CN102047410B - 直接结合方法中的氮-等离子体表面处理 - Google Patents

直接结合方法中的氮-等离子体表面处理 Download PDF

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Publication number
CN102047410B
CN102047410B CN200980119383.1A CN200980119383A CN102047410B CN 102047410 B CN102047410 B CN 102047410B CN 200980119383 A CN200980119383 A CN 200980119383A CN 102047410 B CN102047410 B CN 102047410B
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thin layer
silicon
plasma
less
surface treatment
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Expired - Fee Related
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CN200980119383.1A
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English (en)
Chinese (zh)
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CN102047410A (zh
Inventor
休伯特·莫里西奥
克里斯托夫·莫拉尔斯
弗朗索瓦·里乌托德
卡罗琳·文托萨
蒂里·切沃利奥
劳尔·利布拉尔索
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
    • H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
CN200980119383.1A 2008-05-26 2009-04-28 直接结合方法中的氮-等离子体表面处理 Expired - Fee Related CN102047410B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0802833 2008-05-26
FR0802833A FR2931585B1 (fr) 2008-05-26 2008-05-26 Traitement de surface par plasma d'azote dans un procede de collage direct
PCT/FR2009/000502 WO2009153422A1 (fr) 2008-05-26 2009-04-28 Traitement de surface par plasma d'azote dans un procédé de collage direct

Publications (2)

Publication Number Publication Date
CN102047410A CN102047410A (zh) 2011-05-04
CN102047410B true CN102047410B (zh) 2014-03-26

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CN200980119383.1A Expired - Fee Related CN102047410B (zh) 2008-05-26 2009-04-28 直接结合方法中的氮-等离子体表面处理

Country Status (8)

Country Link
US (1) US8318586B2 (fr)
EP (1) EP2304787B1 (fr)
JP (1) JP5661612B2 (fr)
KR (1) KR101453135B1 (fr)
CN (1) CN102047410B (fr)
AT (1) ATE529891T1 (fr)
FR (1) FR2931585B1 (fr)
WO (1) WO2009153422A1 (fr)

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FR2964112B1 (fr) * 2010-08-31 2013-07-19 Commissariat Energie Atomique Traitement avant collage d'une surface mixte cu-oxyde, par un plasma contenant de l'azote et de l'hydrogene
CN102222637A (zh) * 2011-06-23 2011-10-19 北京大学 一种绝缘体上锗衬底的制备方法
US9589801B2 (en) 2011-10-31 2017-03-07 Arizona Board Of Regents, A Body Corporated Of The State Of Arizona, Acting For And On Behalf Of Arizona State University Methods for wafer bonding and for nucleating bonding nanophases using wet and steam pressurization
KR20130141985A (ko) * 2012-06-18 2013-12-27 삼성전자주식회사 2개 표면을 결합시키는 방법 및 그에 의하여 제조된 구조물
KR102023623B1 (ko) * 2012-07-03 2019-09-23 삼성전자 주식회사 반도체 소자 형성 방법
WO2014052476A2 (fr) 2012-09-25 2014-04-03 Arizona Board Of Regents, A Body Corporate Of The State Of Arizona, Acting For And On... Procédés de collage de tranches et de nucléation de nanophases de liaison
CN110098138B (zh) 2013-09-25 2023-07-18 Ev 集团 E·索尔纳有限责任公司 用于结合基板的装置及方法
KR102287811B1 (ko) * 2014-10-31 2021-08-09 삼성전자주식회사 2개 표면을 결합시키는 방법 및 그에 의하여 제조된 구조체, 및 상기 구조체를 포함하는 미세유동 장치
TWI741988B (zh) * 2015-07-31 2021-10-11 日商新力股份有限公司 堆疊式透鏡結構及其製造方法，以及電子裝置
CN106409650B (zh) * 2015-08-03 2019-01-29 沈阳硅基科技有限公司 一种硅片直接键合方法
US9496239B1 (en) * 2015-12-11 2016-11-15 International Business Machines Corporation Nitride-enriched oxide-to-oxide 3D wafer bonding
US10026716B2 (en) 2016-04-15 2018-07-17 Taiwan Semiconductor Manufacturing Company, Ltd. 3DIC formation with dies bonded to formed RDLs
US9620479B1 (en) 2016-06-30 2017-04-11 International Business Machines Corporation 3D bonded semiconductor structure with an embedded resistor
US9941241B2 (en) * 2016-06-30 2018-04-10 International Business Machines Corporation Method for wafer-wafer bonding
US9716088B1 (en) 2016-06-30 2017-07-25 International Business Machines Corporation 3D bonded semiconductor structure with an embedded capacitor
US9773741B1 (en) 2016-08-17 2017-09-26 Qualcomm Incorporated Bondable device including a hydrophilic layer
US10269756B2 (en) 2017-04-21 2019-04-23 Invensas Bonding Technologies, Inc. Die processing
FR3074959B1 (fr) * 2017-12-08 2019-12-20 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de collage par adhesion directe
US10727219B2 (en) 2018-02-15 2020-07-28 Invensas Bonding Technologies, Inc. Techniques for processing devices
US10859981B1 (en) 2019-10-21 2020-12-08 Quantum Valley Ideas Laboratories Vapor cells having one or more optical windows bonded to a dielectric body
US11742314B2 (en) 2020-03-31 2023-08-29 Adeia Semiconductor Bonding Technologies Inc. Reliable hybrid bonded apparatus
US20220320035A1 (en) * 2021-03-31 2022-10-06 Invensas Bonding Technologies, Inc. Direct bonding methods and structures
US11313926B1 (en) 2021-04-13 2022-04-26 Quantum Valley Ideas Laboratories Interlockable vapor cells
FR3131434B1 (fr) * 2021-12-29 2023-12-15 Commissariat Energie Atomique Procédé d’activation d’une couche exposée
CN116022731B (zh) * 2023-02-17 2023-07-07 西南应用磁学研究所(中国电子科技集团公司第九研究所) 一种基于wlp工艺的mems磁通门传感器的制作方法

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Publication number Priority date Publication date Assignee Title
FR2681472B1 (fr) * 1991-09-18 1993-10-29 Commissariat Energie Atomique Procede de fabrication de films minces de materiau semiconducteur.
US5503704A (en) * 1993-01-06 1996-04-02 The Regents Of The University Of California Nitrogen based low temperature direct bonding
JP3294934B2 (ja) * 1994-03-11 2002-06-24 キヤノン株式会社 半導体基板の作製方法及び半導体基板
US6902987B1 (en) * 2000-02-16 2005-06-07 Ziptronix, Inc. Method for low temperature bonding and bonded structure
US7019339B2 (en) * 2001-04-17 2006-03-28 California Institute Of Technology Method of using a germanium layer transfer to Si for photovoltaic applications and heterostructure made thereby
US6780788B2 (en) * 2002-08-07 2004-08-24 Taiwan Semiconductor Manufacturing Co., Ltd. Methods for improving within-wafer uniformity of gate oxide
JP3980539B2 (ja) * 2003-08-29 2007-09-26 唯知 須賀 基板接合方法、照射方法、および基板接合装置
JPWO2005022610A1 (ja) * 2003-09-01 2007-11-01 株式会社Sumco 貼り合わせウェーハの製造方法
FR2867310B1 (fr) * 2004-03-05 2006-05-26 Soitec Silicon On Insulator Technique d'amelioration de la qualite d'une couche mince prelevee
US7361572B2 (en) * 2005-02-17 2008-04-22 Taiwan Semiconductor Manufacturing Co., Ltd. STI liner modification method
FR2888663B1 (fr) * 2005-07-13 2008-04-18 Soitec Silicon On Insulator Procede de diminution de la rugosite d'une couche epaisse d'isolant
FR2910177B1 (fr) * 2006-12-18 2009-04-03 Soitec Silicon On Insulator Couche tres fine enterree
JP2009135430A (ja) * 2007-10-10 2009-06-18 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法

Also Published As

Publication number Publication date
EP2304787B1 (fr) 2011-10-19
CN102047410A (zh) 2011-05-04
US20110129986A1 (en) 2011-06-02
WO2009153422A8 (fr) 2010-12-23
WO2009153422A1 (fr) 2009-12-23
JP2011523784A (ja) 2011-08-18
KR101453135B1 (ko) 2014-10-27
US8318586B2 (en) 2012-11-27
ATE529891T1 (de) 2011-11-15
FR2931585B1 (fr) 2010-09-03
EP2304787A1 (fr) 2011-04-06
KR20110010740A (ko) 2011-02-07
FR2931585A1 (fr) 2009-11-27
JP5661612B2 (ja) 2015-01-28

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