CN101558454B - 包括具有各自的晶体取向的多个层的x射线聚焦光学器件 - Google Patents

包括具有各自的晶体取向的多个层的x射线聚焦光学器件 Download PDF

Info

Publication number
CN101558454B
CN101558454B CN200780046503.0A CN200780046503A CN101558454B CN 101558454 B CN101558454 B CN 101558454B CN 200780046503 A CN200780046503 A CN 200780046503A CN 101558454 B CN101558454 B CN 101558454B
Authority
CN
China
Prior art keywords
optical device
layer
monochromatic
ray
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200780046503.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN101558454A (zh
Inventor
陈泽武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
X Ray Optical Systems Inc
Original Assignee
X Ray Optical Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by X Ray Optical Systems Inc filed Critical X Ray Optical Systems Inc
Publication of CN101558454A publication Critical patent/CN101558454A/zh
Application granted granted Critical
Publication of CN101558454B publication Critical patent/CN101558454B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KHANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KHANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00Arrangements for handling radiation or particles
    • G21K2201/06Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/062Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements the element being a crystal
    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KHANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00Arrangements for handling radiation or particles
    • G21K2201/06Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/064Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Lenses (AREA)
CN200780046503.0A 2006-11-16 2007-11-16 包括具有各自的晶体取向的多个层的x射线聚焦光学器件 Expired - Fee Related CN101558454B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US86613406P 2006-11-16 2006-11-16
US60/866,134 2006-11-16
PCT/US2007/084938 WO2008061221A2 (en) 2006-11-16 2007-11-16 X-ray focusing optic having multiple layers with respective crystal orientations

Publications (2)

Publication Number Publication Date
CN101558454A CN101558454A (zh) 2009-10-14
CN101558454B true CN101558454B (zh) 2013-11-06

Family

ID=39358362

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200780046503.0A Expired - Fee Related CN101558454B (zh) 2006-11-16 2007-11-16 包括具有各自的晶体取向的多个层的x射线聚焦光学器件

Country Status (5)

Country Link
US (1) US7738629B2 (https=)
EP (1) EP2097907B1 (https=)
JP (1) JP5315251B2 (https=)
CN (1) CN101558454B (https=)
WO (1) WO2008061221A2 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6084222B2 (ja) 2011-08-15 2017-02-22 エックス−レイ オプティカル システムズ インコーポレーテッド 重質試料用の試料粘度/流量制御およびそのx線分析応用
CN103946693B (zh) 2011-10-06 2017-05-03 X射线光学系统公司 可移除式x‑射线分析仪用的可移动型运输及屏蔽装置
EP3168606A1 (en) 2011-10-26 2017-05-17 X-Ray Optical Systems, Inc. X-ray monochromator and support
US20150117599A1 (en) * 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
EP2843362A4 (en) * 2012-04-25 2015-12-02 Nippon Steel & Sumitomo Metal Corp METHOD AND DEVICE FOR DETERMINING THE FE-ZN ALLOYING PHASE THICKNESS OF A HOTZIN-COATED STEEL PLATE
JP5928363B2 (ja) * 2013-02-01 2016-06-01 信越半導体株式会社 シリコン単結晶ウエーハの評価方法
US9883793B2 (en) 2013-08-23 2018-02-06 The Schepens Eye Research Institute, Inc. Spatial modeling of visual fields
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
MX356909B (es) 2013-10-25 2018-06-20 Nippon Steel & Sumitomo Metal Corp Dispositivo de determinación de adhesión de platinado en línea para lámina de acero galvanizada y línea de producción de lámina de acero galvanizada.
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
JP6069609B2 (ja) * 2015-03-26 2017-02-01 株式会社リガク 二重湾曲x線集光素子およびその構成体、二重湾曲x線分光素子およびその構成体の製造方法
US10020087B1 (en) * 2015-04-21 2018-07-10 Michael Kozhukh Highly reflective crystalline mosaic neutron monochromator
US10677744B1 (en) * 2016-06-03 2020-06-09 U.S. Department Of Energy Multi-cone x-ray imaging Bragg crystal spectrometer
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
KR102718046B1 (ko) * 2018-07-04 2024-10-17 가부시키가이샤 리가쿠 형광 x선 분석 장치
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
DE112019004478T5 (de) 2018-09-07 2021-07-08 Sigray, Inc. System und verfahren zur röntgenanalyse mit wählbarer tiefe
US11217357B2 (en) 2020-02-10 2022-01-04 Sigray, Inc. X-ray mirror optics with multiple hyperboloidal/hyperbolic surface profiles
US12247934B2 (en) 2022-07-29 2025-03-11 X-Ray Optical Systems, Inc. Polarized, energy dispersive x-ray fluorescence system and method

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4261771A (en) * 1979-10-31 1981-04-14 Bell Telephone Laboratories, Incorporated Method of fabricating periodic monolayer semiconductor structures by molecular beam epitaxy
CN1058668A (zh) * 1991-07-30 1992-02-12 双向合成材料有限公司 改进型中子反射超级镜面结构
US5127028A (en) * 1990-08-01 1992-06-30 Wittry David B Diffractord with doubly curved surface steps
US5757883A (en) * 1995-04-26 1998-05-26 U.S. Philips Corporation Method of manufacturing an X-ray optical element for an X-ray analysis apparatus
US6285506B1 (en) * 1999-01-21 2001-09-04 X-Ray Optical Systems, Inc. Curved optical device and method of fabrication
CN1313507A (zh) * 2000-03-10 2001-09-19 中国科学院高能物理研究所 同步辐射x射线多层膜反射率计装置
US6498830B2 (en) * 1999-02-12 2002-12-24 David B. Wittry Method and apparatus for fabricating curved crystal x-ray optics
US7035374B2 (en) * 2002-08-02 2006-04-25 X-Ray Optical Systems, Inc. Optical device for directing x-rays having a plurality of optical crystals
CN1829910A (zh) * 2003-06-02 2006-09-06 X射线光学系统公司 实现xanes分析的方法和设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4675889A (en) * 1985-07-08 1987-06-23 Ovonic Synthetic Materials Company, Inc. Multiple wavelength X-ray dispersive devices and method of making the devices
JP2968993B2 (ja) * 1990-11-29 1999-11-02 株式会社リコー X線分光器
JP2968995B2 (ja) 1990-11-30 1999-11-02 株式会社リコー 多波長分光素子
US5164975A (en) * 1991-06-13 1992-11-17 The United States Of America As Represented By The United States Department Of Energy Multiple wavelength X-ray monochromators

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4261771A (en) * 1979-10-31 1981-04-14 Bell Telephone Laboratories, Incorporated Method of fabricating periodic monolayer semiconductor structures by molecular beam epitaxy
US5127028A (en) * 1990-08-01 1992-06-30 Wittry David B Diffractord with doubly curved surface steps
CN1058668A (zh) * 1991-07-30 1992-02-12 双向合成材料有限公司 改进型中子反射超级镜面结构
US5757883A (en) * 1995-04-26 1998-05-26 U.S. Philips Corporation Method of manufacturing an X-ray optical element for an X-ray analysis apparatus
US6285506B1 (en) * 1999-01-21 2001-09-04 X-Ray Optical Systems, Inc. Curved optical device and method of fabrication
US6498830B2 (en) * 1999-02-12 2002-12-24 David B. Wittry Method and apparatus for fabricating curved crystal x-ray optics
CN1313507A (zh) * 2000-03-10 2001-09-19 中国科学院高能物理研究所 同步辐射x射线多层膜反射率计装置
US7035374B2 (en) * 2002-08-02 2006-04-25 X-Ray Optical Systems, Inc. Optical device for directing x-rays having a plurality of optical crystals
CN1829910A (zh) * 2003-06-02 2006-09-06 X射线光学系统公司 实现xanes分析的方法和设备

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
David B. Wittry等.X-ray Crystal Spectrometers and Monochromators in Microanalysis.《Microscopy and Microanalysis》.2001,(第7期), *
G. K. Celler等.Frontiers of silicon-on-insulator.《Applied Physics Reviews-Focused Review》.2003,第93卷(第9期), *
JP平4-204297A 1992.07.24
乐孜纯等.高能X射线聚焦组合透镜的理论研究.《光学学报》.2004,第24卷(第4期), *
汤琦等.弧矢(Sagittal)聚焦双晶单色器设计.《光学 精密工程》.2002,第10卷(第4期),
汤琦等.弧矢(Sagittal)聚焦双晶单色器设计.《光学 精密工程》.2002,第10卷(第4期), *

Also Published As

Publication number Publication date
EP2097907A2 (en) 2009-09-09
JP2010510494A (ja) 2010-04-02
CN101558454A (zh) 2009-10-14
EP2097907B1 (en) 2013-07-03
JP5315251B2 (ja) 2013-10-16
US20080117511A1 (en) 2008-05-22
US7738629B2 (en) 2010-06-15
WO2008061221A3 (en) 2008-10-09
WO2008061221A2 (en) 2008-05-22

Similar Documents

Publication Publication Date Title
CN101558454B (zh) 包括具有各自的晶体取向的多个层的x射线聚焦光学器件
CN103765201B (zh) X射线分析引擎和分析仪的支撑结构及高度对准的单色x射线光学器件
US7551722B2 (en) X-ray target and apparatuses using the same
JP4731178B2 (ja) 光学反射素子、その製造方法、及びその素子を具備する光学機器
JP4994375B2 (ja) 点焦点湾曲モノクロメータ光学体を使用するx線結像系
CN101278360B (zh) 用于痕量元素制图的单色x射线微束
JPS6098399A (ja) ポイントソースx線集束装置
CN104272424A (zh) 具有使用多材料x 射线管阳极和单色光学装置产生的多激励能带的x射线分析器
EP1074025B1 (en) X-ray concentrator and x-ray diagnostic system
JP2010510494A5 (https=)
CN117079856A (zh) 一种硬X射线微聚焦的Nb/Al多层膜Laue透镜
JP5173435B2 (ja) X線モノクロメーターまたは中性子モノクロメーター
JPH08201589A (ja) X線分光素子
Padmore et al. Sub-micron white-beam focusing using elliptically bent mirrors
Michette et al. Active microstructured arrays for x-ray optics
Welzel et al. Laboratory Instrumentation for X‐Ray Powder Diffraction: Developments and Examples
Sanmartin et al. Progress on the development of active micro-structured optical arrays for X-ray optics
Zhu et al. Development of X‐ray Microscopy at IPOE
Bavdaz et al. X-ray Optics: new technologies at ESA
Sanmartin et al. Development of spider micro-structured optical arrays for x-ray optics
TW202609808A (zh) X射線光學器件及用於評估樣品的方法
Snigirev X-ray refractive optics for nanofocusing

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20131106

Termination date: 20201116

CF01 Termination of patent right due to non-payment of annual fee