CN101546133B - 曝光装置及曝光方法 - Google Patents
曝光装置及曝光方法 Download PDFInfo
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- CN101546133B CN101546133B CN2009101182133A CN200910118213A CN101546133B CN 101546133 B CN101546133 B CN 101546133B CN 2009101182133 A CN2009101182133 A CN 2009101182133A CN 200910118213 A CN200910118213 A CN 200910118213A CN 101546133 B CN101546133 B CN 101546133B
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- belt
- exposure
- pressing plate
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Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008084251A JP5117243B2 (ja) | 2008-03-27 | 2008-03-27 | 露光装置 |
JP2008-084251 | 2008-03-27 | ||
JP2008084251 | 2008-03-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101546133A CN101546133A (zh) | 2009-09-30 |
CN101546133B true CN101546133B (zh) | 2012-07-04 |
Family
ID=41193328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009101182133A Active CN101546133B (zh) | 2008-03-27 | 2009-02-25 | 曝光装置及曝光方法 |
Country Status (2)
Country | Link |
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JP (1) | JP5117243B2 (ja) |
CN (1) | CN101546133B (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011099563A1 (ja) * | 2010-02-12 | 2011-08-18 | 株式会社ニコン | 基板処理装置 |
US20120064460A1 (en) * | 2010-09-07 | 2012-03-15 | Nikon Corporation | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
KR101643679B1 (ko) * | 2012-01-17 | 2016-07-28 | 에이에스엠엘 네델란즈 비.브이. | 가요성 기판의 로딩 방법 및 리소그래피 장치 |
CN102692831B (zh) * | 2012-05-28 | 2014-03-26 | 京东方科技集团股份有限公司 | 对位标识及在曝光工艺中采用该对位标识制作工件的方法 |
KR101600810B1 (ko) * | 2014-05-12 | 2016-03-08 | 주식회사 옵티레이 | 노광 장치 |
DE102014215439B4 (de) | 2014-08-05 | 2017-08-24 | Nanoscribe Gmbh | Verfahren zum Herstellen einer Struktur |
CN107608177B (zh) * | 2017-10-22 | 2024-01-02 | 长春工业大学 | 一种制造超大面积纳米压印无缝图案的装置及方法 |
CN112777381B (zh) * | 2020-12-21 | 2022-09-30 | 江苏迪盛智能科技有限公司 | 尾料识别方法、装置、电子设备和存储介质 |
CN112693947B (zh) * | 2020-12-21 | 2022-09-27 | 江苏迪盛智能科技有限公司 | 拉料偏差处理方法、装置、电子设备和存储介质 |
CN113204176A (zh) * | 2021-04-27 | 2021-08-03 | 合肥芯碁微电子装备股份有限公司 | 用于检测和调试设备成像光路的工装、检测系统和方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0147807A2 (en) * | 1983-12-27 | 1985-07-10 | Rogers Corporation | Method for forming a substrate for tape automated bonding for electronic circuit elements |
JP3049785B2 (ja) * | 1991-02-13 | 2000-06-05 | 松下電器産業株式会社 | バンプの整形方法 |
CN1932646A (zh) * | 2005-09-14 | 2007-03-21 | 东海商事株式会社 | 曝光装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002368378A (ja) * | 2001-06-04 | 2002-12-20 | Dainippon Screen Mfg Co Ltd | 基板クランプ装置 |
JP3741013B2 (ja) * | 2001-09-17 | 2006-02-01 | ウシオ電機株式会社 | 蛇行修正機構を備えた帯状ワークの露光装置 |
JP4082104B2 (ja) * | 2002-06-21 | 2008-04-30 | ウシオ電機株式会社 | パターン検査装置 |
JP4407333B2 (ja) * | 2004-03-23 | 2010-02-03 | ウシオ電機株式会社 | 帯状ワークの露光装置 |
JP4479383B2 (ja) * | 2004-07-05 | 2010-06-09 | ウシオ電機株式会社 | パターン検査装置 |
-
2008
- 2008-03-27 JP JP2008084251A patent/JP5117243B2/ja active Active
-
2009
- 2009-02-25 CN CN2009101182133A patent/CN101546133B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0147807A2 (en) * | 1983-12-27 | 1985-07-10 | Rogers Corporation | Method for forming a substrate for tape automated bonding for electronic circuit elements |
JP3049785B2 (ja) * | 1991-02-13 | 2000-06-05 | 松下電器産業株式会社 | バンプの整形方法 |
CN1932646A (zh) * | 2005-09-14 | 2007-03-21 | 东海商事株式会社 | 曝光装置 |
Non-Patent Citations (2)
Title |
---|
JP平2-176662A 1990.07.09 |
JP特许第3049785号B2 2000.06.05 |
Also Published As
Publication number | Publication date |
---|---|
JP2009237334A (ja) | 2009-10-15 |
JP5117243B2 (ja) | 2013-01-16 |
CN101546133A (zh) | 2009-09-30 |
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