CN101648649A - 真空基片传送系统 - Google Patents
真空基片传送系统 Download PDFInfo
- Publication number
- CN101648649A CN101648649A CN200910192013A CN200910192013A CN101648649A CN 101648649 A CN101648649 A CN 101648649A CN 200910192013 A CN200910192013 A CN 200910192013A CN 200910192013 A CN200910192013 A CN 200910192013A CN 101648649 A CN101648649 A CN 101648649A
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- CN
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- Prior art keywords
- vacuum
- chamber
- basal plate
- transmitting system
- transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 claims abstract description 101
- 230000005540 biological transmission Effects 0.000 claims abstract description 97
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims description 42
- 230000001360 synchronised effect Effects 0.000 abstract description 24
- 230000003749 cleanliness Effects 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 22
- 238000012545 processing Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 8
- 239000010408 film Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000013049 sediment Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 241000252254 Catostomidae Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011796 hollow space material Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/16—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by roller conveyors
- C03B35/163—Drive means, clutches, gearing or drive speed control means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/16—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by roller conveyors
- C03B35/165—Supports or couplings for roller ends, e.g. trunions, gudgeons
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/16—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by roller conveyors
- C03B35/18—Construction of the conveyor rollers ; Materials, coatings or coverings thereof
- C03B35/186—End caps, end fixtures or roller end shape designs
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (8)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910192013A CN101648649B (zh) | 2009-09-03 | 2009-09-03 | 真空基片传送系统 |
PCT/CN2009/076037 WO2011026295A1 (zh) | 2009-09-03 | 2009-12-25 | 真空基片传送系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910192013A CN101648649B (zh) | 2009-09-03 | 2009-09-03 | 真空基片传送系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101648649A true CN101648649A (zh) | 2010-02-17 |
CN101648649B CN101648649B (zh) | 2012-10-10 |
Family
ID=41671007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200910192013A Expired - Fee Related CN101648649B (zh) | 2009-09-03 | 2009-09-03 | 真空基片传送系统 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN101648649B (zh) |
WO (1) | WO2011026295A1 (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101826452A (zh) * | 2010-03-30 | 2010-09-08 | 东莞宏威数码机械有限公司 | 基片上载装置 |
CN102560443A (zh) * | 2011-12-31 | 2012-07-11 | 汉能科技有限公司 | 一种工艺腔传输控制系统 |
CN102674005A (zh) * | 2011-03-14 | 2012-09-19 | 无锡康力电子有限公司 | 电子级超薄玻璃清洗设备用传送装置 |
CN103043441A (zh) * | 2011-10-14 | 2013-04-17 | 黄正栋 | 传动装置 |
WO2015184676A1 (zh) * | 2014-06-03 | 2015-12-10 | 上海理想万里晖薄膜设备有限公司 | 实现基板正交传送的真空搬运装置及其搬运方法 |
CN106044048A (zh) * | 2016-07-29 | 2016-10-26 | 芜湖鸣人热能设备有限公司 | 钢板运输装置 |
CN106746720A (zh) * | 2016-12-02 | 2017-05-31 | 东莞市天合机电开发有限公司 | 一种玻璃基板镀膜机构 |
CN108639659A (zh) * | 2018-06-19 | 2018-10-12 | 江苏港星方能超声洗净科技有限公司 | 直通式真空装置 |
CN110079791A (zh) * | 2019-04-25 | 2019-08-02 | 北京捷造光电技术有限公司 | 一种用于pecvd反应区的伸缩式滚轮传输结构 |
CN112093378A (zh) * | 2020-11-10 | 2020-12-18 | 山东金宜善新材料有限公司 | 四溴双酚a离心物料上料装置 |
CN112606287A (zh) * | 2020-10-23 | 2021-04-06 | 浙江中科玖源新材料有限公司 | 一种聚酰亚胺流延膜干燥设备 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3579348B2 (ja) * | 2000-12-11 | 2004-10-20 | 住友精密工業株式会社 | 傾斜式液切り装置 |
JP2003341835A (ja) * | 2002-05-27 | 2003-12-03 | Shimada Phys & Chem Ind Co Ltd | 基板のガス処理装置 |
JP2004196482A (ja) * | 2002-12-18 | 2004-07-15 | Maruyasu Kikai Kk | ローラコンベア |
DE10328273A1 (de) * | 2003-06-23 | 2005-01-27 | Von Ardenne Anlagentechnik Gmbh | Transportvorrichtung flächenförmiger Substrate, insbesondere in Vakuumbeschichtungsanlagen |
JP2005269709A (ja) * | 2004-03-16 | 2005-09-29 | Maguneo Giken:Kk | 磁気回転伝達装置及び密閉撹拌装置 |
CN1810608A (zh) * | 2005-01-26 | 2006-08-02 | 三发机电有限公司 | 基底传送设备 |
DE502006004376D1 (de) * | 2006-06-22 | 2009-09-10 | Applied Materials Gmbh & Co Kg | Vakuumbeschichtungsanlage |
US20080302656A1 (en) * | 2007-06-06 | 2008-12-11 | Jurgen Henrich | Vacuum coating installation with transport rollers for the transport of a planar substrate |
-
2009
- 2009-09-03 CN CN200910192013A patent/CN101648649B/zh not_active Expired - Fee Related
- 2009-12-25 WO PCT/CN2009/076037 patent/WO2011026295A1/zh active Application Filing
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101826452A (zh) * | 2010-03-30 | 2010-09-08 | 东莞宏威数码机械有限公司 | 基片上载装置 |
CN101826452B (zh) * | 2010-03-30 | 2011-09-07 | 东莞宏威数码机械有限公司 | 基片上载装置 |
CN102674005A (zh) * | 2011-03-14 | 2012-09-19 | 无锡康力电子有限公司 | 电子级超薄玻璃清洗设备用传送装置 |
CN103043441A (zh) * | 2011-10-14 | 2013-04-17 | 黄正栋 | 传动装置 |
CN102560443A (zh) * | 2011-12-31 | 2012-07-11 | 汉能科技有限公司 | 一种工艺腔传输控制系统 |
WO2015184676A1 (zh) * | 2014-06-03 | 2015-12-10 | 上海理想万里晖薄膜设备有限公司 | 实现基板正交传送的真空搬运装置及其搬运方法 |
CN106044048A (zh) * | 2016-07-29 | 2016-10-26 | 芜湖鸣人热能设备有限公司 | 钢板运输装置 |
CN106746720A (zh) * | 2016-12-02 | 2017-05-31 | 东莞市天合机电开发有限公司 | 一种玻璃基板镀膜机构 |
CN106746720B (zh) * | 2016-12-02 | 2019-01-22 | 徐州市凯诺机械有限公司 | 一种玻璃基板镀膜机构 |
CN108639659A (zh) * | 2018-06-19 | 2018-10-12 | 江苏港星方能超声洗净科技有限公司 | 直通式真空装置 |
CN110079791A (zh) * | 2019-04-25 | 2019-08-02 | 北京捷造光电技术有限公司 | 一种用于pecvd反应区的伸缩式滚轮传输结构 |
CN112606287A (zh) * | 2020-10-23 | 2021-04-06 | 浙江中科玖源新材料有限公司 | 一种聚酰亚胺流延膜干燥设备 |
CN112606287B (zh) * | 2020-10-23 | 2022-06-07 | 浙江中科玖源新材料有限公司 | 一种聚酰亚胺流延膜干燥设备 |
CN112093378A (zh) * | 2020-11-10 | 2020-12-18 | 山东金宜善新材料有限公司 | 四溴双酚a离心物料上料装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2011026295A1 (zh) | 2011-03-10 |
CN101648649B (zh) | 2012-10-10 |
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C14 | Grant of patent or utility model | ||
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Effective date of registration: 20131205 Granted publication date: 20121010 |
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PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20121010 |
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PD01 | Discharge of preservation of patent |
Date of cancellation: 20141205 Granted publication date: 20121010 |
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C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121010 Termination date: 20130903 |