WO2009004859A1 - 浮上装置及び浮上搬送装置 - Google Patents

浮上装置及び浮上搬送装置 Download PDF

Info

Publication number
WO2009004859A1
WO2009004859A1 PCT/JP2008/058625 JP2008058625W WO2009004859A1 WO 2009004859 A1 WO2009004859 A1 WO 2009004859A1 JP 2008058625 W JP2008058625 W JP 2008058625W WO 2009004859 A1 WO2009004859 A1 WO 2009004859A1
Authority
WO
WIPO (PCT)
Prior art keywords
levitation
fluid
nozzle
transportation device
transportation
Prior art date
Application number
PCT/JP2008/058625
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Kensuke Hirata
Kai Tanaka
Original Assignee
Ihi Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ihi Corporation filed Critical Ihi Corporation
Priority to CN200880021740.6A priority Critical patent/CN101715422B/zh
Publication of WO2009004859A1 publication Critical patent/WO2009004859A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
PCT/JP2008/058625 2007-06-29 2008-05-09 浮上装置及び浮上搬送装置 WO2009004859A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200880021740.6A CN101715422B (zh) 2007-06-29 2008-05-09 悬浮装置及悬浮输送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007173433A JP5396695B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置
JP2007-173433 2007-06-29

Publications (1)

Publication Number Publication Date
WO2009004859A1 true WO2009004859A1 (ja) 2009-01-08

Family

ID=40225916

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058625 WO2009004859A1 (ja) 2007-06-29 2008-05-09 浮上装置及び浮上搬送装置

Country Status (5)

Country Link
JP (1) JP5396695B2 (enrdf_load_stackoverflow)
KR (1) KR20100018613A (enrdf_load_stackoverflow)
CN (1) CN101715422B (enrdf_load_stackoverflow)
TW (1) TW200918427A (enrdf_load_stackoverflow)
WO (1) WO2009004859A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102484089A (zh) * 2009-06-29 2012-05-30 英泰克普拉斯有限公司 平板精密悬浮系统

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5879680B2 (ja) * 2010-11-05 2016-03-08 株式会社Ihi 非接触式静電チャック
JP5790121B2 (ja) * 2011-04-26 2015-10-07 株式会社Ihi 浮上搬送装置
CN102785940A (zh) * 2012-08-15 2012-11-21 吉林大学 超声波/气浮混合式非接触自动运输装置
CN206705256U (zh) * 2016-11-01 2017-12-05 昆山高艺泽机械设备有限公司 一种气浮式输送系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP4501713B2 (ja) * 2005-02-09 2010-07-14 シンフォニアテクノロジー株式会社 エア浮上搬送装置
TW200800773A (en) * 2005-11-14 2008-01-01 Ishikawajima Harima Heavy Ind Floating device and carrying device
KR101213991B1 (ko) * 2005-12-16 2012-12-20 엘아이지에이디피 주식회사 기판 이송 장치 및 방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2006182563A (ja) * 2004-12-01 2006-07-13 Ishikawajima Harima Heavy Ind Co Ltd 浮上装置および搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102484089A (zh) * 2009-06-29 2012-05-30 英泰克普拉斯有限公司 平板精密悬浮系统

Also Published As

Publication number Publication date
CN101715422A (zh) 2010-05-26
CN101715422B (zh) 2013-03-27
JP2009012875A (ja) 2009-01-22
KR20100018613A (ko) 2010-02-17
TWI359778B (enrdf_load_stackoverflow) 2012-03-11
JP5396695B2 (ja) 2014-01-22
TW200918427A (en) 2009-05-01

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