CN102231047A - Ultraviolet light curing device and alarm method thereof - Google Patents
Ultraviolet light curing device and alarm method thereof Download PDFInfo
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- CN102231047A CN102231047A CN2011101724596A CN201110172459A CN102231047A CN 102231047 A CN102231047 A CN 102231047A CN 2011101724596 A CN2011101724596 A CN 2011101724596A CN 201110172459 A CN201110172459 A CN 201110172459A CN 102231047 A CN102231047 A CN 102231047A
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Abstract
The invention provides an ultraviolet light curing device and an alarm method thereof, wherein the ultraviolet light curing device comprises a chamber, an ultraviolet light generating device, a substrate bearing disc, a water cooling device and a humidity sensor, wherein the ultraviolet light generating device is arranged in the chamber; the substrate bearing disc is arranged opposite to the ultraviolet light generating device; the water cooling device is arranged at the bottom of the substrate bearing disc; the humidity sensor is used for detecting the humidity in the chamber, and the humidity sensor gives out an alarm when the humidity in the chamber is greater than a set value. The ultraviolet light curing device and the alarm method thereof provided by the invention can be used for avoiding the production losses in a light curing process in batches and further has the advantages of high alarm accuracy, large alarm range and timely trouble shooting.
Description
Technical field
The present invention relates to the semiconductor manufacturing facility field, particularly ultraviolet light sets firmly and is equipped with and ultraviolet light sets firmly alarm method fully.
Background technology
Photoetching process is one of of paramount importance processing step during semiconductor is made.Main effect be with the graph copying on the mask plate to silicon chip, for next step semiconductor technology ready, such as: etching or ion inject; The cost of photoetching is about 1/3 of whole silicon wafer manufacturing process, expends time in to account for 40～60% of whole silicon wafer technology.
At publication number is to disclose a kind of photoetching process in the Chinese patent of CN 101592866A, specifically comprises: the substrate for the treatment of photoetching is provided; Described substrate is cleaned, dries; To dried substrate spin coating photoresist, form photoresist layer; Described photoresist layer is carried out soft baking; Photoresist layer after the soft baking is exposed, develops, form the photoresist figure; Described photoresist figure is dried by the fire firmly; With described photoresist figure is mask, etched substrate, with figure transfer to substrate.
In existing photoetching process; usually can carry out the baking (soft baking or hard baking) of one or many to photoresist or photoresist figure; to remove the moisture of photoresist or photoresist figure; existing baking adopts ultraviolet light to set firmly fully usually; but, adopt existing ultraviolet light to set firmly the substrate scrappage height that is equipped with after toasting.
Summary of the invention
The ultraviolet light that the problem that the present invention solves provides a kind ofly can improve yield, reduce scrappage sets firmly and is equipped with and ultraviolet light sets firmly alarm method fully.
For addressing the above problem, the invention provides a kind of ultraviolet light and set firmly fully, comprising: chamber; Be positioned at the ultraviolet ray generating apparatus of chamber; The substrate load plate relative with described ultraviolet ray generating apparatus; Be positioned at the water-cooling apparatus of described substrate carrier tray bottom; Be used to survey the humidity sensor of humidity in the described chamber, when described chamber humidity greater than setting value, humidity sensor is reported to the police.
Optionally, described setting value is greater than 30% of external environment humidity.
Optionally, described setting value is greater than 60% of external environment humidity.
Optionally, described humidity sensor is arranged in the chamber or is arranged in the gas exhaust duct.
Optionally, also comprise: the humidity alert device.
Optionally, also comprise: ultraviolet light sets firmly the alert device that is equipped with.
The present invention also provides a kind of ultraviolet light to set firmly alarm method fully, comprising: provide ultraviolet light to set firmly and be equipped with, described ultraviolet light sets firmly to get everything ready and is useful on the humidity sensor of surveying humidity in the described chamber; Adopt described ultraviolet light to set firmly and be cured technology fully; When humidity in the described chamber greater than external environment humidity 30% the time, warning system is reported to the police.
Compared with prior art, the present invention has the following advantages: embodiments of the invention set firmly to be equipped with at ultraviolet light installs the humidity sensor 140 that is used to survey humidity in the described chamber 100, described humidity sensor 140 gives the alarm when humidity is unusual in described chamber 100, and loss is excessive when avoiding producing in batches.
The ultraviolet light of the embodiment of the invention sets firmly fully alarm method can batch carry out avoiding production loss in the solid technology of light, further have warning degree of accuracy height, and it is big to have alarm range, the advantage timely of fixing a breakdown.
Description of drawings
Fig. 1 is that ultraviolet light of the present invention sets firmly an embodiment diagrammatic cross-section that is equipped with;
Fig. 2 is that ultraviolet light of the present invention sets firmly another embodiment diagrammatic cross-section that is equipped with;
Fig. 3 is that ultraviolet light provided by the invention sets firmly alarm method schematic flow sheet fully.
Embodiment
The present inventor finds in real work, adopt existing ultraviolet light to set firmly the substrate scrappage height that is equipped with after toasting, the inventor further analyzes the substrate of scrapping, and it is water stain to find that the substrate of scrapping all has, and causes substrate to be polluted in the solid process of light owing to leak.
For this reason; the present inventor further discovers; can cause ultraviolet light to set firmly and leak fully and form water stain reason and be: carry out in the solid technological process of ultraviolet light at substrate; substrate is positioned over described ultraviolet light and sets firmly on the substrate load plate (wafer chuck) that is equipped with; and when carrying out ultra-violet curing; the water cooling system of described substrate load plate cools off described substrate by water-cooled; when leaking appears in cooling system; chilled water can spread to described substrate load plate; causing substrate to be subjected to water in the solid process of light pollutes; but semiconductor fabrication process usually can batch carry out technology, then the product that carries out technology is spot-check, and waits when pinpointing the problems; the product of this batch is all scrapped; cause damage, and the product of whenever doing a slice or few sheet is just checked, causes production efficiency low.
For this reason, the present inventor provides a kind of ultraviolet light to set firmly fully, comprising: chamber; Be positioned at the ultraviolet ray generating apparatus of chamber; The substrate load plate relative with described ultraviolet ray generating apparatus; Be positioned at the water-cooling apparatus of described substrate carrier tray bottom; Be used to survey the humidity sensor of humidity in the described chamber, when described chamber humidity greater than setting value, humidity sensor is reported to the police.
The present invention is based on the experiment basis, a kind of humidity sensor that can survey described chamber humidity that has is provided, described humidity sensor can be surveyed described chamber humidity, when described chamber humidity greater than setting value, humidity sensor is reported to the police, can after finishing current technology, stop the curing process of this batch, avoid causing the product of this batch all to scrap, reduce production loss.
Particularly, please refer to Fig. 1, Fig. 1 illustrates ultraviolet light of the present invention and sets firmly an embodiment diagrammatic cross-section that is equipped with, and comprising: chamber 100; Be positioned at the ultraviolet ray generating apparatus 110 of chamber 100; The substrate load plate 120 relative with described ultraviolet ray generating apparatus 110; Be positioned at the water-cooling apparatus 130 of described substrate load plate 120 bottoms; Be used to survey the humidity sensor 140 of humidity in the described chamber 100.
Described chamber 100 can be vacuum chamber, for the solid technology of ultraviolet light provides state space and operating platform, the material of described chamber 100 can be selected from the stainless steel of stainless steel or surface coating ceramic material, and described chamber 100 can be hollow container, for example cylindrical shape, square tube shape.
Described ultraviolet ray generating apparatus 110 is positioned at chamber 100, and in the present embodiment, described ultraviolet ray generating apparatus 110 is positioned at chamber 100 tip positions, is used for producing ultraviolet ray photoresist is cured.
Described substrate load plate 120 is positioned at chamber 100 bottom positions, and relative with described ultraviolet ray generating apparatus 110, and described substrate load plate 120 is used to place the substrate that spin coating has photoresist, makes described photoresist solidify under the ultraviolet ray irradiation.
Described water-cooling apparatus 130 is used to cool off described substrate load plate 120 and the substrate that is positioned on the described substrate load plate 120, the part that described water-cooling apparatus 130 is positioned at described substrate load plate 120 bottoms is a water cooling tube, when needs cool off, described water-cooling apparatus 130 is from the water inlet port input chilled water of water cooling tube, discharge chilled water from the water outlet port, thereby reduce described substrate load plate 120 and the substrate temperature that is positioned on the described substrate load plate 120.
Need to prove that because water inlet port, the connection of water outlet port, the cooling water pipe quality problems of water cooling tube, in cooling procedure, chilled water can leak to described substrate load plate 120 surfaces usually, cause substrate in the solid process of light, to be subjected to water and pollute.
Described humidity sensor 140 is used for the indoor humidity of detection cavity, when described humidity is higher than preset value, described humidity sensor 140 will give the alarm, and make the staff can stop the curing process of this batch, avoid causing the product of this batch all to scrap, reduce production loss.
Need to prove, in normal curing process, also can there be certain humidity in described chamber interior, for this reason, the present inventor is through discovering, the chamber interior humidity of normal curing process is 30% of external environment humidity, particularly, usually ultraviolet light sets firmly and is positioned over fully in the ultra-clean chamber (Clean Room), and external environment humidity is the humidity (ultra-clean chamber humidity is 45 ± 5RH, and wherein RH is relative humidity (Relative Humidity)) of ultra-clean chamber; And if cooling system leaks, the humidity of chamber interior is 60% of external environment humidity, and when the preset value of humidity alarm can be made as greater than 30% of external environment humidity, preferably, the preset value of humidity alarm can be made as 60% of external environment humidity.
Also need to prove, still with reference to figure 1, described humidity sensor 140 can be arranged in the chamber 100, in the time of in humidity sensor 140 is arranged at chamber 100, has the humidity of measurement advantage accurately, when but described humidity sensor 140 was arranged in the chamber 100, described humidity sensor 140 needed high temperature resistant, UV resistant radiation.
More preferably, please refer to Fig. 2, described humidity sensor 140 is arranged in the gas exhaust duct (Exhaust line) 150 of chamber 100, because in the curing process, need the pressure that keeps certain in the chamber, humidity in the gas exhaust duct 150 and the humidity in the chamber are consistent, measure humidity in the gas exhaust duct 150 humidity in also can reaction chamber, and because described humidity sensor 140 is arranged in the gas exhaust duct of chamber 100, do not need to be exposed under the ultraviolet direct irradiation, and temperature is lower than the temperature in the chamber in the gas exhaust duct 150, and described humidity sensor 140 does not need to adopt the high temperature resistant of costliness, the humidity sensor of UV resistant radiation.
Also need to prove, setting firmly fully at ultraviolet light, the outside also has the humidity alert device, the humidity that detects chamber interior when described humidity sensor 140 is during greater than preset value, described humidity sensor 140 is to the humidity alert device signal that gives the alarm, described humidity alert device receives alarm signal to begin to report to the police, described humidity sensor 140 can by Wi-Fi, bluetooth, infrared or by signal wire to the humidity alert device signal that gives the alarm.
The humidity that detects chamber interior when described humidity sensor 140 is during greater than preset value, described humidity sensor 140 can also set firmly the alert device that the is equipped with signal that gives the alarm to ultraviolet light, receive alarm signal and begin to report to the police when ultraviolet light sets firmly the alert device that is equipped with, described humidity sensor 140 can be by Wi-Fi, bluetooth, infrared or set firmly the alert device that the is equipped with signal that gives the alarm by signal wire to ultraviolet light.
More preferably, the humidity that detects chamber interior when described humidity sensor 140 is during greater than preset value, described humidity sensor 140 can also be simultaneously sets firmly the alert device that is equipped with and the humidity alert device signal that gives the alarm to ultraviolet light, receive alarm signal and begin to report to the police when ultraviolet light sets firmly the alert device that is equipped with and humidity alert device, described humidity sensor 140 can pass through Wi-Fi, bluetooth, infrared, perhaps set firmly the alert device that is equipped with and the humidity alert device signal that gives the alarm to ultraviolet light by signal wire, when ultraviolet light sets firmly the alert device that is equipped with and humidity alert device when reporting to the police simultaneously, can get rid of ultraviolet light and set firmly the failure warning that is equipped with itself, warning degree of accuracy height, and it is big to have alarm range, fix a breakdown in time the advantage that production loss is few.
To sum up, embodiments of the invention set firmly to be equipped with at ultraviolet light installs the humidity sensor 140 that is used to survey humidity in the described chamber 100, and described humidity sensor 140 gives the alarm when humidity is unusual in described chamber 100, and loss is excessive when avoiding producing in batches.
Further, the alarm preset value of humidity sensor 140 is made as greater than 30% of external environment humidity, can accurately react normal curing process and cooling system leaks, and alarm reaction is accurate.
Further, described humidity sensor 140 can also be simultaneously sets firmly the alert device that is equipped with and the humidity alert device signal that gives the alarm to ultraviolet light, have and to get rid of ultraviolet light and set firmly the failure warning that is equipped with itself, the advantage that the warning degree of accuracy is high, and it is big to have alarm range, fix a breakdown in time the advantage that production loss is few.
The present inventor also provides a kind of ultraviolet light to set firmly alarm method fully, please refer to Fig. 3, comprising:
Step S101 provides ultraviolet light to set firmly and is equipped with, and described ultraviolet light sets firmly to get everything ready and is useful on the humidity sensor 140 of surveying humidity in the described chamber 100;
Step S102 adopts described ultraviolet light to set firmly and is cured technology fully;
Step S103, when humidity in the described chamber 100 greater than external environment humidity 30% the time, warning system is reported to the police.
Particularly, described warning system can set firmly the alert device that is equipped with for ultraviolet light, when humidity in the described chamber 100 greater than external environment humidity 30% the time, preferably, the preset value of humidity alarm can be made as 60% of external environment humidity, described humidity sensor 140 sets firmly the alert device that the is equipped with signal that gives the alarm to ultraviolet light, receive alarm signal and begin to report to the police when ultraviolet light sets firmly the alert device that is equipped with, described humidity sensor 140 can pass through Wi-Fi, bluetooth, infrared, perhaps set firmly the alert device that the is equipped with signal that gives the alarm to ultraviolet light by signal wire, making does not need additionally to be provided with warning system, low production cost; In another embodiment, described warning system can be the extra humidity alert device that is provided with, described humidity sensor 140 can by Wi-Fi, bluetooth, infrared or by signal wire to the humidity alert device signal that gives the alarm, begin to report to the police when the humidity alert device receives alarm signal, present embodiment has the accurate advantage of alarm; In another embodiment, described humidity sensor 140 can be by Wi-Fi, bluetooth, infrared or set firmly the alert device that is equipped with and the humidity alert device signal that gives the alarm simultaneously by signal wire to ultraviolet light, when ultraviolet light sets firmly the alert device that is equipped with and humidity alert device when reporting to the police simultaneously, can get rid of ultraviolet light and set firmly the failure warning that is equipped with itself, warning degree of accuracy height, and it is big to have alarm range, fixes a breakdown in time the advantage that production loss is few.
Described humidity sensor 140 can be arranged on ultraviolet light and set firmly fully in the chamber or be arranged at ultraviolet light and set firmly fully in the gas exhaust duct (Exhaust line).
The ultraviolet light of the embodiment of the invention sets firmly fully alarm method can batch carry out avoiding production loss in the solid technology of light, further have warning degree of accuracy height, and it is big to have alarm range, the advantage timely of fixing a breakdown.
Though the present invention with preferred embodiment openly as above; but it is not to be used for limiting the present invention; any those skilled in the art without departing from the spirit and scope of the present invention; can utilize the method and the technology contents of above-mentioned announcement that technical solution of the present invention is made possible change and modification; therefore; every content that does not break away from technical solution of the present invention; to any simple modification, equivalent variations and modification that above embodiment did, all belong to the protection domain of technical solution of the present invention according to technical spirit of the present invention.
Claims (9)
1. a ultraviolet light sets firmly and is equipped with, and comprising:
Chamber;
Be positioned at the ultraviolet ray generating apparatus of chamber;
The substrate load plate relative with described ultraviolet ray generating apparatus;
Be positioned at the water-cooling apparatus of described substrate carrier tray bottom;
It is characterized in that, also comprise:
Be used to survey the humidity sensor of humidity in the described chamber, when described chamber humidity greater than setting value, humidity sensor is reported to the police.
2. ultraviolet light as claimed in claim 1 sets firmly and is equipped with, and it is characterized in that described setting value is greater than 30% of external environment humidity.
3. ultraviolet light as claimed in claim 2 sets firmly and is equipped with, and it is characterized in that described setting value is greater than 60% of external environment humidity.
4. ultraviolet light as claimed in claim 1 sets firmly and is equipped with, and it is characterized in that, described humidity sensor is arranged in the chamber or is arranged in the gas exhaust duct.
5. ultraviolet light as claimed in claim 1 sets firmly and is equipped with, and it is characterized in that, also comprises: the humidity alert device.
6. ultraviolet light as claimed in claim 1 sets firmly and is equipped with, and it is characterized in that, also comprises: ultraviolet light sets firmly the alert device that is equipped with.
7. a ultraviolet light sets firmly alarm method fully, it is characterized in that, comprising:
Provide ultraviolet light to set firmly and be equipped with, described ultraviolet light sets firmly to get everything ready and is useful on the humidity sensor of surveying humidity in the described chamber;
Adopt described ultraviolet light to set firmly and be cured technology fully;
When humidity in the described chamber greater than external environment humidity 30% the time, warning system is reported to the police.
8. ultraviolet light as claimed in claim 7 sets firmly alarm method fully, it is characterized in that, described warning system comprises the humidity alert device or/and ultraviolet light sets firmly the alert device that is equipped with.
9. ultraviolet light as claimed in claim 7 sets firmly alarm method fully, it is characterized in that, described humidity sensor is arranged in the chamber or is arranged in the gas exhaust duct.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110172459.6A CN102231047B (en) | 2011-06-23 | 2011-06-23 | UV-curing equipment and UV-curing equipment alarm method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110172459.6A CN102231047B (en) | 2011-06-23 | 2011-06-23 | UV-curing equipment and UV-curing equipment alarm method |
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| Publication Number | Publication Date |
|---|---|
| CN102231047A true CN102231047A (en) | 2011-11-02 |
| CN102231047B CN102231047B (en) | 2016-09-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110172459.6A Active CN102231047B (en) | 2011-06-23 | 2011-06-23 | UV-curing equipment and UV-curing equipment alarm method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104834178A (en) * | 2014-02-12 | 2015-08-12 | 中芯国际集成电路制造(上海)有限公司 | Apparatus and method for preparing photomask |
| CN108369379A (en) * | 2015-04-30 | 2018-08-03 | 福尔卡斯特科研和开发公司 | The stereolithography system of improvement |
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| JPH10256118A (en) * | 1997-03-10 | 1998-09-25 | Mitsubishi Electric Corp | Method and apparatus for treating resist pattern |
| JP2007163904A (en) * | 2005-12-14 | 2007-06-28 | Orc Mfg Co Ltd | Exposure apparatus |
| CN101221377A (en) * | 2008-01-16 | 2008-07-16 | 重庆大学 | Miniature constant temperature self-control experimental bench used for simple photo-etching and soft photo-etching |
| CN201698152U (en) * | 2010-06-04 | 2011-01-05 | 志圣科技（广州）有限公司 | Exposure machine with humidity adjusting function |
| CN102029715A (en) * | 2010-10-25 | 2011-04-27 | 江苏文光车辆附件有限公司 | SLA (stereo lithography) technology of light curing stereo homocentric sphere |
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2011
- 2011-06-23 CN CN201110172459.6A patent/CN102231047B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10256118A (en) * | 1997-03-10 | 1998-09-25 | Mitsubishi Electric Corp | Method and apparatus for treating resist pattern |
| JP2007163904A (en) * | 2005-12-14 | 2007-06-28 | Orc Mfg Co Ltd | Exposure apparatus |
| CN101221377A (en) * | 2008-01-16 | 2008-07-16 | 重庆大学 | Miniature constant temperature self-control experimental bench used for simple photo-etching and soft photo-etching |
| CN201698152U (en) * | 2010-06-04 | 2011-01-05 | 志圣科技（广州）有限公司 | Exposure machine with humidity adjusting function |
| CN102029715A (en) * | 2010-10-25 | 2011-04-27 | 江苏文光车辆附件有限公司 | SLA (stereo lithography) technology of light curing stereo homocentric sphere |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104834178A (en) * | 2014-02-12 | 2015-08-12 | 中芯国际集成电路制造(上海)有限公司 | Apparatus and method for preparing photomask |
| CN108369379A (en) * | 2015-04-30 | 2018-08-03 | 福尔卡斯特科研和开发公司 | The stereolithography system of improvement |
| CN108369379B (en) * | 2015-04-30 | 2020-11-03 | 福尔卡斯特科研和开发公司 | Improved stereolithography system |
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| CN102231047B (en) | 2016-09-14 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HONGLI SEMICONDUCTOR MANUFACTURE CO LTD, SHANGHAI Effective date: 20140403 |
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Effective date of registration: 20140403 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: Zuchongzhi road in Pudong Zhangjiang hi tech park Shanghai city Pudong New Area No. 1399 201203 Applicant before: Hongli Semiconductor Manufacture Co., Ltd., Shanghai |
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