CN102222734A - 一种倒置太阳能电池制作方法 - Google Patents
一种倒置太阳能电池制作方法 Download PDFInfo
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- CN102222734A CN102222734A CN2011101896126A CN201110189612A CN102222734A CN 102222734 A CN102222734 A CN 102222734A CN 2011101896126 A CN2011101896126 A CN 2011101896126A CN 201110189612 A CN201110189612 A CN 201110189612A CN 102222734 A CN102222734 A CN 102222734A
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- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 29
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- 238000000576 coating method Methods 0.000 claims description 11
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 7
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 5
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 3
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 2
- 238000000151 deposition Methods 0.000 abstract description 5
- 238000004064 recycling Methods 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
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- 239000000377 silicon dioxide Substances 0.000 abstract 3
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- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 239000010931 gold Substances 0.000 description 5
- 206010040844 Skin exfoliation Diseases 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
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- 229920002120 photoresistant polymer Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
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- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
- H01L31/1844—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0687—Multiple junction or tandem solar cells
- H01L31/06875—Multiple junction or tandem solar cells inverted grown metamorphic [IMM] multiple junction solar cells, e.g. III-V compounds inverted metamorphic multi-junction cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1892—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof methods involving the use of temporary, removable substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Energy (AREA)
- Sustainable Development (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011101896126A CN102222734B (zh) | 2011-07-07 | 2011-07-07 | 一种倒置太阳能电池制作方法 |
PCT/CN2012/078233 WO2013004188A1 (zh) | 2011-07-07 | 2012-07-05 | 太阳能电池,系统,及其制作方法 |
US14/147,498 US9318643B2 (en) | 2011-07-07 | 2014-01-04 | Fabrication method of inverted solar cells |
Applications Claiming Priority (1)
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CN2011101896126A CN102222734B (zh) | 2011-07-07 | 2011-07-07 | 一种倒置太阳能电池制作方法 |
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CN102222734A true CN102222734A (zh) | 2011-10-19 |
CN102222734B CN102222734B (zh) | 2012-11-14 |
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CN2011101896126A Active CN102222734B (zh) | 2011-07-07 | 2011-07-07 | 一种倒置太阳能电池制作方法 |
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CN (1) | CN102222734B (zh) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102723404A (zh) * | 2012-06-26 | 2012-10-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | 倒置生长宽谱吸收iii-v多结电池的制备方法 |
CN102723405A (zh) * | 2012-06-26 | 2012-10-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | 双面生长高效宽谱吸收多结太阳电池的制备方法 |
WO2013004188A1 (zh) * | 2011-07-07 | 2013-01-10 | 厦门市三安光电科技有限公司 | 太阳能电池,系统,及其制作方法 |
CN103094443A (zh) * | 2011-11-03 | 2013-05-08 | 亚威朗光电(中国)有限公司 | 图形生长衬底 |
CN104205364A (zh) * | 2012-03-28 | 2014-12-10 | 索泰克公司 | 多结太阳能电池装置的制造 |
CN107799459A (zh) * | 2016-09-06 | 2018-03-13 | 中芯国际集成电路制造(上海)有限公司 | 一种绝缘体上锗硅衬底及其制造方法和半导体器件 |
CN108701710A (zh) * | 2016-02-29 | 2018-10-23 | 三星显示有限公司 | 制造纳米棒的方法以及通过该方法制造的纳米棒 |
CN108767047A (zh) * | 2018-04-25 | 2018-11-06 | 西安电子科技大学 | 具有微纳减反结构的InGaP/InGaAs/Ge三结太阳电池及制作方法 |
CN109461644A (zh) * | 2018-10-25 | 2019-03-12 | 中国科学院半导体研究所 | 透明单晶AlN的制备方法及衬底、紫外发光器件 |
CN111192853A (zh) * | 2020-01-10 | 2020-05-22 | 北京飓芯科技有限公司 | 一种基于3d叠层掩模衬底的外延层材料剥离方法 |
CN113328009A (zh) * | 2021-05-28 | 2021-08-31 | 扬州乾照光电有限公司 | 一种太阳能电池的制作方法 |
CN114899254A (zh) * | 2022-04-12 | 2022-08-12 | 中山德华芯片技术有限公司 | 一种三结太阳能电池及其制备方法与应用 |
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CN104332511B (zh) * | 2014-11-12 | 2016-06-15 | 苏州强明光电有限公司 | InGaAs量子点太阳能电池及其制作方法 |
CN104979412B (zh) * | 2015-07-08 | 2017-09-29 | 苏州强明光电有限公司 | 太阳能电池外延片和其制作方法 |
CN106784127B (zh) * | 2015-11-20 | 2019-02-01 | 北京创昱科技有限公司 | 一种双结薄膜太阳能电池组件及其制作方法 |
CN106229261A (zh) * | 2016-09-12 | 2016-12-14 | 中山德华芯片技术有限公司 | 一种采用外延牺牲层工艺制作GaAs‑HEMT器件T型栅的方法 |
JP7083837B2 (ja) * | 2017-03-06 | 2022-06-13 | イー インク コーポレイション | カラー画像をレンダリングするための方法および装置 |
US11830733B2 (en) * | 2021-03-26 | 2023-11-28 | Alliance For Sustainable Energy, Llc | Patterned nanochannel sacrificial layer for semiconductor substrate reuse |
Citations (3)
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WO2010059131A1 (en) * | 2008-11-19 | 2010-05-27 | Agency For Science, Technology And Research | Method of at least partially releasing an epitaxial layer |
US20100304521A1 (en) * | 2006-10-09 | 2010-12-02 | Solexel, Inc. | Shadow Mask Methods For Manufacturing Three-Dimensional Thin-Film Solar Cells |
CN102104087A (zh) * | 2010-12-15 | 2011-06-22 | 上海理工大学 | 一种柔性薄膜太阳能电池制备方法 |
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US4980204A (en) * | 1987-11-27 | 1990-12-25 | Fujitsu Limited | Metal organic chemical vapor deposition method with controlled gas flow rate |
JP3230638B2 (ja) * | 1993-02-10 | 2001-11-19 | シャープ株式会社 | 発光ダイオードの製造方法 |
JP2002511831A (ja) * | 1997-07-03 | 2002-04-16 | シービーエル テクノロジーズ | エピタキシャル蒸着により自立形基板を形成する熱的不整合の補償 |
KR100755656B1 (ko) * | 2006-08-11 | 2007-09-04 | 삼성전기주식회사 | 질화물계 반도체 발광소자의 제조방법 |
TWI416615B (zh) * | 2007-10-16 | 2013-11-21 | Epistar Corp | 分離二種材料系統之方法 |
US8193078B2 (en) * | 2008-10-28 | 2012-06-05 | Athenaeum, Llc | Method of integrating epitaxial film onto assembly substrate |
JP2010238715A (ja) * | 2009-03-30 | 2010-10-21 | Mitsubishi Electric Corp | 半導体発光素子の製造方法および半導体発光素子 |
TWI405257B (zh) * | 2009-04-08 | 2013-08-11 | Advanced Optoelectronic Tech | 分離基板與半導體層的方法 |
-
2011
- 2011-07-07 CN CN2011101896126A patent/CN102222734B/zh active Active
-
2014
- 2014-01-04 US US14/147,498 patent/US9318643B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US20100304521A1 (en) * | 2006-10-09 | 2010-12-02 | Solexel, Inc. | Shadow Mask Methods For Manufacturing Three-Dimensional Thin-Film Solar Cells |
WO2010059131A1 (en) * | 2008-11-19 | 2010-05-27 | Agency For Science, Technology And Research | Method of at least partially releasing an epitaxial layer |
CN102104087A (zh) * | 2010-12-15 | 2011-06-22 | 上海理工大学 | 一种柔性薄膜太阳能电池制备方法 |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013004188A1 (zh) * | 2011-07-07 | 2013-01-10 | 厦门市三安光电科技有限公司 | 太阳能电池,系统,及其制作方法 |
CN103094443A (zh) * | 2011-11-03 | 2013-05-08 | 亚威朗光电(中国)有限公司 | 图形生长衬底 |
CN104205364A (zh) * | 2012-03-28 | 2014-12-10 | 索泰克公司 | 多结太阳能电池装置的制造 |
CN104205364B (zh) * | 2012-03-28 | 2017-07-14 | 索泰克公司 | 多结太阳能电池装置的制造 |
CN102723405A (zh) * | 2012-06-26 | 2012-10-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | 双面生长高效宽谱吸收多结太阳电池的制备方法 |
CN102723404A (zh) * | 2012-06-26 | 2012-10-10 | 中国科学院苏州纳米技术与纳米仿生研究所 | 倒置生长宽谱吸收iii-v多结电池的制备方法 |
CN108701710A (zh) * | 2016-02-29 | 2018-10-23 | 三星显示有限公司 | 制造纳米棒的方法以及通过该方法制造的纳米棒 |
CN107799459B (zh) * | 2016-09-06 | 2020-06-09 | 中芯国际集成电路制造(上海)有限公司 | 一种绝缘体上锗硅衬底及其制造方法和半导体器件 |
CN107799459A (zh) * | 2016-09-06 | 2018-03-13 | 中芯国际集成电路制造(上海)有限公司 | 一种绝缘体上锗硅衬底及其制造方法和半导体器件 |
CN108767047A (zh) * | 2018-04-25 | 2018-11-06 | 西安电子科技大学 | 具有微纳减反结构的InGaP/InGaAs/Ge三结太阳电池及制作方法 |
CN108767047B (zh) * | 2018-04-25 | 2019-12-31 | 西安电子科技大学 | 具有微纳减反结构的InGaP/InGaAs/Ge三结太阳电池及制作方法 |
CN109461644A (zh) * | 2018-10-25 | 2019-03-12 | 中国科学院半导体研究所 | 透明单晶AlN的制备方法及衬底、紫外发光器件 |
CN111192853A (zh) * | 2020-01-10 | 2020-05-22 | 北京飓芯科技有限公司 | 一种基于3d叠层掩模衬底的外延层材料剥离方法 |
CN111192853B (zh) * | 2020-01-10 | 2022-10-14 | 北京飓芯科技有限公司 | 一种基于3d叠层掩模衬底的外延层材料剥离方法 |
CN113328009A (zh) * | 2021-05-28 | 2021-08-31 | 扬州乾照光电有限公司 | 一种太阳能电池的制作方法 |
CN114899254A (zh) * | 2022-04-12 | 2022-08-12 | 中山德华芯片技术有限公司 | 一种三结太阳能电池及其制备方法与应用 |
Also Published As
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US9318643B2 (en) | 2016-04-19 |
US20140120656A1 (en) | 2014-05-01 |
CN102222734B (zh) | 2012-11-14 |
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