CN101715422B - 悬浮装置及悬浮输送装置 - Google Patents

悬浮装置及悬浮输送装置 Download PDF

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Publication number
CN101715422B
CN101715422B CN200880021740.6A CN200880021740A CN101715422B CN 101715422 B CN101715422 B CN 101715422B CN 200880021740 A CN200880021740 A CN 200880021740A CN 101715422 B CN101715422 B CN 101715422B
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CN
China
Prior art keywords
fluid
levitation
squit hole
zone
base portion
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Active
Application number
CN200880021740.6A
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English (en)
Chinese (zh)
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CN101715422A (zh
Inventor
平田贤辅
田中刈入
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IHI Corp
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IHI Corp
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Publication date
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Publication of CN101715422A publication Critical patent/CN101715422A/zh
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Publication of CN101715422B publication Critical patent/CN101715422B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
CN200880021740.6A 2007-06-29 2008-05-09 悬浮装置及悬浮输送装置 Active CN101715422B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007173433A JP5396695B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置
JP173433/2007 2007-06-29
PCT/JP2008/058625 WO2009004859A1 (ja) 2007-06-29 2008-05-09 浮上装置及び浮上搬送装置

Publications (2)

Publication Number Publication Date
CN101715422A CN101715422A (zh) 2010-05-26
CN101715422B true CN101715422B (zh) 2013-03-27

Family

ID=40225916

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880021740.6A Active CN101715422B (zh) 2007-06-29 2008-05-09 悬浮装置及悬浮输送装置

Country Status (5)

Country Link
JP (1) JP5396695B2 (enrdf_load_stackoverflow)
KR (1) KR20100018613A (enrdf_load_stackoverflow)
CN (1) CN101715422B (enrdf_load_stackoverflow)
TW (1) TW200918427A (enrdf_load_stackoverflow)
WO (1) WO2009004859A1 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101142959B1 (ko) * 2009-06-29 2012-05-08 김영태 평판 정밀 플로팅 시스템
JP5879680B2 (ja) * 2010-11-05 2016-03-08 株式会社Ihi 非接触式静電チャック
JP5790121B2 (ja) * 2011-04-26 2015-10-07 株式会社Ihi 浮上搬送装置
CN102785940A (zh) * 2012-08-15 2012-11-21 吉林大学 超声波/气浮混合式非接触自动运输装置
CN206705256U (zh) * 2016-11-01 2017-12-05 昆山高艺泽机械设备有限公司 一种气浮式输送系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1590254A (zh) * 2003-08-28 2005-03-09 村田机械株式会社 浮起搬送装置
CN1817767A (zh) * 2005-02-09 2006-08-16 神钢电机株式会社 空气浮起单元、运送方法以及空气浮起运送装置
CN1966371A (zh) * 2005-11-14 2007-05-23 石川岛播磨重工业株式会社 浮起装置及输送装置
CN1982179A (zh) * 2005-12-16 2007-06-20 爱德牌工程有限公司 用于传送玻璃基板的设备和方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1590254A (zh) * 2003-08-28 2005-03-09 村田机械株式会社 浮起搬送装置
CN1817767A (zh) * 2005-02-09 2006-08-16 神钢电机株式会社 空气浮起单元、运送方法以及空气浮起运送装置
CN1966371A (zh) * 2005-11-14 2007-05-23 石川岛播磨重工业株式会社 浮起装置及输送装置
CN1982179A (zh) * 2005-12-16 2007-06-20 爱德牌工程有限公司 用于传送玻璃基板的设备和方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平11-268830A 1999.10.05

Also Published As

Publication number Publication date
CN101715422A (zh) 2010-05-26
JP2009012875A (ja) 2009-01-22
WO2009004859A1 (ja) 2009-01-08
KR20100018613A (ko) 2010-02-17
TWI359778B (enrdf_load_stackoverflow) 2012-03-11
JP5396695B2 (ja) 2014-01-22
TW200918427A (en) 2009-05-01

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