CN102076625A - 无碱玻璃基板的蚀刻方法及显示装置 - Google Patents

无碱玻璃基板的蚀刻方法及显示装置 Download PDF

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Publication number
CN102076625A
CN102076625A CN200980124716XA CN200980124716A CN102076625A CN 102076625 A CN102076625 A CN 102076625A CN 200980124716X A CN200980124716X A CN 200980124716XA CN 200980124716 A CN200980124716 A CN 200980124716A CN 102076625 A CN102076625 A CN 102076625A
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China
Prior art keywords
quality
glass substrate
etching
engraving method
etching solution
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CN200980124716XA
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English (en)
Chinese (zh)
Inventor
西条佳孝
铃木祐一
秋山良司
竹中敦义
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AGC Inc
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Asahi Glass Co Ltd
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Publication of CN102076625A publication Critical patent/CN102076625A/zh
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
CN200980124716XA 2008-06-25 2009-06-19 无碱玻璃基板的蚀刻方法及显示装置 Pending CN102076625A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008166537 2008-06-25
JP2008-166537 2008-06-25
PCT/JP2009/061181 WO2009157378A1 (ja) 2008-06-25 2009-06-19 無アルカリガラス基板のエッチング方法及び表示デバイス

Publications (1)

Publication Number Publication Date
CN102076625A true CN102076625A (zh) 2011-05-25

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CN200980124716XA Pending CN102076625A (zh) 2008-06-25 2009-06-19 无碱玻璃基板的蚀刻方法及显示装置

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Country Link
JP (1) JP5423674B2 (ko)
KR (1) KR101430290B1 (ko)
CN (1) CN102076625A (ko)
TW (1) TWI447085B (ko)
WO (1) WO2009157378A1 (ko)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104334507A (zh) * 2012-05-31 2015-02-04 旭硝子株式会社 无碱玻璃基板及无碱玻璃基板的减薄方法
CN104761150A (zh) * 2015-03-16 2015-07-08 南昌欧菲光学技术有限公司 玻璃蚀刻液、利用该蚀刻液蚀刻玻璃的方法、盖板玻璃及其制备方法
CN105992749A (zh) * 2013-11-28 2016-10-05 旭硝子株式会社 无碱玻璃基板及无碱玻璃基板的减薄方法
CN104334507B (zh) * 2012-05-31 2016-11-30 旭硝子株式会社 无碱玻璃基板及无碱玻璃基板的减薄方法
CN106457513A (zh) * 2015-03-25 2017-02-22 松下知识产权经营株式会社 玻璃用研磨装置的清洗液和清洗方法
CN108602714A (zh) * 2016-01-29 2018-09-28 康宁股份有限公司 使玻璃变薄的方法
CN109315045A (zh) * 2016-05-31 2019-02-05 株式会社Ｎｓｃ 显示装置制造方法
CN104684859B (zh) * 2012-05-31 2019-07-12 康宁股份有限公司 用于湿酸性蚀刻中污泥控制的方法
CN110799466A (zh) * 2017-08-31 2020-02-14 日本电气硝子株式会社 玻璃的蚀刻方法和蚀刻处理装置以及玻璃板

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5821188B2 (ja) * 2010-12-27 2015-11-24 旭硝子株式会社 情報記録媒体用ガラス基板の製造方法
US9315412B2 (en) * 2011-07-07 2016-04-19 Corning Incorporated Surface flaw modification for strengthening of glass articles
KR101302681B1 (ko) * 2011-08-22 2013-09-03 삼성코닝정밀소재 주식회사 에칭 기판
JP2013142048A (ja) * 2012-01-11 2013-07-22 Sharp Corp 無アルカリガラスを原料とするゼオライトの製造方法、ａ型ゼオライトおよびそれを用いた成形体、水浄化剤、土壌改質剤、保肥剤
JP2013155057A (ja) * 2012-01-26 2013-08-15 Sanwa Frost Industry Co Ltd Ｌｃｄガラス基板のエッチング方法およびその装置
US9488857B2 (en) 2014-01-10 2016-11-08 Corning Incorporated Method of strengthening an edge of a glass substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003020255A (ja) * 2001-04-12 2003-01-24 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
JP2003066864A (ja) * 2001-08-24 2003-03-05 Sharp Corp 埋め込み構造を有する基板およびそれを用いた表示装置ならびにその製造方法
TW200800827A (en) * 2006-05-25 2008-01-01 Nippon Electric Glass Co Alkali free glass and alkali free glass substrate

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100262115B1 (ko) * 1995-09-28 2000-07-15 기시다 기요사쿠 무알칼리유리기판
US6479395B1 (en) * 1999-11-02 2002-11-12 Alien Technology Corporation Methods for forming openings in a substrate and apparatuses with these openings and methods for creating assemblies with openings
JP2002087844A (ja) * 2000-09-14 2002-03-27 Sony Corp 表示パネルの製造方法
JP2005247687A (ja) * 2001-04-12 2005-09-15 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
JP3665323B2 (ja) * 2002-11-22 2005-06-29 西山ステンレスケミカル株式会社 フラットパネルディスプレイ用ガラス基板及びその製造方法
JP2005187274A (ja) * 2003-12-26 2005-07-14 Casio Comput Co Ltd ガラス基板の表面処理方法
WO2009066624A1 (ja) * 2007-11-19 2009-05-28 Asahi Glass Co., Ltd. ガラス基板のエッチング処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003020255A (ja) * 2001-04-12 2003-01-24 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
JP2003066864A (ja) * 2001-08-24 2003-03-05 Sharp Corp 埋め込み構造を有する基板およびそれを用いた表示装置ならびにその製造方法
TW200800827A (en) * 2006-05-25 2008-01-01 Nippon Electric Glass Co Alkali free glass and alkali free glass substrate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
巫文强: "《新型玻璃刻蚀用光刻胶的研制》", 《应用化学》 *

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104334507B (zh) * 2012-05-31 2016-11-30 旭硝子株式会社 无碱玻璃基板及无碱玻璃基板的减薄方法
CN104334507A (zh) * 2012-05-31 2015-02-04 旭硝子株式会社 无碱玻璃基板及无碱玻璃基板的减薄方法
CN104684859B (zh) * 2012-05-31 2019-07-12 康宁股份有限公司 用于湿酸性蚀刻中污泥控制的方法
TWI639571B (zh) * 2013-11-28 2018-11-01 日商Ａｇｃ股份有限公司 Thin plate forming method for alkali-free glass substrate and alkali-free glass substrate
CN105992749A (zh) * 2013-11-28 2016-10-05 旭硝子株式会社 无碱玻璃基板及无碱玻璃基板的减薄方法
CN105992749B (zh) * 2013-11-28 2020-11-03 Ａｇｃ株式会社 无碱玻璃基板及无碱玻璃基板的减薄方法
CN104761150A (zh) * 2015-03-16 2015-07-08 南昌欧菲光学技术有限公司 玻璃蚀刻液、利用该蚀刻液蚀刻玻璃的方法、盖板玻璃及其制备方法
CN104761150B (zh) * 2015-03-16 2017-09-22 南昌欧菲光学技术有限公司 玻璃蚀刻液、利用该蚀刻液蚀刻玻璃的方法、盖板玻璃及其制备方法
CN106457513B (zh) * 2015-03-25 2018-06-12 松下知识产权经营株式会社 清洗液用于玻璃用研磨装置的用途和清洗方法
CN106457513A (zh) * 2015-03-25 2017-02-22 松下知识产权经营株式会社 玻璃用研磨装置的清洗液和清洗方法
CN108602714A (zh) * 2016-01-29 2018-09-28 康宁股份有限公司 使玻璃变薄的方法
US11001522B2 (en) 2016-01-29 2021-05-11 Corning Incorporated Methods for thinning glass
CN109315045A (zh) * 2016-05-31 2019-02-05 株式会社Ｎｓｃ 显示装置制造方法
CN110799466A (zh) * 2017-08-31 2020-02-14 日本电气硝子株式会社 玻璃的蚀刻方法和蚀刻处理装置以及玻璃板
CN110799466B (zh) * 2017-08-31 2022-09-06 日本电气硝子株式会社 玻璃的蚀刻方法和蚀刻处理装置以及玻璃板

Also Published As

Publication number Publication date
JPWO2009157378A1 (ja) 2011-12-15
KR20110027704A (ko) 2011-03-16
TWI447085B (zh) 2014-08-01
JP5423674B2 (ja) 2014-02-19
WO2009157378A1 (ja) 2009-12-30
TW201006777A (en) 2010-02-16
KR101430290B1 (ko) 2014-08-14

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Application publication date: 20110525