CN101960385B - 多光子曝光系统 - Google Patents

多光子曝光系统 Download PDF

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Publication number
CN101960385B
CN101960385B CN200980106580XA CN200980106580A CN101960385B CN 101960385 B CN101960385 B CN 101960385B CN 200980106580X A CN200980106580X A CN 200980106580XA CN 200980106580 A CN200980106580 A CN 200980106580A CN 101960385 B CN101960385 B CN 101960385B
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CN
China
Prior art keywords
light beam
resin
exposure system
exposure
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200980106580XA
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English (en)
Chinese (zh)
Other versions
CN101960385A (zh
Inventor
罗伯特·J·达沃
布拉因·J·盖茨
迪安·法克里斯
罗伯特·T·克拉沙
普热梅斯瓦夫·P·马尔科维茨
克雷格·R·斯克拉
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN101960385A publication Critical patent/CN101960385A/zh
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Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B29C64/124—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified
    • B29C64/129—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask
    • B29C64/135—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using layers of liquid which are selectively solidified characterised by the energy source therefor, e.g. by global irradiation combined with a mask the energy source being concentrated, e.g. scanning lasers or focused light sources
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
    • G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70375—Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Laser Beam Processing (AREA)
  • Polymerisation Methods In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN200980106580XA 2008-02-26 2009-02-17 多光子曝光系统 Expired - Fee Related CN101960385B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US3153808P 2008-02-26 2008-02-26
US61/031,538 2008-02-26
PCT/US2009/034287 WO2009108543A2 (en) 2008-02-26 2009-02-17 Multi-photon exposure system

Publications (2)

Publication Number Publication Date
CN101960385A CN101960385A (zh) 2011-01-26
CN101960385B true CN101960385B (zh) 2012-11-07

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ID=41016675

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980106580XA Expired - Fee Related CN101960385B (zh) 2008-02-26 2009-02-17 多光子曝光系统

Country Status (5)

Country Link
US (2) US8605256B2 (https=)
EP (1) EP2257854B1 (https=)
JP (2) JP5801558B2 (https=)
CN (1) CN101960385B (https=)
WO (1) WO2009108543A2 (https=)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8322874B2 (en) * 2007-09-06 2012-12-04 3M Innovative Properties Company Lightguides having light extraction structures providing regional control of light output
CN101795838B (zh) 2007-09-06 2014-02-12 3M创新有限公司 形成模具的方法以及使用所述模具形成制品的方法
CN101795961B (zh) * 2007-09-06 2013-05-01 3M创新有限公司 用于制备微结构化制品的工具
US8451457B2 (en) 2007-10-11 2013-05-28 3M Innovative Properties Company Chromatic confocal sensor
EP2232531B1 (en) 2007-12-12 2018-09-19 3M Innovative Properties Company Method for making structures with improved edge definition
DE102011012484B4 (de) 2011-02-25 2025-08-14 Nanoscribe Holding Gmbh Verfahren und Vorrichtung zum ortsaufgelösten Einbringen eines Intensitätsmusters aus elektromagnetischer Strahlung in eine photosensitive Substanz sowie Verwendung hiervon
DE102011123139B4 (de) 2011-02-25 2025-08-14 Nanoscribe Holding Gmbh Verfahren und Vorrichtung zum ortsaufgelösten Einbringen eines Intensitätsmusters aus elektromagnetischer Strahlung in eine photosensitive Substanz sowie Verwendung hiervon
CN102513267A (zh) * 2011-12-27 2012-06-27 江苏东禾电声配件有限公司 一种双胶混合气动施胶枪
US10114157B2 (en) * 2012-09-20 2018-10-30 Applied Materials, Inc. Pulse width controller
JP6151054B2 (ja) * 2013-03-22 2017-06-21 ギガフォトン株式会社 レーザ装置及び極端紫外光生成装置
GB201310398D0 (en) 2013-06-11 2013-07-24 Renishaw Plc Additive manufacturing apparatus and method
JP6571638B2 (ja) 2013-06-10 2019-09-04 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 選択的レーザ固化装置および方法
EP2878402A1 (en) * 2013-12-02 2015-06-03 SLM Solutions Group AG Apparatus and method for producing three-dimensional work pieces with a radiation detection device
JP6345944B2 (ja) * 2014-02-21 2018-06-20 株式会社ミツトヨ 斜入射干渉計
US10319132B2 (en) * 2014-05-08 2019-06-11 Nvidia Corporation Method and system for representing objects with velocity-dependent particles
WO2016003669A1 (en) 2014-06-30 2016-01-07 3M Innovative Properties Company 360 degree privacy film
WO2016085334A2 (en) 2014-11-24 2016-06-02 Additive Industries B.V. Apparatus for producing an object by means of additive manufacturing
CN107209356B (zh) * 2014-12-09 2020-07-17 阿森提斯股份有限公司 用于高度和厚度的非接触式测量的集成光学器件
EP3053542B1 (de) * 2015-02-06 2018-03-28 Ivoclar Vivadent AG Dentales Lichthärtgerät
CN110596886B (zh) * 2015-03-20 2021-12-07 株式会社尼康 图案描绘装置
GB201505458D0 (en) * 2015-03-30 2015-05-13 Renishaw Plc Additive manufacturing apparatus and methods
US10688733B2 (en) * 2015-11-25 2020-06-23 The Boeing Company Method and apparatus for three-dimensional printing
DE102016001355B4 (de) * 2016-02-08 2022-03-24 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Verfahren und Vorrichtung zur Analyse von Laserstrahlen in Anlagen für generative Fertigung
US10495579B2 (en) 2016-05-02 2019-12-03 Kla-Tencor Corporation System and method for compensation of illumination beam misalignment
EP3287263A1 (de) * 2016-08-26 2018-02-28 Multiphoton Optics Gmbh Vorrichtung und verfahren zur lasergestützten bearbeitung von körpern oder oberflächen
EP3287262A1 (de) 2016-08-26 2018-02-28 Multiphoton Optics Gmbh Vorrichtung und verfahren zur lasergestützten bearbeitung von körpern oder oberflächen
TWI668130B (zh) 2017-03-22 2019-08-11 三緯國際立體列印科技股份有限公司 立體列印裝置及其接續列印的方法
CN108621433B (zh) * 2017-03-22 2020-05-19 三纬国际立体列印科技股份有限公司 立体打印装置及其接续打印的方法
EP3704545B1 (en) 2017-10-31 2025-12-03 Lawrence Livermore National Security, LLC System and method for depth resolved parallel two-photon polymerization for scalable submicron additive manufacturing
CN111526979B (zh) * 2017-12-29 2023-08-29 劳伦斯·利弗莫尔国家安全有限责任公司 用于亚微米增材制造的系统和方法
DE102018208752B4 (de) 2018-06-04 2024-08-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Bearbeitung zur Bearbeitung schwer zugänglicher Werkstücke sowie Verwendung einer Vorrichtung
WO2020154703A1 (en) * 2019-01-24 2020-07-30 Walter Voit Systems, methods, and materials for ultra-high throughput additive manufacturing
NL2022840B1 (en) * 2019-03-29 2020-10-06 Additive Ind Bv Method and apparatus for producing an object by means of additive manufacturing
US11642848B2 (en) * 2019-09-23 2023-05-09 Carbon, Inc. Temperature responsive resin cassettes for additive manufacturing
US11415728B2 (en) * 2020-05-27 2022-08-16 Looking Glass Factory, Inc. System and method for holographic displays
DE102020119702A1 (de) * 2020-07-27 2022-01-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Vorrichtung und Verfahren zur Abtastung einer Zielebene mit mehreren Laserstrahlen, insbesondere zur Lasermaterialbearbeitung
JP2024515765A (ja) * 2021-04-26 2024-04-10 ローレンス・リバモア・ナショナル・セキュリティー・エルエルシー 走査投影ステレオリソグラフィのための診断および解像度最適化
CA3216924A1 (en) * 2021-05-10 2022-11-17 David Jung Laser pulse selection using motorized shutter
DE102021113189A1 (de) * 2021-05-20 2022-11-24 Nanoscribe Holding Gmbh Verfahren zum Erzeugen einer dreidimensionalen Zielstruktur in einem Lithographiematerial mittels einer Laserlithographie-Vorrichtung
CN118055746A (zh) 2021-10-08 2024-05-17 爱尔康公司 用于组织破裂的高效激光器
CN118103012A (zh) 2021-10-15 2024-05-28 爱尔康公司 动态激光脉冲控制
CN113909677B (zh) * 2021-10-22 2023-10-31 吉林大学 一种振镜辅助循环扫描的双光子聚合高功率曝光方法及系统
CN113985708B (zh) * 2021-10-26 2024-02-13 之江实验室 可连续像旋转调制的超分辨高速并行激光直写方法与装置
US20230363945A1 (en) * 2022-05-10 2023-11-16 Alcon Inc. Laser pulse control with sub-carrier modulation
EP4522094A1 (en) * 2022-05-10 2025-03-19 Alcon Inc. Adjustable laser pulse control
TR2022007784A2 (tr) * 2022-05-13 2023-11-21 Bilkent Ueniversitesi Ulusal Nanoteknoloji Arastirma Merkezi Nano ölçekte bi̇r li̇tografi̇ yöntemi̇
EP4543592A1 (en) 2022-06-23 2025-04-30 Solventum Intellectual Properties Company Methods and devices for removing particles from fluids
EP4619153A1 (en) 2022-11-15 2025-09-24 Solventum Intellectual Properties Company Microstructured substrate including connected wells
EP4619157A1 (en) 2022-11-15 2025-09-24 Solventum Intellectual Properties Company Methods and kits for removing particles from fluids
WO2025050065A1 (en) 2023-08-30 2025-03-06 Looking Glass Factory, Inc. Augmented superstereoscopic display

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1630612A2 (en) * 2004-08-25 2006-03-01 Seiko Epson Corporation Method for manufacturing a microstructure, exposure device, and electronic apparatus
CN1842747A (zh) * 2003-08-27 2006-10-04 皇家飞利浦电子股份有限公司 形成光学图像的方法、用于执行所述方法的设备以及使用所述方法制作装置的处理

Family Cites Families (139)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3018262A (en) 1957-05-01 1962-01-23 Shell Oil Co Curing polyepoxides with certain metal salts of inorganic acids
US3729313A (en) 1971-12-06 1973-04-24 Minnesota Mining & Mfg Novel photosensitive systems comprising diaryliodonium compounds and their use
US3808006A (en) 1971-12-06 1974-04-30 Minnesota Mining & Mfg Photosensitive material containing a diaryliodium compound, a sensitizer and a color former
US3779778A (en) 1972-02-09 1973-12-18 Minnesota Mining & Mfg Photosolubilizable compositions and elements
US3741769A (en) 1972-10-24 1973-06-26 Minnesota Mining & Mfg Novel photosensitive polymerizable systems and their use
AU497960B2 (en) 1974-04-11 1979-01-25 Minnesota Mining And Manufacturing Company Photopolymerizable compositions
US4250053A (en) 1979-05-21 1981-02-10 Minnesota Mining And Manufacturing Company Sensitized aromatic iodonium or aromatic sulfonium salt photoinitiator systems
US4249011A (en) 1979-06-25 1981-02-03 Minnesota Mining And Manufacturing Company Poly(ethylenically unsaturated alkoxy) heterocyclic compounds
US4262072A (en) 1979-06-25 1981-04-14 Minnesota Mining And Manufacturing Company Poly(ethylenically unsaturated alkoxy) heterocyclic protective coatings
US4279717A (en) 1979-08-03 1981-07-21 General Electric Company Ultraviolet curable epoxy silicone coating compositions
US4491628A (en) 1982-08-23 1985-01-01 International Business Machines Corporation Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone
JPS60160017U (ja) 1984-03-29 1985-10-24 東芝プラント建設株式会社 組立型ケ−ブルトレイ
US4668601A (en) 1985-01-18 1987-05-26 Minnesota Mining And Manufacturing Company Protective coating for phototools
US4642126A (en) 1985-02-11 1987-02-10 Norton Company Coated abrasives with rapidly curable adhesives and controllable curvature
US4652274A (en) 1985-08-07 1987-03-24 Minnesota Mining And Manufacturing Company Coated abrasive product having radiation curable binder
CA1323949C (en) 1987-04-02 1993-11-02 Michael C. Palazzotto Ternary photoinitiator system for addition polymerization
US4859572A (en) 1988-05-02 1989-08-22 Eastman Kodak Company Dye sensitized photographic imaging system
US5369511A (en) 1989-08-21 1994-11-29 Amos; Carl R. Methods of and apparatus for manipulating electromagnetic phenomenon
JP2724232B2 (ja) 1990-05-02 1998-03-09 株式会社日立製作所 自動焦点手段およびその自動焦点手段を用いた光ディスク装置
JP2912721B2 (ja) * 1991-02-19 1999-06-28 日本電信電話株式会社 三次元物体の形成方法
US5235015A (en) 1991-02-21 1993-08-10 Minnesota Mining And Manufacturing Company High speed aqueous solvent developable photopolymer compositions
GB9121789D0 (en) 1991-10-14 1991-11-27 Minnesota Mining & Mfg Positive-acting photothermographic materials
DE69217177T2 (de) 1991-11-28 1997-05-15 Enplas Corp Flächenartige Lichtquelle
TW268969B (https=) 1992-10-02 1996-01-21 Minnesota Mining & Mfg
US5298741A (en) 1993-01-13 1994-03-29 Trustees Of Tufts College Thin film fiber optic sensor array and apparatus for concurrent viewing and chemical sensing of a sample
JPH07245258A (ja) * 1994-03-08 1995-09-19 Nikon Corp 露光方法及び露光装置
US5801666A (en) * 1993-02-10 1998-09-01 Board Of Regents, The University Of Texas System Three-dimensional monitor
US5427733A (en) * 1993-10-20 1995-06-27 United Technologies Corporation Method for performing temperature-controlled laser sintering
JPH07304104A (ja) * 1994-05-11 1995-11-21 Olympus Optical Co Ltd 光造形品の形成方法および装置
US5512219A (en) 1994-06-03 1996-04-30 Reflexite Corporation Method of casting a microstructure sheet having an array of prism elements using a reusable polycarbonate mold
US5856373A (en) 1994-10-31 1999-01-05 Minnesota Mining And Manufacturing Company Dental visible light curable epoxy system with enhanced depth of cure
JPH09129550A (ja) * 1995-08-30 1997-05-16 Canon Inc 露光装置及びそれを用いたデバイスの製造方法
US5858624A (en) 1996-09-20 1999-01-12 Minnesota Mining And Manufacturing Company Method for assembling planarization and indium-tin-oxide layer on a liquid crystal display color filter with a transfer process
TW347363B (en) 1996-11-12 1998-12-11 Bae-Hyeock Chun Method for improving demolding effect of a mold by a low temperature plasma process
US6608228B1 (en) 1997-11-07 2003-08-19 California Institute Of Technology Two-photon or higher-order absorbing optical materials for generation of reactive species
WO1998021521A1 (en) 1996-11-12 1998-05-22 California Institute Of Technology Two-photon or higher-order absorbing optical materials and methods of use
US5817497A (en) * 1996-11-26 1998-10-06 Incyte Pharmaceuticals Glutathione s-transferase
EP0856592A1 (en) 1997-02-04 1998-08-05 N.V. Bekaert S.A. A coating comprising layers of diamond like carbon and diamond like nanocomposite compositions
US5922238A (en) 1997-02-14 1999-07-13 Physical Optics Corporation Method of making replicas and compositions for use therewith
DE19713362A1 (de) 1997-03-29 1998-10-01 Zeiss Carl Jena Gmbh Konfokale mikroskopische Anordnung
US5998495A (en) 1997-04-11 1999-12-07 3M Innovative Properties Company Ternary photoinitiator system for curing of epoxy/polyol resin compositions
US6025406A (en) 1997-04-11 2000-02-15 3M Innovative Properties Company Ternary photoinitiator system for curing of epoxy resins
US6001297A (en) 1997-04-28 1999-12-14 3D Systems, Inc. Method for controlling exposure of a solidfiable medium using a pulsed radiation source in building a three-dimensional object using stereolithography
JPH1124081A (ja) 1997-06-27 1999-01-29 Minnesota Mining & Mfg Co <3M> 光学要素および積層体転写シート
US5859251A (en) 1997-09-18 1999-01-12 The United States Of America As Represented By The Secretary Of The Air Force Symmetrical dyes with large two-photon absorption cross-sections
US5770737A (en) 1997-09-18 1998-06-23 The United States Of America As Represented By The Secretary Of The Air Force Asymmetrical dyes with large two-photon absorption cross-sections
WO1999054784A1 (en) 1998-04-21 1999-10-28 University Of Connecticut Free-form nanofabrication using multi-photon excitation
US6100405A (en) 1999-06-15 2000-08-08 The United States Of America As Represented By The Secretary Of The Air Force Benzothiazole-containing two-photon chromophores exhibiting strong frequency upconversion
US7046905B1 (en) 1999-10-08 2006-05-16 3M Innovative Properties Company Blacklight with structured surfaces
JP2001150451A (ja) 1999-11-22 2001-06-05 Canon Inc 成形型およびその製造方法
US6288842B1 (en) 2000-02-22 2001-09-11 3M Innovative Properties Sheeting with composite image that floats
US6696157B1 (en) 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
US6560248B1 (en) 2000-06-08 2003-05-06 Mania Barco Nv System, method and article of manufacture for improved laser direct imaging a printed circuit board utilizing a mode locked laser and scophony operation
US6852766B1 (en) 2000-06-15 2005-02-08 3M Innovative Properties Company Multiphoton photosensitization system
AU2001270320A1 (en) * 2000-06-15 2001-12-24 3M Innovative Properties Company Multicolor imaging using multiphoton photochemical processes
DE60139620D1 (de) * 2000-06-15 2009-10-01 3M Innovative Properties Co Methode und gerät zur erzielung wiederholter multiphotonabsorption
US7118845B2 (en) * 2000-06-15 2006-10-10 3M Innovative Properties Company Multiphoton photochemical process and articles preparable thereby
US7381516B2 (en) 2002-10-02 2008-06-03 3M Innovative Properties Company Multiphoton photosensitization system
JP2004503928A (ja) 2000-06-15 2004-02-05 スリーエム　イノベイティブ　プロパティズ　カンパニー 多方向光反応吸収方法
WO2001096958A2 (en) * 2000-06-15 2001-12-20 3M Innovative Properties Company Process for producing microfluidic articles
ATE433129T1 (de) * 2000-06-15 2009-06-15 3M Innovative Properties Co Mikroherstellungsverfahren für organische optische bauteile
DE10034737C2 (de) 2000-07-17 2002-07-11 Fraunhofer Ges Forschung Verfahren zur Herstellung einer permanenten Entformungsschicht durch Plasmapolymerisation auf der Oberfläche eines Formteilwerkzeugs, ein nach dem Verfahren herstellbares Formteilwerkzeug und dessen Verwendung
JP2001287273A (ja) * 2001-03-12 2001-10-16 Three D Syst Inc 立体造形方法及び装置
ATE526135T1 (de) 2001-03-26 2011-10-15 Novartis Ag Giessform und verfahren zur herstellung von opthalmischen linsen
US20020192569A1 (en) 2001-05-15 2002-12-19 The Chromaline Corporation Devices and methods for exposure of photoreactive compositions with light emitting diodes
KR100490873B1 (ko) 2001-05-17 2005-05-23 한국과학기술연구원 초소형 렌즈 어레이 제조방법
US6904225B2 (en) 2001-05-22 2005-06-07 Nichia Corporation Optical waveguide plate of surface light emitting apparatus
JP2003001599A (ja) * 2001-06-25 2003-01-08 Japan Science & Technology Corp 三次元微小構造物の製造方法及びその装置
US20030006535A1 (en) 2001-06-26 2003-01-09 Michael Hennessey Method and apparatus for forming microstructures on polymeric substrates
DE10131156A1 (de) 2001-06-29 2003-01-16 Fraunhofer Ges Forschung Arikel mit plasmapolymerer Beschichtung und Verfahren zu dessen Herstellung
US6804062B2 (en) 2001-10-09 2004-10-12 California Institute Of Technology Nonimaging concentrator lens arrays and microfabrication of the same
US6948448B2 (en) 2001-11-27 2005-09-27 General Electric Company Apparatus and method for depositing large area coatings on planar surfaces
US7887889B2 (en) 2001-12-14 2011-02-15 3M Innovative Properties Company Plasma fluorination treatment of porous materials
US6750266B2 (en) 2001-12-28 2004-06-15 3M Innovative Properties Company Multiphoton photosensitization system
JP2003233200A (ja) * 2002-02-08 2003-08-22 Sony Corp 露光方法および露光装置
JP3801100B2 (ja) * 2002-06-07 2006-07-26 Ｊｓｒ株式会社 光硬化造形装置、光硬化造形方法及び光硬化造形システム
US20060072438A1 (en) * 2002-09-30 2006-04-06 Seiji Nishino Optical information recording substrate and recording/reproducing device using it
US20030155667A1 (en) 2002-12-12 2003-08-21 Devoe Robert J Method for making or adding structures to an article
US7478942B2 (en) 2003-01-23 2009-01-20 Samsung Electronics Co., Ltd. Light guide plate with light reflection pattern
US7537369B2 (en) 2003-02-28 2009-05-26 Sharp Kabushiki Kaisha Surface radiation conversion element, liquid crystal display device, and method of producing a surface radiation conversion element
JP4269745B2 (ja) 2003-03-31 2009-05-27 株式会社日立製作所 スタンパ及び転写装置
US20040202865A1 (en) 2003-04-08 2004-10-14 Andrew Homola Release coating for stamper
US7070406B2 (en) 2003-04-29 2006-07-04 Hewlett-Packard Development Company, L.P. Apparatus for embossing a flexible substrate with a pattern carried by an optically transparent compliant media
JP2005084617A (ja) * 2003-09-11 2005-03-31 Fuji Photo Film Co Ltd 多光子吸収露光方法および装置
EP1538482B1 (en) 2003-12-05 2016-02-17 Obducat AB Device and method for large area lithography
DK1704585T3 (en) 2003-12-19 2017-05-22 Univ North Carolina Chapel Hill Methods for preparing isolated micro- and nanostructures using soft lithography or printing lithography
US7632087B2 (en) 2003-12-19 2009-12-15 Wd Media, Inc. Composite stamper for imprint lithography
US9040090B2 (en) 2003-12-19 2015-05-26 The University Of North Carolina At Chapel Hill Isolated and fixed micro and nano structures and methods thereof
US20050273146A1 (en) 2003-12-24 2005-12-08 Synecor, Llc Liquid perfluoropolymers and medical applications incorporating same
US20050271794A1 (en) 2003-12-24 2005-12-08 Synecor, Llc Liquid perfluoropolymers and medical and cosmetic applications incorporating same
US7282324B2 (en) 2004-01-05 2007-10-16 Microchem Corp. Photoresist compositions, hardened forms thereof, hardened patterns thereof and metal patterns formed using them
WO2005087974A2 (en) 2004-03-05 2005-09-22 Applied Materials, Inc. Cvd processes for the deposition of amorphous carbon films
WO2005100961A2 (en) * 2004-04-19 2005-10-27 Phoseon Technology, Inc. Imaging semiconductor strucutures using solid state illumination
US20050254035A1 (en) 2004-05-11 2005-11-17 Chromaplex, Inc. Multi-photon lithography
US20050272599A1 (en) 2004-06-04 2005-12-08 Kenneth Kramer Mold release layer
JP4599553B2 (ja) * 2004-10-01 2010-12-15 国立大学法人北海道大学 レーザ加工方法および装置
JP2006165371A (ja) 2004-12-09 2006-06-22 Canon Inc 転写装置およびデバイス製造方法
US7297374B1 (en) 2004-12-29 2007-11-20 3M Innovative Properties Company Single- and multi-photon polymerizable pre-ceramic polymeric compositions
JP4674333B2 (ja) * 2005-01-18 2011-04-20 独立行政法人情報通信研究機構 レーザー加工装置、この装置を用いて製造した光デバイス
US20060207976A1 (en) * 2005-01-21 2006-09-21 Bovatsek James M Laser material micromachining with green femtosecond pulses
WO2006093963A1 (en) 2005-03-02 2006-09-08 The Trustees Of Boston College Structures and methods of replicating the same
WO2006098057A1 (ja) * 2005-03-17 2006-09-21 Osaka University ビーム光出力システム、ビーム光出力装置の制御方法、及び制御装置
KR100688866B1 (ko) 2005-04-07 2007-03-02 삼성전기주식회사 임프린트 장치, 시스템 및 방법
DE102005016955A1 (de) * 2005-04-12 2006-10-19 Universität Tübingen Verfahren und Vorrichtung zur Verarbeitung von Bild- und Volumendaten auf Basis statistischer Modelle
US7478791B2 (en) 2005-04-15 2009-01-20 3M Innovative Properties Company Flexible mold comprising cured polymerizable resin composition
KR100692742B1 (ko) 2005-05-13 2007-03-09 삼성전자주식회사 도광층을 갖는 키 패드 및 키 패드 어셈블리
EP1731962B1 (en) 2005-06-10 2008-12-31 Obducat AB Pattern replication with intermediate stamp
US7326948B2 (en) 2005-08-15 2008-02-05 Asml Netherlands B.V. Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method
JP2007057622A (ja) * 2005-08-22 2007-03-08 Ricoh Co Ltd 光学素子及びその製造方法、光学素子用形状転写型の製造方法及び光学素子用転写型
KR100610336B1 (ko) 2005-09-12 2006-08-09 김형준 키패드 백라이트용 도광판 및 그 제조 방법
WO2007051803A1 (de) 2005-10-31 2007-05-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Entformungsschicht und verfahren zu ihrer herstellung
US7878791B2 (en) 2005-11-04 2011-02-01 Asml Netherlands B.V. Imprint lithography
US7583444B1 (en) 2005-12-21 2009-09-01 3M Innovative Properties Company Process for making microlens arrays and masterforms
DE112006003494T5 (de) 2005-12-21 2008-10-30 3M Innovative Properties Co., Saint Paul Verfahren und Vorrichtung zur Verarbeitung von mehrphotonen-aushärtbaren photoreaktiven Zusammensetzungen
US20080319404A1 (en) 2005-12-21 2008-12-25 Pekurovsky Mikhail L Microneedle Devices
KR100802553B1 (ko) 2005-12-27 2008-02-20 케이 비 광통신 주식회사 휴대용 무선단말기의 키패드 백라이팅 장치
US7545569B2 (en) 2006-01-13 2009-06-09 Avery Dennison Corporation Optical apparatus with flipped compound prism structures
CA2643510C (en) 2006-02-27 2014-04-29 Microcontinuum, Inc. Formation of pattern replicating tools
TWM298289U (en) 2006-03-17 2006-09-21 Hon Hai Prec Ind Co Ltd Light guide plates and electronic products using the same
US20070216049A1 (en) 2006-03-20 2007-09-20 Heptagon Oy Method and tool for manufacturing optical elements
WO2007112309A2 (en) 2006-03-24 2007-10-04 3M Innovative Properties Company Process for making microneedles, microneedle arrays, masters, and replication tools
JP2009537870A (ja) 2006-05-18 2009-10-29 スリーエム イノベイティブ プロパティズ カンパニー 抽出構造体を備えた導光体の製造方法及びその方法で製造された導光体
TWI322927B (en) 2006-05-24 2010-04-01 Ind Tech Res Inst Roller module for microstructure thin film imprint
TW200745490A (en) 2006-06-07 2007-12-16 Jeng Shiang Prec Ind Co Ltd Light guide plate
US20080007964A1 (en) 2006-07-05 2008-01-10 Tai-Yen Lin Light guiding structure
US20080083886A1 (en) 2006-09-14 2008-04-10 3M Innovative Properties Company Optical system suitable for processing multiphoton curable photoreactive compositions
US7551359B2 (en) 2006-09-14 2009-06-23 3M Innovative Properties Company Beam splitter apparatus and system
US8241713B2 (en) 2007-02-21 2012-08-14 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US7891636B2 (en) 2007-08-27 2011-02-22 3M Innovative Properties Company Silicone mold and use thereof
CN101795961B (zh) 2007-09-06 2013-05-01 3M创新有限公司 用于制备微结构化制品的工具
US8322874B2 (en) 2007-09-06 2012-12-04 3M Innovative Properties Company Lightguides having light extraction structures providing regional control of light output
CN101795838B (zh) 2007-09-06 2014-02-12 3M创新有限公司 形成模具的方法以及使用所述模具形成制品的方法
EP2207820A4 (en) 2007-10-11 2011-10-26 3M Innovative Properties Co HIGHLY FUNCTIONAL REACTIVE SPECIES WITH MULTIPHOTONIC HARDENING
US8451457B2 (en) 2007-10-11 2013-05-28 3M Innovative Properties Company Chromatic confocal sensor
US8586285B2 (en) 2007-11-27 2013-11-19 3M Innovative Properties Company Methods for forming sheeting with a composite image that floats and a master tooling
EP2232531B1 (en) 2007-12-12 2018-09-19 3M Innovative Properties Company Method for making structures with improved edge definition
US8080073B2 (en) 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
US8570270B2 (en) 2009-10-19 2013-10-29 Apple Inc. Backlight unit color compensation techniques
TWM385715U (en) 2009-12-14 2010-08-01 Chunghwa Picture Tubes Ltd Backlight module

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1842747A (zh) * 2003-08-27 2006-10-04 皇家飞利浦电子股份有限公司 形成光学图像的方法、用于执行所述方法的设备以及使用所述方法制作装置的处理
EP1630612A2 (en) * 2004-08-25 2006-03-01 Seiko Epson Corporation Method for manufacturing a microstructure, exposure device, and electronic apparatus

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