CN102119366B - 辐射源、光刻设备以及器件制造方法 - Google Patents

辐射源、光刻设备以及器件制造方法 Download PDF

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Publication number
CN102119366B
CN102119366B CN200980131416.4A CN200980131416A CN102119366B CN 102119366 B CN102119366 B CN 102119366B CN 200980131416 A CN200980131416 A CN 200980131416A CN 102119366 B CN102119366 B CN 102119366B
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CN
China
Prior art keywords
radiation
radiation beam
hydrogen
lithographic equipment
projection system
Prior art date
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Active
Application number
CN200980131416.4A
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English (en)
Chinese (zh)
Other versions
CN102119366A (zh
Inventor
A·凯姆鹏
V·班尼恩
V·伊万诺夫
E·鲁普斯卓
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ASML Holding NV
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ASML Holding NV
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Publication date
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Publication of CN102119366A publication Critical patent/CN102119366A/zh
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H10P76/2042—Photolithographic processes using lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2008—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70575—Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Epidemiology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Plasma & Fusion (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • X-Ray Techniques (AREA)
CN200980131416.4A 2008-08-14 2009-07-13 辐射源、光刻设备以及器件制造方法 Active CN102119366B (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US13613008P 2008-08-14 2008-08-14
US13612908P 2008-08-14 2008-08-14
US61/136,129 2008-08-14
US61/136,130 2008-08-14
US19337308P 2008-11-21 2008-11-21
US61/193,373 2008-11-21
PCT/EP2009/058898 WO2010018039A1 (en) 2008-08-14 2009-07-13 Radiation source, lithographic apparatus and device manufacturing method

Publications (2)

Publication Number Publication Date
CN102119366A CN102119366A (zh) 2011-07-06
CN102119366B true CN102119366B (zh) 2015-04-22

Family

ID=41110410

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980131416.4A Active CN102119366B (zh) 2008-08-14 2009-07-13 辐射源、光刻设备以及器件制造方法

Country Status (6)

Country Link
US (1) US8685632B2 (enExample)
JP (1) JP5732393B2 (enExample)
KR (1) KR101626012B1 (enExample)
CN (1) CN102119366B (enExample)
NL (1) NL2003152A1 (enExample)
WO (1) WO2010018039A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8587768B2 (en) * 2010-04-05 2013-11-19 Media Lario S.R.L. EUV collector system with enhanced EUV radiation collection
DE102010038697B4 (de) * 2010-07-30 2012-07-19 Carl Zeiss Smt Gmbh Verfahren und Vorrichtung zur Qualifizierung einer Optik einer Projektionsbelichtungsanlage für die Mikrolithographie
EP2681625A1 (en) * 2011-03-04 2014-01-08 ASML Netherlands BV Lithograpic apparatus, spectral purity filter and device manufacturing method
JP2014514736A (ja) * 2011-03-16 2014-06-19 ケーエルエー−テンカー コーポレイション 薄膜スペクトル純度フィルタコーティングとともに画像センサを使用するｅｕｖ化学線レチクル検査システム
JP5952399B2 (ja) * 2011-08-05 2016-07-13 エーエスエムエル ネザーランズ ビー．ブイ． 放射源、リソグラフィ装置のための方法及びデバイス製造方法
WO2014020003A1 (en) * 2012-08-03 2014-02-06 Asml Netherlands B.V. Lithographic apparatus and method of manufacturing a device
JP6731415B2 (ja) * 2015-02-10 2020-07-29 カール・ツァイス・エスエムティー・ゲーエムベーハー Ｅｕｖ多層ミラー、多層ミラーを含む光学系及び多層ミラーを製造する方法
WO2021074042A1 (en) * 2019-10-15 2021-04-22 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP6919699B2 (ja) 2019-11-28 2021-08-18 凸版印刷株式会社 反射型フォトマスクブランク及び反射型フォトマスク
US20230143851A1 (en) 2020-04-30 2023-05-11 Toppan Photomask Co., Ltd. Reflective photomask blank and reflective photomask
JP7421411B2 (ja) 2020-04-30 2024-01-24 株式会社トッパンフォトマスク 反射型フォトマスクブランク及び反射型フォトマスク
JP7525354B2 (ja) 2020-09-28 2024-07-30 株式会社トッパンフォトマスク 反射型フォトマスクブランク及び反射型フォトマスク
JP7538050B2 (ja) 2021-01-08 2024-08-21 株式会社トッパンフォトマスク 反射型フォトマスクブランク及び反射型フォトマスク
JP7614949B2 (ja) 2021-06-02 2025-01-16 テクセンドフォトマスク株式会社 反射型フォトマスクブランク及び反射型フォトマスク
DE102022212168A1 (de) * 2022-11-16 2024-05-16 Carl Zeiss Smt Gmbh EUV-Optik-Modul für eine EUV-Projektionsbelichtungsanlage
WO2025127000A1 (ja) 2023-12-14 2025-06-19 テクセンドフォトマスク株式会社 反射型マスクブランク、反射型マスク及び反射型マスクの製造方法
KR20260113123A (ko) 2023-12-28 2026-07-21 테크센드 포토마스크 가부시키가이샤 반사형 포토마스크

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1527139A (zh) * 2003-03-07 2004-09-08 Asml 光刻装置及器件制造方法
US20050057734A1 (en) * 2002-12-20 2005-03-17 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
CN1696833A (zh) * 2004-05-11 2005-11-16 Asml荷兰有限公司 光刻装置及器件制造方法
WO2006011105A2 (en) * 2004-07-22 2006-02-02 Philips Intellectual Property & Standards Gmbh Optical system having a cleaning arrangement
US20080001101A1 (en) * 2006-06-30 2008-01-03 Asml Netherlands B.V. Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7453645B2 (en) * 2004-12-30 2008-11-18 Asml Netherlands B.V. Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
US7473908B2 (en) * 2006-07-14 2009-01-06 Asml Netherlands B.V. Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface
DE102006054726B4 (de) 2006-11-21 2014-09-11 Asml Netherlands B.V. Verfahren zum Entfernen von Kontaminationen auf optischen Oberflächen und optische Anordnung
NL2004787A (en) * 2009-06-30 2011-01-04 Asml Netherlands Bv Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter.

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050057734A1 (en) * 2002-12-20 2005-03-17 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
CN1527139A (zh) * 2003-03-07 2004-09-08 Asml 光刻装置及器件制造方法
CN1696833A (zh) * 2004-05-11 2005-11-16 Asml荷兰有限公司 光刻装置及器件制造方法
WO2006011105A2 (en) * 2004-07-22 2006-02-02 Philips Intellectual Property & Standards Gmbh Optical system having a cleaning arrangement
US20080001101A1 (en) * 2006-06-30 2008-01-03 Asml Netherlands B.V. Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned

Also Published As

Publication number Publication date
JP2011530823A (ja) 2011-12-22
KR20110058810A (ko) 2011-06-01
KR101626012B1 (ko) 2016-05-31
CN102119366A (zh) 2011-07-06
JP5732393B2 (ja) 2015-06-10
US20110143288A1 (en) 2011-06-16
US8685632B2 (en) 2014-04-01
WO2010018039A1 (en) 2010-02-18
NL2003152A1 (nl) 2010-02-16

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