CN101636462B - 切片和晶片附连粘合剂 - Google Patents

切片和晶片附连粘合剂 Download PDF

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Publication number
CN101636462B
CN101636462B CN2008800086804A CN200880008680A CN101636462B CN 101636462 B CN101636462 B CN 101636462B CN 2008800086804 A CN2008800086804 A CN 2008800086804A CN 200880008680 A CN200880008680 A CN 200880008680A CN 101636462 B CN101636462 B CN 101636462B
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Prior art keywords
acrylate
acrylic ester
thermosetting resin
tackiness agent
ester polymer
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Expired - Fee Related
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CN2008800086804A
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English (en)
Chinese (zh)
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CN101636462A (zh
Inventor
埃里克·G·拉森
迈克尔·A·克罗普
大卫·J·普劳特
谢里尔·L·摩尔
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04Homopolymers or copolymers of esters
    • C09J133/06Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C09J133/08Homopolymers or copolymers of acrylic acid esters
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    • H01L21/6835Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836Wafer tapes, e.g. grinding or dicing support tapes
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    • H01L2221/67Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
    • H01L2221/683Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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    • H01L2221/68327Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/2919Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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    • H01L2224/83191Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Organic Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Adhesive Tapes (AREA)
  • Die Bonding (AREA)
CN2008800086804A 2007-03-16 2008-03-07 切片和晶片附连粘合剂 Expired - Fee Related CN101636462B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US89518907P 2007-03-16 2007-03-16
US60/895,189 2007-03-16
PCT/US2008/056178 WO2008115711A1 (en) 2007-03-16 2008-03-07 Dicing and die attach adhesive

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Publication Number Publication Date
CN101636462A CN101636462A (zh) 2010-01-27
CN101636462B true CN101636462B (zh) 2013-03-13

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US (1) US8022145B2 (OSRAM)
EP (1) EP2134800A4 (OSRAM)
JP (1) JP2010521555A (OSRAM)
KR (1) KR20100014539A (OSRAM)
CN (1) CN101636462B (OSRAM)
TW (1) TW200902664A (OSRAM)
WO (1) WO2008115711A1 (OSRAM)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009114345A1 (en) * 2008-03-07 2009-09-17 3M Innovative Properties Company Dicing tape and die attach adhesive with patterned backing
JP2011014767A (ja) * 2009-07-03 2011-01-20 Nippon Electric Glass Co Ltd 発光デバイス及びその製造方法
CN101988961B (zh) * 2009-08-04 2013-01-02 武汉武大卓越科技有限责任公司 地理位置数据采集系统
JP5833809B2 (ja) * 2010-02-01 2015-12-16 デクセリアルズ株式会社 異方性導電フィルム、接合体及び接続方法
KR101576689B1 (ko) * 2010-11-24 2015-12-10 (주)엘지하우시스 터치패널용 점착제 조성물, 점착필름 및 터치패널
EP2736999B1 (en) * 2011-07-28 2018-11-07 Protavic Korea Co., Ltd. Flexible bismaleimide, benzoxazine, epoxy-anhydride adduct hybrid adhesive
US9056438B2 (en) 2012-05-02 2015-06-16 3M Innovative Properties Company Curable composition, articles comprising the curable composition, and method of making the same
CN103812048B (zh) * 2012-11-15 2017-10-27 国家电网公司 Gis备用间隔的检测系统及方法
WO2014092019A1 (ja) 2012-12-12 2014-06-19 株式会社ニコン 組成物、積層体、積層体の製造方法、トランジスタおよびトランジスタの製造方法
JP6454580B2 (ja) * 2015-03-30 2019-01-16 デクセリアルズ株式会社 熱硬化性接着シート、及び半導体装置の製造方法
EP3450479A1 (en) * 2017-09-01 2019-03-06 Henkel AG & Co. KGaA A latent, fast curing composition, a use thereof and an article having a cured composition obtainable therefrom
CN108276923A (zh) * 2018-02-02 2018-07-13 苏州城邦达力材料科技有限公司 一种uv减粘组合物、uv减粘膜及其制备方法
CN119391356A (zh) * 2024-11-22 2025-02-07 东莞市贝特利新材料有限公司 一种紫外光固化粘接剂及其制备方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4968559A (en) 1985-02-14 1990-11-06 Bando Chemical Industries. Ltd. Pressure sensitive adhesive film with barrier layer
US5234730A (en) 1986-11-07 1993-08-10 Tremco, Inc. Adhesive composition, process, and product
US5049085A (en) 1989-12-22 1991-09-17 Minnesota Mining And Manufacturing Company Anisotropically conductive polymeric matrix
US5300788A (en) 1991-01-18 1994-04-05 Kopin Corporation Light emitting diode bars and arrays and method of making same
EP0578498B1 (en) * 1992-07-10 1997-04-16 Nippon Shokubai Co., Ltd. Acrylic polymer, its use and process for producing it
EP0842960A4 (en) 1996-06-03 1999-09-22 Toyo Ink Mfg Co SOLIDIFIABLE LIQUID RESIN COMPOSITION
US20020007910A1 (en) * 1996-11-12 2002-01-24 Greggory Scott Bennett Thermosettable pressure sensitive adhesive
DE19857237A1 (de) * 1997-12-23 1999-06-24 Henkel Kgaa Strahlenhärtbare Kaschierklebestoffe
US6265460B1 (en) 1998-06-29 2001-07-24 3M Innovative Properties Company Hot-melt adhesive composition, heat-bonding film adhesive and adhering method using hot-melt adhesive composition
US6235850B1 (en) * 1998-12-11 2001-05-22 3M Immovative Properties Company Epoxy/acrylic terpolymer self-fixturing adhesive
US6180527B1 (en) 1999-08-09 2001-01-30 Micron Technology, Inc. Method and apparatus for thinning article, and article
US6472065B1 (en) * 2000-07-13 2002-10-29 3M Innovative Properties Company Clear adhesive sheet
WO2002074686A2 (en) 2000-12-05 2002-09-26 Analog Devices, Inc. A method and device for protecting micro electromechanical systems structures during dicing of a wafer
JP4699620B2 (ja) * 2001-03-05 2011-06-15 日立化成工業株式会社 感光性接着フィルムおよびその用途ならびに半導体装置の製造方法
WO2003089506A1 (en) * 2002-04-22 2003-10-30 Purdue Research Foundation Hydrogels having enhanced elasticity and mechanical strength properties
US7396869B2 (en) 2002-12-04 2008-07-08 Denovus Llc Metallic acrylate curing agents and usage thereof in intermediate compositions
JP2004273895A (ja) 2003-03-11 2004-09-30 Disco Abrasive Syst Ltd 半導体ウエーハの分割方法
US7410831B2 (en) 2003-05-12 2008-08-12 Tokyo Seimitsu Co., Ltd. Method and device for dividing plate-like member
JP4027332B2 (ja) * 2004-03-19 2007-12-26 リンテック株式会社 半導体用粘接着シートおよび半導体装置の製造方法
US20060252234A1 (en) 2004-07-07 2006-11-09 Lintec Corporation Hardenable pressure sensitive adhesive sheet for dicing/die-bonding and method for manufacturing semiconductor device
CA2578694C (en) * 2004-09-01 2014-02-25 Appleton Papers Inc. Encapsulated cure systems
JP4466397B2 (ja) * 2005-02-10 2010-05-26 住友ベークライト株式会社 半導体用接着フィルム及びこれを用いた半導体装置
WO2009114345A1 (en) * 2008-03-07 2009-09-17 3M Innovative Properties Company Dicing tape and die attach adhesive with patterned backing

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TW200902664A (en) 2009-01-16
US8022145B2 (en) 2011-09-20
WO2008115711A1 (en) 2008-09-25
EP2134800A4 (en) 2011-09-28
EP2134800A1 (en) 2009-12-23
CN101636462A (zh) 2010-01-27
KR20100014539A (ko) 2010-02-10
JP2010521555A (ja) 2010-06-24

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