JPS5672339A - Fet multisensor - Google Patents
Fet multisensorInfo
- Publication number
- JPS5672339A JPS5672339A JP14913979A JP14913979A JPS5672339A JP S5672339 A JPS5672339 A JP S5672339A JP 14913979 A JP14913979 A JP 14913979A JP 14913979 A JP14913979 A JP 14913979A JP S5672339 A JPS5672339 A JP S5672339A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- multisensor
- ion
- fet
- thr
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE: To enable stable measurement, by putting each characteristic of each sensor into a specific range, constituting a multisensor.
CONSTITUTION: A composite sensor has an ion sensing film, which responds to various ions in electrolyte, on the uppermost surface of each gate of plural insulating gas type field effect transistor constructions formed on the same substrate. The threshold voltage Vth, temperature dependancy and drain current IDSS for each ion sensor are selected to satisfy the relation in thr right formulas.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14913979A JPS5672339A (en) | 1979-11-16 | 1979-11-16 | Fet multisensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14913979A JPS5672339A (en) | 1979-11-16 | 1979-11-16 | Fet multisensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5672339A true JPS5672339A (en) | 1981-06-16 |
Family
ID=15468600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14913979A Pending JPS5672339A (en) | 1979-11-16 | 1979-11-16 | Fet multisensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5672339A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5924244A (en) * | 1982-08-02 | 1984-02-07 | Hitachi Ltd | Field effect transistor type multi-ion sensor and preparation thereof |
JPS59206756A (en) * | 1983-05-11 | 1984-11-22 | Hitachi Ltd | Fet chemical sensor combined with reference electrode |
JP2011080996A (en) * | 2009-10-08 | 2011-04-21 | Robert Bosch Gmbh | Gas sensitive semiconductor device |
-
1979
- 1979-11-16 JP JP14913979A patent/JPS5672339A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5924244A (en) * | 1982-08-02 | 1984-02-07 | Hitachi Ltd | Field effect transistor type multi-ion sensor and preparation thereof |
JPH0358061B2 (en) * | 1982-08-02 | 1991-09-04 | Hitachi Ltd | |
JPS59206756A (en) * | 1983-05-11 | 1984-11-22 | Hitachi Ltd | Fet chemical sensor combined with reference electrode |
JPH0469338B2 (en) * | 1983-05-11 | 1992-11-05 | Hitachi Ltd | |
JP2011080996A (en) * | 2009-10-08 | 2011-04-21 | Robert Bosch Gmbh | Gas sensitive semiconductor device |
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