JPS5270884A - Moisture sensitive element - Google Patents

Moisture sensitive element

Info

Publication number
JPS5270884A
JPS5270884A JP50147215A JP14721575A JPS5270884A JP S5270884 A JPS5270884 A JP S5270884A JP 50147215 A JP50147215 A JP 50147215A JP 14721575 A JP14721575 A JP 14721575A JP S5270884 A JPS5270884 A JP S5270884A
Authority
JP
Japan
Prior art keywords
sensitive element
moisture sensitive
sensitivity
semiconductor substrate
mos transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50147215A
Other languages
Japanese (ja)
Inventor
Takehiro Tozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50147215A priority Critical patent/JPS5270884A/en
Publication of JPS5270884A publication Critical patent/JPS5270884A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a moisture sensitive element, in which an insulated gate of an MOS transistor formed on a semiconductor substrate is made of a hygroscopic polymer to increase the sensitivity.
COPYRIGHT: (C)1977,JPO&Japio
JP50147215A 1975-12-09 1975-12-09 Moisture sensitive element Pending JPS5270884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50147215A JPS5270884A (en) 1975-12-09 1975-12-09 Moisture sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50147215A JPS5270884A (en) 1975-12-09 1975-12-09 Moisture sensitive element

Publications (1)

Publication Number Publication Date
JPS5270884A true JPS5270884A (en) 1977-06-13

Family

ID=15425164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50147215A Pending JPS5270884A (en) 1975-12-09 1975-12-09 Moisture sensitive element

Country Status (1)

Country Link
JP (1) JPS5270884A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142445A (en) * 1980-04-09 1981-11-06 Hitachi Ltd Manufacturing of humidity-sensing semiconductor element
JPS6044856A (en) * 1983-08-19 1985-03-11 ソーン　イーエムアイ　パテンツ　リミテッド Vapor-sensor
JP2017508958A (en) * 2014-02-17 2017-03-30 ノキア テクノロジーズ オーユー Apparatus and related methods

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142445A (en) * 1980-04-09 1981-11-06 Hitachi Ltd Manufacturing of humidity-sensing semiconductor element
JPS6326858B2 (en) * 1980-04-09 1988-05-31 Hitachi Ltd
JPS6044856A (en) * 1983-08-19 1985-03-11 ソーン　イーエムアイ　パテンツ　リミテッド Vapor-sensor
JP2017508958A (en) * 2014-02-17 2017-03-30 ノキア テクノロジーズ オーユー Apparatus and related methods
US9989488B2 (en) 2014-02-17 2018-06-05 Nokia Technologies Oy Field-effect sensor and associated methods

Similar Documents

Publication Publication Date Title
JPS5279679A (en) Semiconductor memory device
JPS5230388A (en) Semiconductor integrated circuit device constructed with insulating ga te field effect transistor
JPS5270884A (en) Moisture sensitive element
JPS52124889A (en) Semiconductor photoelectric transducer
JPS53141583A (en) Integrated-circuit semiconductor device of field effect type
JPS51147280A (en) Semiconductor device
JPS5215274A (en) Semiconductor device
JPS5433097A (en) Semiconductor gas sensor
JPS5275987A (en) Gate protecting device
JPS53109487A (en) Manufacture for semiconductor device
JPS5272586A (en) Production of semiconductor device
JPS52100877A (en) Field effect transistor of junction type
JPS5261960A (en) Production of semiconductor device
JPS51147188A (en) Semicoductor device
JPS533074A (en) Production of schottkey barrier gate field effect transistor
JPS5270768A (en) Semiconductor device
JPS5251880A (en) Moisture sensitive element
JPS51123073A (en) Insulated gate (type) semiconductor device
JPS5263685A (en) Production of semiconductor device
JPS52113176A (en) Semiconductor device
JPS5227279A (en) Semiconductor unit
JPS51148380A (en) Manufacturing method of electric field semiconductor device
JPS53138684A (en) Semiconductor memory device
JPS5377168A (en) Production of semiconductor device
JPS5287381A (en) Humidity sensitive element