CN101680745B - 位置测量装置 - Google Patents

位置测量装置 Download PDF

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Publication number
CN101680745B
CN101680745B CN2008800163321A CN200880016332A CN101680745B CN 101680745 B CN101680745 B CN 101680745B CN 2008800163321 A CN2008800163321 A CN 2008800163321A CN 200880016332 A CN200880016332 A CN 200880016332A CN 101680745 B CN101680745 B CN 101680745B
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scale
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removable
space
fixed
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Chinese (zh)
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CN101680745A (zh
Inventor
W·霍尔扎普费尔
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G01D5/34723—Scale reading or illumination devices involving light-guides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Vehicle Body Suspensions (AREA)
  • Body Structure For Vehicles (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN2008800163321A 2007-05-16 2008-05-02 位置测量装置 Active CN101680745B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102007023300A DE102007023300A1 (de) 2007-05-16 2007-05-16 Positionsmesseinrichtung und Anordnung derselben
DE102007023300.2 2007-05-16
PCT/EP2008/003552 WO2008138501A1 (de) 2007-05-16 2008-05-02 Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
CN101680745A CN101680745A (zh) 2010-03-24
CN101680745B true CN101680745B (zh) 2012-03-21

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN2008800163321A Active CN101680745B (zh) 2007-05-16 2008-05-02 位置测量装置
CN2008800162193A Active CN101688795B (zh) 2007-05-16 2008-05-02 光学位置测量装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2008800162193A Active CN101688795B (zh) 2007-05-16 2008-05-02 光学位置测量装置

Country Status (7)

Country Link
US (2) US7907286B2 (cg-RX-API-DMAC7.html)
EP (2) EP2149036B1 (cg-RX-API-DMAC7.html)
JP (2) JP5079874B2 (cg-RX-API-DMAC7.html)
CN (2) CN101680745B (cg-RX-API-DMAC7.html)
AT (1) ATE487109T1 (cg-RX-API-DMAC7.html)
DE (2) DE102007023300A1 (cg-RX-API-DMAC7.html)
WO (2) WO2008138502A1 (cg-RX-API-DMAC7.html)

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GB0613902D0 (en) * 2006-07-13 2006-08-23 Renishaw Plc Scale and readhead
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
US10259607B2 (en) * 2008-03-04 2019-04-16 Vanrx Pharmasystems Inc. Aseptic robotic filling system and method
JP5268529B2 (ja) * 2008-09-29 2013-08-21 キヤノン株式会社 変位計測装置及び半導体製造装置
WO2010065609A2 (en) * 2008-12-02 2010-06-10 Eddy Patrick E Compression device and control system for applying pressure to a limb of a living being
DE102010003157B4 (de) * 2010-03-23 2019-10-24 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
EP2606315B1 (de) * 2010-08-19 2019-01-09 ELESTA GmbH Positionsmessvorrichtung
CN103261962B (zh) 2010-10-25 2018-04-27 株式会社尼康 用于检查或测量对象的设备、光学组件、方法，以及用于制造结构的方法
DE102011081879A1 (de) 2010-11-03 2012-05-03 Dr. Johannes Heidenhain Gmbh Optische Winkelmesseinrichtung
DE102010043469A1 (de) 2010-11-05 2012-05-10 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011082156A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102010063253A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076055A1 (de) * 2011-05-18 2012-11-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076178B4 (de) * 2011-05-20 2022-03-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US8604413B2 (en) * 2011-06-13 2013-12-10 Mitutoyo Corporation Optical encoder including displacement sensing normal to the encoder scale grating surface
NL2009197A (en) 2011-08-25 2013-02-27 Asml Netherlands Bv System for detection motion, lithographic apparatus and device manufacturing method.
DE102011111900A1 (de) * 2011-08-30 2013-02-28 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferometrischen Abstandsbestimmung
US8724095B2 (en) 2011-10-25 2014-05-13 Nikon Corporation Optical assembly for laser radar
KR101854177B1 (ko) * 2012-02-17 2018-06-20 덕터 요한네스 하이덴하인 게엠베하 부품에 대한 가공 기구 위치 정렬 장치 및 방법
SG11201503261TA (en) 2012-11-19 2015-05-28 Asml Netherlands Bv Position measurement system, grating for a position measurement system and method
CN103148779B (zh) * 2013-01-30 2016-01-13 中国科学院长春光学精密机械与物理研究所 位置测量设备中光源的调整装置
DE102014208988A1 (de) * 2013-09-11 2015-03-12 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102013220196A1 (de) * 2013-10-07 2015-04-09 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102013220214A1 (de) * 2013-10-07 2015-04-09 Dr. Johannes Heidenhain Gmbh Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück
DE102013221898A1 (de) * 2013-10-29 2015-04-30 Dr. Johannes Heidenhain Gmbh Vorrichtung zur Positionsbestimmung
JP6359340B2 (ja) * 2014-05-27 2018-07-18 株式会社ミツトヨ スケール及び光学式エンコーダ
JP6088466B2 (ja) * 2014-06-09 2017-03-01 ファナック株式会社 反射型の光学式エンコーダ
DE102014211004A1 (de) 2014-06-10 2015-12-17 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102015200293A1 (de) * 2015-01-13 2016-07-14 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102015219810A1 (de) * 2015-10-13 2017-04-13 Dr. Johannes Heidenhain Gmbh X-Y-Tisch mit einer Positionsmesseinrichtung
US10126560B2 (en) * 2016-02-18 2018-11-13 National Engineering Research Center for Optical Instrumentation Spectrum-generation system based on multiple-diffraction optical phasometry
DE102016214456A1 (de) * 2016-08-04 2018-02-08 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung
TWI648520B (zh) 2016-10-21 2019-01-21 財團法人工業技術研究院 光學編碼裝置
DE102017201257A1 (de) * 2017-01-26 2018-07-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
TWI680648B (zh) 2018-12-26 2019-12-21 財團法人工業技術研究院 編碼盤、檢光器、光學絕對式旋轉編碼器及編碼值輸出、偵錯與除錯的方法
DE102019206937A1 (de) 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
TWI716246B (zh) 2019-12-31 2021-01-11 財團法人工業技術研究院 光學編碼器
DE102020202080A1 (de) 2020-02-19 2021-08-19 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
CN115993088A (zh) 2021-10-20 2023-04-21 约翰内斯.海德汉博士有限公司 光学位置测量设备

Citations (3)

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US3884580A (en) * 1973-09-07 1975-05-20 Gerber Scientific Instr Co Apparatus for measuring and positioning by interferometry
EP0482553A2 (de) * 1990-10-22 1992-04-29 Karl SÀ¼ss KG Präzisionsgeräte für Wissenschaft und Industrie - GmbH & Co. Messanordnung für x,y,gamma-Koordinatentische
EP1734394A1 (en) * 2005-06-13 2006-12-20 George Mauro Positioning system for eliminating lost motion effect

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DE2521618B1 (de) 1975-05-15 1976-03-11 Zeiss Carl Fa Vorrichtung zum Messen oder Einstellen von zweidimensionalen Lagekoordinaten
GB8413955D0 (en) 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
DE8628805U1 (de) 1986-10-29 1989-01-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische Längen- oder Winkelmeßeinrichtung
DE3905730C2 (de) 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
DE4033013C2 (de) * 1990-10-18 1994-11-17 Heidenhain Gmbh Dr Johannes Polarisationsoptische Anordnung
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ
ATE192566T1 (de) * 1994-02-23 2000-05-15 Heidenhain Gmbh Dr Johannes Positionsmessvorrichtung
JP3530573B2 (ja) * 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
JP3158878B2 (ja) * 1994-07-28 2001-04-23 松下電器産業株式会社 光学式エンコーダ
DE19521295C2 (de) * 1995-06-10 2000-07-13 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
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US7636165B2 (en) 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
DE102006042743A1 (de) * 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
JP5095475B2 (ja) * 2008-04-14 2012-12-12 株式会社森精機製作所 光学式変位測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3884580A (en) * 1973-09-07 1975-05-20 Gerber Scientific Instr Co Apparatus for measuring and positioning by interferometry
EP0482553A2 (de) * 1990-10-22 1992-04-29 Karl SÀ¼ss KG Präzisionsgeräte für Wissenschaft und Industrie - GmbH & Co. Messanordnung für x,y,gamma-Koordinatentische
EP1734394A1 (en) * 2005-06-13 2006-12-20 George Mauro Positioning system for eliminating lost motion effect

Also Published As

Publication number Publication date
US7907286B2 (en) 2011-03-15
EP2149036B1 (de) 2015-02-11
WO2008138502A1 (de) 2008-11-20
US7796272B2 (en) 2010-09-14
JP2010527014A (ja) 2010-08-05
CN101688795B (zh) 2011-09-14
EP2149029A1 (de) 2010-02-03
ATE487109T1 (de) 2010-11-15
JP2010527013A (ja) 2010-08-05
EP2149029B1 (de) 2010-11-03
DE502008001727D1 (de) 2010-12-16
CN101688795A (zh) 2010-03-31
WO2008138501A1 (de) 2008-11-20
JP5253498B2 (ja) 2013-07-31
US20080282566A1 (en) 2008-11-20
US20080285058A1 (en) 2008-11-20
DE102007023300A1 (de) 2008-11-20
CN101680745A (zh) 2010-03-24
EP2149036A1 (de) 2010-02-03
JP5079874B2 (ja) 2012-11-21

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