CN102033095B - 气敏半导体装置 - Google Patents

气敏半导体装置 Download PDF

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Publication number
CN102033095B
CN102033095B CN201010501828.7A CN201010501828A CN102033095B CN 102033095 B CN102033095 B CN 102033095B CN 201010501828 A CN201010501828 A CN 201010501828A CN 102033095 B CN102033095 B CN 102033095B
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China
Prior art keywords
channel
gas
electrode
gate electrode
gate
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Expired - Fee Related
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CN201010501828.7A
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English (en)
Chinese (zh)
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CN102033095A (zh
Inventor
D·孔兹
M·威登迈耶
A·马丁
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases

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  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
CN201010501828.7A 2009-10-08 2010-09-30 气敏半导体装置 Expired - Fee Related CN102033095B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009045475.6A DE102009045475B4 (de) 2009-10-08 2009-10-08 Gassensitive Halbleitervorrichtung sowie deren Verwendung
DE102009045475.6 2009-10-08

Publications (2)

Publication Number Publication Date
CN102033095A CN102033095A (zh) 2011-04-27
CN102033095B true CN102033095B (zh) 2015-04-01

Family

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Family Applications (1)

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CN201010501828.7A Expired - Fee Related CN102033095B (zh) 2009-10-08 2010-09-30 气敏半导体装置

Country Status (5)

Country Link
US (1) US8513711B2 (enExample)
JP (1) JP5743478B2 (enExample)
CN (1) CN102033095B (enExample)
DE (1) DE102009045475B4 (enExample)
FR (1) FR2951273B1 (enExample)

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DE102009045475B4 (de) * 2009-10-08 2023-06-29 Robert Bosch Gmbh Gassensitive Halbleitervorrichtung sowie deren Verwendung
DE102012211460A1 (de) * 2012-07-03 2014-01-09 Robert Bosch Gmbh Gassensor und Verfahren zum Herstellen eines solchen
DE102012213530A1 (de) 2012-08-01 2014-02-06 Robert Bosch Gmbh Verfahren und Messgerät zum Bestimmen eines Zustands eines Halbleitermaterials eines von einem Hersteller getesteten und ausgelieferten chemosensitiven Feldeffekttransistors
DE102012213533A1 (de) 2012-08-01 2014-02-06 Robert Bosch Gmbh Halbleiterbauelement und Verfahren zum Bestimmen eines Zustands eines Halbleitermaterials des Halbleiterbauelements
CN103308563A (zh) * 2013-05-16 2013-09-18 黑龙江大学 一种以单壁碳纳米管/酞菁复合材料为氨敏材料的气敏元件及其制备方法
US10770573B2 (en) * 2018-09-20 2020-09-08 Tower Semiconductor Ltd. Apparatus, system and method of an electrostatically formed nanowire (EFN)
CN109580725B (zh) * 2018-12-10 2020-06-26 华中科技大学 基于天线结构的二维过渡金属硫化物气体传感器及制备
CN111380926B (zh) * 2018-12-28 2023-05-26 鸿富锦精密工业（深圳）有限公司 气体感测器及其制备方法
CN115420788B (zh) * 2022-09-01 2025-09-09 湘潭大学 用于多种气体识别的碳基薄膜晶体管型传感器阵列及其制备方法
CN117783244B (zh) * 2023-12-11 2024-12-10 哈尔滨工业大学 传感器敏感模块、钌岛增强氨气传感器和氨气中氨分子检测方法

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US6955749B2 (en) * 2001-04-12 2005-10-18 Micronas Gmbh Sensor for measuring an ion concentration or gas concentration
CN1926248A (zh) * 2004-02-27 2007-03-07 技术资源有限公司 直接熔炼设备及方法

Also Published As

Publication number Publication date
DE102009045475B4 (de) 2023-06-29
US20110121368A1 (en) 2011-05-26
FR2951273B1 (fr) 2014-07-04
FR2951273A1 (fr) 2011-04-15
US8513711B2 (en) 2013-08-20
CN102033095A (zh) 2011-04-27
JP2011080996A (ja) 2011-04-21
JP5743478B2 (ja) 2015-07-01
DE102009045475A1 (de) 2011-04-14

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