CN101728240B - 一种多功能抛动旋转机构 - Google Patents
一种多功能抛动旋转机构 Download PDFInfo
- Publication number
- CN101728240B CN101728240B CN2009102044056A CN200910204405A CN101728240B CN 101728240 B CN101728240 B CN 101728240B CN 2009102044056 A CN2009102044056 A CN 2009102044056A CN 200910204405 A CN200910204405 A CN 200910204405A CN 101728240 B CN101728240 B CN 101728240B
- Authority
- CN
- China
- Prior art keywords
- synchronous pulley
- rotating mechanism
- main
- decorated basket
- gaily decorated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 64
- 230000001360 synchronised effect Effects 0.000 claims abstract description 60
- 238000005530 etching Methods 0.000 claims abstract description 20
- 230000005540 biological transmission Effects 0.000 claims description 26
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 238000012546 transfer Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 abstract description 22
- 238000005260 corrosion Methods 0.000 abstract description 21
- 230000007797 corrosion Effects 0.000 abstract description 21
- 238000000034 method Methods 0.000 abstract description 18
- 230000008569 process Effects 0.000 abstract description 17
- 230000009471 action Effects 0.000 abstract description 3
- 239000013618 particulate matter Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 235000014347 soups Nutrition 0.000 description 7
- 229910021645 metal ion Inorganic materials 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000002253 acid Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000001455 metallic ions Chemical class 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102044056A CN101728240B (zh) | 2009-09-30 | 2009-09-30 | 一种多功能抛动旋转机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009102044056A CN101728240B (zh) | 2009-09-30 | 2009-09-30 | 一种多功能抛动旋转机构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101728240A CN101728240A (zh) | 2010-06-09 |
CN101728240B true CN101728240B (zh) | 2011-07-20 |
Family
ID=42448908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009102044056A Active CN101728240B (zh) | 2009-09-30 | 2009-09-30 | 一种多功能抛动旋转机构 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101728240B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102319693A (zh) * | 2011-07-07 | 2012-01-18 | 苏州赤诚洗净科技有限公司 | 带抛动装置的太阳能电池硅片的超声波清洗装置 |
CN103551331B (zh) * | 2013-10-29 | 2015-05-13 | 科威信(无锡)洗净科技有限公司 | 碳氢清洗机中的抛动转动装置 |
CN105374663B (zh) * | 2015-10-19 | 2017-11-17 | 锦州阳光能源有限公司 | 硅片酸洗减薄机 |
CN105551952B (zh) * | 2015-12-21 | 2018-10-19 | 上海提牛机电设备有限公司 | 芯片深沟腐蚀装置 |
CN107887292A (zh) * | 2016-09-30 | 2018-04-06 | 宫朝光 | 硅片化学减薄设备 |
CN110620066A (zh) * | 2019-09-06 | 2019-12-27 | 上海华力集成电路制造有限公司 | 槽式湿法刻蚀机台及利用其进行湿法刻蚀的方法 |
CN113035751B (zh) * | 2021-03-02 | 2022-08-19 | 桂林雷光科技有限公司 | 一种去应力腐蚀机的芯片旋转装置及其设备 |
CN113725130B (zh) * | 2021-11-01 | 2021-12-28 | 天霖(张家港)电子科技有限公司 | 一种半导体结构的刻蚀装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2796868Y (zh) * | 2005-03-24 | 2006-07-19 | 上海科伟达超声波科技有限公司 | 抛动旋转助洗装置 |
CN201556607U (zh) * | 2009-09-30 | 2010-08-18 | 耿彪 | 一种多功能抛动旋转机构 |
-
2009
- 2009-09-30 CN CN2009102044056A patent/CN101728240B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2796868Y (zh) * | 2005-03-24 | 2006-07-19 | 上海科伟达超声波科技有限公司 | 抛动旋转助洗装置 |
CN201556607U (zh) * | 2009-09-30 | 2010-08-18 | 耿彪 | 一种多功能抛动旋转机构 |
Also Published As
Publication number | Publication date |
---|---|
CN101728240A (zh) | 2010-06-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101728240B (zh) | 一种多功能抛动旋转机构 | |
CN201556607U (zh) | 一种多功能抛动旋转机构 | |
CN111672853A (zh) | 一种成本低的化妆品用玻璃瓶加工方法 | |
CN106045327B (zh) | Ag防眩光平板显示玻璃制造方法 | |
CN102564287A (zh) | 利用晶圆台测量晶圆的膜厚度的方法 | |
CN103290382B (zh) | 一种真空镀膜机行星式工件架 | |
TW201832944A (zh) | 印刷設備 | |
CN105826222A (zh) | 一种晶圆刻蚀设备 | |
CN201374316Y (zh) | 一种用于晶圆清洗或腐蚀的旋转装置 | |
CN111863660A (zh) | 硅片清洗装置、硅片双面清洗设备及硅片的清洗方法 | |
CN101958228B (zh) | 具有移动式泄液槽的清洗蚀刻机台 | |
CN105833765A (zh) | 一种防止物料沉积的搅拌器 | |
CN205406498U (zh) | 一种晶圆刻蚀设备 | |
CN204174265U (zh) | 一种可实现真空状态下自动翻片的翻转驱动装置 | |
CN203595896U (zh) | 基板显影处理装置 | |
CN113305093B (zh) | 半导体清洗设备中的清洗槽及半导体清洗设备 | |
CN113438889B (zh) | 一种多工位电子芯片吸取加工生产设备 | |
CN104174544A (zh) | 靶材真空喷涂生产设备 | |
CN211247535U (zh) | 一种主减速器壳体生产线智能清洗设备 | |
CN220272424U (zh) | 一种全自动清洗晶圆的装置 | |
CN202358648U (zh) | 一种双螺旋输送防粘辊自动清理装置 | |
CN101656221A (zh) | 应用于半导体刻蚀清洗设备的全塑料高速机械手 | |
JP6379540B2 (ja) | 洗浄装置および洗浄方法 | |
CN207957573U (zh) | 一种工装检具起吊机构 | |
CN202513194U (zh) | 基板传送系统 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20100609 Assignee: Beijing Hualin JIAYE Technology Co., Ltd. Assignor: Geng Biao Contract record no.: 2012990000923 Denomination of invention: Multifunctional throw rotating mechanism Granted publication date: 20110720 License type: Exclusive License Record date: 20121225 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160728 Address after: 101100 Beijing city Tongzhou District Songzhuang town of houxiagongzhuang village 1000 meters to the Southeast Patentee after: Beijing Hualin JIAYE Technology Co., Ltd. Address before: 053873 No. 15 Geng Zhuang village, upper town, Shenzhou City, Hebei Province Patentee before: Geng Biao |