CN101720366B - 具有涂层的工具 - Google Patents

具有涂层的工具 Download PDF

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Publication number
CN101720366B
CN101720366B CN2008800226886A CN200880022688A CN101720366B CN 101720366 B CN101720366 B CN 101720366B CN 2008800226886 A CN2008800226886 A CN 2008800226886A CN 200880022688 A CN200880022688 A CN 200880022688A CN 101720366 B CN101720366 B CN 101720366B
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CN
China
Prior art keywords
cutting tool
layer
multiphase
tool according
conductive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008800226886A
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English (en)
Chinese (zh)
Other versions
CN101720366A (zh
Inventor
法伊特·席尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Walter AG
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Walter AG
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Publication date
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Publication of CN101720366A publication Critical patent/CN101720366A/zh
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Expired - Fee Related legal-status Critical Current
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F2005/001—Cutting tools, earth boring or grinding tool other than table ware
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
CN2008800226886A 2007-07-02 2008-05-16 具有涂层的工具 Expired - Fee Related CN101720366B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007030734A DE102007030734A1 (de) 2007-07-02 2007-07-02 Beschichtetes Werkzeug
DE102007030734.0 2007-07-02
PCT/EP2008/056038 WO2009003756A1 (de) 2007-07-02 2008-05-16 Beschichtetes werkzeug

Publications (2)

Publication Number Publication Date
CN101720366A CN101720366A (zh) 2010-06-02
CN101720366B true CN101720366B (zh) 2013-01-16

Family

ID=39651142

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008800226886A Expired - Fee Related CN101720366B (zh) 2007-07-02 2008-05-16 具有涂层的工具

Country Status (8)

Country Link
US (1) US8491996B2 (enExample)
EP (1) EP2167705B1 (enExample)
JP (1) JP5438001B2 (enExample)
KR (1) KR20100049572A (enExample)
CN (1) CN101720366B (enExample)
DE (1) DE102007030734A1 (enExample)
ES (1) ES2525331T3 (enExample)
WO (1) WO2009003756A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8882870B2 (en) 2010-08-04 2014-11-11 Tungaloy Corporation Coated tool
CN102061454B (zh) * 2011-01-20 2012-08-22 厦门金鹭特种合金有限公司 一种在刀具上涂覆涂层的制备方法
US10639768B2 (en) * 2011-05-27 2020-05-05 P&S Global Holdings Llc Multi-layer coating with cubic boron nitride particles
DE102011053372A1 (de) * 2011-09-07 2013-03-07 Walter Ag Werkzeug mit chromhaltiger Funktionsschicht
DE102012017731A1 (de) * 2012-09-08 2014-03-13 Oerlikon Trading Ag, Trübbach Ti-Al-Ta-basierte Beschichtung mit einer verbesserten Temperaturbeständigkeit
FR2996679A1 (fr) * 2012-10-09 2014-04-11 St Microelectronics Crolles 2 Procede de depot d'une couche de tialn peu diffusive et grille isolee comprenant une telle couche
CN104481997A (zh) * 2014-11-19 2015-04-01 广东龙丰精密铜管有限公司 一种基于pvd表面强化的内螺纹芯头及其制造方法
EP3417084B1 (en) 2016-02-19 2023-07-26 Walter AG Cutting tool
US11047034B1 (en) 2017-01-30 2021-06-29 United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Conductive high toughness oxides deposited by plasma spray—physical vapor deposition (PS-PVD)
EP3406751A1 (en) * 2017-05-24 2018-11-28 Walter Ag A coated cutting tool and a method for its production
CN109082641B (zh) * 2018-08-28 2020-05-22 华南理工大学 一种三层膜结构涂层及其制备方法
CN114381690B (zh) * 2022-01-11 2024-03-01 厦门钨业股份有限公司 一种CrAlMeN-CrAlN纳米多层结构涂层及其制备方法与用途

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5447804A (en) * 1991-05-16 1995-09-05 Balzers Aktiengesellschaft Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating
DE19937284A1 (de) * 1999-08-06 2001-02-15 Gfo Ges Fuer Oberflaechentech Elektrisch leitender Mehrschichtaufbau

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3498837A (en) * 1967-01-11 1970-03-03 Ibm Vacuum coating chromium-chromium oxide on recording member
US3990860A (en) * 1975-11-20 1976-11-09 Nasa High temperature oxidation resistant cermet compositions
US4668528A (en) * 1986-04-09 1987-05-26 Massachusetts Institute Of Technology Method and apparatus for photodeposition of films on surfaces
JP3027502B2 (ja) * 1993-03-15 2000-04-04 健 増本 耐摩耗性非晶質硬質膜及びその製造方法
US5879823A (en) 1995-12-12 1999-03-09 Kennametal Inc. Coated cutting tool
EP0832993A1 (de) * 1996-09-23 1998-04-01 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Schichtsystem, Verfahren zur Herstellung desselben und Metallsubstrat mit einem derartigen Schichtsystem
DE59606970D1 (de) * 1996-10-09 2001-06-28 Widia Gmbh Verbundkörper, verfahren zu seiner herstellung und verwendung des verbundkörpers
DE19641468A1 (de) 1996-10-09 1998-04-16 Widia Gmbh Verbundkörper
US6235416B1 (en) * 1997-01-21 2001-05-22 Widia Gmbh Composite body and production process
DE19737470A1 (de) 1997-01-21 1998-07-23 Widia Gmbh Verbundkörper und Verfahren zu seiner Herstellung
SE518134C2 (sv) * 1997-12-10 2002-09-03 Sandvik Ab Multiskiktbelagt skärverktyg
DE59903347D1 (de) 1998-09-24 2002-12-12 Widia Gmbh Verbundwerkstoff-überzug und verfahren zu seiner herstellung
JP4502475B2 (ja) * 2000-08-04 2010-07-14 株式会社神戸製鋼所 硬質皮膜および耐摩耗部材並びにその製造方法
AT5008U1 (de) * 2001-02-09 2002-02-25 Plansee Tizit Ag Hartmetallverschleissteil mit mischoxidschicht
US6767627B2 (en) * 2002-12-18 2004-07-27 Kobe Steel, Ltd. Hard film, wear-resistant object and method of manufacturing wear-resistant object
US7581906B2 (en) * 2004-05-19 2009-09-01 Tdy Industries, Inc. Al2O3 ceramic tools with diffusion bonding enhanced layer
DE102004044240A1 (de) * 2004-09-14 2006-03-30 Walter Ag Schneidwerkzeug mit oxidischer Beschichtung
US7939181B2 (en) * 2006-10-11 2011-05-10 Oerlikon Trading Ag, Trubbach Layer system with at least one mixed crystal layer of a multi-oxide

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5447804A (en) * 1991-05-16 1995-09-05 Balzers Aktiengesellschaft Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating
DE19937284A1 (de) * 1999-08-06 2001-02-15 Gfo Ges Fuer Oberflaechentech Elektrisch leitender Mehrschichtaufbau

Also Published As

Publication number Publication date
CN101720366A (zh) 2010-06-02
DE102007030734A1 (de) 2009-01-08
JP5438001B2 (ja) 2014-03-12
ES2525331T3 (es) 2014-12-22
JP2010531742A (ja) 2010-09-30
EP2167705A1 (de) 2010-03-31
EP2167705B1 (de) 2014-09-17
US20100260560A1 (en) 2010-10-14
KR20100049572A (ko) 2010-05-12
WO2009003756A1 (de) 2009-01-08
US8491996B2 (en) 2013-07-23

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20130116

Termination date: 20190516

CF01 Termination of patent right due to non-payment of annual fee