CN101772690B - 表面传感器偏移 - Google Patents

表面传感器偏移 Download PDF

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Publication number
CN101772690B
CN101772690B CN200880024540.6A CN200880024540A CN101772690B CN 101772690 B CN101772690 B CN 101772690B CN 200880024540 A CN200880024540 A CN 200880024540A CN 101772690 B CN101772690 B CN 101772690B
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China
Prior art keywords
probe
surface probe
skew
around
axis
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CN200880024540.6A
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Chinese (zh)
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CN101772690A (zh
Inventor
戴维·斯文·瓦利亚塞
琼·路易斯·格热西亚克
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Renishaw PLC
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Renishaw PLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
CN200880024540.6A 2007-07-13 2008-07-11 表面传感器偏移 Active CN101772690B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0713639.3A GB0713639D0 (en) 2007-07-13 2007-07-13 Error correction
GB0713639.3 2007-07-13
PCT/GB2008/002375 WO2009010721A1 (en) 2007-07-13 2008-07-11 Surface sensor offset

Publications (2)

Publication Number Publication Date
CN101772690A CN101772690A (zh) 2010-07-07
CN101772690B true CN101772690B (zh) 2014-08-20

Family

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CN200880024540.6A Active CN101772690B (zh) 2007-07-13 2008-07-11 表面传感器偏移

Country Status (6)

Country Link
US (1) US8756973B2 (enExample)
EP (2) EP2167911B1 (enExample)
JP (2) JP5706158B2 (enExample)
CN (1) CN101772690B (enExample)
GB (1) GB0713639D0 (enExample)
WO (1) WO2009010721A1 (enExample)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL2013568T3 (pl) * 2006-04-06 2009-10-30 Hexagon Metrology Spa Maszyna do mierzenia współrzędnych z poziomym ramieniem
JP5330297B2 (ja) * 2009-05-26 2013-10-30 株式会社ミツトヨ アライメント調整機構、および測定装置
JP5491098B2 (ja) * 2009-08-11 2014-05-14 オークマ株式会社 工作機械のタッチプローブのキャリブレーション方法及び工作機械
GB201003363D0 (en) 2010-03-01 2010-04-14 Renishaw Plc Measurement method and apparatus
EP2381212B1 (en) * 2010-04-26 2018-04-25 Tesa Sa Coordinate measuring system for rotationally symmetric workpieces
JP5595798B2 (ja) * 2010-06-10 2014-09-24 Ｄｍｇ森精機株式会社 工作機械における工作物測定方法およびその装置
DE102011053117B4 (de) 2010-09-06 2023-02-23 Hexagon Metrology Gmbh Verfahren zum Kalibrieren eines Taststiftes eines Koordinatenmessgerätes sowie zur Korrektur von Messergebnissen
EP2453325A1 (en) * 2010-11-16 2012-05-16 Universal Robots ApS Method and means for controlling a robot
JP5695410B2 (ja) * 2010-12-20 2015-04-08 株式会社ミツトヨ 角度検出装置およびその偏心量推定方法
EP2729763A1 (de) * 2011-07-08 2014-05-14 Carl Zeiss Industrielle Messtechnik GmbH Korrektur und/oder vermeidung von fehlern bei der messung von koordinaten eines werkstücks
CN104991518B (zh) 2011-09-28 2018-10-09 Ur机器人有限公司 机器人的校准和编程
CN103842766B (zh) * 2011-10-06 2017-05-24 瑞尼斯豪公司 测量方法
GB201204947D0 (en) * 2012-03-21 2012-05-02 Renishaw Plc Method and apparatus for inspecting workpieces
US20170363403A1 (en) * 2012-03-21 2017-12-21 Renishaw Plc Method and apparatus for inspecting workpieces
JP6242856B2 (ja) 2012-04-18 2017-12-06 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 工作機械を使用してフィーチャを発見する方法
WO2013156765A1 (en) 2012-04-18 2013-10-24 Renishaw Plc A method of analogue measurement scanning on a machine tool and corresponding machine tool apparatus
EP3239653B1 (en) 2012-04-18 2018-11-21 Renishaw plc Method of measurement on a machine tool and corresponding machine tool
US9222769B2 (en) * 2012-12-08 2015-12-29 Grale Technologies High speed metrology with numerically controlled machines
GB201311600D0 (en) * 2013-06-28 2013-08-14 Renishaw Plc Calibration of a contact probe
CN104251676A (zh) * 2013-06-28 2014-12-31 鸿富锦精密工业（深圳）有限公司 三次元测量装置
JP6144157B2 (ja) * 2013-08-26 2017-06-07 株式会社ミツトヨ 形状測定装置及びｖ溝求心測定方法
JP6175738B2 (ja) * 2013-10-10 2017-08-09 株式会社東京精密 三次元測定機を用いた円測定方法
RU2688977C2 (ru) 2014-03-04 2019-05-23 Юниверсал Роботс А/С Система безопасности для промышленного робота
JP6448242B2 (ja) * 2014-07-18 2019-01-09 株式会社ミツトヨ 形状測定装置の測定誤差の補正方法及び形状測定装置
CN104457640A (zh) * 2014-09-05 2015-03-25 合肥工业大学 用于关节类坐标测量机标定的常见虚拟几何特征标准件
US10195746B2 (en) 2014-09-26 2019-02-05 Teradyne, Inc. Grasping gripper
US9952044B2 (en) 2015-02-02 2018-04-24 Rolls-Royce North American Technologies, Inc. Multi-axis calibration block
US10850393B2 (en) 2015-07-08 2020-12-01 Universal Robots A/S Method for extending end user programming of an industrial robot with third party contributions
JP6585476B2 (ja) * 2015-11-17 2019-10-02 ローランドディー．ジー．株式会社 補正方法および補正装置
TWI805545B (zh) 2016-04-12 2023-06-21 丹麥商環球機器人公司 用於藉由示範來程式化機器人之方法和電腦程式產品
US11162914B2 (en) * 2016-06-30 2021-11-02 Kitz Corporation Pressure-resistance inspection apparatus for valves and its inspection method, and hydrogen gas detection unit
JP6341962B2 (ja) * 2016-08-26 2018-06-13 株式会社ミツトヨ 三次元測定装置及び座標補正方法
JP2018031754A (ja) * 2016-08-26 2018-03-01 株式会社ミツトヨ 三次元測定装置及び座標補正方法
CN109964098B (zh) * 2016-11-16 2022-10-14 瑞尼斯豪公司 坐标定位设备以及操作方法
CN106643616A (zh) * 2016-12-27 2017-05-10 广东长盈精密技术有限公司 接触式分中测量方法
DE102017201827A1 (de) * 2017-02-06 2018-08-09 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren zur Korrektur von Abweichungen in einem Herstellungsprozess eines Gegenstands
GB201702391D0 (en) 2017-02-14 2017-03-29 Renishaw Plc Surface sensing device
JP2019007762A (ja) * 2017-06-21 2019-01-17 中村留精密工業株式会社 タッチプローブを用いた計測方法
JP6344630B2 (ja) * 2017-07-12 2018-06-20 株式会社東京精密 三次元測定機を用いた円測定方法
DE102018103420A1 (de) * 2018-02-15 2019-08-22 Jenoptik Industrial Metrology Germany Gmbh Messgerät zur Oberflächen- oder Konturmessung
EP3752790B1 (en) * 2018-02-18 2023-01-25 The L.S. Starrett Company Metrology device with automated compensation and/or alert for orientation errors
DK180508B1 (en) 2019-10-22 2021-06-03 Universal Robots As Maintaining free-drive mode of robot arm for period of time
EP4049104B1 (en) 2019-10-22 2026-02-18 Universal Robots A/S Robot arm with adaptive three-dimensional boundary in free-drive
US12384019B2 (en) 2019-10-22 2025-08-12 Universal Robots A/S Safe activation of free-drive mode of robot arm
GB202002562D0 (en) 2020-02-24 2020-04-08 Renishaw Plc Measurement method
US11524410B2 (en) * 2020-06-12 2022-12-13 Hexagon Metrology, Inc. Robotic alignment method for workpiece measuring systems
USD1082878S1 (en) 2022-01-14 2025-07-08 Universal Robots A/S Robot joint
USD1099187S1 (en) 2022-01-14 2025-10-21 Universal Robots A/S Robot joint
US11709045B1 (en) * 2022-02-19 2023-07-25 National Institute Of Metrology, China Surface texture probe and measurement apparatus with a vibrational membrane
CN116147564B (zh) * 2023-02-23 2023-09-12 泰微科技(珠海)有限公司 三维表面形貌测量方法及装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1207807A (zh) * 1995-12-07 1999-02-10 泰勒·霍布森有限公司 表面形状的测量
CN1882821A (zh) * 2003-11-13 2006-12-20 瑞尼斯豪公司 对具有铰接探头的坐标测量仪进行误差补偿的方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2108715B (en) * 1981-09-15 1985-05-01 Renishaw Electrical Ltd Method of operating a machine tool
DE3740070A1 (de) * 1987-11-26 1989-06-08 Zeiss Carl Fa Dreh-schwenk-einrichtung fuer tastkoepfe von koordinatenmessgeraeten
US5189806A (en) 1988-12-19 1993-03-02 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
GB8908854D0 (en) 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
DE4001433A1 (de) 1990-01-19 1991-07-25 Zeiss Carl Fa Korrekturverfahren fuer koordinatenmessgeraete
GB9517214D0 (en) 1995-08-23 1995-10-25 Renishaw Plc Calibration of an articulating probe head for a coordinating positioning machine
US6895682B2 (en) * 2002-11-08 2005-05-24 North Carolina State University Polar coordinate-based profilometer and methods
JP4163545B2 (ja) 2003-04-11 2008-10-08 株式会社ミツトヨ 真円度測定機用基準治具
US6823713B2 (en) * 2003-04-11 2004-11-30 Infineon Technologies Ag Scanning tip orientation adjustment method for atomic force microscopy
GB0322115D0 (en) * 2003-09-22 2003-10-22 Renishaw Plc Method of error compensation
GB0508217D0 (en) * 2005-04-25 2005-06-01 Renishaw Plc Method for scanning the surface of a workpiece
US7712224B2 (en) * 2007-10-03 2010-05-11 Hexagon Metrology Ab Validating the error map of CMM using calibrated probe
US7905027B2 (en) * 2009-07-01 2011-03-15 Hexagon Metrology, Inc. Method and apparatus for probe tip diameter calibration

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1207807A (zh) * 1995-12-07 1999-02-10 泰勒·霍布森有限公司 表面形状的测量
CN1882821A (zh) * 2003-11-13 2006-12-20 瑞尼斯豪公司 对具有铰接探头的坐标测量仪进行误差补偿的方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
WECKENMANN A ET AL，.BEURTEILUNG DER GENAUIGKEIT VON FORMPRUEFGERAETEN.《WERKSTATTSTECHNIK》.SPRINGER VERLAG,1988,第78卷(第3期),第165-170页. *

Also Published As

Publication number Publication date
JP6013533B2 (ja) 2016-10-25
EP2167911A1 (en) 2010-03-31
EP2167911B1 (en) 2013-05-22
GB0713639D0 (en) 2007-08-22
JP2010533303A (ja) 2010-10-21
US8756973B2 (en) 2014-06-24
US20100132432A1 (en) 2010-06-03
WO2009010721A1 (en) 2009-01-22
CN101772690A (zh) 2010-07-07
EP2543958A1 (en) 2013-01-09
JP5706158B2 (ja) 2015-04-22
JP2015127714A (ja) 2015-07-09

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