CN101877575B - 弯曲振动片 - Google Patents

弯曲振动片 Download PDF

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Publication number
CN101877575B
CN101877575B CN201010170631XA CN201010170631A CN101877575B CN 101877575 B CN101877575 B CN 101877575B CN 201010170631X A CN201010170631X A CN 201010170631XA CN 201010170631 A CN201010170631 A CN 201010170631A CN 101877575 B CN101877575 B CN 101877575B
Authority
CN
China
Prior art keywords
vibrating arm
groove
vibrating
longitudinal direction
vibration piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201010170631XA
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English (en)
Chinese (zh)
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CN101877575A (zh
Inventor
山崎隆
古畑诚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Publication of CN101877575A publication Critical patent/CN101877575A/zh
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Publication of CN101877575B publication Critical patent/CN101877575B/zh
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201010170631XA 2009-04-30 2010-04-30 弯曲振动片 Expired - Fee Related CN101877575B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-111256 2009-04-30
JP2009111256A JP5272880B2 (ja) 2009-04-30 2009-04-30 屈曲振動片

Publications (2)

Publication Number Publication Date
CN101877575A CN101877575A (zh) 2010-11-03
CN101877575B true CN101877575B (zh) 2013-05-08

Family

ID=43020052

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010170631XA Expired - Fee Related CN101877575B (zh) 2009-04-30 2010-04-30 弯曲振动片

Country Status (3)

Country Link
US (1) US7932664B2 (enExample)
JP (1) JP5272880B2 (enExample)
CN (1) CN101877575B (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201032470A (en) * 2008-10-24 2010-09-01 Seiko Epson Corp Bending vibration piece, bending vibrator, and piezoelectric device
JP5272880B2 (ja) * 2009-04-30 2013-08-28 セイコーエプソン株式会社 屈曲振動片
JP5482541B2 (ja) * 2009-10-01 2014-05-07 セイコーエプソン株式会社 振動片、振動子、発振器、及び電子機器
US20110215680A1 (en) * 2010-03-05 2011-09-08 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP2012249246A (ja) * 2011-05-31 2012-12-13 Kyocera Crystal Device Corp 音叉型屈曲水晶振動素子
JP2012249244A (ja) * 2011-05-31 2012-12-13 Kyocera Crystal Device Corp 音叉型屈曲水晶振動素子
JP5724672B2 (ja) * 2011-06-24 2015-05-27 セイコーエプソン株式会社 屈曲振動片、その製造方法、及び電子機器
JP5839919B2 (ja) * 2011-09-28 2016-01-06 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、および電波時計
KR101532115B1 (ko) * 2011-12-01 2015-06-29 삼성전기주식회사 압전 진동자 및 그 제조 방법
JP2013192013A (ja) * 2012-03-13 2013-09-26 Seiko Epson Corp 振動素子、振動デバイスおよび電子機器
JP2013251672A (ja) * 2012-05-31 2013-12-12 Seiko Epson Corp 振動片、電子デバイス、電子機器および振動片の製造方法
JP6080449B2 (ja) 2012-09-18 2017-02-15 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP6155897B2 (ja) * 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
JP6435596B2 (ja) * 2013-08-09 2018-12-12 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、および移動体
JP6582501B2 (ja) * 2015-04-02 2019-10-02 セイコーエプソン株式会社 振動素子、振動子、電子機器および移動体
EP3468036A1 (fr) 2017-10-03 2019-04-10 Micro Crystal AG Résonateur piezo-electrique de petite taille
US10665368B2 (en) * 2018-04-17 2020-05-26 3M Innovative Properties Company Cable support
WO2019211926A1 (ja) * 2018-05-02 2019-11-07 株式会社村田製作所 共振子及び共振装置
US11541688B2 (en) * 2018-05-10 2023-01-03 Aktiebolaget Skf Wheel hub assembly provided with piezoelectric spacers
CN114189228B (zh) * 2021-11-16 2022-09-02 苏州亿波达光电子科技有限公司 一种石英音叉谐振器及其制备方法
CN114157268B (zh) * 2021-12-06 2022-12-20 苏州亿波达光电子科技有限公司 一种石英晶体谐振器及其制造方法
CN117767908A (zh) * 2023-12-27 2024-03-26 天津大学 一种音叉型压电振动片及振荡器

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101495836A (zh) * 2006-07-21 2009-07-29 株式会社村田制作所 音片型振子以及使用了该音片型振子的振动陀螺仪

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5393792A (en) * 1977-01-26 1978-08-17 Seiko Instr & Electronics Ltd Crystal vibrator
FR2467487A1 (fr) * 1979-10-15 1981-04-17 Ebauches Sa Resonateur piezoelectrique
JP2625511B2 (ja) 1988-07-21 1997-07-02 株式会社クボタ 穀粒選別装置用穀粒分布検出装置
JPH06112760A (ja) * 1992-09-25 1994-04-22 Seiko Electronic Components Ltd 捩り水晶振動子
WO2000044092A1 (en) 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator
JP2002261575A (ja) 2000-12-25 2002-09-13 Seiko Epson Corp 振動片、振動子、発振器及び電子機器
JP3900846B2 (ja) * 2001-03-02 2007-04-04 セイコーエプソン株式会社 音叉型水晶振動片、振動子、発振器及び携帯用電話装置
JP2004135052A (ja) * 2002-10-10 2004-04-30 Nippon Dempa Kogyo Co Ltd 音叉型振動子
JP4281348B2 (ja) * 2002-12-17 2009-06-17 セイコーエプソン株式会社 圧電振動片と圧電振動片を利用した圧電デバイス、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4257138B2 (ja) * 2003-02-12 2009-04-22 京セラキンセキヘルツ株式会社 音叉型水晶振動子
JP2004260718A (ja) 2003-02-27 2004-09-16 Seiko Epson Corp 音叉型振動片及び音叉型振動片の製造方法並びに圧電デバイス
JP4316903B2 (ja) * 2003-03-11 2009-08-19 リバーエレテック株式会社 屈曲振動子
JP4593203B2 (ja) * 2004-08-24 2010-12-08 リバーエレテック株式会社 音叉型水晶振動子及びその製造方法
EP1672315B1 (fr) * 2004-12-20 2007-09-26 ETA SA Manufacture Horlogère Suisse Transducteur de mesure d'une vitesse angulaire
JP4638263B2 (ja) * 2005-03-23 2011-02-23 リバーエレテック株式会社 音叉型屈曲振動子
JP4404218B2 (ja) * 2006-03-29 2010-01-27 セイコーエプソン株式会社 音叉振動子およびその製造方法
JP2007285879A (ja) * 2006-04-17 2007-11-01 Seiko Epson Corp 角速度センサおよびその製造方法
JP4578499B2 (ja) * 2007-03-30 2010-11-10 京セラキンセキ株式会社 音叉型屈曲水晶振動素子、及びそれを搭載した水晶振動子並びに水晶発振器
US8234774B2 (en) * 2007-12-21 2012-08-07 Sitime Corporation Method for fabricating a microelectromechanical system (MEMS) resonator
JP2010193133A (ja) * 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP5272880B2 (ja) * 2009-04-30 2013-08-28 セイコーエプソン株式会社 屈曲振動片

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101495836A (zh) * 2006-07-21 2009-07-29 株式会社村田制作所 音片型振子以及使用了该音片型振子的振动陀螺仪

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2006-270335A 2006.10.05

Also Published As

Publication number Publication date
US7932664B2 (en) 2011-04-26
JP5272880B2 (ja) 2013-08-28
US20100277041A1 (en) 2010-11-04
CN101877575A (zh) 2010-11-03
JP2010263317A (ja) 2010-11-18

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: SEIKO EPSON CORP.

Free format text: FORMER OWNER: EPSON TOYOCOM CORP.

Effective date: 20111013

Free format text: FORMER OWNER: SEIKO EPSON CORP.

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20111013

Address after: Tokyo, Japan, Japan

Applicant after: Seiko Epson Corp.

Address before: Japan Tokyo Hino Hino 421-8

Applicant before: Epson Toyocom Corp.

Co-applicant before: Seiko Epson Corp.

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130508

Termination date: 20160430