CN102044545B - 分立栅快闪存储器及其制造方法 - Google Patents
分立栅快闪存储器及其制造方法 Download PDFInfo
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- CN102044545B CN102044545B CN2009101974429A CN200910197442A CN102044545B CN 102044545 B CN102044545 B CN 102044545B CN 2009101974429 A CN2009101974429 A CN 2009101974429A CN 200910197442 A CN200910197442 A CN 200910197442A CN 102044545 B CN102044545 B CN 102044545B
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- China
- Prior art keywords
- sidewall
- flash memory
- surface district
- layer
- semiconductor substrate
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- Expired - Fee Related
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000007667 floating Methods 0.000 claims abstract description 42
- 238000000034 method Methods 0.000 claims abstract description 36
- 239000004065 semiconductor Substances 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 230000008569 process Effects 0.000 claims abstract description 12
- 239000010410 layer Substances 0.000 claims description 83
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 67
- 229920005591 polysilicon Polymers 0.000 claims description 67
- 238000005530 etching Methods 0.000 claims description 14
- 239000011241 protective layer Substances 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 238000002513 implantation Methods 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims description 6
- 230000004224 protection Effects 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 2
- 230000005641 tunneling Effects 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 238000005229 chemical vapour deposition Methods 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000002784 hot electron Substances 0.000 description 3
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- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 230000005689 Fowler Nordheim tunneling Effects 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical group 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
- H01L29/42328—Gate electrodes for transistors with a floating gate with at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
Abstract
Description
Claims (19)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009101974429A CN102044545B (zh) | 2009-10-20 | 2009-10-20 | 分立栅快闪存储器及其制造方法 |
US12/887,496 US8119479B2 (en) | 2009-10-20 | 2010-09-21 | Scalable flash EEPROM memory cell with floating gate spacer wrapped by control gate and method of manufacture |
US13/361,937 US20120146123A1 (en) | 2009-10-20 | 2012-01-30 | Scalable flash eeprom memory cell with floating gate spacer wrapped by control gate and method of manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009101974429A CN102044545B (zh) | 2009-10-20 | 2009-10-20 | 分立栅快闪存储器及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102044545A CN102044545A (zh) | 2011-05-04 |
CN102044545B true CN102044545B (zh) | 2013-03-27 |
Family
ID=43878634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009101974429A Expired - Fee Related CN102044545B (zh) | 2009-10-20 | 2009-10-20 | 分立栅快闪存储器及其制造方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US8119479B2 (zh) |
CN (1) | CN102044545B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103199116B (zh) * | 2013-03-29 | 2016-04-27 | 京东方科技集团股份有限公司 | 悬浮栅晶体管及其制作方法、应用方法、显示器驱动电路 |
US9590058B2 (en) * | 2013-06-28 | 2017-03-07 | Nxp Usa, Inc. | Methods and structures for a split gate memory cell structure |
CN104979383B (zh) * | 2014-04-03 | 2018-07-20 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制造方法和电子装置 |
CN105990360B (zh) * | 2015-02-05 | 2019-08-06 | 物联记忆体科技股份有限公司 | 非易失性存储器及其制造方法 |
KR102328564B1 (ko) | 2015-04-14 | 2021-11-18 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
US10622454B2 (en) * | 2016-06-30 | 2020-04-14 | International Business Machines Corporation | Formation of a semiconductor device with RIE-free spacers |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6143606A (en) * | 1997-12-26 | 2000-11-07 | Worldwide Semiconductor Manufacturing Corp | Method for manufacturing split-gate flash memory cell |
CN1591879A (zh) * | 2003-08-29 | 2005-03-09 | 中芯国际集成电路制造(上海)有限公司 | 一种电可擦除可编程只读存储器及其制造方法 |
CN1941381A (zh) * | 2005-09-28 | 2007-04-04 | 中芯国际集成电路制造(上海)有限公司 | 用于嵌入式eeprom中的一次可编程存储器器件的结构与方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW473840B (en) * | 2000-10-06 | 2002-01-21 | Winbond Electronics Corp | Manufacturing method of EEPROM with split-gate structure |
US6621115B2 (en) * | 2001-11-06 | 2003-09-16 | Integrated Memory Technologies, Inc. | Scalable flash EEPROM memory cell with floating gate spacer wrapped by control gate |
US20050026342A1 (en) * | 2003-07-28 | 2005-02-03 | Ka-Hing Fung | Semiconductor device having improved short channel effects, and method of forming thereof |
US7145802B2 (en) * | 2004-08-31 | 2006-12-05 | Skymedi Corporation | Programming and manufacturing method for split gate memory cell |
KR100683389B1 (ko) * | 2005-09-20 | 2007-02-15 | 동부일렉트로닉스 주식회사 | 플래시 메모리의 셀 트랜지스터 및 그 제조 방법 |
JP2009289949A (ja) * | 2008-05-29 | 2009-12-10 | Toshiba Corp | 不揮発性半導体記憶装置 |
-
2009
- 2009-10-20 CN CN2009101974429A patent/CN102044545B/zh not_active Expired - Fee Related
-
2010
- 2010-09-21 US US12/887,496 patent/US8119479B2/en active Active
-
2012
- 2012-01-30 US US13/361,937 patent/US20120146123A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6143606A (en) * | 1997-12-26 | 2000-11-07 | Worldwide Semiconductor Manufacturing Corp | Method for manufacturing split-gate flash memory cell |
CN1591879A (zh) * | 2003-08-29 | 2005-03-09 | 中芯国际集成电路制造(上海)有限公司 | 一种电可擦除可编程只读存储器及其制造方法 |
CN1941381A (zh) * | 2005-09-28 | 2007-04-04 | 中芯国际集成电路制造(上海)有限公司 | 用于嵌入式eeprom中的一次可编程存储器器件的结构与方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102044545A (zh) | 2011-05-04 |
US20110089479A1 (en) | 2011-04-21 |
US8119479B2 (en) | 2012-02-21 |
US20120146123A1 (en) | 2012-06-14 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20121107 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20121107 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Applicant after: Semiconductor Manufacturing International (Shanghai) Corporation Applicant after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Applicant before: Semiconductor Manufacturing International (Shanghai) Corporation |
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C14 | Grant of patent or utility model | ||
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130327 Termination date: 20191020 |
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CF01 | Termination of patent right due to non-payment of annual fee |