CN101704452B - 滚轮装置驱动机构 - Google Patents
滚轮装置驱动机构 Download PDFInfo
- Publication number
- CN101704452B CN101704452B CN2009101920236A CN200910192023A CN101704452B CN 101704452 B CN101704452 B CN 101704452B CN 2009101920236 A CN2009101920236 A CN 2009101920236A CN 200910192023 A CN200910192023 A CN 200910192023A CN 101704452 B CN101704452 B CN 101704452B
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- Prior art keywords
- roller
- magnetic ring
- driving mechanism
- transmission gear
- ring cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009101920236A CN101704452B (zh) | 2009-09-03 | 2009-09-03 | 滚轮装置驱动机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009101920236A CN101704452B (zh) | 2009-09-03 | 2009-09-03 | 滚轮装置驱动机构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101704452A CN101704452A (zh) | 2010-05-12 |
CN101704452B true CN101704452B (zh) | 2012-05-02 |
Family
ID=42374723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009101920236A Expired - Fee Related CN101704452B (zh) | 2009-09-03 | 2009-09-03 | 滚轮装置驱动机构 |
Country Status (1)
Country | Link |
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CN (1) | CN101704452B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102180329B (zh) * | 2011-03-25 | 2012-12-26 | 上海功源电子科技有限公司 | 同步带驱动传输滚轮式输送装置 |
JP6400977B2 (ja) * | 2013-09-25 | 2018-10-03 | 芝浦メカトロニクス株式会社 | スピン処理装置 |
CN111455341B (zh) * | 2020-06-18 | 2020-09-08 | 上海陛通半导体能源科技股份有限公司 | 基于磁耦合旋转的物理气相沉积设备 |
CN115158964A (zh) * | 2022-08-03 | 2022-10-11 | 中国电子科技集团公司第二十四研究所 | 一种密封环境内动力传输的装置及其使用方法 |
-
2009
- 2009-09-03 CN CN2009101920236A patent/CN101704452B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101704452A (zh) | 2010-05-12 |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120502 Termination date: 20130903 |