CN102231047B - UV-curing equipment and UV-curing equipment alarm method - Google Patents
UV-curing equipment and UV-curing equipment alarm method Download PDFInfo
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- CN102231047B CN102231047B CN201110172459.6A CN201110172459A CN102231047B CN 102231047 B CN102231047 B CN 102231047B CN 201110172459 A CN201110172459 A CN 201110172459A CN 102231047 B CN102231047 B CN 102231047B
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Abstract
A kind of UV-curing equipment and UV-curing equipment alarm method, wherein UV-curing equipment includes: chamber；It is positioned at the ultraviolet ray generating apparatus of chamber；The substrate load plate relative with described ultraviolet ray generating apparatus；It is positioned at the water-cooling apparatus bottom described substrate load plate；For detecting the humidity sensor of described chamber humidity, when described chamber humidity is reported to the police more than setting value, humidity sensor.UV-curing equipment and UV-curing equipment alarm method that the present invention provides can avoid production loss in batch carries out the solid technique of light, further have warning degree of accuracy high, and it is big to have alarm range, advantage timely of fixing a breakdown.
Description
Technical field
The present invention relates to semiconductor manufacturing facility field, fixed particularly to UV-curing equipment and ultraviolet light
Standby alarm method.
Background technology
Photoetching process is one of of paramount importance processing step in semiconductor manufacturing.Main Function is by mask
Graph copying on plate is on silicon chip, ready for next step semiconductor technology, such as: etching or
Ion implanting；The cost of photoetching is about the 1/3 of whole silicon wafer fabrication process, and the consuming time accounts for whole silicon chip
The 40～60% of technique.
In the Chinese patent of Publication No. CN 101592866A, disclose a kind of photoetching process, specifically include:
The substrate treating photoetching is provided；Described substrate is carried out, dries；To the substrate spin coating photoetching after drying
Glue, forms photoresist layer；Described photoresist layer is carried out soft baking；Photoresist layer after soft baking is exposed
Light, development, form photoetching offset plate figure；Described photoetching offset plate figure is dried firmly；With described photoresist figure
Shape is mask, and figure is transferred in substrate by etched substrate.
In existing photoetching process, it will usually photoresist or photoetching offset plate figure are carried out one or many
Baking (soft baking or firmly baking), to remove the moisture of photoresist or photoetching offset plate figure, existing baking is generally adopted
Use UV-curing equipment, but, use the substrate scrappage after the baking of existing UV-curing equipment high.
Summary of the invention
The present invention solve problem be to provide a kind of can improve yield, reduce scrappage UV-curing equipment
And UV-curing equipment alarm method.
For solving the problems referred to above, the present invention provides a kind of UV-curing equipment, including: chamber；It is positioned at chamber
Indoor ultraviolet ray generating apparatus；The substrate load plate relative with described ultraviolet ray generating apparatus；It is positioned at described
Water-cooling apparatus bottom substrate load plate；For detecting the humidity sensor of described chamber humidity, work as institute
State chamber humidity to report to the police more than setting value, humidity sensor.
Optionally, described setting value is 30% more than external environment humidity.
Optionally, described setting value is 60% more than external environment humidity.
Optionally, described humidity sensor is arranged in chamber or is arranged in discharge duct.
Optionally, also include: humidity alert device.
Optionally, also include: the alert device of UV-curing equipment.
The present invention also provides for a kind of UV-curing equipment alarm method, including: UV-curing equipment is provided,
Described UV-curing equipment has the humidity sensor for detecting described chamber humidity；Use described purple
Outer light is fixed for carrying out curing process；When described chamber humidity is more than the 30% of external environment humidity,
Warning system is reported to the police.
Compared with prior art, the invention have the advantages that embodiments of the invention are fixed at ultraviolet light
The standby humidity sensor 140 installed for detecting described chamber 100 humidity, described humidity sensor 140
Alarm is sent, it is to avoid lose excessive during batch production when described chamber 100 humidity exception.
The UV-curing equipment alarm method of the embodiment of the present invention can be avoided in batch carries out the solid technique of light
Production loss, further has warning degree of accuracy high, and it is big to have alarm range, fixes a breakdown in time
Advantage.
Accompanying drawing explanation
Fig. 1 is an embodiment generalized section of the UV-curing equipment of the present invention；
Fig. 2 is another embodiment generalized section of the UV-curing equipment of the present invention；
Fig. 3 is the UV-curing equipment alarm method flow schematic diagram that the present invention provides.
Detailed description of the invention
The present inventor finds in real work, after using the baking of existing UV-curing equipment
Substrate scrappage is high, and the substrate scrapped is analyzed by inventor further, finds that the substrate scrapped all has
Have water stain, cause owing to leaking substrate to be contaminated during light is solid.
To this end, the present inventor further study show that, it is possible to cause UV-curing equipment to leak also
Forming water stain reason at substrate is: in carrying out UV-curing technical process, substrate is positioned over described purple
On the fixed standby substrate load plate (wafer chuck) of outer light, and when carrying out ultra-violet curing, described substrate
Described substrate is cooled down by the water cooling system of load plate by water-cooled, when leakage occurs in cooling system, cold
But water can spread on described substrate load plate, causes substrate to be polluted by water during light is solid, but partly leads
Body manufacturing process batch would generally carry out technique, then spot-check the product carrying out technique, waits discovery
During problem, the product of this batch is all scrapped, and causes damage, and the product often doing a piece of or few sheet just enters
Row checks, causes production efficiency low.
To this end, the present inventor provides a kind of UV-curing equipment, including: chamber；It is positioned at chamber
Interior ultraviolet ray generating apparatus；The substrate load plate relative with described ultraviolet ray generating apparatus；It is positioned at described lining
Water-cooling apparatus bottom end load plate；For detecting the humidity sensor of described chamber humidity, when described
Chamber humidity is more than setting value, and humidity sensor is reported to the police.
The present invention is based on experiment basis, it is provided that a kind of have the humidity biography that can detect described chamber humidity
Sensor, described humidity sensor can detect described chamber humidity, when described chamber humidity is more than setting value,
Humidity sensor is reported to the police, it is possible to stop the curing process of this batch after having carried out current process, it is to avoid make
The product becoming this batch is all scrapped, and reduces production loss.
Specifically, refer to Fig. 1, Fig. 1 and illustrate that the embodiment section of UV-curing equipment of the present invention shows
It is intended to, including: chamber 100；It is positioned at the ultraviolet ray generating apparatus 110 of chamber 100；With described ultraviolet
The substrate load plate 120 that line generating means 110 is relative；It is positioned at the water cooling dress bottom described substrate load plate 120
Put 130；For detecting the humidity sensor 140 of described chamber 100 humidity.
Described chamber 100 can be vacuum chamber, provides state space and operation flat for UV-curing technique
Platform, the material of described chamber 100 can be selected from rustless steel or the rustless steel of surface coating ceramic material,
Described chamber 100 can be hollow container, such as cylindrical shape, square tube shape.
Described ultraviolet ray generating apparatus 110 is positioned at chamber 100, in the present embodiment, described ultraviolet
Generating means 110 is positioned at chamber 100 tip position, is used for producing ultraviolet and solidifies photoresist.
Described substrate load plate 120 is positioned at chamber 100 bottom position, and with described ultraviolet ray generating apparatus 110
Relatively, described substrate load plate 120 has the substrate of photoresist for placing spin coating so that described photoresist exists
Ultraviolet irradiates lower solidification.
Described water-cooling apparatus 130 is used for cooling down described substrate load plate 120 and being positioned over described substrate load plate
Substrate on 120, it is water-cooled that described water-cooling apparatus 130 is positioned at the part bottom described substrate load plate 120
Pipe, when cooling is needed, described water-cooling apparatus 130 inputs cooling water from the water inlet port of water cooling tube,
Discharge cooling water from water outlet port, thus reduce described substrate load plate 120 and be positioned over described substrate load plate
Substrate temperature on 120.
It should be noted that due to water inlet port, the connection of water outlet port, the cooling water pipe matter of water cooling tube
Amount problem, generally in cooling procedure, cooling water can leak to described substrate load plate 120 surface, causes
Substrate is polluted by water during light is solid.
The described humidity sensor 140 humidity for detection cavity indoor, when described humidity is higher than preset value,
Described humidity sensor 140 will send alarm so that staff can stop the curing process of this batch,
Avoid the product causing this batch all to scrap, reduce production loss.
It should be noted that in normal curing process, described chamber interior also can exist certain wet
Degree, to this end, the present inventor finds through research, the chamber interior humidity of normal curing process
For the 30% of external environment humidity, specifically, usual UV-curing equipment is positioned over ultra-clean chamber (Clean
Room), in, external environment humidity is the humidity of ultra-clean chamber, and (ultra-clean chamber humidity is 45 ± 5RH, wherein
RH is relative humidity (Relative Humidity))；And if cooling system leaks, chamber interior wet
Degree is the 60% of external environment humidity, when the preset value of humidity alarm can be set to more than external environment humidity
30%, it is preferable that the preset value of humidity alarm can be set to the 60% of external environment humidity.
Also, it should be noted still with reference to Fig. 1, described humidity sensor 140 can be arranged on chamber
In 100, when humidity sensor 140 is arranged in chamber 100, there is measurement humidity advantage accurately,
But when described humidity sensor 140 is arranged in chamber 100, described humidity sensor 140 needs resistance to height
Temperature, UV radiation.
More preferably, refer to Fig. 2, described humidity sensor 140 is arranged at the discharge duct of chamber 100
In (Exhaust line) 150, owing to, in curing process, needing to keep certain pressure, exhaustor in chamber
Humidity in road 150 keeps consistent with the humidity in chamber, and the humidity measured in discharge duct 150 also can
Humidity in enough reaction chambers, and owing to described humidity sensor 140 is arranged at the exhaustor of chamber 100
In road, it is not necessary to be exposed under ultraviolet direct irradiation, and in discharge duct 150 temperature less than in chamber
Temperature, described humidity sensor 140 need not to use the wet of expensive high temperature resistant, UV radiation
Degree sensor.
Also, it should be noted also there is humidity alert device in UV-curing device external, when described wet
When degree sensor 140 detects the humidity of chamber interior more than preset value, described humidity sensor 140 to
Humidity alert device signal an alert, described humidity alert device receives alarm signal to start to report to the police,
Described humidity sensor 140 can pass through Wi-Fi, bluetooth, infrared or alert by signal alignment humidity
Report equipment signal an alert.
When described humidity sensor 140 detects the humidity of chamber interior more than preset value, described humidity
Sensor 140 can also be to the alert device signal an alert of UV-curing equipment, when ultraviolet light is fixed
Standby alert device receive alarm signal starts report to the police, described humidity sensor 140 can pass through Wi-Fi,
Bluetooth, infrared or by the alert device signal an alert of signal alignment UV-curing equipment.
More preferably, when described humidity sensor 140 detects the humidity of chamber interior more than preset value,
Described humidity sensor 140 can also be simultaneously to alert device and the humidity alert device of UV-curing equipment
Signal an alert, when alert device and the humidity alert device of UV-curing equipment receive alarm signal
Starting to report to the police, described humidity sensor 140 can pass through Wi-Fi, bluetooth, infrared or pass through signal
The alert device of alignment UV-curing equipment and humidity alert device signal an alert, when ultraviolet light is fixed
When standby alert device and humidity alert device are with alarm, the event of UV-curing equipment itself can be got rid of
Barrier alarm, warning degree of accuracy is high, and it is big to have alarm range, fixes a breakdown in time, and production loss is few
Advantage.
To sum up, embodiments of the invention are installed at UV-curing equipment and are used for detecting described chamber 100 endogenous dampness
The humidity sensor 140 of degree, described humidity sensor 140 sends when described chamber 100 humidity exception
Alarm, it is to avoid lose excessive during batch production.
Further, the alarm preset value of humidity sensor 140 is set to more than external environment humidity 30%,
Can accurately react normal cure technique and cooling system leaks, alarm reaction is accurate.
Further, described humidity sensor 140 can also be simultaneously to the alert device of UV-curing equipment
With humidity alert device signal an alert, there is the fault warning that can get rid of UV-curing equipment itself,
The advantage that warning degree of accuracy is high, and it is big to have alarm range, fixes a breakdown in time, few excellent of production loss
Point.
The present inventor also provides for a kind of UV-curing equipment alarm method, refer to Fig. 3, including:
Step S101, it is provided that UV-curing equipment, described UV-curing equipment has for detecting described chamber
The humidity sensor 140 of room 100 humidity；
Step S102, uses described UV-curing equipment to carry out curing process；
Step S103, when described chamber 100 humidity is more than the 30% of external environment humidity, alarm system
System is reported to the police.
Specifically, described warning system can be the alert device of UV-curing equipment, when described chamber 100
When humidity is more than the 30% of external environment humidity, it is preferable that outside the preset value of humidity alarm can be set to
The 60% of boundary's ambient humidity, described humidity sensor 140 sends police to the alert device of UV-curing equipment
The number of notifying, starts to report to the police when the alert device of UV-curing equipment receives alarm signal, and described humidity passes
Sensor 140 can pass through Wi-Fi, bluetooth, infrared or by the police of signal alignment UV-curing equipment
Report equipment signal an alert so that need not additionally arrange warning system, low production cost；Separately
In one embodiment, described warning system can be the extra humidity alert device arranged, described humidity sensor
Device 140 can be by Wi-Fi, bluetooth, infrared or send police by signal alignment humidity alert device
The number of notifying, starts to report to the police when humidity alert device receives alarm signal, and it is accurate that the present embodiment has alarm
Advantage；In another embodiment, described humidity sensor 140 can pass through Wi-Fi, bluetooth, infrared,
Or alert device and humidity alert device by signal alignment UV-curing equipment are simultaneously emitted by alarm signal
Number, when the alert device of UV-curing equipment and humidity alert device are with alarm, ultraviolet can be got rid of
The fixed fault warning standby of light itself, warning degree of accuracy is high, and it is big to have alarm range, fix a breakdown and
Time, the advantage that production loss is few.
Described humidity sensor 140 can be arranged in UV-curing apparatus cavity or be arranged at ultraviolet light
In fixed standby discharge duct (Exhaust line).
The UV-curing equipment alarm method of the embodiment of the present invention can be avoided in batch carries out the solid technique of light
Production loss, further has warning degree of accuracy high, and it is big to have alarm range, fixes a breakdown in time
Advantage.
Although the present invention is open as above with preferred embodiment, but it is not for limiting the present invention, appoints
What those skilled in the art without departing from the spirit and scope of the present invention, may be by the disclosure above
Technical solution of the present invention is made possible variation and amendment by method and technology contents, therefore, every does not takes off
From the content of technical solution of the present invention, it is any that above example is made by the technical spirit of the foundation present invention
Simple modification, equivalent variations and modification, belong to the protection domain of technical solution of the present invention.
Claims (4)
1. a UV-curing equipment, including:
Chamber；
It is positioned at the ultraviolet ray generating apparatus of chamber；
The substrate load plate relative with described ultraviolet ray generating apparatus；
It is positioned at the water-cooling apparatus bottom described substrate load plate；
It is characterized in that, also include:
For detecting the humidity sensor of described chamber humidity, when described chamber humidity is more than setting value,
Humidity sensor is reported to the police, and wherein said humidity sensor is arranged in chamber or is arranged in discharge duct；
Described setting value is 30% more than external environment humidity, or, described setting value is for more than extraneous ring
The 60% of border humidity；
Wherein, in UV-curing device external, there is humidity alert device, when described humidity sensor detects
When humidity to chamber interior is more than preset value, described humidity sensor sends alarm to humidity alert device
Signal, described humidity alert device receives alarm signal to start to report to the police, and described humidity sensor passes through
Wi-Fi, bluetooth, infrared or by signal alignment humidity alert device signal an alert.
2. UV-curing equipment as claimed in claim 1, it is characterised in that also include: UV-curing equipment
Alert device.
3. a UV-curing equipment alarm method, it is characterised in that including:
Thering is provided UV-curing equipment, described UV-curing equipment has the humidity for detection cavity indoor humidity
Sensor, described humidity sensor is arranged in chamber or is arranged in discharge duct；
Described UV-curing equipment is used to carry out curing process；
When described chamber humidity is more than the 30% of external environment humidity or more than the 60% of external environment humidity
Time, warning system is reported to the police；
Wherein, in UV-curing device external, there is humidity alert device, when described humidity sensor detects
When humidity to chamber interior is more than preset value, described humidity sensor sends alarm to humidity alert device
Signal, described humidity alert device receives alarm signal to start to report to the police, and described humidity sensor passes through
Wi-Fi, bluetooth, infrared or by signal alignment humidity alert device signal an alert.
4. UV-curing equipment alarm method as claimed in claim 3, it is characterised in that described warning system
Alert device including UV-curing equipment.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110172459.6A CN102231047B (en) | 2011-06-23 | 2011-06-23 | UV-curing equipment and UV-curing equipment alarm method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201110172459.6A CN102231047B (en) | 2011-06-23 | 2011-06-23 | UV-curing equipment and UV-curing equipment alarm method |
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| CN102231047A CN102231047A (en) | 2011-11-02 |
| CN102231047B true CN102231047B (en) | 2016-09-14 |
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| CN104834178A (en) * | 2014-02-12 | 2015-08-12 | 中芯国际集成电路制造(上海)有限公司 | Apparatus and method for preparing photomask |
| WO2016172788A1 (en) * | 2015-04-30 | 2016-11-03 | Fortier, Raymond | Improved stereolithography system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101221377A (en) * | 2008-01-16 | 2008-07-16 | 重庆大学 | Miniature constant temperature self-control experimental bench used for simple photo-etching and soft photo-etching |
| CN201698152U (en) * | 2010-06-04 | 2011-01-05 | 志圣科技（广州）有限公司 | Exposure machine with humidity adjusting function |
| CN102029715A (en) * | 2010-10-25 | 2011-04-27 | 江苏文光车辆附件有限公司 | SLA (stereo lithography) technology of light curing stereo homocentric sphere |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10256118A (en) * | 1997-03-10 | 1998-09-25 | Mitsubishi Electric Corp | Method and apparatus for treating resist pattern |
| JP4472626B2 (en) * | 2005-12-14 | 2010-06-02 | 株式会社オーク製作所 | Exposure equipment |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101221377A (en) * | 2008-01-16 | 2008-07-16 | 重庆大学 | Miniature constant temperature self-control experimental bench used for simple photo-etching and soft photo-etching |
| CN201698152U (en) * | 2010-06-04 | 2011-01-05 | 志圣科技（广州）有限公司 | Exposure machine with humidity adjusting function |
| CN102029715A (en) * | 2010-10-25 | 2011-04-27 | 江苏文光车辆附件有限公司 | SLA (stereo lithography) technology of light curing stereo homocentric sphere |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140403 |
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Effective date of registration: 20140403 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: Zuchongzhi road in Pudong Zhangjiang hi tech park Shanghai city Pudong New Area No. 1399 201203 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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