBJCMHMOXMLKC-UHFFFAOYSA-N 0.000 description 1
- GMZWPTALVQRAFV-UHFFFAOYSA-N 2,5-dibromo-3,6-dihydroxycyclohexa-2,5-diene-1,4-dione Chemical compound OC1=C(Br)C(=O)C(O)=C(Br)C1=O GMZWPTALVQRAFV-UHFFFAOYSA-N 0.000 description 1
- SENUUPBBLQWHMF-UHFFFAOYSA-N 2,6-dimethylcyclohexa-2,5-diene-1,4-dione Chemical compound CC1=CC(=O)C=C(C)C1=O SENUUPBBLQWHMF-UHFFFAOYSA-N 0.000 description 1
- YBLZPGPLSLJBLR-UHFFFAOYSA-N 2-(1,3-dithiol-2-ylidene)-5,6-dihydro-[1,3]dithiolo[4,5-b][1,4]dioxine Chemical compound O1CCOC(S2)=C1SC2=C1SC=CS1 YBLZPGPLSLJBLR-UHFFFAOYSA-N 0.000 description 1
- BESMENYYPMISDY-UHFFFAOYSA-N 2-(1,3-dithiol-2-ylidene)-5,6-dihydro-[1,3]dithiolo[4,5-b][1,4]dithiine Chemical compound S1CCSC(S2)=C1SC2=C1SC=CS1 BESMENYYPMISDY-UHFFFAOYSA-N 0.000 description 1
- YMWLPMGFZYFLRP-UHFFFAOYSA-N 2-(4,5-dimethyl-1,3-diselenol-2-ylidene)-4,5-dimethyl-1,3-diselenole Chemical compound [Se]1C(C)=C(C)[Se]C1=C1[Se]C(C)=C(C)[Se]1 YMWLPMGFZYFLRP-UHFFFAOYSA-N 0.000 description 1
- HGOTVGUTJPNVDR-UHFFFAOYSA-N 2-(4,5-dimethyl-1,3-dithiol-2-ylidene)-4,5-dimethyl-1,3-dithiole Chemical compound S1C(C)=C(C)SC1=C1SC(C)=C(C)S1 HGOTVGUTJPNVDR-UHFFFAOYSA-N 0.000 description 1
- VRSXBMGXAHSMFB-UHFFFAOYSA-N 2-(5,6-dihydro-4h-cyclopenta[d][1,3]diselenol-2-ylidene)-5,6-dihydro-4h-cyclopenta[d][1,3]diselenole Chemical compound C1CCC([Se]2)=C1[Se]C2=C([Se]1)[Se]C2=C1CCC2 VRSXBMGXAHSMFB-UHFFFAOYSA-N 0.000 description 1
- SGBKGXLBEGFMJB-UHFFFAOYSA-N 2-(5,6-dihydro-4h-cyclopenta[d][1,3]ditellurol-2-ylidene)-5,6-dihydro-4h-cyclopenta[d][1,3]ditellurole Chemical compound C1CCC([Te]2)=C1[Te]C2=C([Te]1)[Te]C2=C1CCC2 SGBKGXLBEGFMJB-UHFFFAOYSA-N 0.000 description 1
- DTJPUCUJANTIIU-UHFFFAOYSA-N 2-(5,6-dihydro-4h-cyclopenta[d][1,3]dithiol-2-ylidene)-5,6-dihydro-4h-cyclopenta[d][1,3]dithiole Chemical compound C1CCC(S2)=C1SC2=C(S1)SC2=C1CCC2 DTJPUCUJANTIIU-UHFFFAOYSA-N 0.000 description 1
- LZJCVNLYDXCIBG-UHFFFAOYSA-N 2-(5,6-dihydro-[1,3]dithiolo[4,5-b][1,4]dithiin-2-ylidene)-5,6-dihydro-[1,3]dithiolo[4,5-b][1,4]dithiine Chemical compound S1C(SCCS2)=C2SC1=C(S1)SC2=C1SCCS2 LZJCVNLYDXCIBG-UHFFFAOYSA-N 0.000 description 1
- JLTPSDHKZGWXTD-UHFFFAOYSA-N 2-[6-(dicyanomethylidene)naphthalen-2-ylidene]propanedinitrile Chemical compound N#CC(C#N)=C1C=CC2=CC(=C(C#N)C#N)C=CC2=C1 JLTPSDHKZGWXTD-UHFFFAOYSA-N 0.000 description 1
- AOPBDRUWRLBSDB-UHFFFAOYSA-N 2-bromoaniline Chemical compound NC1=CC=CC=C1Br AOPBDRUWRLBSDB-UHFFFAOYSA-N 0.000 description 1
- CCTJHVLTAJTPBV-UHFFFAOYSA-N 2-chloro-1,4-naphthoquinone Chemical class C1=CC=C2C(=O)C(Cl)=CC(=O)C2=C1 CCTJHVLTAJTPBV-UHFFFAOYSA-N 0.000 description 1
- AKCRQHGQIJBRMN-UHFFFAOYSA-N 2-chloroaniline Chemical compound NC1=CC=CC=C1Cl AKCRQHGQIJBRMN-UHFFFAOYSA-N 0.000 description 1
- XSUNFLLNZQIJJG-UHFFFAOYSA-N 2-n-naphthalen-2-yl-1-n,1-n,2-n-triphenylbenzene-1,2-diamine Chemical class C1=CC=CC=C1N(C=1C(=CC=CC=1)N(C=1C=CC=CC=1)C=1C=C2C=CC=CC2=CC=1)C1=CC=CC=C1 XSUNFLLNZQIJJG-UHFFFAOYSA-N 0.000 description 1
- JRBJSXQPQWSCCF-UHFFFAOYSA-N 3,3'-Dimethoxybenzidine Chemical compound C1=C(N)C(OC)=CC(C=2C=C(OC)C(N)=CC=2)=C1 JRBJSXQPQWSCCF-UHFFFAOYSA-N 0.000 description 1
- NUIURNJTPRWVAP-UHFFFAOYSA-N 3,3'-Dimethylbenzidine Chemical compound C1=C(N)C(C)=CC(C=2C=C(C)C(N)=CC=2)=C1 NUIURNJTPRWVAP-UHFFFAOYSA-N 0.000 description 1
- DNXUGBMARDFRGG-UHFFFAOYSA-N 3,6-dioxocyclohexa-1,4-diene-1,2-dicarbonitrile Chemical compound O=C1C=CC(=O)C(C#N)=C1C#N DNXUGBMARDFRGG-UHFFFAOYSA-N 0.000 description 1
- VVGUYAUHNXWDRC-UHFFFAOYSA-N 3-bromo-2,5-dimethylcyclohexa-2,5-diene-1,4-dione Chemical compound CC1=CC(=O)C(C)=C(Br)C1=O VVGUYAUHNXWDRC-UHFFFAOYSA-N 0.000 description 1
- DDTHMESPCBONDT-UHFFFAOYSA-N 4-(4-oxocyclohexa-2,5-dien-1-ylidene)cyclohexa-2,5-dien-1-one Chemical compound C1=CC(=O)C=CC1=C1C=CC(=O)C=C1 DDTHMESPCBONDT-UHFFFAOYSA-N 0.000 description 1
- YRNWIFYIFSBPAU-UHFFFAOYSA-N 4-[4-(dimethylamino)phenyl]-n,n-dimethylaniline Chemical compound C1=CC(N(C)C)=CC=C1C1=CC=C(N(C)C)C=C1 YRNWIFYIFSBPAU-UHFFFAOYSA-N 0.000 description 1
- GCXYLRUBYDEKBY-UHFFFAOYSA-N 4-bromo-3,6-dioxocyclohexa-1,4-diene-1,2-dicarbonitrile Chemical compound BrC=1C(C(=C(C(C=1)=O)C#N)C#N)=O GCXYLRUBYDEKBY-UHFFFAOYSA-N 0.000 description 1
- AQZMINLSVARCSL-UHFFFAOYSA-N 4-chloro-3,6-dioxocyclohexa-1,4-diene-1,2-dicarbonitrile Chemical compound ClC1=CC(=O)C(C#N)=C(C#N)C1=O AQZMINLSVARCSL-UHFFFAOYSA-N 0.000 description 1
- DIVZFUBWFAOMCW-UHFFFAOYSA-N 4-n-(3-methylphenyl)-1-n,1-n-bis[4-(n-(3-methylphenyl)anilino)phenyl]-4-n-phenylbenzene-1,4-diamine Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)N(C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 DIVZFUBWFAOMCW-UHFFFAOYSA-N 0.000 description 1
- YJYIEHACYZGUFD-UHFFFAOYSA-N 5-nitro-1,4-dioxonaphthalene-2,3-dicarbonitrile Chemical class O=C1C(C#N)=C(C#N)C(=O)C2=C1C=CC=C2[N+](=O)[O-] YJYIEHACYZGUFD-UHFFFAOYSA-N 0.000 description 1
- 102100025683 Alkaline phosphatase, tissue-nonspecific isozyme Human genes 0.000 description 1
- 101710161969 Alkaline phosphatase, tissue-nonspecific isozyme Proteins 0.000 description 1
- 229910016036 BaF 2 Inorganic materials 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- RUEHGMOYGWZQIS-UHFFFAOYSA-N C.C.C(#N)C1=CC=CC=2C(C3=CC=CC=C3C(C12)=O)=O Chemical compound C.C.C(#N)C1=CC=CC=2C(C3=CC=CC=C3C(C12)=O)=O RUEHGMOYGWZQIS-UHFFFAOYSA-N 0.000 description 1
- PHVOILUUOBIOPZ-UHFFFAOYSA-N C=C1C(=CC(=C2C3=C(C=C(C=C3C=C12)[N+](=O)[O-])[N+](=O)[O-])[N+](=O)[O-])[N+](=O)[O-] Chemical class C=C1C(=CC(=C2C3=C(C=C(C=C3C=C12)[N+](=O)[O-])[N+](=O)[O-])[N+](=O)[O-])[N+](=O)[O-] PHVOILUUOBIOPZ-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- GBPPLADXVZSCHE-UHFFFAOYSA-N ClC1=C(C=C(C(=C1)N)C)C1=CC=C(N)C(=C1)C Chemical compound ClC1=C(C=C(C(=C1)N)C)C1=CC=C(N)C(=C1)C GBPPLADXVZSCHE-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical class [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910018287 SbF 5 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- HFACYLZERDEVSX-UHFFFAOYSA-N benzidine Chemical compound C1=CC(N)=CC=C1C1=CC=C(N)C=C1 HFACYLZERDEVSX-UHFFFAOYSA-N 0.000 description 1
- JFDZBHWFFUWGJE-UHFFFAOYSA-N benzonitrile Chemical compound N#CC1=CC=CC=C1 JFDZBHWFFUWGJE-UHFFFAOYSA-N 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- XKHYPFFZHSGMBE-UHFFFAOYSA-N buta-1,3-diene-1,1,2,3,4,4-hexacarbonitrile Chemical compound N#CC(C#N)=C(C#N)C(C#N)=C(C#N)C#N XKHYPFFZHSGMBE-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- IPPWILKGXFOXHO-UHFFFAOYSA-N chloranilic acid Chemical compound OC1=C(Cl)C(=O)C(O)=C(Cl)C1=O IPPWILKGXFOXHO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- RMBGFUOEZINVEP-UHFFFAOYSA-N cyclohexa-2,5-diene-1,4-dione;phenol Chemical compound OC1=CC=CC=C1.O=C1C=CC(=O)C=C1 RMBGFUOEZINVEP-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- SQNZJJAZBFDUTD-UHFFFAOYSA-N durene Natural products CC1=CC(C)=C(C)C=C1C SQNZJJAZBFDUTD-UHFFFAOYSA-N 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 1
- KTWOOEGAPBSYNW-UHFFFAOYSA-N ferrocene Chemical compound [Fe+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 KTWOOEGAPBSYNW-UHFFFAOYSA-N 0.000 description 1
- 150000002220 fluorenes Chemical class 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 150000002475 indoles Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- SEYZDJPFVVXSRB-UHFFFAOYSA-N iron(2+);1,2,3,4,5-pentamethylcyclopenta-1,3-diene Chemical compound [Fe+2].CC=1C(C)=C(C)[C-](C)C=1C.CC=1C(C)=C(C)[C-](C)C=1C SEYZDJPFVVXSRB-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical group O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 1
- JDEJGVSZUIJWBM-UHFFFAOYSA-N n,n,2-trimethylaniline Chemical compound CN(C)C1=CC=CC=C1C JDEJGVSZUIJWBM-UHFFFAOYSA-N 0.000 description 1
- LWJUQIOWBKYOMO-UHFFFAOYSA-N n,n-dimethylpyren-1-amine Chemical class C1=C2C(N(C)C)=CC=C(C=C3)C2=C2C3=CC=CC2=C1 LWJUQIOWBKYOMO-UHFFFAOYSA-N 0.000 description 1
- MWOUGPLLVVEUMM-UHFFFAOYSA-N n-ethyl-2-methylaniline Chemical compound CCNC1=CC=CC=C1C MWOUGPLLVVEUMM-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002828 nitro derivatives Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- VXTWEDPZMSVFEF-UHFFFAOYSA-N pheniprazine Chemical compound NNC(C)CC1=CC=CC=C1 VXTWEDPZMSVFEF-UHFFFAOYSA-N 0.000 description 1
- 229950005573 pheniprazine Drugs 0.000 description 1
- OXNIZHLAWKMVMX-UHFFFAOYSA-N picric acid Chemical compound OC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O OXNIZHLAWKMVMX-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 150000004032 porphyrins Chemical class 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- WPFGFHJALYCVMO-UHFFFAOYSA-L rubidium carbonate Chemical compound [Rb+].[Rb+].[O-]C([O-])=O WPFGFHJALYCVMO-UHFFFAOYSA-L 0.000 description 1
- 229910000026 rubidium carbonate Inorganic materials 0.000 description 1
- YYMBJDOZVAITBP-UHFFFAOYSA-N rubrene Chemical compound C1=CC=CC=C1C(C1=C(C=2C=CC=CC=2)C2=CC=CC=C2C(C=2C=CC=CC=2)=C11)=C(C=CC=C2)C2=C1C1=CC=CC=C1 YYMBJDOZVAITBP-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- ZFRKQXVRDFCRJG-UHFFFAOYSA-N skatole Natural products C1=CC=C2C(C)=CNC2=C1 ZFRKQXVRDFCRJG-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 125000004646 sulfenyl group Chemical group S(*)* 0.000 description 1
- NLDYACGHTUPAQU-UHFFFAOYSA-N tetracyanoethylene Chemical compound N#CC(C#N)=C(C#N)C#N NLDYACGHTUPAQU-UHFFFAOYSA-N 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
- H10K10/486—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions the channel region comprising two or more active layers, e.g. forming pn heterojunctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/80—Constructional details
- H10K10/82—Electrodes
- H10K10/84—Ohmic electrodes, e.g. source or drain electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
Landscapes
- Thin Film Transistor (AREA)
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JP2010154779A JP2011077500A (ja) | 2009-09-04 | 2010-07-07 | 薄膜トランジスタ、薄膜トランジスタの製造方法、表示装置、および電子機器 |
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CN103985764A (zh) * | 2014-05-30 | 2014-08-13 | Tcl集团股份有限公司 | 氧化物tft及其制备方法、阵列基板、显示器件 |
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JP2014056955A (ja) * | 2012-09-13 | 2014-03-27 | Sony Corp | 薄膜トランジスタおよびその製造方法、並びに電子機器 |
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CN1674227A (zh) * | 2004-03-04 | 2005-09-28 | 株式会社半导体能源研究所 | 形成图案的方法,薄膜晶体管,显示设备及制法和应用 |
CN1694278A (zh) * | 2004-04-29 | 2005-11-09 | 三星Sdi株式会社 | 包含有机受体膜的有机薄膜晶体管 |
CN1825650A (zh) * | 2004-11-23 | 2006-08-30 | 三星Sdi株式会社 | 有机薄膜晶体管及其制造方法和平板显示器件 |
CN1905230A (zh) * | 2004-08-04 | 2007-01-31 | 索尼株式会社 | 场效应晶体管 |
JP2008243911A (ja) * | 2007-03-26 | 2008-10-09 | Nippon Hoso Kyokai <Nhk> | 有機薄膜トランジスタ及びディスプレイ |
US20090076322A1 (en) * | 2007-09-13 | 2009-03-19 | Atsushi Matsunaga | Capsule endoscope |
CN101645488A (zh) * | 2008-08-07 | 2010-02-10 | 索尼株式会社 | 有机薄膜晶体管、其制造方法和电子装置 |
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US7208756B2 (en) * | 2004-08-10 | 2007-04-24 | Ishiang Shih | Organic semiconductor devices having low contact resistance |
KR100658286B1 (ko) * | 2005-08-11 | 2006-12-14 | 삼성에스디아이 주식회사 | 유기 박막 트랜지스터 및 이를 이용한 평판표시장치 |
WO2009075281A1 (ja) * | 2007-12-13 | 2009-06-18 | Idemitsu Kosan Co., Ltd. | 酸化物半導体を用いた電界効果型トランジスタ及びその製造方法 |
JP5216369B2 (ja) | 2008-02-29 | 2013-06-19 | 電源開発株式会社 | バーナおよびその運転方法 |
JP5112284B2 (ja) | 2008-12-26 | 2013-01-09 | グローブライド株式会社 | 釣り用スプール |
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- 2011-06-09 DE DE102011103803A patent/DE102011103803A1/de not_active Withdrawn
- 2011-06-30 CN CN2011101815326A patent/CN102315388A/zh active Pending
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CN1674227A (zh) * | 2004-03-04 | 2005-09-28 | 株式会社半导体能源研究所 | 形成图案的方法,薄膜晶体管,显示设备及制法和应用 |
CN1694278A (zh) * | 2004-04-29 | 2005-11-09 | 三星Sdi株式会社 | 包含有机受体膜的有机薄膜晶体管 |
CN1905230A (zh) * | 2004-08-04 | 2007-01-31 | 索尼株式会社 | 场效应晶体管 |
CN1825650A (zh) * | 2004-11-23 | 2006-08-30 | 三星Sdi株式会社 | 有机薄膜晶体管及其制造方法和平板显示器件 |
JP2008243911A (ja) * | 2007-03-26 | 2008-10-09 | Nippon Hoso Kyokai <Nhk> | 有機薄膜トランジスタ及びディスプレイ |
US20090076322A1 (en) * | 2007-09-13 | 2009-03-19 | Atsushi Matsunaga | Capsule endoscope |
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Cited By (2)
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CN103985764A (zh) * | 2014-05-30 | 2014-08-13 | Tcl集团股份有限公司 | 氧化物tft及其制备方法、阵列基板、显示器件 |
CN103985764B (zh) * | 2014-05-30 | 2018-07-03 | Tcl集团股份有限公司 | 氧化物tft及其制备方法、阵列基板、显示器件 |
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TW201212238A (en) | 2012-03-16 |
TWI463669B (zh) | 2014-12-01 |
DE102011103803A1 (de) | 2012-02-02 |
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