CN116438325A - 切削工具用硬质涂膜 - Google Patents
切削工具用硬质涂膜 Download PDFInfo
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- 239000011248 coating agent Substances 0.000 title claims abstract description 103
- 238000000576 coating method Methods 0.000 title claims abstract description 103
- 238000005520 cutting process Methods 0.000 title claims abstract description 72
- 150000004767 nitrides Chemical class 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims description 9
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 14
- 229910052582 BN Inorganic materials 0.000 abstract description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000919 ceramic Substances 0.000 abstract description 3
- 239000011195 cermet Substances 0.000 abstract description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
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- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
- B23B27/148—Composition of the cutting inserts
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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Abstract
本发明涉及一种由硬质基材(例如硬质合金、金属陶瓷、陶瓷和立方氮化硼)以及形成在该硬质基材上的硬质涂膜构成的切削工具。本发明的切削工具用硬质涂膜以多层结构形成在切削工具的基材上，其中该硬质涂膜包括一层或多层由氧化物制成的涂膜和一层或多层由氮化物制成的涂膜，并且其特征在于，在整个该硬质涂膜中，在该切削工具的刃口中心中的O/(O+N)比率低于在距该刃口中心100μm以上的区域中的O/(O+N)比率。
Description
技术领域
本发明涉及一种用于切削工具的形成在硬质基材如硬质合金、金属陶瓷、陶瓷和立方氮化硼(cBN)上的硬质涂膜。更具体地，本发明涉及一种硬质涂膜，其通过在由包括氮化物膜和氧化物膜的多层结构涂膜构成的硬质涂膜中对于切削工具的每个部分将硬质涂膜的氧和氮的含量比控制为不同来延长切削工具的寿命。
背景技术
切削工具的刃口(edge)在高硬度材料的高速加工期间暴露于约1000℃的高温环境，并且由于与工件接触而引起的摩擦和氧化而受到磨损，以及受到诸如裂纹等机械冲击。因此，切削工具必须具有足够的耐磨性和韧性。
为了赋予如上所述的切削工具所需的耐磨性和韧性，在通常用于切削工具的硬质合金的表面上，通过化学气相沉积(以下称为“CVD”)形成硬质涂膜。
这种硬质涂膜由单层或多层的非氧化物类涂膜(例如，TiN、TiC和TiCN)、具有优异抗氧化性的氧化物类涂膜(例如，Al2O3)或其混合层构成，并且非氧化物类涂膜的实例包括元素周期表第4、5和6族金属元素的碳化物、氮化物和碳氮化物如TiN、TiC、TiCN等，并且氧化物类涂膜的实例包括α-Al2O3或γ-Al2O3。
同时，切削工具的作用和所需的物理性能略有不同，这取决于与待切削材料接触的部分。例如，通常，前刀面要求抗氧化性、耐磨性、耐焊接性等，刃口要求抗氧化性、耐热抗裂性(heat-resistant crack resistance)、抗分层性等，并且后刀面要求耐磨性。
为了在一定程度上满足对于切削工具的每个部分不同地要求的物理性能，已经应用了包括各种元素的多元素薄膜、由不同材料层构成的多层结构薄膜、或后加工技术，但是这些技术在使工具的每个部分的物理性能区别化方面具有局限性。
发明内容
技术问题
本发明的目的是提供一种切削工具用硬质涂膜，其能够通过在切削工具上形成的硬质涂膜中对于要形成的每个部分将氧和氮的含量比控制为不同来实现可更接近刃口、前刀面和后刀面各自所需的物理性能的物理性能，从而延长工具的寿命。
技术方案
为了实现上述目的，本发明提供一种具有硬质涂膜的切削工具，该硬质涂膜是以多层结构形成在切削工具的基材上的硬质涂层，其中该硬质涂膜包括一层或多层由氧化物制成的涂膜和一层或多层由氮化物制成的涂膜，并且在整个该硬质涂膜中，在该切削工具的刃口中心中的O/(O+N)比率低于在距该刃口中心100μm以上的区域中的O/(O+N)比率。
有益效果
在应用本发明的硬质涂膜的切削工具的情况下，由于前刀面或后刀面的O/(O+N)比率的增加而提高了抗氧化性和耐焊接性，并且由于刃口部分的O/(O+N)比率的减少而提高了抗分层性。
附图说明
图1示意性地示出了本发明的硬质涂膜的结构。
具体实施方式
以下，将参考附图详细描述本发明的实施方式。
然而，下面示出的本发明的实施方式可以修改为其他各种形式，并且本发明的范围不限于下面描述的实施方式。本发明的实施方式是为了向本领域技术人员更全面地描述本发明而提供的。
本发明的切削工具用硬质涂膜以多层结构形成在切削工具的基材上，其中该硬质涂膜包括一层或多层由氧化物制成的涂膜和一层或多层由氮化物制成的涂膜，并且其特征在于，在整个该硬质涂膜中，在该切削工具的刃口中心中的O/(O+N)比率低于在距该刃口中心100μm以上的区域中的O/(O+N)比率。
图1示意性地示出了本发明的硬质涂膜的结构。如图1所示，由氧化物制成的涂膜和由氮化物制成的涂膜在基材的表面上形成多层结构，并且在整个该硬质涂膜中，从刃口中心(基材中的弯曲部分)到前刀面或后刀面约100μm以内的区域部分(阴影部分)的特征在于，与其他区域相比，氧/(氧+氮)(以下称为O/(O+N))的比率被控制为相对较低。
同时，O/(O+N)的比率可以在从刃口中心(基材中的弯曲部分)到前刀面或后刀面约100μm以内的区域(阴影部分)中均匀形成，或者可以以O/(O+N)的比率从中心到前刀面或后刀面以连续、间歇或混合的形式逐渐增加的形式形成。
当刃口和前刀面或后刀面各自的O/(O+N)被控制为彼此不同时，前刀面或后刀面与刃口相比具有相对高的O/(O+N)，并因此具有改进的抗氧化性和耐焊接性。同时，刃口具有相对低的O/(O+N)，并因此具有改进的抗分层性。通过上述，可以根据前刀面(或后刀面)和刃口各自所需的物理性能来控制硬质涂膜的特性，从而可以延长切削工具的寿命。
另外，在硬质涂膜中，当切削工具的刃口中心的O/(O+N)与距刃口中心100μm以上的区域的O/(O+N)之差小于0.05时，上述刃口与前刀面或后刀面之间的物理性质差异可能不足，并且当大于0.15时，刃口的抗氧化性和耐焊接性变得过低，这是不期望的，因此，优选将O/(O+N)之差保持在0.05至0.15。
另外，构成硬质涂膜的由氧化物制成的涂膜和由氮化物制成的涂膜各自可以是包含选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的一种或多种元素的化合物。
另外，当硬质涂膜形成得薄至具有小于0.01μm的厚度时，该厚度太薄以至于硬质涂膜不能充分地保护切削工具，并且当该厚度大于20μm时，由于残余应力的增加而可能发生分层和崩裂(chipping)等，这导致工具的寿命反而降低，因此优选将厚度形成在0.01μm至20μm的范围内。
另外，当由氧化物制成的涂膜的厚度之和形成得薄至小于0.01μm时，抗氧化性不足，并且当该厚度之和大于5μm时，由于残余应力的增加而可能发生分层和崩裂，并且涂膜的导电性显著降低，从而降低沉积时涂膜的密度和粘附力，因此优选将该厚度之和形成在0.01μm至5μm、更优选0.01μm至3μm、最优选0.01μm至1μm的范围内。
另外，在由氧化物制成的涂膜和由氮化物制成的涂膜的上部和/或下部中，可以额外地形成选自碳化物、氮化物、氧化物、碳氮化物、氧氮化物、氧碳化物、氧碳氮化物、硼化物、硼氮化物、硼碳化物、硼碳氮化物、硼氧氮化物、硼氧代碳化物、硼氧代碳氮化物和硼氧代氮化物中的化合物的一层或多层，所有这些化合物均包含选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的一种或多种。
另外，由氧化物制成的涂膜例如可以由Al2O3构成，该Al2O3由立方γ相或六方α相构成。
实施方式
[实施例]
硬质涂膜的制备
在本发明的实施方式中，使用磁控溅射(其为物理气相沉积(PVD)方法)在诸如硬质合金、金属陶瓷、陶瓷或立方氮化硼等由烧结体制成的硬质基材的表面上形成由氧化物制成的涂膜，并且另外，通过同时应用电弧离子镀和磁控溅射的混合PVD工艺形成具有包括由氧化物制成的涂膜和由氮化物制成的涂膜的多层结构的硬质涂膜。
具体地，用湿式微喷和超纯水洗涤基材，然后以干燥状态沿圆周安装在涂覆炉中与旋转台上的中心轴在径向上相距预定距离的位置处。将涂覆炉中的初始真空压力降低至8.5×10-5Torr以下，并将温度升高至400℃至600℃，然后在氩(Ar)气体气氛下在旋转台上旋转的同时，对旋转基材施加-200V至-300V的脉冲偏置电压，进行离子轰击30分钟至60分钟。将用于涂覆的气体压力保持在50mTorr以下，优选40mTorr以下，并且对于涂覆期间的基板偏置电压，在涂覆氧化物膜时为-100V至-150V，在涂覆氮化物膜时为-20V至-100V。上述涂覆条件可以根据设备特性和条件而变化。
更具体地，作为基材，使用由平均粒径为0.8μm的WC和含量为10重量％的Co构成的硬质合金。氧化物涂膜由Al2O3制成，并且使用Al 99.9at.％靶在偏置电压为-125V(脉冲DC，20kHz至45kHz)、溅射功率为20kW、注入O2和Ar作为反应气体并且压力为0.5Pa的条件下形成。氮化物涂膜由AlTiN或AlCrN制成，并且使用AlTi(60at.％/40at.％)靶或AlCr(64at.％/36at.％)靶在偏置电压为-30V至-60V、电弧电流为100A至150A、注入N2作为反应气体并且压力为2.7Pa至4.0Pa的条件下形成。在此，本发明的实施例通过在刚形成氧化物涂膜后施加-200V至-300V的脉冲偏置电压以进行离子轰击5分钟至10分钟而构成，并且本发明的比较例通过在刚形成氧化物涂膜后不进行除涂覆外的单独工艺而构成。
在上述条件下制造本发明的实施例和比较例，并且与之对应的硬质涂膜的结构、厚度和硬度的基本信息示于下表1中。
[表1]
硬质膜的O/(O+N)分析结果
下表2示出了使用能量色散X射线光谱(EDX)分析实施例和比较例的样品的切削工具的刃口中心的涂膜中的O/(O+N)和距刃口中心100μm的区域的涂膜中的O/(O+N)的结果。此时，通常，工具的前刀面放置在平行于靶的方向上，并且工具的后刀面放置在垂直于靶的方向上，这可以根据工具的形状或工具在旋转台上的安装方式而改变。在样品号1-2(R)、1-4(R)、2-2(R)和2-4(R)中，将工具安装在旋转台上，使得工具的前刀面放置在垂直于靶的方向上，并且工具的后刀面放置在平行于靶的方向上。
[表2]
如上表2所确认，在实施例的硬质涂膜中，在切削工具的刃口中心的涂膜中的O/(O+N)的值比在距切削工具的刃口中心100μm的区域(前刀面或后刀面)的涂膜中的O/(O+N)的值低0.05至0.15。相反，在比较例的硬质涂膜中，在切削工具的刃口中心的涂膜中的O/(O+N)的值比在距切削工具的刃口中心100μm的区域(前刀面或后刀面)的涂膜中的O/(O+N)的值高0.01至0.07。即，对于每个实施例的硬质涂膜，在切削工具的刃口中心的涂膜中的O/(O+N)低，并且根据刃口的位置而具有更显著的O/(O+N)差异。
切削性能的评价
为了评价如表2所示制备的硬质涂膜的耐焊接性、抗分层性和耐崩裂性(chippingresistance)，进行铣削试验，并在以下条件下进行评价。
当以低切削速度对碳钢进行加工时，由于待切削材料的焊接以及由此产生的工具的积屑瘤(built-up edge)，前刀面的耐焊接性对切削性能有很大影响。当在精加工(其为切削深度为1mm以下的精加工)条件下对不锈钢进行加工时，应变硬化集中在刃口部分，因此该刃口部分的抗分层性对切削性能有很大影响。至于模具钢，机械摩擦磨损是主要的磨损类型，但是由于频繁的崩裂，刃口部分的耐崩裂性也对切削性能有很大影响，如同其耐磨性一样，以便使工具能够充分地发挥其原有的耐磨性。
(1)耐焊接性的评价
待切削材料：碳钢(SM45C)
样品型号：SDKN1504AESN-SU
切削速度：150m/min
切削进给：0.2mm/齿
切削深度：2mm
(2)抗分层性的评价
待切削材料：不锈钢(STS316L)
样品型号：SNMX1206ANN-MF
切削速度：120m/min
切削进给：0.1mm/齿
切削深度：1mm
(3)耐崩裂性的评价
待切削材料：模具钢(NAK80)
样品型号：ADKT170608PESR-MM
切削速度：100m/min
切削进给：0.15mm/齿
切削深度：5mm
在上述条件下获得的评价结果示于下表3中。
[表3]
如上表3所确认，与比较例的硬质涂膜相比，实施例的硬质涂膜中的1-2、1-2(R)、1-4和1-4(R)具有优异的耐焊接性、抗分层性和耐崩裂性。
实施例的硬质涂膜具有这样的结构：由于刃口中心的O/(O+N)低于前刀面或后刀面的O/(O+N)，因此刃口部分的抗分层性和耐崩裂性优异，并且由于前刀面或后刀面的O/(O+N)高，因此抗氧化性和耐焊接性优异。由于上述原因，与比较例的硬质涂膜相比，实施例的硬质涂膜具有工具每个部分所需的更好的物理性能，因此，在铣削试验中被确定为具有优异的切削性能。
在此，在具有氮化物涂膜和氧化物涂膜的双层结构的1-1和2-1样品的情况下，由于薄膜硬度低、薄膜厚度小并且没有保护氧化物涂膜的最外层，因此氧化物涂膜在加工期间被迅速消耗，因此抗氧化性和耐焊接性降低，导致切削性能相对较低。因此，可以看出，如样品1-2、1-4、2-2和2-4那样氧化物涂膜堆叠在氮化物涂膜之间时，其在结构上是稳定的，并且如样品1-2和1-4那样对于工具的每个部分存在O/(O+N)差异时，其被确定为可以最好地反映所得到的提高切削性能的效果的薄膜结构。
除了上述评价的12种样品之外，还额外地制备了在由氧化物制成的涂膜的上部和/或下部具有包含选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的一种或多种的氮化物涂膜的硬质涂膜样品。对该样品进行铣削试验，并且评价结果示于下表4中。
[表4]
如上表4所确认，与比较例的硬质涂膜相比，实施例的硬质涂膜通常具有优异的耐焊接性、抗分层性和耐崩裂性。
可以看出，在由氧化物制成的涂膜的上部和/或下部具有包含选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的一种或多种的氮化物涂膜的硬质涂膜根据氮化物的组成和层叠位置对每个评价项目具有稍微不同的切削性能。如上所述，通过本发明的由氧化物和氮化物构成的涂膜中各种材料的组成和结构组合，可以预期设计出适合于加工环境的硬质涂膜并相应地提高性能。
Claims (6)
1.一种以多层结构形成在切削工具的基材上的硬质涂膜，其中：
所述硬质涂膜包括一层或多层由氧化物制成的涂膜和一层或多层由氮化物制成的涂膜；并且
在整个所述硬质涂膜中，在所述切削工具的刃口中心中的O/(O+N)比率低于在距所述刃口中心100μm以上的区域中的O/(O+N)比率。
2.如权利要求1所述的硬质涂膜，其中在整个所述硬质涂膜中，在所述切削工具的刃口中心中的O/(O+N)比率比在距所述刃口中心100μm以上的区域中的O/(O+N)比率低0.05至0.15。
3.如权利要求2所述的硬质涂膜，其中所述由氧化物制成的涂膜和所述由氮化物制成的涂膜包含选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的一种或多种。
4.如权利要求1至3中任一项所述的硬质涂膜，其中：
所述硬质涂膜的总厚度为0.02μm至20μm；并且
所述硬质涂膜中包含的所有氧化物膜的总厚度为0.01μm至5μm。
5.如权利要求2所述的硬质涂膜，其中在所述由氧化物制成的涂膜和所述由氮化物制成的涂膜的上部和/或下部中，形成选自碳化物、氮化物、氧化物、碳氮化物、氧氮化物、氧碳化物、氧碳氮化物、硼化物、硼氮化物、硼碳化物、硼碳氮化物、硼氧氮化物、硼氧代碳化物、硼氧代碳氮化物和硼氧代氮化物中的化合物的一层或多层，所有这些化合物均包含选自Al、Cr、Ti、Y、V、W、Ta、Nb、Mo、Zr、Hf和Si中的一种或多种。
6.如权利要求2所述的硬质涂膜，其中所述由氧化物制成的涂膜由Al2O3构成，所述Al2O3由立方γ相或六方α相构成。
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