CN101958634B - 真空动密封精确传动装置 - Google Patents
真空动密封精确传动装置 Download PDFInfo
- Publication number
- CN101958634B CN101958634B CN2010101711322A CN201010171132A CN101958634B CN 101958634 B CN101958634 B CN 101958634B CN 2010101711322 A CN2010101711322 A CN 2010101711322A CN 201010171132 A CN201010171132 A CN 201010171132A CN 101958634 B CN101958634 B CN 101958634B
- Authority
- CN
- China
- Prior art keywords
- holder
- sealing assembly
- vacuum
- dynamic sealing
- bellows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005540 biological transmission Effects 0.000 title claims abstract description 58
- 238000001514 detection method Methods 0.000 claims abstract description 53
- 238000007789 sealing Methods 0.000 claims description 69
- 230000008878 coupling Effects 0.000 claims description 35
- 238000010168 coupling process Methods 0.000 claims description 35
- 238000005859 coupling reaction Methods 0.000 claims description 35
- 230000003749 cleanliness Effects 0.000 abstract description 8
- 238000005259 measurement Methods 0.000 abstract 2
- 230000003287 optical effect Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 description 10
- 238000012545 processing Methods 0.000 description 5
- 230000001360 synchronised effect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000700 radioactive tracer Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J9/00—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction
- F16J9/12—Details
- F16J9/14—Joint-closures
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
- Sealing Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (5)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101711322A CN101958634B (zh) | 2010-05-06 | 2010-05-06 | 真空动密封精确传动装置 |
PCT/CN2011/071857 WO2011137689A1 (zh) | 2010-05-06 | 2011-03-16 | 真空动密封精确传动装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101711322A CN101958634B (zh) | 2010-05-06 | 2010-05-06 | 真空动密封精确传动装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101958634A CN101958634A (zh) | 2011-01-26 |
CN101958634B true CN101958634B (zh) | 2012-07-25 |
Family
ID=43485795
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101711322A Expired - Fee Related CN101958634B (zh) | 2010-05-06 | 2010-05-06 | 真空动密封精确传动装置 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN101958634B (zh) |
WO (1) | WO2011137689A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101958634B (zh) * | 2010-05-06 | 2012-07-25 | 东莞宏威数码机械有限公司 | 真空动密封精确传动装置 |
CN102678934A (zh) * | 2012-05-17 | 2012-09-19 | 东莞宏威数码机械有限公司 | 密封传动装置 |
CN108449859B (zh) * | 2018-03-08 | 2019-12-06 | 西北核技术研究所 | 用于真空中的轮轴式粒子加速器降能装置及其降能方法 |
CN114810842B (zh) * | 2022-06-28 | 2022-09-23 | 天津德沃尔智能科技有限公司 | 交叉轴承装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3371650A (en) * | 1965-12-31 | 1968-03-05 | Bendix Corp | Means to position and drive work support |
DE4106846C1 (en) * | 1991-03-04 | 1992-01-30 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | High vacuum tight drive for MBE appts. - comprising mounting head for substrate carrier pivotable between deposition position and charging position |
CN2552944Y (zh) * | 2002-07-04 | 2003-05-28 | 昆明贵金属研究所 | 真空镀膜轴向运动控制装置 |
CN1582069A (zh) * | 2003-08-13 | 2005-02-16 | 胜华科技股份有限公司 | 有机电激发光元件的成膜设备 |
CN201674380U (zh) * | 2010-05-06 | 2010-12-15 | 东莞宏威数码机械有限公司 | 真空动密封精确传动机构 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101958634B (zh) * | 2010-05-06 | 2012-07-25 | 东莞宏威数码机械有限公司 | 真空动密封精确传动装置 |
-
2010
- 2010-05-06 CN CN2010101711322A patent/CN101958634B/zh not_active Expired - Fee Related
-
2011
- 2011-03-16 WO PCT/CN2011/071857 patent/WO2011137689A1/zh active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3371650A (en) * | 1965-12-31 | 1968-03-05 | Bendix Corp | Means to position and drive work support |
DE4106846C1 (en) * | 1991-03-04 | 1992-01-30 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | High vacuum tight drive for MBE appts. - comprising mounting head for substrate carrier pivotable between deposition position and charging position |
CN2552944Y (zh) * | 2002-07-04 | 2003-05-28 | 昆明贵金属研究所 | 真空镀膜轴向运动控制装置 |
CN1582069A (zh) * | 2003-08-13 | 2005-02-16 | 胜华科技股份有限公司 | 有机电激发光元件的成膜设备 |
CN201674380U (zh) * | 2010-05-06 | 2010-12-15 | 东莞宏威数码机械有限公司 | 真空动密封精确传动机构 |
Also Published As
Publication number | Publication date |
---|---|
WO2011137689A1 (zh) | 2011-11-10 |
CN101958634A (zh) | 2011-01-26 |
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