CN102165574A - 具有凹槽的硅基底上的接合 - Google Patents

具有凹槽的硅基底上的接合 Download PDF

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Publication number
CN102165574A
CN102165574A CN200980137309.2A CN200980137309A CN102165574A CN 102165574 A CN102165574 A CN 102165574A CN 200980137309 A CN200980137309 A CN 200980137309A CN 102165574 A CN102165574 A CN 102165574A
Authority
CN
China
Prior art keywords
adhesive
transducer
membrane
microns
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200980137309.2A
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English (en)
Chinese (zh)
Inventor
克里斯托弗·门泽尔
格雷戈里·黛布拉班德
科琳娜·尼斯托利卡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Dimatix Inc
Original Assignee
Fujifilm Dimatix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Dimatix Inc filed Critical Fujifilm Dimatix Inc
Publication of CN102165574A publication Critical patent/CN102165574A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/52—Mounting semiconductor bodies in containers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
    • H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
CN200980137309.2A 2008-09-18 2009-09-18 具有凹槽的硅基底上的接合 Pending CN102165574A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US9818708P 2008-09-18 2008-09-18
US61/098,187 2008-09-18
PCT/US2009/057433 WO2010033774A2 (en) 2008-09-18 2009-09-18 Bonding on silicon substrate having a groove

Publications (1)

Publication Number Publication Date
CN102165574A true CN102165574A (zh) 2011-08-24

Family

ID=42006580

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980137309.2A Pending CN102165574A (zh) 2008-09-18 2009-09-18 具有凹槽的硅基底上的接合

Country Status (6)

Country Link
US (1) US8853915B2 (enExample)
EP (1) EP2332169B1 (enExample)
JP (1) JP2012502824A (enExample)
KR (1) KR20110070876A (enExample)
CN (1) CN102165574A (enExample)
WO (1) WO2010033774A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110902648A (zh) * 2019-12-06 2020-03-24 太原科技大学 聚合物电解质与金属的超声辅助阳极键合装置及其方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20110070876A (ko) 2008-09-18 2011-06-24 후지필름 디마틱스, 인크. 홈을 갖는 실리콘 기판 상의 본딩
WO2021118605A1 (en) * 2019-12-13 2021-06-17 Hewlett-Packard Development Company, L.P. Fluidic device die
WO2025153968A1 (en) * 2024-01-16 2025-07-24 Luxottica S.R.L. Hinge for eyeglass frame, frame and eyeglass comprising such a hinge, and method for assembling such a hinge

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JPS55109668A (en) * 1980-01-07 1980-08-23 Ricoh Co Ltd Vibrator of ink jet device
JP2712602B2 (ja) * 1989-08-10 1998-02-16 株式会社村田製作所 圧電共振子の製造方法
WO1991012663A1 (fr) * 1990-02-09 1991-08-22 Toyo Communication Equipment Co., Ltd. Structure pour maintenir dans un module un resonateur piezo-electrique plat ultra-mince
JP3052336B2 (ja) 1990-05-29 2000-06-12 セイコーエプソン株式会社 インクジェットヘッド
JP3175301B2 (ja) * 1992-06-03 2001-06-11 セイコーエプソン株式会社 インクジェット記録ヘッド及びインクジェット記録ヘッドの製造方法
US6688718B1 (en) * 1999-07-02 2004-02-10 Hewlett-Packard Development Company, L.P. Heat transfer device for an inkjet printer
JP4361658B2 (ja) * 2000-02-14 2009-11-11 富士通マイクロエレクトロニクス株式会社 実装基板及び実装方法
JP2002210965A (ja) 2001-01-17 2002-07-31 Seiko Epson Corp ノズルプレート及びインクジェット式記録ヘッド並びにインクジェット式記録装置
US6856075B1 (en) * 2001-06-22 2005-02-15 Hutchinson Technology Incorporated Enhancements for adhesive attachment of piezoelectric motor elements to a disk drive suspension
JP2003157565A (ja) * 2001-11-21 2003-05-30 Ricoh Co Ltd 波面収差補正ミラー及び該ミラーを用いた光ディスク装置
US6794958B2 (en) * 2002-07-25 2004-09-21 Agilent Technologies, Inc. Method of fabricating a semiconductor device and an apparatus embodying the method
US7266868B2 (en) * 2003-06-30 2007-09-11 Brother Kogyo Kabushiki Kaisha Method of manufacturing liquid delivery apparatus
JP2005104038A (ja) 2003-09-30 2005-04-21 Fuji Photo Film Co Ltd 吐出ヘッド及び液吐出装置
CN100548692C (zh) * 2003-10-10 2009-10-14 富士胶卷迪马蒂克斯股份有限公司 具有薄膜的打印头
US7048361B2 (en) * 2003-11-05 2006-05-23 Xerox Corporation Ink jet apparatus
US20050247990A1 (en) * 2004-05-05 2005-11-10 Ming-Te Cheng Image sensor packages and method of assembling the same
JP2006076128A (ja) 2004-09-09 2006-03-23 Fuji Xerox Co Ltd インクジェット記録ヘッド
US7448732B2 (en) * 2004-09-30 2008-11-11 Fujifilm Corporation Liquid ejection head and manufacturing method thereof
CN101080360B (zh) 2004-10-21 2012-10-31 富士胶卷迪马蒂克斯股份有限公司 用于蚀刻的牺牲基底
JP4520317B2 (ja) * 2005-01-25 2010-08-04 パナソニック株式会社 超音波探触子、超音波診断装置及び超音波探傷装置
JP4929598B2 (ja) * 2005-02-07 2012-05-09 富士ゼロックス株式会社 液滴吐出ヘッド、及び、液滴吐出装置
EP1907212B1 (en) 2005-07-13 2012-10-24 Fujifilm Dimatix, Inc. Method and apparatus for scalable droplet ejection manufacturing
US7683524B2 (en) * 2005-08-31 2010-03-23 Xinetics, Inc. Multichannel, surface parallel, zonal transducer system
US20070120896A1 (en) * 2005-11-30 2007-05-31 Xerox Corporation Drop generator
US20070263038A1 (en) * 2006-05-12 2007-11-15 Andreas Bibl Buried heater in printhead module
KR20110070876A (ko) 2008-09-18 2011-06-24 후지필름 디마틱스, 인크. 홈을 갖는 실리콘 기판 상의 본딩
WO2010033334A1 (en) * 2008-09-18 2010-03-25 Fujifilm Corporation Bonding on silicon substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110902648A (zh) * 2019-12-06 2020-03-24 太原科技大学 聚合物电解质与金属的超声辅助阳极键合装置及其方法
CN110902648B (zh) * 2019-12-06 2023-01-17 太原科技大学 聚合物电解质与金属的超声辅助阳极键合装置及其方法

Also Published As

Publication number Publication date
HK1157936A1 (zh) 2012-07-06
EP2332169B1 (en) 2016-02-24
EP2332169A2 (en) 2011-06-15
EP2332169A4 (en) 2013-05-29
WO2010033774A3 (en) 2010-06-03
US8853915B2 (en) 2014-10-07
JP2012502824A (ja) 2012-02-02
US20100066206A1 (en) 2010-03-18
WO2010033774A2 (en) 2010-03-25
KR20110070876A (ko) 2011-06-24

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Application publication date: 20110824