CN101656221A - 应用于半导体刻蚀清洗设备的全塑料高速机械手 - Google Patents
应用于半导体刻蚀清洗设备的全塑料高速机械手 Download PDFInfo
- Publication number
- CN101656221A CN101656221A CN200910092223A CN200910092223A CN101656221A CN 101656221 A CN101656221 A CN 101656221A CN 200910092223 A CN200910092223 A CN 200910092223A CN 200910092223 A CN200910092223 A CN 200910092223A CN 101656221 A CN101656221 A CN 101656221A
- Authority
- CN
- China
- Prior art keywords
- manipulator
- mechanical arm
- synchronizing wheel
- power source
- main shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 24
- 229920003023 plastic Polymers 0.000 title claims abstract description 15
- 239000004033 plastic Substances 0.000 title claims abstract description 15
- 238000004140 cleaning Methods 0.000 title claims abstract description 14
- 239000004065 semiconductor Substances 0.000 title claims abstract description 11
- 238000012546 transfer Methods 0.000 claims description 16
- 230000001360 synchronised effect Effects 0.000 claims description 7
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 150000001455 metallic ions Chemical class 0.000 abstract description 3
- 238000013461 design Methods 0.000 abstract description 2
- 238000005536 corrosion prevention Methods 0.000 abstract 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 23
- 239000004800 polyvinyl chloride Substances 0.000 description 23
- -1 polytetrafluoroethylene Polymers 0.000 description 17
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 17
- 239000004810 polytetrafluoroethylene Substances 0.000 description 17
- 239000000463 material Substances 0.000 description 14
- 239000004743 Polypropylene Substances 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 9
- 239000002245 particle Substances 0.000 description 7
- 239000004698 Polyethylene Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229920001155 polypropylene Polymers 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 4
- 229920006362 Teflon® Polymers 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 229910021645 metal ion Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 239000002033 PVDF binder Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920000573 polyethylene Polymers 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 235000014347 soups Nutrition 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 206010044565 Tremor Diseases 0.000 description 1
- 230000001458 anti-acid effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000013528 metallic particle Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Manipulator (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009100922234A CN101656221B (zh) | 2009-09-07 | 2009-09-07 | 应用于半导体刻蚀清洗设备的全塑料高速机械手 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009100922234A CN101656221B (zh) | 2009-09-07 | 2009-09-07 | 应用于半导体刻蚀清洗设备的全塑料高速机械手 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101656221A true CN101656221A (zh) | 2010-02-24 |
CN101656221B CN101656221B (zh) | 2011-03-16 |
Family
ID=41710432
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009100922234A Expired - Fee Related CN101656221B (zh) | 2009-09-07 | 2009-09-07 | 应用于半导体刻蚀清洗设备的全塑料高速机械手 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101656221B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102412419A (zh) * | 2010-09-25 | 2012-04-11 | 深圳市吉阳自动化科技有限公司 | 一种叠片机及电芯叠片机构 |
CN103420616A (zh) * | 2012-05-18 | 2013-12-04 | 弘塑科技股份有限公司 | 蚀刻握持夹具 |
CN107706141A (zh) * | 2017-09-19 | 2018-02-16 | 上海微松工业自动化有限公司 | 一种半导体前置模块晶圆的传输工艺 |
CN118073258A (zh) * | 2024-04-18 | 2024-05-24 | 沈阳芯达科技有限公司 | 一种晶片浸泡清洗装置及方法 |
-
2009
- 2009-09-07 CN CN2009100922234A patent/CN101656221B/zh not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102412419A (zh) * | 2010-09-25 | 2012-04-11 | 深圳市吉阳自动化科技有限公司 | 一种叠片机及电芯叠片机构 |
CN102412419B (zh) * | 2010-09-25 | 2014-02-05 | 深圳市吉阳自动化科技有限公司 | 一种叠片机及电芯叠片机构 |
CN103420616A (zh) * | 2012-05-18 | 2013-12-04 | 弘塑科技股份有限公司 | 蚀刻握持夹具 |
CN103420616B (zh) * | 2012-05-18 | 2016-02-10 | 弘塑科技股份有限公司 | 蚀刻握持夹具 |
CN107706141A (zh) * | 2017-09-19 | 2018-02-16 | 上海微松工业自动化有限公司 | 一种半导体前置模块晶圆的传输工艺 |
CN118073258A (zh) * | 2024-04-18 | 2024-05-24 | 沈阳芯达科技有限公司 | 一种晶片浸泡清洗装置及方法 |
CN118073258B (zh) * | 2024-04-18 | 2024-07-02 | 沈阳芯达科技有限公司 | 一种晶片浸泡清洗装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101656221B (zh) | 2011-03-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101656221B (zh) | 应用于半导体刻蚀清洗设备的全塑料高速机械手 | |
CN203448352U (zh) | 一种桶装水桶外壁清洗机 | |
CN101728240B (zh) | 一种多功能抛动旋转机构 | |
CN201791386U (zh) | 卧式蒸发器 | |
CN207684300U (zh) | 一种环规清洗机的上料系统 | |
CN201478285U (zh) | 应用于半导体刻蚀清洗设备的全塑料高速机械手 | |
CN201272743Y (zh) | 一种石英晶片腐蚀机 | |
CN105826222A (zh) | 一种晶圆刻蚀设备 | |
CN208848875U (zh) | 机械手臂及传送装置 | |
CN205926526U (zh) | 一种玻璃瓶清洗设备 | |
CN205290938U (zh) | 一种高效率机器人 | |
CN207346758U (zh) | 四轴移栽机 | |
CN216138911U (zh) | 一种用于晶圆搬运机器人的防滴水和飞溅水装置 | |
CN206051497U (zh) | 一种罐头自动封口机 | |
CN109132506A (zh) | 一种适用于agv车的手爪库装置 | |
CN201082426Y (zh) | 快装式清洗装置 | |
CN106113089A (zh) | 自动清洗工业机器人 | |
CN110654782A (zh) | 一种具有清洗功能的链条式运输设备 | |
CN205799577U (zh) | 一种设有旋转执行末端的搬运机器人 | |
CN202643684U (zh) | 一种发酵罐 | |
CN201834250U (zh) | 用于大输液软袋生产线的灌装组件 | |
CN206242043U (zh) | 横臂水平滑动机构 | |
CN207206861U (zh) | 一种转盘机运水套装置 | |
CN202148013U (zh) | 一种硅片传送机构的滚轮结构 | |
CN207256174U (zh) | 一种多工序机械臂加工平台 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee |
Owner name: BEIJING GIGASOLAR TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CHINA UNITED CLEANING TECHNOLOGY CO., LTD., BEIJING |
|
CP01 | Change in the name or title of a patent holder |
Address after: 100012, building 40, 2 Beiyuan Road, Beijing, Chaoyang District Patentee after: GIGA solar holding Co., Ltd. Address before: 100012, building 40, 2 Beiyuan Road, Beijing, Chaoyang District Patentee before: China United Cleaning Technology Co., Ltd., Beijing |
|
DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification to Pay the Fees |
|
DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification of Termination of Patent Right |
|
DD01 | Delivery of document by public notice |
Addressee: GIGA solar holding Co., Ltd. Document name: Notification of Decision on Request for Restoration of Right |
|
DD01 | Delivery of document by public notice |
Addressee: Liang Jingjing Document name: payment instructions |
|
DD01 | Delivery of document by public notice | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110316 Termination date: 20200907 |