CN102044557B - 有机发光二极管显示设备及其制造方法 - Google Patents

有机发光二极管显示设备及其制造方法 Download PDF

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CN102044557B
CN102044557B CN201010506955.6A CN201010506955A CN102044557B CN 102044557 B CN102044557 B CN 102044557B CN 201010506955 A CN201010506955 A CN 201010506955A CN 102044557 B CN102044557 B CN 102044557B
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李洪鲁
李相祚
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Samsung Display Co Ltd
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Abstract

提供一种有机发光二极管(OLED)显示设备及其制造方法。位于OLED显示设备中所包括的相邻两个像素中的驱动晶体管的半导体层可沿不同的长度方向延伸。因此,可改进OLED显示设备的条状斑纹。

Description

有机发光二极管显示设备及其制造方法
技术领域
本发明的示例性实施例涉及有机发光二极管(OLED)显示设备及其制造方法。
背景技术
作为平板显示器(FPD)的一个类型,有机发光二极管(OLED)显示设备较之液晶显示器(LCD)可能具备更高的亮度和更广的视角。此外,OLED显示设备无需背光单元,因而可以制作得更薄。
OLED显示设备按驱动方式分类为被动矩阵型或主动矩阵型。主动矩阵型OLED显示设备可包括使用薄膜晶体管(TFT)的电路。此外,尽管可通过使用利用激光束结晶的多晶硅(poly-Si)来获得TFT的半导体层,但是结晶过程中可能会产生诸如条状斑纹之类的缺陷。
发明内容
本发明的非限制性示例实施例提供一种有机发光二极管(OLED)显示设备及其制造方法,其可减少或最小化由诸如激光照射装置的振荡激光束的输出非均匀性之类的因素导致的条状斑纹,并且不会降低设备的制造生产率。
根据本发明的非限制性示例实施例,提供一种有机发光二极管(OLED)显示设备。该OLED显示设备包括:多条扫描线;与所述扫描线交叉的多条数据线;以及位于所述扫描线与所述数据线的交叉区域的多个像素。各个像素包括:OLED、开关晶体管、驱动晶体管和电容器。所述开关晶体管包括:连接到所述扫描线中的一条扫描线的栅电极和连接到所述数据线中的一条数据线的第一电极。所述驱动晶体管连接在所述OLED与电压源供应线之间,且包括半导体层和连接到所述开关晶体管的第二电极的栅电极。所述电容器连接在所述驱动晶体管的栅电极与所述电压源供应线之间。所述多个像素中沿所述扫描线或所述数据线设置的相邻两个像素的驱动晶体管的半导体层沿不同的长度方向延伸。
所述开关晶体管可进一步包括半导体层。所述开关晶体管和所述驱动晶体管各自的半导体层可包括源极区域和漏极区域和沟道区域。所述开关晶体管和所述驱动晶体管各自的栅电极可位于与所述半导体层的沟道区域对应的位置。所述开关晶体管和所述驱动晶体管各自可进一步包括源电极、漏电极和栅极绝缘层。所述源电极和漏电极可分别连接到所述半导体层的源极区域和漏极区域。所述栅极绝缘层可位于所述半导体层与所述栅电极之间。
所述开关晶体管和所述驱动晶体管可具有相同的结构。
所述多个像素中沿所述扫描线或所述数据线的相邻两个像素的驱动晶体管的半导体层可沿不同的长度方向延伸。具有不同的长度方向的相邻像素中的任意相邻两个像素的驱动晶体管的半导体层的长度方向之间的角度差可基本上彼此相同。
所述多个像素中沿所述扫描线或所述数据线设置的基本上任意相邻两个像素的驱动晶体管的半导体层可沿不同的长度方向延伸。
所述开关晶体管的半导体层和所述驱动晶体管的半导体层可利用通过激光束结晶的多晶硅(poly-Si)来形成。
所述开关晶体管的半导体层和所述驱动晶体管的半导体层可具有以平行于所述扫描线或所述数据线的方式形成的晶粒界面。
所述多个像素中沿所述扫描线或所述数据线设置的基本上任意相邻两个像素的驱动晶体管的半导体层可沿不同的长度方向延伸。
根据本发明的另一非限制性示例实施例,提供一种有机发光二极管(OLED)显示设备。该OLED显示设备包括多个像素,位于多条数据线和多条扫描线的交叉区域,数据信号从数据驱动器通过所述多条数据线来传送,扫描信号从扫描驱动器通过所述多条扫描线来传送。各个像素包括由多个薄膜晶体管(TFT)控制的OLED,各个TFT包括:半导体层、栅极绝缘层、源电极和漏电极以及栅电极。与所述多个像素中沿所述扫描线或所述数据线设置的相邻两个像素的OLED相连接的TFT的半导体层沿不同的长度方向延伸。
各个像素可进一步包括电容器、所述TFT中的驱动晶体管和所述TFT中的驱动晶体管。所述电容器可被配置为存储所述数据信号之中的数据信号。所述驱动晶体管可被配置为向所述OLED施加与所述数据信号相对应的驱动电流。所述开关晶体管可被配置为响应于所述扫描信号中的一个扫描信号,向所述驱动晶体管的栅极端子施加所述数据信号。所述多个像素中沿所述扫描线或所述数据线设置的相邻两个像素的驱动晶体管的半导体层可沿不同的长度方向延伸。
与所述多个像素中沿所述扫描线或所述数据线的相邻两个像素的OLED相连接的TFT的半导体层可沿不同的长度方向延伸。与具有不同的长度方向的相邻像素中的任意相邻两个像素的OLED相连接的TFT的半导体层的长度方向之间的角度差可基本上彼此相同。
与所述多个像素中沿所述扫描线或所述数据线设置的基本上任意相邻两个像素的OLED相连接的TFT的半导体层可沿不同的长度方向延伸。
所述TFT的半导体层可利用通过激光束结晶的多晶硅(poly-Si)来形成。
所述TFT的半导体层可具有以平行于所述扫描线或所述数据线的方式形成的晶粒界面。
与所述多个像素中沿所述扫描线或所述数据线设置的基本上任意相邻两个像素的OLED相连接的TFT的半导体层可沿不同的长度方向延伸。
根据本发明的又一非限制性示例实施例,提供一种制造有机发光二极管(OLED)显示设备的方法。该OLED显示设备包括:基板、多条数据线、多条扫描线和位于所述扫描线与所述数据线的交叉区域的多个像素。该方法包括:针对所述各个像素,在所述基板上形成开关晶体管和驱动晶体管。所述开关晶体管包括第一半导体层、栅极绝缘层、第一源电极/漏电极和第二源电极/漏电极以及第一栅电极。所述驱动晶体管包括第二半导体层、栅极绝缘层、第三源电极/漏电极和第四源电极/漏电极以及第二栅电极。该方法进一步包括:形成所述扫描线和所述数据线,各条扫描线连接到所述多个像素中各个像素的开关晶体管的第一栅电极,各条数据线连接到所述多个像素中各个像素的开关晶体管的第一源电极/漏电极。该方法进一步包括在所述各个像素的开关晶体管和驱动晶体管上形成保护层。该方法进一步包括针对各个像素形成OLED,该OLED包括:连接到所述驱动晶体管的第四源电极/漏电极的下电极、包括至少一个发射层(EML)的有机层以及位于所述保护层上的上电极。所述多个像素中沿所述扫描线或所述数据线设置的相邻两个像素的第二半导体层沿不同的长度方向延伸。
所述第一半导体层和所述第二半导体层可通过利用激光束使非晶硅(a-Si)结晶成多晶硅(poly-Si)来形成。
用于使a-Si结晶的激光束可沿平行于所述扫描线或所述数据线的方向来照射。
所述多个像素中沿所述扫描线或所述数据线的相邻两个像素的第二半导体层可沿不同的长度方向延伸。具有不同的长度方向的相邻像素中任意相邻两个像素的驱动晶体管的第二半导体层的长度方向之间的角度差可基本上彼此相同。
该方法可进一步包括在所述保护层上形成平坦化层。
附图说明
将参照附图结合本发明的某些非限制性示例实施例来描述本发明的上述及其他特征,在附图中:
图1是根据本发明的非限制性示例实施例的有机发光二极管(OLED)显示器的电路图;
图2是图1的区域“A”的正视图;以及
图3是沿图2的线I-I’截取的剖视图。
具体实施方式
针对本发明的非限制性示例实施例的更加详细描述,正如附图中所示出的,将使本发明的上述及其他特征和方面变得易懂。在附图中,层或区域的厚度为清晰起见而有所夸大;贯穿整套附图,相同的附图标记始终用于指代相同的元件。
在随后的说明书和权利要求中,当描述某元件“连接”到另一元件时,该元件可以“直接连接”到此另一元件,也可以经第三元件“电连接”到此另一元件。此外,除非明确表达相反的意见,“包括”一词及其各种变体皆应理解为意指含括所提到的元件而同时并不排除其他元件。
考虑到制造有机发光二极管显示设备时的大规模生产和效率,利用激光束的硅结晶方法包括:利用气体激光振荡器(例如,准分子激光器)或者固体激光振荡器(例如,YAG激光器)输出聚束(beam-spot)激光束;利用光学系统将所述聚束激光束处理为具备一长度(例如,预定长度)的线性激光束;和将所述线性激光束照射到基板上。然而,由于激光束的高干涉特性,在线性激光束的长轴和短轴上会出现散斑,这导致基板上形成的多晶硅层的晶体均一性下降。
此外,为减少或最小化条状斑纹的产生,可以以不同的角度(例如,以预定的角度)将线性激光束照射到基板上以使激光束以及与激光束相关的散斑以散射或随机方式照射到基板上。然而,当基板与激光束成不同角度(例如,预定角度)时,依照基板与激光束之间所有这些不同角度的处理时间可能会增长,而控制像素之间的交叠区域和这些不同激光束角度也可能是困难的。因此,可能会降低设备的制造生产率。
非限制性示例实施例
图1是根据本发明非限制性示例实施例的有机发光二极管(OLED)显示设备(即,有机发光显示设备)的电路图,图2是图1的区域“A”的平视图。
参照图1和图2,根据本发明非限制性示例实施例的OLED显示设备包括显示单元100、数据驱动器110和扫描驱动器120。显示单元100可用于显示图像(例如,预定图像)。数据驱动器110可用于通过多条数据线D1-Dm向显示单元100施加数据信号。此外,扫描驱动器120可用于通过多条扫描线S1-Sn向显示单元100施加扫描信号。
因此,显示单元100可用于响应于扫描信号和数据信号显示图像。显示单元100包括位于数据线D1-Dm与扫描线S1-Sm的交叉区域处的多个像素。这些像素中各个像素皆包括有机发光二极管(OLED)、开关晶体管TRs、驱动晶体管TRd和电容器Cst。开关晶体管TRs具有连接到扫描线S1-Sn中的一条扫描线的栅电极241以及连接到数据线D1-Dm中的一条数据线的第一电极。开关晶体管TRs可响应于扫描信号之一传送数据信号之一。驱动晶体管TRd连接在OLED和电压源供应线ELVDD之间,且具有连接到开关晶体管TRs的第二电极的栅电极243。驱动晶体管TRd可传送与经开关晶体管TRs传送的数据信号对应的驱动电流给OLED。电容器Cst连接在驱动晶体管TRd的栅电极243和电压源供应线ELVDD之间,并用于存储数据信号。
在一个非限制性示例实施例中,在沿扫描线S1-Sn之一或者沿数据线D1-Dn之一设置的相邻两个像素中,驱动晶体管Trd的半导体层230形成为沿不同的长度方向(例如,图2中示出的长度方向T1-T4)延伸,从而使沿该扫描线或沿该数据线设置的相邻两个像素的特性之间产生差异。为描述方便起见,在图2中示出了四个不同的长度方向T1-T4并在下面的非限制性示例实施例中描述这四个不同的长度方向T1-T4,但本发明的非限制性示例实施例不限于此。
利用激光束的结晶方法所引起的条状斑纹可以是因沿垂直于或平行于激光照射方向的设置的驱动晶体管TRd的半导体层230之间的电子迁移率存在差异而引起的。这可能要归因于由于激光束的高干扰特性在线性激光束的长轴与短轴上引起的散斑。因此,当通过使相邻两个像素的驱动晶体管TRd沿不同的长度方向T1-T4延伸而引起比散度(specific dispersion)时,与(到线性束的)电子迁移率的差别有关的亮度差异可降低,从而减轻条状斑纹。
此处,由于条状斑纹可出现在与激光照射方向垂直或者平行的一个或者两个方向上,沿扫描线S1-Sn和数据线D1-Dm设置的所有(或者几乎所有)相邻像素对的驱动晶体管TRd可形成为按不同的长度方向T1-T4延伸。
以类似的方式,沿扫描线S1-Sn或者沿数据线D1-Dm设置的相邻两个像素中的开关晶体管TRs的半导体层220可形成为按不同的长度方向延伸。然而,需要更大的面积(例如,预定面积)以使相邻两个像素的半导体层220和230按不同的长度方向延伸。因此,像素电路可能会复杂化,发射区可能会变小。故而,在某些非限制性示例实施例中,仅位于相邻像素中且被配置为产生与数据信号对应的驱动电流的驱动晶体管TRd的半导体层230可形成为按不同的长度方向T1-T4延伸。
随着沿扫描线S1-Sn或者沿数据线D1-Dm设置的相邻像素的驱动晶体管TRd之间的电子迁移率的差增大,条状斑纹可降低。如下面的公式1所示,相邻两个像素的半导体层230之间的电子迁移率的差是这相邻两个像素的驱动晶体管TRd的半导体层230所延伸的长度方向T1-T4之间的角度θ1-θ4的角度差的函数。因此,为提高相邻半导体层之间的电子迁移率的差,应选择相邻两个像素的驱动晶体管TRd的半导体层230所延伸的长度方向T1-T4之间的角度θ1-θ4的角度差以提高公式1中的相应值。
然而,当相邻两个像素的驱动晶体管TRd的半导体层230所延伸的长度方向T1-T4之间的角度θ1-θ4的角度差改变时,可发生亮度不均匀。相应地,在某些非限制性示例实施例中,相邻两个像素的驱动晶体管TRd的半导体层230所延伸的长度方向T1-T4之间的角度θ1-θ4的角度差可以是固定的(或大体上固定的)。
M d = CW ( 1 cos θ 1 - 1 cos θ 2 ) = CW ( cos θ 2 - cos θ 1 cos θ 1 cos θ 2 ) - - - ( 1 ) ,
其中Md代表相邻像素之间的电子迁移率差,W代表驱动晶体管的半导体层的宽度,C为常数,θ1和θ2代表相邻两个像素的驱动晶体管的半导体层所延伸的长度方向的相应角度,这些角度基于与图2中所示扫描线平行的线来测量。
图3是沿图2的线I-I’截取的剖视图。
现在参照图2和图3描述根据本发明非限制性示例实施例的OLED显示设备的制造方法。
首先,可以在利用玻璃或合成树脂或者不锈用途钢(SUS,例如不锈钢)形成的基板210上堆叠非晶硅(a-Si)(未示出)。通过利用激光的结晶方法将该a-Si层结晶为多晶硅(poly-Si)层。该利用激光的结晶方法可以是准分子激光退火(ELA)结晶方法或者连续性侧向长晶(SLS)结晶方法。该poly-Si层可以被图案化以形成开关晶体管TRs的第一半导体层220和驱动晶体管TRd的第二半导体层230。
在这种情况下,驱动晶体管TRd的第二半导体层230可沿长度方向(例如预定的长度方向)T1至T4延伸,而沿扫描线S1至Sn或数据线D1至Dm设置的相邻两个像素的驱动晶体管TRd的半导体层230可形成为沿不同的长度方向T1至T4延伸。这可能会导致沿扫描线S1至Sn或数据线D1至Dm设置的相邻两个像素的驱动晶体管TRd的特性之间出现差异。
同样,当在基板210与照射到基板210上的激光束(未示出)之间形成一角度(例如,预定角度)以使开关晶体管TRs的第一半导体层220和驱动晶体管TRd的第二半导体层230结晶时,考虑到制造工艺的生产率降低,例如工艺时间增加,可采用平行于基板210的一个侧表面的方式来照射激光束。通常,扫描线S1至Sn和数据线D1至Dm形成为平行于基板210的一个侧表面。因此,例如,为了使开关晶体管TRs的第一半导体层220和驱动晶体管TRd的第二半导体层230结晶而照射到基板210上的激光束可沿平行于扫描线S1至Sn或数据线D1至Dm的方向来照射。因此,可利用多晶硅层来形成开关晶体管TRs的第一半导体层220和驱动晶体管TRd的第二半导体层230,并且在该多晶硅层中,晶粒界面沿平行于扫描线S1至Sn或数据线D1至Dm的方向形成。
尽管如图3所示的本非限制性示例实施例描述非晶硅层直接形成在基板210上,在其他非限制性示例实施例中,为了防止在非晶硅结晶期间杂质扩散到基板210中,可在基板210上形成缓冲层(未示出),在缓冲层上形成非晶硅层然后进行结晶。可利用氮化硅(SiNx)层、氧化硅(SiO2)层或其叠层来形成缓冲层。
继续描述图3所示的非限制性示例实施例,栅极绝缘层240可堆叠在具有第一半导体层220和第二半导体层230的基板210上。可利用氧化硅(SiO2)层、氮化硅(SiNx)层或其叠层来形成栅极绝缘层240。
之后,可在栅极绝缘层240上形成用于栅电极的金属层(未示出)。金属层可以是利用铝(Al)或铝合金(例如,铝-钕(Al-Nd))形成的单层,也可以是通过将铝合金堆叠在铬(Cr)或钼(Mo)合金上来形成叠层。可以对用于栅电极的金属层进行干蚀刻或湿蚀刻,从而形成第一栅电极241、第二栅电极243以及电容器Cst的电容器下电极245。第一栅电极241可对应于第一半导体层220的一区域(例如,预定区域),并且连接到扫描线S1至Sn中的一条扫描线。第二栅电极243可对应于第二半导体层230的一区域(例如,预定区域)。这里,第一半导体层220的区域可以是沟道区域224,第二半导体层230的区域可以是沟道区域234。
图2示出第一栅电极241与扫描线S1至Sn中的一条扫描线相接触,第二栅电极243与电容器下电极245相接触。然而,在其他非限制性示例实施例中,在形成第一栅电极241、扫描线S1至Sn、第二栅电极243和电容器下电极245之后,可将第一栅电极241与扫描线S1至Sn通过接触孔彼此相连接,并且可将第二栅电极243与电容器下电极245通过接触孔彼此相连接。
接下来,可将第一栅电极241和第二栅电极243用作掩膜来为第一半导体层220的部分和第二半导体层230的部分掺杂导电杂质,从而形成第一半导体层220的第一源极和漏极区域222和第二半导体层230的第二源极和漏极区域232。因此,可在第一半导体层220的第一源极和漏极区域222之间形成第一半导体层220的沟道区域224,并且可在第二半导体层230的第二源极和漏极区域232之间形成第二半导体层230的沟道区域234。在这种情况下,可通过在形成第一栅电极241和第二栅电极243之前在基板上210上形成光致抗蚀剂来执行杂质掺杂工艺。在其他非限制性示例实施例中,为了防止漏电流,可通过将低浓度杂质掺杂到第一半导体层220的沟道区域224的部分和第二半导体层230的沟道区域234的部分中来执行杂质掺杂过程。
随后,可以在具有第一栅电极241和第二栅电极243的基板210上形成层间绝缘层250。可以对层间绝缘层250和栅极绝缘层240进行蚀刻,从而形成第一接触孔224、第二接触孔235和第三接触孔242。第一接触孔225可局部露出第一源极和漏极区域222,第二接触孔235可局部露出第二源极和漏极区域232,第三接触孔242可局部露出电容器下电极245。
之后,导电材料,例如钼-钨(MoW)或铝-钕(Al-Nd),可堆叠在具有第一至第三接触孔225、235和242的层间绝缘层250上。可对导电材料进行图案化以形成第一源/漏电极251、第二源/漏电极252、第三源/漏电极253、第四源/漏电极254和电容器上电极255,从而完成开关晶体管TRs、驱动晶体管TRd和电容器Cst。
第一源/漏电极251和第二源/漏电极252可通过第一接触孔225连接到第一源极和漏极区域222。第一源/漏电极251可连接至数据线D1-Dm中的一条数据线。第二源/漏电极252可通过第三接触孔242连接到电容器下电极245。
第三源/漏电极253和第四源/漏电极254可通过第二接触孔235连接到第二源极/漏极区域232。第三源/漏电极253可连接到电压源供应线ELVDD。第四源/漏电极254可连接到在随后的工艺期间形成的下电极280。
尽管如图3所示的本非限制性示例实施例描述各个像素包括一个开关晶体管TRs、一个驱动晶体管TRd以及一个电容器Cst,在其他非限制性示例实施例中,当各个像素包括补偿电路结构以补偿驱动晶体管TRd的阈值电压时,该像素可进一步包括多个开关晶体管TRs。
此外,尽管如图3所示的本非限制性示例实施例描述开关晶体管TRs和驱动晶体管TRd均采用栅电极位于半导体层之上的顶栅结构,但是在其他非限制性示例实施例中,开关晶体管TRs和驱动晶体管TRd可采用不同的结构。例如,开关晶体管TRs或驱动晶体管TRd可采用栅电极位于半导体层之下的底栅结构。
接下来,可在包括第一至第四源/漏电极251、252、253和254的基板210上形成保护层260和平坦化层270并对其进行蚀刻,从而形成局部露出第四源/漏电极254的通孔272。保护层260可以是无机绝缘层,例如氧化硅层。平坦化层270可以是有机绝缘层,例如丙烯醛基层。尽管如图3所示的本非限制性示例实施例描述在具有第一至第四源/漏电极251、252、253和254的基板210上既形成保护层260又形成平坦化层270,但是在其他非限制性示例实施例中,可以仅形成保护层260和平坦化层270中的一个。
之后,可在具有通孔272的平坦化层270上堆叠导电材料并对其进行图案化,从而形成下电极280以通过通孔272连接到第四源/漏电极254。然后,可在具有下电极290的基板210上形成限制发射层的像素限制层290,以局部露出下电极280。像素限制层290可利用聚酰亚胺、苯并环丁烯(benzocyclobutens)系列树脂、苯酚树脂、丙烯酸脂或其混合物。
随后,可在下电极280的被像素限制层290限制的发射区域露出的表面上形成包括至少一个发射层(EML)281的有机层285。可在有机层285上形成上电极300,从而完成被配置成发出与数据信号和扫描信号相对应的一颜色(例如预定颜色)的光的OLED。
因此,沿扫描线S1至Sn或数据线D1至Dm设置的相邻两个像素的驱动晶体管TRd可具有沿不同的长度方向延伸的半导体层。因此,这些驱动晶体管TRd间出现差异,从而减少由于振荡激光束的输出非均匀性而出现的条状斑纹。
根据上述本发明的非限制性示例实施例,位于沿扫描线或数据线设置的相邻两个像素中的驱动晶体管的半导体层可形成为沿不同的长度方向延伸,从而给相邻两个像素的驱动晶体管的特性之间带来差异。因此,可减少由于振荡激光束的输出非均匀性而出现的条状斑纹,而不降低制造工艺的生产率。
尽管已结合本发明的特定非限制性示例实施例对本发明进行了描述,但是本领域技术人员应该理解,可以对本发明的非限制性示例实施例做出各种修改和变形,而不脱离由所附权利要求及其等同物限制的本发明的精神或范围。

Claims (16)

1.一种有机发光二极管显示设备,包括:
多条扫描线;
与所述多条扫描线交叉的多条数据线;以及
位于所述多条扫描线与所述多条数据线的交叉区域的多个像素,
其中所述多个像素中的每个像素包括:
有机发光二极管;
开关晶体管,包括连接到所述多条扫描线之一的栅电极和连接到所述多条数据线之一的第一电极;
驱动晶体管,连接在所述有机发光二极管与电压源供应线之间,且包括半导体层和连接到所述开关晶体管的第二电极的栅电极;以及
电容器,连接在所述驱动晶体管的栅电极与所述电压源供应线之间,
其中沿所述多条扫描线和所述多条数据线设置的所有相邻像素对的驱动晶体管的半导体层沿不同的长度方向延伸。
2.根据权利要求1所述的有机发光二极管显示设备,其中:
所述开关晶体管进一步包括半导体层,
所述开关晶体管的半导体层包括源极区域和漏极区域以及沟道区域,
所述开关晶体管的栅电极位于与所述开关晶体管的半导体层的沟道区域对应的位置,并且
所述开关晶体管进一步包括:
源电极和漏电极,分别连接到所述开关晶体管的半导体层的源极区域和漏极区域;以及
位于所述开关晶体管的半导体层与所述开关晶体管的栅电极之间的栅极绝缘层,
所述驱动晶体管的半导体层包括源极区域和漏极区域以及沟道区域,
所述驱动晶体管的栅电极位于与所述驱动晶体管的半导体层的沟道区域对应的位置,并且
所述驱动晶体管进一步包括:
源电极和漏电极,分别连接到所述驱动晶体管的半导体层的源极区域和漏极区域;以及
位于所述驱动晶体管的半导体层与所述驱动晶体管的栅电极之间的栅极绝缘层。
3.根据权利要求2所述的有机发光二极管显示设备,其中所述开关晶体管和所述驱动晶体管具有相同的结构。
4.根据权利要求1所述的有机发光二极管显示设备,其中具有不同的长度方向的相邻像素中的任意相邻两个像素的驱动晶体管的半导体层的长度方向之间的角度差彼此相同。
5.根据权利要求1所述的有机发光二极管显示设备,其中所述开关晶体管的半导体层和所述驱动晶体管的半导体层利用通过激光束结晶的多晶硅来形成。
6.根据权利要求5所述的有机发光二极管显示设备,其中所述开关晶体管的半导体层和所述驱动晶体管的半导体层具有以平行于所述多条扫描线或所述多条数据线的方式形成的晶粒界面。
7.一种有机发光二极管显示设备,包括:
多个像素,位于多条数据线和多条扫描线的交叉区域,数据信号从数据驱动器通过所述多条数据线来传送,扫描信号从扫描驱动器通过所述多条扫描线来传送,所述多个像素中的每个像素包括:
由多个薄膜晶体管控制的有机发光二极管,所述多个薄膜晶体管中的每个薄膜晶体管包括:
半导体层;
栅极绝缘层;
源电极和漏电极;以及
栅电极,
其中与沿所述多条扫描线和所述多条数据线设置的所有相邻像素对的有机发光二极管相连接的所述薄膜晶体管的半导体层沿不同的长度方向延伸。
8.根据权利要求7所述的有机发光二极管显示设备,其中所述多个像素中的每个像素进一步包括:
电容器,被配置为存储所述数据信号之中的数据信号;
所述薄膜晶体管中的驱动晶体管,被配置为向所述有机发光二极管施加与所述数据信号相对应的驱动电流;以及
所述薄膜晶体管中的开关晶体管,被配置为响应于所述多个扫描信号中的一个扫描信号,向所述驱动晶体管的栅极端子施加该数据信号,
其中所述多个像素中沿所述多条扫描线或所述多条数据线设置的相邻两个像素的驱动晶体管的半导体层沿不同的长度方向延伸。
9.根据权利要求7所述的有机发光二极管显示设备,其中与具有不同的长度方向的相邻像素中的任意相邻两个像素的有机发光二极管相连接的薄膜晶体管的半导体层的长度方向之间的角度差彼此相同。
10.根据权利要求7所述的有机发光二极管显示设备,其中所述多个薄膜晶体管的半导体层利用通过激光束结晶的多晶硅来形成。
11.根据权利要求10所述的有机发光二极管显示设备,其中所述多个薄膜晶体管的半导体层具有以平行于所述多条扫描线或所述多条数据线的方式形成的晶粒界面。
12.一种制造有机发光二极管显示设备的方法,该有机发光二极管显示设备包括:基板、多条数据线、多条扫描线和位于所述多条扫描线与所述多条数据线的交叉区域的多个像素,该方法包括:
针对所述各个像素,在所述基板上形成开关晶体管和驱动晶体管,其中所述开关晶体管包括第一半导体层、栅极绝缘层、第一源电极/漏电极和第二源电极/漏电极以及第一栅电极,并且所述驱动晶体管包括第二半导体层、栅极绝缘层、第三源电极/漏电极和第四源电极/漏电极以及第二栅电极;
形成所述多条扫描线和所述多条数据线,各条扫描线连接到所述多个像素中各个像素的开关晶体管的第一栅电极,各条数据线连接到所述多个像素中各个像素的开关晶体管的第一源电极/漏电极;
在所述多个像素中的每个像素的开关晶体管和驱动晶体管上形成保护层;以及
针对所述多个像素中的每个像素形成有机发光二极管,该有机发光二极管包括:连接到所述驱动晶体管的第四源电极/漏电极的下电极、包括至少一个发射层的有机层以及位于所述保护层上的上电极,
其中沿所述多条扫描线和所述多条数据线设置的所有相邻像素对的所述第二半导体层沿不同的长度方向延伸。
13.根据权利要求12所述的制造有机发光二极管显示设备的方法,其中所述第一半导体层和所述第二半导体层通过利用激光束使非晶硅结晶成多晶硅来形成。
14.根据权利要求13所述的制造有机发光二极管显示设备的方法,其中用于使非晶硅结晶的激光束沿平行于所述多条扫描线或所述多条数据线的方向来照射。
15.根据权利要求12所述的制造有机发光二极管显示设备的方法,其中具有不同的长度方向的相邻像素中任意相邻两个像素的驱动晶体管的第二半导体层的长度方向之间的角度差彼此相同。
16.根据权利要求12所述的制造有机发光二极管显示设备的方法,进一步包括:在所述保护层上形成平坦化层。
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