CN101490315A - 生产具有改善的载流子寿命的基底的方法 - Google Patents

生产具有改善的载流子寿命的基底的方法 Download PDF

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Publication number
CN101490315A
CN101490315A CNA200780027337XA CN200780027337A CN101490315A CN 101490315 A CN101490315 A CN 101490315A CN A200780027337X A CNA200780027337X A CN A200780027337XA CN 200780027337 A CN200780027337 A CN 200780027337A CN 101490315 A CN101490315 A CN 101490315A
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China
Prior art keywords
gas
substrate
zero
reaction chamber
silicon carbide
Prior art date
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Pending
Application number
CNA200780027337XA
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English (en)
Chinese (zh)
Inventor
G·钟
M·罗伯达
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Dow Silicones Corp
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Dow Corning Corp
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Publication date
Application filed by Dow Corning Corp filed Critical Dow Corning Corp
Publication of CN101490315A publication Critical patent/CN101490315A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02529—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02378—Silicon carbide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/02433—Crystal orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02576—N-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02579—P-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CNA200780027337XA 2006-07-19 2007-07-17 生产具有改善的载流子寿命的基底的方法 Pending CN101490315A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US83183906P 2006-07-19 2006-07-19
US60/831,839 2006-07-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201210002807.XA Division CN102517631B (zh) 2006-07-19 2007-07-17 生产具有改善的载流子寿命的基底的方法

Publications (1)

Publication Number Publication Date
CN101490315A true CN101490315A (zh) 2009-07-22

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CNA200780027337XA Pending CN101490315A (zh) 2006-07-19 2007-07-17 生产具有改善的载流子寿命的基底的方法
CN201210002807.XA Active CN102517631B (zh) 2006-07-19 2007-07-17 生产具有改善的载流子寿命的基底的方法

Family Applications After (1)

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Country Status (8)

Country Link
US (2) US20100006859A1 (enExample)
EP (1) EP2044244B1 (enExample)
JP (3) JP2009544171A (enExample)
KR (1) KR101419279B1 (enExample)
CN (2) CN101490315A (enExample)
AU (1) AU2007275780B2 (enExample)
CA (1) CA2657929C (enExample)
WO (1) WO2008011022A1 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104246979A (zh) * 2012-09-11 2014-12-24 道康宁公司 SiC上的高电压功率半导体器件
US9165779B2 (en) 2012-10-26 2015-10-20 Dow Corning Corporation Flat SiC semiconductor substrate
US9279192B2 (en) 2014-07-29 2016-03-08 Dow Corning Corporation Method for manufacturing SiC wafer fit for integration with power device manufacturing technology
US9738991B2 (en) 2013-02-05 2017-08-22 Dow Corning Corporation Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion
US9797064B2 (en) 2013-02-05 2017-10-24 Dow Corning Corporation Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a support shelf which permits thermal expansion
CN116057214A (zh) * 2020-09-11 2023-05-02 洛佩诗公司 用于cvd沉积n型掺杂的碳化硅的方法和外延反应器

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CN101540343B (zh) * 2009-04-14 2011-08-24 西安电子科技大学 偏移场板结构的4H-SiC PiN/肖特基二极管及其制作方法
US8574528B2 (en) * 2009-09-04 2013-11-05 University Of South Carolina Methods of growing a silicon carbide epitaxial layer on a substrate to increase and control carrier lifetime
US20120244684A1 (en) * 2011-03-24 2012-09-27 Kunihiko Suzuki Film-forming apparatus and method
CN103370454B (zh) * 2011-04-21 2015-09-09 新日铁住金株式会社 外延碳化硅单晶基板及其制造方法
WO2014027472A1 (ja) 2012-08-17 2014-02-20 株式会社Ihi 耐熱複合材料の製造方法及び製造装置
JP6249815B2 (ja) * 2014-02-17 2017-12-20 株式会社Ihi 耐熱複合材料の製造方法及び製造装置
KR20180042228A (ko) 2015-07-23 2018-04-25 더 유니버시티 오브 월위크 단결정 실리콘 상에 결정축을 따라서 3C-SiC을 성장시키는 방법
GB2540608A (en) * 2015-07-23 2017-01-25 Univ Warwick Growing epitaxial 3C-SiC on single-crystal silicon
CN107578988B (zh) 2017-09-13 2019-11-19 中国电子科技集团公司第十三研究所 碳化硅外延层钝化方法
CN111624460B (zh) * 2020-06-28 2022-10-21 西安奕斯伟材料科技有限公司 一种单晶硅缺陷分布区域的检测方法
CN113913926A (zh) * 2021-10-22 2022-01-11 西安奕斯伟材料科技有限公司 外延反应腔室的恢复方法、外延生长装置及外延晶圆

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104246979A (zh) * 2012-09-11 2014-12-24 道康宁公司 SiC上的高电压功率半导体器件
US9337277B2 (en) 2012-09-11 2016-05-10 Dow Corning Corporation High voltage power semiconductor device on SiC
CN104246979B (zh) * 2012-09-11 2016-11-23 道康宁公司 SiC上的高电压功率半导体器件
US9165779B2 (en) 2012-10-26 2015-10-20 Dow Corning Corporation Flat SiC semiconductor substrate
US9738991B2 (en) 2013-02-05 2017-08-22 Dow Corning Corporation Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a supporting shelf which permits thermal expansion
US9797064B2 (en) 2013-02-05 2017-10-24 Dow Corning Corporation Method for growing a SiC crystal by vapor deposition onto a seed crystal provided on a support shelf which permits thermal expansion
US9279192B2 (en) 2014-07-29 2016-03-08 Dow Corning Corporation Method for manufacturing SiC wafer fit for integration with power device manufacturing technology
US10002760B2 (en) 2014-07-29 2018-06-19 Dow Silicones Corporation Method for manufacturing SiC wafer fit for integration with power device manufacturing technology
CN116057214A (zh) * 2020-09-11 2023-05-02 洛佩诗公司 用于cvd沉积n型掺杂的碳化硅的方法和外延反应器

Also Published As

Publication number Publication date
CN102517631B (zh) 2015-04-01
JP2009544171A (ja) 2009-12-10
JP2013047181A (ja) 2013-03-07
KR101419279B1 (ko) 2014-07-15
US20140203297A1 (en) 2014-07-24
KR20090031573A (ko) 2009-03-26
US9337027B2 (en) 2016-05-10
JP2015083538A (ja) 2015-04-30
CA2657929C (en) 2014-11-04
AU2007275780B2 (en) 2011-02-24
AU2007275780A1 (en) 2008-01-24
CN102517631A (zh) 2012-06-27
EP2044244A1 (en) 2009-04-08
WO2008011022A1 (en) 2008-01-24
US20100006859A1 (en) 2010-01-14
EP2044244B1 (en) 2013-05-08
CA2657929A1 (en) 2008-01-24

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Application publication date: 20090722