CN101520312B - 位移检测装置及具有该位移检测装置的光学仪器 - Google Patents

位移检测装置及具有该位移检测装置的光学仪器 Download PDF

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Publication number
CN101520312B
CN101520312B CN2009100044600A CN200910004460A CN101520312B CN 101520312 B CN101520312 B CN 101520312B CN 2009100044600 A CN2009100044600 A CN 2009100044600A CN 200910004460 A CN200910004460 A CN 200910004460A CN 101520312 B CN101520312 B CN 101520312B
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CN
China
Prior art keywords
light
reflective
receiving element
inspected
light receiving
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Expired - Fee Related
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CN2009100044600A
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English (en)
Chinese (zh)
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CN101520312A (zh
Inventor
中川英法
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Canon Inc
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Canon Inc
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Publication of CN101520312A publication Critical patent/CN101520312A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
CN2009100044600A 2008-02-25 2009-02-25 位移检测装置及具有该位移检测装置的光学仪器 Expired - Fee Related CN101520312B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008042754A JP5058845B2 (ja) 2008-02-25 2008-02-25 変位検出装置及びそれを有する光学機器
JP2008042754 2008-02-25
JP2008-042754 2008-02-25

Publications (2)

Publication Number Publication Date
CN101520312A CN101520312A (zh) 2009-09-02
CN101520312B true CN101520312B (zh) 2011-03-09

Family

ID=40810524

Family Applications (1)

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CN2009100044600A Expired - Fee Related CN101520312B (zh) 2008-02-25 2009-02-25 位移检测装置及具有该位移检测装置的光学仪器

Country Status (4)

Country Link
US (1) US7830531B2 (https=)
EP (1) EP2093542B1 (https=)
JP (1) JP5058845B2 (https=)
CN (1) CN101520312B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010181181A (ja) * 2009-02-03 2010-08-19 Canon Inc スケール、それを有する変位検出装置、及びそれを有する撮像装置
DE202010017994U1 (de) * 2010-12-20 2013-07-10 Binder Gmbh Messsystem zum Messen der CO2-Konzentration in einem Klimaschrank oder einem Inkubator
CN102506722A (zh) * 2011-11-21 2012-06-20 北京中煤矿山工程有限公司 一种冻结壁位移测试方法
US10648839B2 (en) * 2017-05-22 2020-05-12 Mitutoyo Corporation Photoelectric encoder
CN116745592A (zh) * 2021-03-31 2023-09-12 ams国际有限公司 位移检测器、位移检测器阵列和制造位移检测器的方法
CN113280842B (zh) * 2021-04-21 2022-10-18 温州大学 反透射一体式光电传感器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6975408B2 (en) * 2001-02-20 2005-12-13 Canon Kabushiki Kaisha Reflection scale and displacement measurement apparatus using the same
US7022974B2 (en) * 2002-05-21 2006-04-04 Canon Kabushiki Kaisha Sensor using roof mirror/roof prism array scale, and apparatus equipped with the sensor
CN101110416A (zh) * 2006-07-19 2008-01-23 佳能株式会社 反射传感器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2280259A (en) 1993-07-24 1995-01-25 British Aerospace Detecting angular displacement.
JP2001349750A (ja) * 2000-06-08 2001-12-21 Olympus Optical Co Ltd 光学式エンコーダ
JP2003139572A (ja) * 2001-11-06 2003-05-14 Ntt Electornics Corp エンコーダ
JP2005265512A (ja) * 2004-03-17 2005-09-29 Canon Inc 光学式エンコーダ
JP5046718B2 (ja) * 2007-04-12 2012-10-10 株式会社ミツトヨ 光学式測定装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6975408B2 (en) * 2001-02-20 2005-12-13 Canon Kabushiki Kaisha Reflection scale and displacement measurement apparatus using the same
US7022974B2 (en) * 2002-05-21 2006-04-04 Canon Kabushiki Kaisha Sensor using roof mirror/roof prism array scale, and apparatus equipped with the sensor
CN101110416A (zh) * 2006-07-19 2008-01-23 佳能株式会社 反射传感器
EP1882908A2 (en) * 2006-07-19 2008-01-30 Canon Kabushiki Kaisha Reflective sensor

Also Published As

Publication number Publication date
JP2009198434A (ja) 2009-09-03
CN101520312A (zh) 2009-09-02
US7830531B2 (en) 2010-11-09
JP5058845B2 (ja) 2012-10-24
US20090213390A1 (en) 2009-08-27
EP2093542B1 (en) 2015-08-12
EP2093542A1 (en) 2009-08-26

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