CN101499456A - 半导体器件及其制造方法 - Google Patents
半导体器件及其制造方法 Download PDFInfo
- Publication number
- CN101499456A CN101499456A CNA2009100098367A CN200910009836A CN101499456A CN 101499456 A CN101499456 A CN 101499456A CN A2009100098367 A CNA2009100098367 A CN A2009100098367A CN 200910009836 A CN200910009836 A CN 200910009836A CN 101499456 A CN101499456 A CN 101499456A
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- peristome
- dielectric film
- semiconductor device
- wiring
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 187
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 229910052751 metal Inorganic materials 0.000 claims abstract description 94
- 239000002184 metal Substances 0.000 claims abstract description 94
- 238000000034 method Methods 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims description 64
- 230000004888 barrier function Effects 0.000 claims description 52
- 239000000853 adhesive Substances 0.000 claims description 42
- 230000001070 adhesive effect Effects 0.000 claims description 42
- 230000001681 protective effect Effects 0.000 claims description 21
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 239000004020 conductor Substances 0.000 claims description 8
- 238000000059 patterning Methods 0.000 claims description 5
- 238000003475 lamination Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 description 34
- 238000001465 metallisation Methods 0.000 description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 17
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 16
- 229920005989 resin Polymers 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 229910052802 copper Inorganic materials 0.000 description 11
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- 229910052759 nickel Inorganic materials 0.000 description 8
- 239000004642 Polyimide Substances 0.000 description 7
- 238000013007 heat curing Methods 0.000 description 7
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- 238000011049 filling Methods 0.000 description 4
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- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
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- 238000004080 punching Methods 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
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Abstract
Description
Claims (24)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP020691/2008 | 2008-01-31 | ||
JP2008020691A JP4636090B2 (ja) | 2008-01-31 | 2008-01-31 | 半導体装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101499456A true CN101499456A (zh) | 2009-08-05 |
CN101499456B CN101499456B (zh) | 2011-05-04 |
Family
ID=40930841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2009100098367A Expired - Fee Related CN101499456B (zh) | 2008-01-31 | 2009-01-24 | 半导体器件及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7972903B2 (zh) |
JP (1) | JP4636090B2 (zh) |
KR (1) | KR101009123B1 (zh) |
CN (1) | CN101499456B (zh) |
TW (1) | TWI390696B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104464583A (zh) * | 2014-12-09 | 2015-03-25 | 合肥鑫晟光电科技有限公司 | 一种点灯检测装置以及方法 |
CN108962843A (zh) * | 2017-05-19 | 2018-12-07 | Tdk株式会社 | 半导体ic内置基板及其制造方法 |
US11231904B2 (en) | 2015-03-06 | 2022-01-25 | Apple Inc. | Reducing response latency of intelligent automated assistants |
Families Citing this family (6)
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JP2012256675A (ja) * | 2011-06-08 | 2012-12-27 | Shinko Electric Ind Co Ltd | 配線基板、半導体装置及びその製造方法 |
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- 2009-01-24 CN CN2009100098367A patent/CN101499456B/zh not_active Expired - Fee Related
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Cited By (3)
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CN104464583A (zh) * | 2014-12-09 | 2015-03-25 | 合肥鑫晟光电科技有限公司 | 一种点灯检测装置以及方法 |
US11231904B2 (en) | 2015-03-06 | 2022-01-25 | Apple Inc. | Reducing response latency of intelligent automated assistants |
CN108962843A (zh) * | 2017-05-19 | 2018-12-07 | Tdk株式会社 | 半导体ic内置基板及其制造方法 |
Also Published As
Publication number | Publication date |
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JP4636090B2 (ja) | 2011-02-23 |
CN101499456B (zh) | 2011-05-04 |
KR20090084684A (ko) | 2009-08-05 |
US7972903B2 (en) | 2011-07-05 |
TW200941689A (en) | 2009-10-01 |
US20090194866A1 (en) | 2009-08-06 |
TWI390696B (zh) | 2013-03-21 |
JP2009182200A (ja) | 2009-08-13 |
KR101009123B1 (ko) | 2011-01-18 |
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