CN101675512A - 半导体器件中的分隔层的形成 - Google Patents

半导体器件中的分隔层的形成 Download PDF

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Publication number
CN101675512A
CN101675512A CN200880013173A CN200880013173A CN101675512A CN 101675512 A CN101675512 A CN 101675512A CN 200880013173 A CN200880013173 A CN 200880013173A CN 200880013173 A CN200880013173 A CN 200880013173A CN 101675512 A CN101675512 A CN 101675512A
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CN
China
Prior art keywords
layer
table top
metal
semiconductor layer
dielectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200880013173A
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English (en)
Chinese (zh)
Inventor
约翰·M·格兰特
斯里坎斯·B·萨玛维丹
苏雷什·文卡特森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NXP USA Inc
Original Assignee
Freescale Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Publication of CN101675512A publication Critical patent/CN101675512A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76264—SOI together with lateral isolation, e.g. using local oxidation of silicon, or dielectric or polycristalline material refilled trench or air gap isolation regions, e.g. completely isolated semiconductor islands
    • H01L21/76283—Lateral isolation by refilling of trenches with dielectric material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Thin Film Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
CN200880013173A 2007-04-23 2008-04-04 半导体器件中的分隔层的形成 Pending CN101675512A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/738,683 US8039339B2 (en) 2007-04-23 2007-04-23 Separate layer formation in a semiconductor device
US11/738,683 2007-04-23
PCT/US2008/059352 WO2008130818A1 (en) 2007-04-23 2008-04-04 Separate layer formation in a semiconductor device

Publications (1)

Publication Number Publication Date
CN101675512A true CN101675512A (zh) 2010-03-17

Family

ID=39872628

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880013173A Pending CN101675512A (zh) 2007-04-23 2008-04-04 半导体器件中的分隔层的形成

Country Status (5)

Country Link
US (1) US8039339B2 (enExample)
JP (1) JP5280434B2 (enExample)
CN (1) CN101675512A (enExample)
TW (1) TWI442511B (enExample)
WO (1) WO2008130818A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016101545B4 (de) * 2016-01-28 2020-10-08 Infineon Technologies Dresden Gmbh Verfahren zum herstellen einer halbleitervorrichtung mit silicidschichten und eine halbleitervorrichtung
CN113078067B (zh) * 2021-03-30 2023-04-28 电子科技大学 一种沟槽分离栅器件的制造方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5447874A (en) * 1994-07-29 1995-09-05 Grivna; Gordon Method for making a semiconductor device comprising a dual metal gate using a chemical mechanical polish
US6013551A (en) * 1997-09-26 2000-01-11 Taiwan Semiconductor Manufacturing Company, Ltd. Method of manufacture of self-aligned floating gate, flash memory cell and device manufactured thereby
US6027961A (en) * 1998-06-30 2000-02-22 Motorola, Inc. CMOS semiconductor devices and method of formation
US6204103B1 (en) * 1998-09-18 2001-03-20 Intel Corporation Process to make complementary silicide metal gates for CMOS technology
US6262456B1 (en) * 1998-11-06 2001-07-17 Advanced Micro Devices, Inc. Integrated circuit having transistors with different threshold voltages
JP3613113B2 (ja) * 2000-01-21 2005-01-26 日本電気株式会社 半導体装置およびその製造方法
US6444512B1 (en) * 2000-06-12 2002-09-03 Motorola, Inc. Dual metal gate transistors for CMOS process
JP2002009171A (ja) * 2000-06-22 2002-01-11 Fujitsu Ltd 半導体装置の製造方法
US6627510B1 (en) * 2002-03-29 2003-09-30 Sharp Laboratories Of America, Inc. Method of making self-aligned shallow trench isolation
TW544840B (en) * 2002-06-27 2003-08-01 Intelligent Sources Dev Corp A stack-type DRAM memory structure and its manufacturing method
US6846734B2 (en) * 2002-11-20 2005-01-25 International Business Machines Corporation Method and process to make multiple-threshold metal gates CMOS technology
US6919647B2 (en) * 2003-07-03 2005-07-19 American Semiconductor, Inc. SRAM cell
US7018887B1 (en) * 2004-03-01 2006-03-28 Advanced Micro Devices, Inc. Dual metal CMOS transistors with silicon-metal-silicon stacked gate electrode
US7157378B2 (en) * 2004-07-06 2007-01-02 Intel Corporation Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode
US7422936B2 (en) * 2004-08-25 2008-09-09 Intel Corporation Facilitating removal of sacrificial layers via implantation to form replacement metal gates
US7074664B1 (en) * 2005-03-29 2006-07-11 Freescale Semiconductor, Inc. Dual metal gate electrode semiconductor fabrication process and structure thereof

Also Published As

Publication number Publication date
US20080261374A1 (en) 2008-10-23
JP5280434B2 (ja) 2013-09-04
TWI442511B (zh) 2014-06-21
US8039339B2 (en) 2011-10-18
JP2010525609A (ja) 2010-07-22
TW200908211A (en) 2009-02-16
WO2008130818A1 (en) 2008-10-30

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SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20100317