CN102215031B - 振动片以及振子 - Google Patents

振动片以及振子 Download PDF

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Publication number
CN102215031B
CN102215031B CN201110086238.7A CN201110086238A CN102215031B CN 102215031 B CN102215031 B CN 102215031B CN 201110086238 A CN201110086238 A CN 201110086238A CN 102215031 B CN102215031 B CN 102215031B
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China
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tapered portion
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along
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CN201110086238.7A
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English (en)
Chinese (zh)
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CN102215031A (zh
Inventor
山田明法
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to CN201410645694.4A priority Critical patent/CN104506160B/zh
Publication of CN102215031A publication Critical patent/CN102215031A/zh
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Gyroscopes (AREA)
CN201110086238.7A 2010-04-08 2011-04-07 振动片以及振子 Active CN102215031B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410645694.4A CN104506160B (zh) 2010-04-08 2011-04-07 振动片、振子以及传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-089259 2010-04-08
JP2010089259A JP5499852B2 (ja) 2010-04-08 2010-04-08 振動片、振動子

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CN201410645694.4A Division CN104506160B (zh) 2010-04-08 2011-04-07 振动片、振子以及传感器
CN201410027347.5A Division CN103812471A (zh) 2010-04-08 2011-04-07 振动片以及振子

Publications (2)

Publication Number Publication Date
CN102215031A CN102215031A (zh) 2011-10-12
CN102215031B true CN102215031B (zh) 2014-12-10

Family

ID=44746187

Family Applications (3)

Application Number Title Priority Date Filing Date
CN201110086238.7A Active CN102215031B (zh) 2010-04-08 2011-04-07 振动片以及振子
CN201410027347.5A Withdrawn CN103812471A (zh) 2010-04-08 2011-04-07 振动片以及振子
CN201410645694.4A Expired - Fee Related CN104506160B (zh) 2010-04-08 2011-04-07 振动片、振子以及传感器

Family Applications After (2)

Application Number Title Priority Date Filing Date
CN201410027347.5A Withdrawn CN103812471A (zh) 2010-04-08 2011-04-07 振动片以及振子
CN201410645694.4A Expired - Fee Related CN104506160B (zh) 2010-04-08 2011-04-07 振动片、振子以及传感器

Country Status (5)

Country Link
US (3) US8816572B2 (https=)
JP (1) JP5499852B2 (https=)
KR (1) KR20110113144A (https=)
CN (3) CN102215031B (https=)
TW (2) TWI474618B (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5565154B2 (ja) * 2009-09-11 2014-08-06 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
US20110227458A1 (en) * 2010-03-17 2011-09-22 Seiko Epson Corporation Piezoelectric resonator element, piezoelectric device, and electronic apparatus
JP5499852B2 (ja) * 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP6160027B2 (ja) * 2012-04-27 2017-07-12 セイコーエプソン株式会社 振動片およびジャイロセンサー並びに電子機器および移動体
JP5974629B2 (ja) * 2012-05-23 2016-08-23 セイコーエプソン株式会社 振動片、振動片の製造方法、角速度センサー、電子機器、移動体
TWI634742B (zh) * 2013-11-16 2018-09-01 精工愛普生股份有限公司 振動片、振動子、振盪器、電子機器及移動體
JP6340774B2 (ja) * 2013-11-16 2018-06-13 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6450551B2 (ja) * 2014-09-30 2019-01-09 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP6552225B2 (ja) 2015-03-12 2019-07-31 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
US10170684B2 (en) * 2015-09-30 2019-01-01 Kyocera Corporation Tuning fork type crystal blank, tuning fork type crystal element, and crystal device
CN117767910B (zh) * 2023-12-29 2025-09-12 天津大学 一种音叉型压电振动片及振荡器

Family Cites Families (29)

* Cited by examiner, † Cited by third party
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GB2224159B (en) * 1988-09-09 1992-07-08 Seiko Electronic Components Resonator
TW427059B (en) * 1998-08-07 2001-03-21 Tdk Corp Resonator, piezoelectric resonator and the manufacturing method thereof
WO2000044092A1 (en) * 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator
JP2002319838A (ja) * 2001-02-19 2002-10-31 Seiko Epson Corp 圧電デバイス及びそのパッケージ
JP4281348B2 (ja) * 2002-12-17 2009-06-17 セイコーエプソン株式会社 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4356366B2 (ja) 2003-06-10 2009-11-04 セイコーエプソン株式会社 圧電振動片、圧電振動片の製造方法および圧電振動子、圧電振動子を搭載した電子機器
JP2005151423A (ja) * 2003-11-19 2005-06-09 Seiko Epson Corp 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP2005184767A (ja) * 2003-11-27 2005-07-07 Seiko Epson Corp 音叉型圧電振動片および音叉型圧電振動子の製造方法
JP4409979B2 (ja) 2004-02-10 2010-02-03 シチズンホールディングス株式会社 振動子
EP1641118B1 (en) * 2004-09-24 2010-04-21 Seiko Epson Corporation Piezoelectric resonator element and piezoelectric device
JP4591035B2 (ja) * 2004-10-21 2010-12-01 セイコーエプソン株式会社 圧電振動片ならびに圧電デバイスの製造方法
JP4277818B2 (ja) * 2005-03-22 2009-06-10 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4609196B2 (ja) * 2005-06-20 2011-01-12 セイコーエプソン株式会社 圧電振動片および圧電デバイスならびに電子機器および携帯電話装置
JP2007258918A (ja) * 2006-03-22 2007-10-04 Epson Toyocom Corp 圧電デバイス
US20080211350A1 (en) * 2006-08-18 2008-09-04 Epson Toyocom Corporation Piezoelectric resonator element and piezoelectric device
JP4985960B2 (ja) 2007-06-07 2012-07-25 セイコーエプソン株式会社 振動片及び振動子
ATE453954T1 (de) * 2007-07-19 2010-01-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten
WO2009035155A1 (ja) * 2007-09-13 2009-03-19 Citizen Holdings Co., Ltd. 水晶振動子片およびその製造方法
WO2009143492A1 (en) * 2008-05-23 2009-11-26 Statek Corporation Piezoelectric resonator
JP5454134B2 (ja) 2008-12-27 2014-03-26 セイコーエプソン株式会社 振動片、振動子、センサー及び電子部品
US8067880B2 (en) 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
JP2010157933A (ja) 2008-12-27 2010-07-15 Epson Toyocom Corp 屈曲振動片及び電子部品
JP5445114B2 (ja) 2009-03-02 2014-03-19 セイコーエプソン株式会社 振動片および発振器
JP2010252302A (ja) 2009-03-25 2010-11-04 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP2010226608A (ja) 2009-03-25 2010-10-07 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP2010226610A (ja) 2009-03-25 2010-10-07 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP5499852B2 (ja) * 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP2012120014A (ja) * 2010-12-02 2012-06-21 Seiko Epson Corp 圧電振動素子、その製造方法、圧電振動子及び圧電発振器
JP5912557B2 (ja) * 2011-03-29 2016-04-27 日本電波工業株式会社 音叉型圧電振動片及び圧電デバイス

Also Published As

Publication number Publication date
TW201203855A (en) 2012-01-16
US8816572B2 (en) 2014-08-26
US20110248600A1 (en) 2011-10-13
KR20110113144A (ko) 2011-10-14
JP5499852B2 (ja) 2014-05-21
CN103812471A (zh) 2014-05-21
US9257961B2 (en) 2016-02-09
US9252741B2 (en) 2016-02-02
CN104506160B (zh) 2017-08-25
CN104506160A (zh) 2015-04-08
CN102215031A (zh) 2011-10-12
TW201524118A (zh) 2015-06-16
TWI474618B (zh) 2015-02-21
JP2011223230A (ja) 2011-11-04
US20140327342A1 (en) 2014-11-06
US20140225480A1 (en) 2014-08-14

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