DE102007030734A1 - Beschichtetes Werkzeug - Google Patents

Beschichtetes Werkzeug Download PDF

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Publication number
DE102007030734A1
DE102007030734A1 DE102007030734A DE102007030734A DE102007030734A1 DE 102007030734 A1 DE102007030734 A1 DE 102007030734A1 DE 102007030734 A DE102007030734 A DE 102007030734A DE 102007030734 A DE102007030734 A DE 102007030734A DE 102007030734 A1 DE102007030734 A1 DE 102007030734A1
Authority
DE
Germany
Prior art keywords
phase
cutting tool
layer
tool according
metal oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102007030734A
Other languages
German (de)
English (en)
Inventor
Veit Schier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Walter AG
Original Assignee
Walter AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Walter AG filed Critical Walter AG
Priority to DE102007030734A priority Critical patent/DE102007030734A1/de
Priority to ES08750326.4T priority patent/ES2525331T3/es
Priority to JP2010513814A priority patent/JP5438001B2/ja
Priority to KR1020107002336A priority patent/KR20100049572A/ko
Priority to CN2008800226886A priority patent/CN101720366B/zh
Priority to PCT/EP2008/056038 priority patent/WO2009003756A1/de
Priority to EP08750326.4A priority patent/EP2167705B1/de
Priority to US12/666,241 priority patent/US8491996B2/en
Publication of DE102007030734A1 publication Critical patent/DE102007030734A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/28—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass cutting tools
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3435—Applying energy to the substrate during sputtering
    • C23C14/345—Applying energy to the substrate during sputtering using substrate bias
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F2005/001—Cutting tools, earth boring or grinding tool other than table ware
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T407/00—Cutters, for shaping
    • Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
DE102007030734A 2007-07-02 2007-07-02 Beschichtetes Werkzeug Withdrawn DE102007030734A1 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE102007030734A DE102007030734A1 (de) 2007-07-02 2007-07-02 Beschichtetes Werkzeug
ES08750326.4T ES2525331T3 (es) 2007-07-02 2008-05-16 Herramienta revestida
JP2010513814A JP5438001B2 (ja) 2007-07-02 2008-05-16 被覆された工具
KR1020107002336A KR20100049572A (ko) 2007-07-02 2008-05-16 코팅된 공구
CN2008800226886A CN101720366B (zh) 2007-07-02 2008-05-16 具有涂层的工具
PCT/EP2008/056038 WO2009003756A1 (de) 2007-07-02 2008-05-16 Beschichtetes werkzeug
EP08750326.4A EP2167705B1 (de) 2007-07-02 2008-05-16 Beschichtetes werkzeug
US12/666,241 US8491996B2 (en) 2007-07-02 2008-05-16 Coated tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007030734A DE102007030734A1 (de) 2007-07-02 2007-07-02 Beschichtetes Werkzeug

Publications (1)

Publication Number Publication Date
DE102007030734A1 true DE102007030734A1 (de) 2009-01-08

Family

ID=39651142

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102007030734A Withdrawn DE102007030734A1 (de) 2007-07-02 2007-07-02 Beschichtetes Werkzeug

Country Status (8)

Country Link
US (1) US8491996B2 (enExample)
EP (1) EP2167705B1 (enExample)
JP (1) JP5438001B2 (enExample)
KR (1) KR20100049572A (enExample)
CN (1) CN101720366B (enExample)
DE (1) DE102007030734A1 (enExample)
ES (1) ES2525331T3 (enExample)
WO (1) WO2009003756A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013034598A1 (de) * 2011-09-07 2013-03-14 Walter Ag Werkzeug mit chromhaltiger funktionsschicht
WO2017140787A1 (en) 2016-02-19 2017-08-24 Walter Ag Cutting tool

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8882870B2 (en) 2010-08-04 2014-11-11 Tungaloy Corporation Coated tool
CN102061454B (zh) * 2011-01-20 2012-08-22 厦门金鹭特种合金有限公司 一种在刀具上涂覆涂层的制备方法
US10639768B2 (en) * 2011-05-27 2020-05-05 P&S Global Holdings Llc Multi-layer coating with cubic boron nitride particles
DE102012017731A1 (de) * 2012-09-08 2014-03-13 Oerlikon Trading Ag, Trübbach Ti-Al-Ta-basierte Beschichtung mit einer verbesserten Temperaturbeständigkeit
FR2996679A1 (fr) * 2012-10-09 2014-04-11 St Microelectronics Crolles 2 Procede de depot d'une couche de tialn peu diffusive et grille isolee comprenant une telle couche
CN104481997A (zh) * 2014-11-19 2015-04-01 广东龙丰精密铜管有限公司 一种基于pvd表面强化的内螺纹芯头及其制造方法
US11047034B1 (en) 2017-01-30 2021-06-29 United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Conductive high toughness oxides deposited by plasma spray—physical vapor deposition (PS-PVD)
EP3406751A1 (en) * 2017-05-24 2018-11-28 Walter Ag A coated cutting tool and a method for its production
CN109082641B (zh) * 2018-08-28 2020-05-22 华南理工大学 一种三层膜结构涂层及其制备方法
CN114381690B (zh) * 2022-01-11 2024-03-01 厦门钨业股份有限公司 一种CrAlMeN-CrAlN纳米多层结构涂层及其制备方法与用途

Citations (8)

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Publication number Priority date Publication date Assignee Title
US3498837A (en) * 1967-01-11 1970-03-03 Ibm Vacuum coating chromium-chromium oxide on recording member
DE19651592A1 (de) 1995-12-12 1997-06-19 Kennametal Inc Beschichtetes Schneidwerkzeug
DE19741800A1 (de) * 1996-09-23 1998-03-26 Fraunhofer Ges Forschung Schichtsystem, Verfahren zur Herstellung desselben und Metallsubstrat mit einem derartigen Schichtsystem
DE19641468A1 (de) 1996-10-09 1998-04-16 Widia Gmbh Verbundkörper
DE19737470A1 (de) 1997-01-21 1998-07-23 Widia Gmbh Verbundkörper und Verfahren zu seiner Herstellung
DE19942303A1 (de) 1998-09-24 2000-03-30 Widia Gmbh Verbundwerkstoff und Verfahren zu seiner Herstellung
DE19937284A1 (de) 1999-08-06 2001-02-15 Gfo Ges Fuer Oberflaechentech Elektrisch leitender Mehrschichtaufbau
DE102004044240A1 (de) 2004-09-14 2006-03-30 Walter Ag Schneidwerkzeug mit oxidischer Beschichtung

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US4668528A (en) * 1986-04-09 1987-05-26 Massachusetts Institute Of Technology Method and apparatus for photodeposition of films on surfaces
US5310607A (en) * 1991-05-16 1994-05-10 Balzers Aktiengesellschaft Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating
JP3027502B2 (ja) * 1993-03-15 2000-04-04 健 増本 耐摩耗性非晶質硬質膜及びその製造方法
ES2157021T3 (es) * 1996-10-09 2001-08-01 Widia Gmbh Cuerpo compuesto, procedimiento para su fabricacion y utilizacion del cuerpo compuesto.
EP0954622B1 (de) * 1997-01-21 2001-07-11 Widia GmbH Verbundkörper und verfahren zu seiner herstellung
SE518134C2 (sv) * 1997-12-10 2002-09-03 Sandvik Ab Multiskiktbelagt skärverktyg
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AT5008U1 (de) * 2001-02-09 2002-02-25 Plansee Tizit Ag Hartmetallverschleissteil mit mischoxidschicht
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3498837A (en) * 1967-01-11 1970-03-03 Ibm Vacuum coating chromium-chromium oxide on recording member
DE19651592A1 (de) 1995-12-12 1997-06-19 Kennametal Inc Beschichtetes Schneidwerkzeug
DE19741800A1 (de) * 1996-09-23 1998-03-26 Fraunhofer Ges Forschung Schichtsystem, Verfahren zur Herstellung desselben und Metallsubstrat mit einem derartigen Schichtsystem
DE19641468A1 (de) 1996-10-09 1998-04-16 Widia Gmbh Verbundkörper
DE19737470A1 (de) 1997-01-21 1998-07-23 Widia Gmbh Verbundkörper und Verfahren zu seiner Herstellung
DE19942303A1 (de) 1998-09-24 2000-03-30 Widia Gmbh Verbundwerkstoff und Verfahren zu seiner Herstellung
DE19937284A1 (de) 1999-08-06 2001-02-15 Gfo Ges Fuer Oberflaechentech Elektrisch leitender Mehrschichtaufbau
DE102004044240A1 (de) 2004-09-14 2006-03-30 Walter Ag Schneidwerkzeug mit oxidischer Beschichtung

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* Cited by examiner, † Cited by third party
Title
DIN-ISO 1832
JAANISO,R.,et.al.:Electrical and Gas Sensing Prope rties of Cr2O3-TiO2 Thin Films made by Pulse d Laser Deposition.In:IEEE Sensors 2006,22-25 Okt. 2006,S.708-711;$S.709/710,Abschn.III A u. B,Fig.2 ,3$; KHANNA,A.,BHAT,D.G.:Growth and characterizati on of chromium oxide thin films prepared by reacti ve ac magnetron sputtering.In:J.Vac.Sci. Technol. A,2006, Bd.24,H.5,S.1870-1877;$S.1870 re.Sp.,Z.1-9 ,Fig.3,S.1874 re.Sp.,Z.3-11, S.1876 li.Sp.,Z.43-50 $
JAANISO,R.,et.al.:Electrical and Gas Sensing Properties of <SUB>2</SUB>O<SUB>3</SUB>-TiO<SUB>2</SUB> Thin Films made by Pulsed Laser Deposition.In: IEEE Sensors 2006,22-25 Okt. 2006,S.708-711;$S.709/710,Abschn.III A u. B,Fig.2,3$; *
KHANNA,A.,BHAT,D.G.:Growth and characterization of chromium oxide thin films prepared by reactive ac magnetron sputtering.In:J.Vac. Sci. Technol. A,2006, Bd.24,H.5,S.1870-1877;$S.1870 re.Sp.,Z.1-9, Fig.3,S.1874 re.Sp.,Z.3-11, S.1876 li.Sp.,Z.43-50$; *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013034598A1 (de) * 2011-09-07 2013-03-14 Walter Ag Werkzeug mit chromhaltiger funktionsschicht
US9249515B2 (en) 2011-09-07 2016-02-02 Walter Ag Tool with chromium-containing functional layer
EP2753728B1 (de) * 2011-09-07 2018-12-12 Walter AG Werkzeug mit chromhaltiger funktionsschicht
WO2017140787A1 (en) 2016-02-19 2017-08-24 Walter Ag Cutting tool
US11247275B2 (en) 2016-02-19 2022-02-15 Walter Ag Cutting tool

Also Published As

Publication number Publication date
WO2009003756A1 (de) 2009-01-08
ES2525331T3 (es) 2014-12-22
US20100260560A1 (en) 2010-10-14
US8491996B2 (en) 2013-07-23
EP2167705A1 (de) 2010-03-31
CN101720366B (zh) 2013-01-16
CN101720366A (zh) 2010-06-02
EP2167705B1 (de) 2014-09-17
JP2010531742A (ja) 2010-09-30
JP5438001B2 (ja) 2014-03-12
KR20100049572A (ko) 2010-05-12

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OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
R012 Request for examination validly filed

Effective date: 20140409

R120 Application withdrawn or ip right abandoned