CN101535193A - 能回火的日光控制层体系及用于制备该层体系的方法 - Google Patents

能回火的日光控制层体系及用于制备该层体系的方法 Download PDF

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CN101535193A
CN101535193A CNA2007800295701A CN200780029570A CN101535193A CN 101535193 A CN101535193 A CN 101535193A CN A2007800295701 A CNA2007800295701 A CN A2007800295701A CN 200780029570 A CN200780029570 A CN 200780029570A CN 101535193 A CN101535193 A CN 101535193A
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coating systems
described coating
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CN101535193B (zh
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克里斯多佛·科克尔特
霍尔格·普勒尔
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Feng Adena company limited
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Abstract

本发明涉及一种在透明基底之上的、具有可调整的反射色和透射率的、可回火的日光控制层体系及制备该层体系的方法。本发明基于如下任务，即，介绍一种借助真空涂布可施加于玻璃上的日光防护层体系，该层体系能可变地进行热处理并且在此在保持化学和机械稳定性的情况下，不具有可见的色移，该任务通过一种用以涂布介电基底S0的、对可见光进行反射和吸收的、可回火的层体系来解决，所述层体系在基底S0上以如下顺序包含有至少一个高折射的透明介电层S2、功能性的金属反射和吸收层S4以及高折射的透明介电层S6。根据本发明的日光控制层体系使得调整反射色和透射率成为可能。

Description

能回火的日光控制层体系及用于制备该层体系的方法
技术领域
本发明涉及一种在透明基底之上的、具有可调节的反射色及透射率的、可回火的日光控制层体系。
背景技术
这类借助于真空涂布而施加于玻璃上的层体系主要在建筑业中用于窗和立面的构造和用于汽车业中。在该两种应用领域中，该层体系必须是化学稳定的并且是机械坚固的，其中，存在着标准化的测试来可类比地评价这些特性，例如在5％的盐酸中煮沸以及各种摩擦测试。
同时，该层体系必须对于可见光具有很高程度透过性(透射率)，透射率值优选为约75％至80％，并且对于在几μm的波长范围辐射，即在所谓的近红外范围内的辐射具有很高程度的反射能力。这种特殊的、依赖于波长的透射率及反射特性是主要用于日光防护的层体系—即公知的日光处理(亦即日光控制)体系的特征。但是，在特别的应用情况中，也需要远红外区域内的高反射能力，该反射能力反映在层体系的发射性能上。
所涉及的施加于玻璃上的日光防护层体系的另一重要特性是热处理的可行性，诸如该热处理例如用于制备建筑和汽车工业用的安全玻璃的回火过程中，或者用于挡风玻璃的玻璃成型过程中。因为在不同的应用情况中需要的是：为了成本低廉地制备和获得均质的层，在热处理之前进行涂布，所以该层体系必须具有如下机械、化学和光学的特性，所述特性在伴随根据应用情况而不同的温度模式和时间模式的各种热处理过程中不会或基本不会劣化。
在US 6,159,607中描述了一种基本针对所述这些要求的层体系。据此，用化学计量上的氮化硅层(Si3N4)覆盖由镍或镍的合金构成的、具有针对红外线辐射所需的反射特性的金属层，所述氮化硅层(Si3N4)又使得层体系在机械上和在化学上稳定。
由于热处理，该含镍的金属层不会使发射能力的劣化。但是已发现的是，在热处理的历程中，会发生特别是氮从氮化硅层到金属层的扩散过程以及镍沿着相反方向的扩散过程。
由于所述过程，依赖于热处理的温度和持续时间地，使所述层体系发生相对于未经热处理的层体系的色移，这特别是对于在建筑中的应用而言是不期望的。因为在立面构造中出于成本原因，只能在真正需要防止事故的地方使用经热处理的安全玻璃，从而使得总是要相毗邻地使用未经热处理的玻璃和经热处理的玻璃，并由此特别是表现出可能出现的色差。
因为在波长为大约10μm的另外的远红外区域内这种色差对于红外反射性层体系也是不期望的，所以在WO 02/092527中介绍了这样的层体系，所述层体系在反射层与设置于该反射层之上的、也可由氮化硅组成的介电层之间插入优选含有镍铬氧化物的、所谓的抗迁移层。该抗迁移层应在热处理期间及之后对导致色差的扩散过程进行补偿。但是，实践中已经证实：这只对于确定的热处理过程起效。
在EP 0646 551中介绍了避免相毗邻地使用的经热处理的和未经热处理的玻璃而引起的色差的另一种可能性。据此，利用位于红外反射性金属层之下的另一氮化硅层以及一个或两个氮化硅层的可变厚度，除了机械和化学特性之外，特别是有针对性地对层体系的光学特性进行调整，由此，能够精确地生产出有针对性的、很小的色偏，从而使得在热处理之后不再存在可见的色差并且这些经涂布的玻璃可用在立面中。但是，为此必须制备两个不同的、彼此之间以及与热处理过程相互精确地协调的层体系。这种层体系的调谐对于每个要用的颜色都是必需的并因此是非常高成本和不灵活的，并且只有在所需要的每个层体系的机械和化学稳定性容许的限度内才可行。
在应用情况中，各种不同的、彼此协调的层体系的使用只能通过如下的层体系来阻止，即，所述的层体系即使在如下的热处理中也基本不改变其光学特性，在所述热处理中，在持续时间和处理温度方面，在各种过程内常用的范围是可以充分利用的并且同时这两个参数是可以灵活选择的。为此目的，在US 6,524,714中介绍了一种层体系，该层体系代替公知的含镍的反射层而使用至少部分氮化的金属层，优选是含镍的或含铬的金属氮化物。在这里，金属的氮化度通过在涂布步骤的工作气体中的氮份额来调整，在所述涂布步骤中施加金属。
通过对反射性金属层进行氮化，至少在所述的625℃下10分钟的热处理范畴内降低了所描述的特别是氮在该层体系中的扩散过程并进而降低了该层体系的色移。在此，一种具有相同的、但不含氮化物的金属层并经历相同热处理的层体系被用作对比。
但是，利用金属的氮化，除了机械和化学稳定性减小之外还会连带引起特别是红外区域内反射特性的劣化。虽然减小的稳定性可以通过氮化硅层的改性来补偿，但是在每种情况下与之相联系的是光学特性的变化，从而要在色移与稳定性之间寻找一个让步。
另外，还需要的是，使这种反射性层体系同样历经灵活的热处理过程，并在此满足对机械特性、化学特性和光学特性方面的要求。
因此，本发明的任务在于：提供一种借助于真空涂布可施加于玻璃上的日光防护层体系及用来制备该层体系的方法，该体系能可变地进行热处理并且在此在保持化学和机械稳定性的情况下，不具有可见的色移。
该任务通过一种具有权利要求1的特征的层体系以及一种具有权利要求23的特征的方法来解决。本发明的有利构造方案是从属权利要求的主题。
用于涂布介电基底S0的、可回火的、对可见光进行反射和吸收的层体系在该基底S0上以如下顺序包含有至少一个高折射透明介电层S2、功能性的金属反射和吸收层S4以及高折射透明介电层S6。
根据本发明的日光控制层体系使得对反射色及透射率的调整成为可能。
在此，可以设置为，对于波长为550nm的光，层S2和S6中至少一个折射率在2.0与2.5之间。
根据本发明的构造方案，层S2由金属的、半导体的或半导体合金的氧化物或氮化物组成。本发明的另一构造方案设置为，层S6含有硅。
根据本发明的层体系可以有利地以如下方式实施，使得层S2和S6中的至少一个由不同材料的至少两个分层组成。
在这里，可以设置为，层S2和S6中的至少一个含有金属的、半导体的或半导体合金的氧化物或氮化物。本发明的另一构造方案设置为，层S6含有硅。
例如可以设置为，层S2和S6的至少一个含有SnO2和Si3N4。
根据本发明的又一构造方案，层S4由铬或铬化合物，例如CrNx组成。
可选地可以设置为，层S4由钛或钛化合物，例如TiNx组成。
另外，可选地可以设置为，层S4由NiCr或NiCr-化合物组成。
根据本发明的改进方案，在基底S0与层S2之间布置一个中等折射至低折射的透明介电阻隔层和/或粘附层S1。
对于波长为550nm的光，层S1的折射率有利地处于1.60与1.75之间。
根据本发明的另一改进方案，在层S6上设置有中等折射至低折射的透明介电阻隔层和/或粘附层S7。
对于波长为550nm的光，层S7的折射率有利地处于1.60与1.85之间。
根据本发明的构造方案，层S1和S7中的至少一个含有金属的、半导体的或半导体合金的氧氮化物。
可以有利地设置为，在层S2与S4之间插入阻挡层S3。
另外还可以有利地设置为，在层S4与S6之间插入阻挡层S5。
在此，层S3和S5中的至少一个可以含有SiOxNy，亚化学计量上的NiCrOx或NiCrNx。
根据本发明的另一构造方案，设置至少另一个金属反射和吸收层。
有利的是，至少另一个金属反射和吸收层含有铬或钛。
此外还可以设置为，至少另一个金属反射和吸收层含有氮。
在本发明的优选改进方案中，至少另一个金属反射和吸收层是含氮的铬-梯度化合物(Gradientenverbindung)，其中，在层的至少一个边缘区域内的氮含量是最大的并且向内减小。
用于制备这样的层体系的根据本发明的方法的特征在于，至少一个层通过溅射，优选是直流(DC)磁控溅射或中频(MF)磁控溅射来施加。
层S1和S7中的至少一个有利地通过化学气相沉积(CVD)工艺或等离子体辅助的CVD工艺来施加。
优选在含氧和/或含氮的气氛中通过硅或硅铝合金的反应性磁控溅射来施加层S1和S7中的至少一个。
特别优选在含氧和/或含氮的氩气氛中通过硅或硅铝合金的反应性磁控溅射来施加层S1和S7中的至少一个。
此外，根据本发明地可以设置为，在含氧和/或含氮和/或含氩的气氛中通过硅或硅-铝合金的反应性磁控溅射来施加层S1和S7中的至少一个，以作为具有不同化学计量的梯度层。
根据本发明的、可行的层体系的示例是：
S0/S1/Si3N4/CrNx/Si3N4/S7
S0/S1/SnO2/Si3N4/CrNx/Si3N4/S7
S0/S1/SnO2/NiCrNx/CrNx/Si3N4/S7
S0/S1/SnO2/SiOxNy/CrNx/Si3N4/S7
通过吸收和反射层S4的厚度的变动，可以调整层体系的透射率。通过使用不同厚度的CrNx-化合物来实现所期望的透射率以及实现完全确定的化学计量以获得回火能力，可以将回火后的颜色迁移保持得很小。CrNx是良好的吸收层。使用CrNx代替一般使用的NiCr或NiCr-化合物(NiCrOx)的另一优点是，在回火之后只有很小的雾度扩大，所述雾度扩大另外在其它情况下也会由于镍扩散进入相邻层中而引起。
另外，位于吸收层之下的(基底侧的)且根据所期望的反射色而具有适宜厚度的高折射层可以不只是由Si3N4组成，而是同样还附加地由金属氧化物层来构造。于是，在氧化物层与吸收层之间需要薄的阻挡层。通过这些可能的附加材料的应用，在给定涂布机构型和目标配置(Targetbestückung)的情况下，能够明显减少周期时间。
选择性层S1是如下的阻隔层，该阻隔层会阻碍Na+从玻璃基底中扩散到层体系中以及阻碍对层特性的玻璃影响，如腐蚀或吸管印痕。此外，通过层S1的沉积，将由玻璃基底带入到涂布设备中去的水从基底去除掉。
同样选择性层S7以其涉及常用被覆层S6更低的折射率而表现为去反光层(Entspiegelungsschicht)，该去反光层在期望高透射率的情况下更明显地提高所述层体系的透射率。

Claims (28)

1.用以涂布介电基底S0的、能回火的、对可见光进行反射和吸收的层体系，所述层体系在所述基底S0上以如下顺序包含有至少一个高折射的透明介电层S2、功能性的金属反射和吸收层S4以及高折射的透明介电层S6。
2.如权利要求1所述的层体系，其特征在于，对于波长为550nm的光，所述层S2和S6中的至少一个的折射率在2.0与2.5之间。
3.如权利要求1或2所述的层体系，其特征在于，所述层S2由金属的、半导体的或半导体合金的氧化物或氮化物组成。
4.如前述权利要求之一所述的层体系，其特征在于，所述层S6含有硅。
5.如前述权利要求之一所述的层体系，其特征在于，所述层S2和S6中的至少一个由不同材料的至少两个分层组成。
6.如前述权利要求之一所述的层体系，其特征在于，所述层S2和S6中的至少一个含有金属的、半导体的或半导体合金的氧化物或氮化物。
7.如前述权利要求之一所述的层体系，其特征在于，所述层S2和S6中的至少一个含有SnO2或Si3N4。
8.如前述权利要求之一所述的层体系，其特征在于，所述层S4由铬或铬化合物组成，例如由CrNx组成。
9.如前述权利要求之一所述的层体系，其特征在于，所述层S4由钛或钛化合物组成，例如由TiNx组成。
10.如前述权利要求之一所述的层体系，其特征在于，所述层S4由NiCr或NiCr-化合物组成。
11.如前述权利要求之一所述的层体系，其特征在于，在所述基底S0与所述层S2之间布置有中等折射至低折射的透明介电阻隔层和/或粘附层S1。
12.如前述权利要求之一所述的层体系，其特征在于，对于波长为550nm的光，所述层S1的折射率在1.60与1.75之间。
13.如前述权利要求之一所述的层体系，其特征在于，在所述层S6上布置有中等折射至低折射的透明介电阻隔和/或粘附层S7。
14.如前述权利要求之一所述的层体系，其特征在于，对于波长为550nm的光，所述层S7的折射率在1.60与1.85之间。
15.如前述权利要求之一所述的层体系，其特征在于，所述层S1和S7中的至少一个含有金属的、半导体的或半导体合金的氧氮化物。
16.如前述权利要求之一所述的层体系，其特征在于，在所述层S2与S4之间插入阻挡层S3。
17.如前述权利要求之一所述的层体系，其特征在于，在所述层S4与S6之间插入阻挡层S5。
18.如前述权利要求之一所述的层体系，其特征在于，所述层S3和S5中的至少一个含有SiOxNy、亚化学计量的NiCrOx或NiCrNx。
19.如前述权利要求之一所述的层体系，其特征在于，设置至少另一个金属反射和吸收层。
20.如前述权利要求之一所述的层体系，其特征在于，至少另一个金属反射和吸收层含有铬或钛。
21.如前述权利要求之一所述的层体系，其特征在于，至少另一个金属反射和吸收层含有氮。
22.如前述权利要求之一所述的层体系，其特征在于，至少另一个金属反射和吸收层是含氮的铬-梯度化合物，其中，在所述层的至少一个边缘区域内的氮含量是最大的并且向内减少。
23.用于制备如权利要求1-22之一所述的层体系的方法，其特征在于，将至少一个层通过溅射来施加。
24.如权利要求23所述的方法，其特征在于，将至少一个层通过DC磁控溅射或MF磁控溅射来施加。
25.如权利要求23或24所述的方法，其特征在于，将所述层S1和S7中的至少一个通过CVD工艺或等离子体辅助的CVD工艺来施加。
26.如权利要求23至25之一所述的方法，其特征在于，将所述层S1和S7中的至少一个在含氧和/或含氮的气氛中通过硅或硅铝合金的反应性磁控溅射来施加。
27.如权利要求23至26之一所述的方法，其特征在于，将所述层S1和S7中的至少一个在含氧和/或含氮的氩气氛中通过硅或硅铝合金的反应性磁控溅射来施加。
28.如权利要求23-27之一所述的方法，其特征在于，将所述层S1和S7中的至少一个作为具有不同化学计量的梯度层而在含氧和/或含氮和/或含氩的气氛中通过硅或硅铝合金的反应性磁控溅射来施加。
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103339079A (zh) * 2010-10-08 2013-10-02 葛迪恩实业公司 可回火三层防反射涂层、包括可回火三层防反射涂层的涂层制品和/或制作其的方法
CN103726013A (zh) * 2012-10-11 2014-04-16 冯·阿德纳设备有限公司 带梯度层的太阳能吸收器层系统和制造它的方法及装置
CN106995281A (zh) * 2017-04-01 2017-08-01 佛山市翔硕宇玻璃科技有限公司 一种可钢化抗氧化耐腐蚀彩色镀膜玻璃

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3004710B1 (fr) * 2013-04-19 2017-01-27 Saint Gobain Vitrage de controle solaire comprenant deux couches metalliques a base de nickel
DE102014002965A1 (de) * 2013-07-30 2015-02-05 Leybold Optics Gmbh Schichtsystem eines transparenten Substrats sowie Verfahren zur Herstellung eines Schichtsystems
US10294147B2 (en) * 2017-01-05 2019-05-21 Guardian Glass, LLC Heat treatable coated article having titanium nitride based IR reflecting layer(s)
KR102075076B1 (ko) * 2017-02-22 2020-02-07 (주)엘지하우시스 저투과 및 저반사 코팅유리
FR3118440B1 (fr) 2020-12-31 2022-12-23 Saint Gobain Vitrage antisolaire comprenant une couche mince à base de nitrure de titane et une couche de nitrure de silicium sous-stœchiométriques en azote.

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02225346A (ja) * 1989-02-27 1990-09-07 Central Glass Co Ltd 熱線反射ガラス
US5188887A (en) * 1989-03-09 1993-02-23 Guardian Industries Corp. Heat treatable sputter-coated glass
JPH05124839A (ja) * 1991-10-31 1993-05-21 Central Glass Co Ltd 熱的加工可能な断熱ガラス
US5229194A (en) * 1991-12-09 1993-07-20 Guardian Industries Corp. Heat treatable sputter-coated glass systems
DE4211363A1 (de) * 1992-04-04 1993-10-07 Leybold Ag Verfahren zum Herstellen von Scheiben mit hohem Transmissionsverhalten im sichtbaren Spektralbereich und mit hohem Reflexionsverhalten für Wärmestrahlung sowie durch das Verfahren hergestellte Scheiben
US5688585A (en) * 1993-08-05 1997-11-18 Guardian Industries Corp. Matchable, heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same
US5376455A (en) * 1993-10-05 1994-12-27 Guardian Industries Corp. Heat-treatment convertible coated glass and method of converting same
FR2728559B1 (fr) * 1994-12-23 1997-01-31 Saint Gobain Vitrage Substrats en verre revetus d'un empilement de couches minces a proprietes de reflexion dans l'infrarouge et/ou dans le domaine du rayonnement solaire
US6495251B1 (en) * 1997-06-20 2002-12-17 Ppg Industries Ohio, Inc. Silicon oxynitride protective coatings
JPH11302037A (ja) * 1998-04-23 1999-11-02 Central Glass Co Ltd 低反射率、低透過率ガラス
US7267879B2 (en) * 2001-02-28 2007-09-11 Guardian Industries Corp. Coated article with silicon oxynitride adjacent glass
US7153577B2 (en) * 2000-07-10 2006-12-26 Guardian Industries Corp. Heat treatable coated article with dual layer overcoat
DE10058700A1 (de) * 2000-11-25 2002-06-06 Saint Gobain Glasscheibe mit einem metallisch reflektierenden Schichtsystem
US6524714B1 (en) * 2001-05-03 2003-02-25 Guardian Industries Corp. Heat treatable coated articles with metal nitride layer and methods of making same
US6627317B2 (en) * 2001-05-17 2003-09-30 Guardian Industries Corp. Heat treatable coated articles with anti-migration barrier layer between dielectric and solar control layers, and methods of making same
JP2003002691A (ja) * 2001-06-19 2003-01-08 Central Glass Co Ltd 低反射基板およびその製造方法
US6974630B1 (en) * 2003-05-20 2005-12-13 Guardian Industries Corp. Coated article with niobium chromium inclusive barrier layer(s) and method of making same
FR2858975B1 (fr) * 2003-08-20 2006-01-27 Saint Gobain Substrat transparent revetu d'un empilement de couches minces a proprietes de reflexion dans l'infrarouge et/ou dans le domaine du rayonnement solaire
DE10356357B4 (de) * 2003-11-28 2010-05-06 Von Ardenne Anlagentechnik Gmbh Wärmebehandelbares Sonnen- und Wärmeschutzschichtsystem und Verfahren zu dessen Herstellung
WO2005073428A1 (en) * 2004-01-23 2005-08-11 Arkema Inc. Method of depositing film stacks on a substrate
JP2007530402A (ja) * 2004-04-03 2007-11-01 アプライド マテリアルズ ゲーエムベーハー アンド コンパニー カーゲー ガラスコーティング
DE102004047135B4 (de) * 2004-09-27 2011-08-18 VON ARDENNE Anlagentechnik GmbH, 01324 Temperfähiges Schichtsystem und Verfahren zu seiner Herstellung

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103339079A (zh) * 2010-10-08 2013-10-02 葛迪恩实业公司 可回火三层防反射涂层、包括可回火三层防反射涂层的涂层制品和/或制作其的方法
CN103726013A (zh) * 2012-10-11 2014-04-16 冯·阿德纳设备有限公司 带梯度层的太阳能吸收器层系统和制造它的方法及装置
CN103726013B (zh) * 2012-10-11 2015-09-09 冯·阿德纳有限公司 带梯度层的太阳能吸收器层系统和制造它的方法及装置
CN106995281A (zh) * 2017-04-01 2017-08-01 佛山市翔硕宇玻璃科技有限公司 一种可钢化抗氧化耐腐蚀彩色镀膜玻璃

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DE102006037912A1 (de) 2008-02-14
WO2008017723A1 (de) 2008-02-14

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