CN101558454B - 包括具有各自的晶体取向的多个层的x射线聚焦光学器件 - Google Patents
包括具有各自的晶体取向的多个层的x射线聚焦光学器件 Download PDFInfo
- Publication number
- CN101558454B CN101558454B CN200780046503.0A CN200780046503A CN101558454B CN 101558454 B CN101558454 B CN 101558454B CN 200780046503 A CN200780046503 A CN 200780046503A CN 101558454 B CN101558454 B CN 101558454B
- Authority
- CN
- China
- Prior art keywords
- optical device
- layer
- monochromatic
- ray
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/062—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements the element being a crystal
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
- G21K2201/064—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Lenses (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US86613406P | 2006-11-16 | 2006-11-16 | |
| US60/866,134 | 2006-11-16 | ||
| PCT/US2007/084938 WO2008061221A2 (en) | 2006-11-16 | 2007-11-16 | X-ray focusing optic having multiple layers with respective crystal orientations |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101558454A CN101558454A (zh) | 2009-10-14 |
| CN101558454B true CN101558454B (zh) | 2013-11-06 |
Family
ID=39358362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200780046503.0A Expired - Fee Related CN101558454B (zh) | 2006-11-16 | 2007-11-16 | 包括具有各自的晶体取向的多个层的x射线聚焦光学器件 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7738629B2 (https=) |
| EP (1) | EP2097907B1 (https=) |
| JP (1) | JP5315251B2 (https=) |
| CN (1) | CN101558454B (https=) |
| WO (1) | WO2008061221A2 (https=) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6084222B2 (ja) | 2011-08-15 | 2017-02-22 | エックス−レイ オプティカル システムズ インコーポレーテッド | 重質試料用の試料粘度/流量制御およびそのx線分析応用 |
| CN103946693B (zh) | 2011-10-06 | 2017-05-03 | X射线光学系统公司 | 可移除式x‑射线分析仪用的可移动型运输及屏蔽装置 |
| EP3168606A1 (en) | 2011-10-26 | 2017-05-17 | X-Ray Optical Systems, Inc. | X-ray monochromator and support |
| US20150117599A1 (en) * | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
| EP2843362A4 (en) * | 2012-04-25 | 2015-12-02 | Nippon Steel & Sumitomo Metal Corp | METHOD AND DEVICE FOR DETERMINING THE FE-ZN ALLOYING PHASE THICKNESS OF A HOTZIN-COATED STEEL PLATE |
| JP5928363B2 (ja) * | 2013-02-01 | 2016-06-01 | 信越半導体株式会社 | シリコン単結晶ウエーハの評価方法 |
| US9883793B2 (en) | 2013-08-23 | 2018-02-06 | The Schepens Eye Research Institute, Inc. | Spatial modeling of visual fields |
| US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
| MX356909B (es) | 2013-10-25 | 2018-06-20 | Nippon Steel & Sumitomo Metal Corp | Dispositivo de determinación de adhesión de platinado en línea para lámina de acero galvanizada y línea de producción de lámina de acero galvanizada. |
| USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
| JP6069609B2 (ja) * | 2015-03-26 | 2017-02-01 | 株式会社リガク | 二重湾曲x線集光素子およびその構成体、二重湾曲x線分光素子およびその構成体の製造方法 |
| US10020087B1 (en) * | 2015-04-21 | 2018-07-10 | Michael Kozhukh | Highly reflective crystalline mosaic neutron monochromator |
| US10677744B1 (en) * | 2016-06-03 | 2020-06-09 | U.S. Department Of Energy | Multi-cone x-ray imaging Bragg crystal spectrometer |
| US10845491B2 (en) | 2018-06-04 | 2020-11-24 | Sigray, Inc. | Energy-resolving x-ray detection system |
| KR102718046B1 (ko) * | 2018-07-04 | 2024-10-17 | 가부시키가이샤 리가쿠 | 형광 x선 분석 장치 |
| GB2591630B (en) | 2018-07-26 | 2023-05-24 | Sigray Inc | High brightness x-ray reflection source |
| US10656105B2 (en) | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
| US10962491B2 (en) | 2018-09-04 | 2021-03-30 | Sigray, Inc. | System and method for x-ray fluorescence with filtering |
| DE112019004478T5 (de) | 2018-09-07 | 2021-07-08 | Sigray, Inc. | System und verfahren zur röntgenanalyse mit wählbarer tiefe |
| US11217357B2 (en) | 2020-02-10 | 2022-01-04 | Sigray, Inc. | X-ray mirror optics with multiple hyperboloidal/hyperbolic surface profiles |
| US12247934B2 (en) | 2022-07-29 | 2025-03-11 | X-Ray Optical Systems, Inc. | Polarized, energy dispersive x-ray fluorescence system and method |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4261771A (en) * | 1979-10-31 | 1981-04-14 | Bell Telephone Laboratories, Incorporated | Method of fabricating periodic monolayer semiconductor structures by molecular beam epitaxy |
| CN1058668A (zh) * | 1991-07-30 | 1992-02-12 | 双向合成材料有限公司 | 改进型中子反射超级镜面结构 |
| US5127028A (en) * | 1990-08-01 | 1992-06-30 | Wittry David B | Diffractord with doubly curved surface steps |
| US5757883A (en) * | 1995-04-26 | 1998-05-26 | U.S. Philips Corporation | Method of manufacturing an X-ray optical element for an X-ray analysis apparatus |
| US6285506B1 (en) * | 1999-01-21 | 2001-09-04 | X-Ray Optical Systems, Inc. | Curved optical device and method of fabrication |
| CN1313507A (zh) * | 2000-03-10 | 2001-09-19 | 中国科学院高能物理研究所 | 同步辐射x射线多层膜反射率计装置 |
| US6498830B2 (en) * | 1999-02-12 | 2002-12-24 | David B. Wittry | Method and apparatus for fabricating curved crystal x-ray optics |
| US7035374B2 (en) * | 2002-08-02 | 2006-04-25 | X-Ray Optical Systems, Inc. | Optical device for directing x-rays having a plurality of optical crystals |
| CN1829910A (zh) * | 2003-06-02 | 2006-09-06 | X射线光学系统公司 | 实现xanes分析的方法和设备 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4675889A (en) * | 1985-07-08 | 1987-06-23 | Ovonic Synthetic Materials Company, Inc. | Multiple wavelength X-ray dispersive devices and method of making the devices |
| JP2968993B2 (ja) * | 1990-11-29 | 1999-11-02 | 株式会社リコー | X線分光器 |
| JP2968995B2 (ja) | 1990-11-30 | 1999-11-02 | 株式会社リコー | 多波長分光素子 |
| US5164975A (en) * | 1991-06-13 | 1992-11-17 | The United States Of America As Represented By The United States Department Of Energy | Multiple wavelength X-ray monochromators |
-
2007
- 2007-11-16 US US11/941,377 patent/US7738629B2/en active Active
- 2007-11-16 CN CN200780046503.0A patent/CN101558454B/zh not_active Expired - Fee Related
- 2007-11-16 WO PCT/US2007/084938 patent/WO2008061221A2/en not_active Ceased
- 2007-11-16 JP JP2009537384A patent/JP5315251B2/ja not_active Expired - Fee Related
- 2007-11-16 EP EP07871499.5A patent/EP2097907B1/en not_active Not-in-force
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4261771A (en) * | 1979-10-31 | 1981-04-14 | Bell Telephone Laboratories, Incorporated | Method of fabricating periodic monolayer semiconductor structures by molecular beam epitaxy |
| US5127028A (en) * | 1990-08-01 | 1992-06-30 | Wittry David B | Diffractord with doubly curved surface steps |
| CN1058668A (zh) * | 1991-07-30 | 1992-02-12 | 双向合成材料有限公司 | 改进型中子反射超级镜面结构 |
| US5757883A (en) * | 1995-04-26 | 1998-05-26 | U.S. Philips Corporation | Method of manufacturing an X-ray optical element for an X-ray analysis apparatus |
| US6285506B1 (en) * | 1999-01-21 | 2001-09-04 | X-Ray Optical Systems, Inc. | Curved optical device and method of fabrication |
| US6498830B2 (en) * | 1999-02-12 | 2002-12-24 | David B. Wittry | Method and apparatus for fabricating curved crystal x-ray optics |
| CN1313507A (zh) * | 2000-03-10 | 2001-09-19 | 中国科学院高能物理研究所 | 同步辐射x射线多层膜反射率计装置 |
| US7035374B2 (en) * | 2002-08-02 | 2006-04-25 | X-Ray Optical Systems, Inc. | Optical device for directing x-rays having a plurality of optical crystals |
| CN1829910A (zh) * | 2003-06-02 | 2006-09-06 | X射线光学系统公司 | 实现xanes分析的方法和设备 |
Non-Patent Citations (6)
| Title |
|---|
| David B. Wittry等.X-ray Crystal Spectrometers and Monochromators in Microanalysis.《Microscopy and Microanalysis》.2001,(第7期), * |
| G. K. Celler等.Frontiers of silicon-on-insulator.《Applied Physics Reviews-Focused Review》.2003,第93卷(第9期), * |
| JP平4-204297A 1992.07.24 |
| 乐孜纯等.高能X射线聚焦组合透镜的理论研究.《光学学报》.2004,第24卷(第4期), * |
| 汤琦等.弧矢(Sagittal)聚焦双晶单色器设计.《光学 精密工程》.2002,第10卷(第4期), |
| 汤琦等.弧矢(Sagittal)聚焦双晶单色器设计.《光学 精密工程》.2002,第10卷(第4期), * |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2097907A2 (en) | 2009-09-09 |
| JP2010510494A (ja) | 2010-04-02 |
| CN101558454A (zh) | 2009-10-14 |
| EP2097907B1 (en) | 2013-07-03 |
| JP5315251B2 (ja) | 2013-10-16 |
| US20080117511A1 (en) | 2008-05-22 |
| US7738629B2 (en) | 2010-06-15 |
| WO2008061221A3 (en) | 2008-10-09 |
| WO2008061221A2 (en) | 2008-05-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101558454B (zh) | 包括具有各自的晶体取向的多个层的x射线聚焦光学器件 | |
| CN103765201B (zh) | X射线分析引擎和分析仪的支撑结构及高度对准的单色x射线光学器件 | |
| US7551722B2 (en) | X-ray target and apparatuses using the same | |
| JP4731178B2 (ja) | 光学反射素子、その製造方法、及びその素子を具備する光学機器 | |
| JP4994375B2 (ja) | 点焦点湾曲モノクロメータ光学体を使用するx線結像系 | |
| CN101278360B (zh) | 用于痕量元素制图的单色x射线微束 | |
| JPS6098399A (ja) | ポイントソースx線集束装置 | |
| CN104272424A (zh) | 具有使用多材料x 射线管阳极和单色光学装置产生的多激励能带的x射线分析器 | |
| EP1074025B1 (en) | X-ray concentrator and x-ray diagnostic system | |
| JP2010510494A5 (https=) | ||
| CN117079856A (zh) | 一种硬X射线微聚焦的Nb/Al多层膜Laue透镜 | |
| JP5173435B2 (ja) | X線モノクロメーターまたは中性子モノクロメーター | |
| JPH08201589A (ja) | X線分光素子 | |
| Padmore et al. | Sub-micron white-beam focusing using elliptically bent mirrors | |
| Michette et al. | Active microstructured arrays for x-ray optics | |
| Welzel et al. | Laboratory Instrumentation for X‐Ray Powder Diffraction: Developments and Examples | |
| Sanmartin et al. | Progress on the development of active micro-structured optical arrays for X-ray optics | |
| Zhu et al. | Development of X‐ray Microscopy at IPOE | |
| Bavdaz et al. | X-ray Optics: new technologies at ESA | |
| Sanmartin et al. | Development of spider micro-structured optical arrays for x-ray optics | |
| TW202609808A (zh) | X射線光學器件及用於評估樣品的方法 | |
| Snigirev | X-ray refractive optics for nanofocusing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131106 Termination date: 20201116 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |