CN101454735B - 自适应响应时间闭环控制算法 - Google Patents

自适应响应时间闭环控制算法 Download PDF

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Publication number
CN101454735B
CN101454735B CN2007800195351A CN200780019535A CN101454735B CN 101454735 B CN101454735 B CN 101454735B CN 2007800195351 A CN2007800195351 A CN 2007800195351A CN 200780019535 A CN200780019535 A CN 200780019535A CN 101454735 B CN101454735 B CN 101454735B
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control algorithm
loop
adaptive closed
sensor
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CN101454735A (zh
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A·斯米尔诺夫
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Bomai Licheng Co ltd
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Hitachi Metals Ltd
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
  • Flow Control (AREA)
CN2007800195351A 2006-04-28 2007-04-27 自适应响应时间闭环控制算法 Active CN101454735B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/413,780 US7603186B2 (en) 2006-04-28 2006-04-28 Adaptive response time closed loop control algorithm
US11/413,780 2006-04-28
PCT/US2007/067593 WO2007127897A2 (en) 2006-04-28 2007-04-27 Adaptive response time closed loop control algorithm

Publications (2)

Publication Number Publication Date
CN101454735A CN101454735A (zh) 2009-06-10
CN101454735B true CN101454735B (zh) 2013-07-17

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CN2007800195351A Active CN101454735B (zh) 2006-04-28 2007-04-27 自适应响应时间闭环控制算法

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US (1) US7603186B2 (enExample)
EP (1) EP2013672A4 (enExample)
JP (1) JP5152178B2 (enExample)
KR (1) KR101136841B1 (enExample)
CN (1) CN101454735B (enExample)
TW (1) TWI413879B (enExample)
WO (1) WO2007127897A2 (enExample)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160018824A (ko) * 2006-10-03 2016-02-17 가부시키가이샤 호리바 에스텍 매스 플로우 컨트롤러
US7853364B2 (en) 2006-11-30 2010-12-14 Veeco Instruments, Inc. Adaptive controller for ion source
US8079383B2 (en) * 2006-12-07 2011-12-20 Mks Instruments, Inc. Controller gain scheduling for mass flow controllers
US8056579B2 (en) * 2007-06-04 2011-11-15 Horiba Stec, Co., Ltd. Mass flow controller
US8160833B2 (en) * 2009-07-14 2012-04-17 Hitachi Metals, Ltd Thermal mass flow sensor with improved response across fluid types
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
JP5499381B2 (ja) * 2009-10-20 2014-05-21 日立金属株式会社 流量制御装置
US8428755B2 (en) * 2010-02-01 2013-04-23 Johnson Controls Technology Company Systems and methods for increasing feedback controller response times
US8131400B2 (en) * 2010-06-10 2012-03-06 Hitachi Metals, Ltd. Adaptive on-tool mass flow controller tuning
US8945094B2 (en) * 2010-09-08 2015-02-03 Honeywell International Inc. Apparatus and method for medication delivery using single input-single output (SISO) model predictive control
WO2013115298A1 (ja) 2012-02-03 2013-08-08 日立金属株式会社 流量制御装置及びプログラム
US9411321B2 (en) * 2012-06-20 2016-08-09 Fisher Controls International Llc Methods and system for minor loop feedback fallback
US9004107B2 (en) * 2012-08-21 2015-04-14 Applied Materials, Inc. Methods and apparatus for enhanced gas flow rate control
US20150362897A1 (en) 2013-03-27 2015-12-17 Schlumberger Technology Corporation Interface for Automation Client
WO2015030097A1 (ja) * 2013-08-28 2015-03-05 株式会社堀場エステック 流量制御装置及び流量制御プログラム
PL2910865T3 (pl) 2014-02-21 2017-02-28 Plum Sp. Z O.O. Układ do i sposób sterowania wentylatorem wdmuchującym powietrze do przestrzeni chronionej, zwłaszcza w wentylacji pożarowej do ochrony dróg ewakuacji
MX384796B (es) * 2014-04-11 2025-03-14 Bristol Inc D/B/A Remote Automation Solutions Controlador de flujo de inyeccion para agua y vapor.
US10550552B2 (en) 2014-05-01 2020-02-04 Graco Minnesota Inc. Method for fluid pressure control in a closed system
US10245608B2 (en) 2014-05-01 2019-04-02 Graco Minnesota Inc. Method for flow control calibration of high-transient systems
JP6001600B2 (ja) * 2014-06-26 2016-10-05 株式会社日本自動車部品総合研究所 ガス供給部を制御するシステムおよびガス充填方法
AU2016257653B2 (en) 2015-05-01 2019-12-05 Graco Minnesota Inc. Adaptive flow control
US9989956B2 (en) 2016-05-11 2018-06-05 Saudi Arabian Oil Company Split range control using proportional-integral control with flow valves
US11204597B2 (en) 2016-05-20 2021-12-21 Moog Inc. Outer space digital logistics system
CA3025064A1 (en) 2016-05-20 2017-11-23 Moog Inc. Secure and traceable manufactured parts
JP2018018942A (ja) * 2016-07-27 2018-02-01 東京エレクトロン株式会社 液処理装置及び液処理方法
CN107041282A (zh) * 2017-01-20 2017-08-15 青岛农业大学 一种能够实现闭环控制的水肥一体化算法及控制器
CN109506028B (zh) * 2017-09-15 2020-02-21 武汉海翼科技有限公司 一种压力调节阀的快速随动控制方法
EP3727860B1 (en) * 2017-12-20 2024-02-21 Moog Inc. Outer space digital logistics system
US11209298B2 (en) * 2018-04-27 2021-12-28 Hitachi Metals, Ltd. Thermal mass flow sensor with improved accuracy
US10969797B2 (en) * 2018-08-29 2021-04-06 Illinois Tool Works, Inc. Mass flow valve controller and control method with set point filter and linearization system based on valve model
DK3690592T3 (da) * 2019-01-30 2021-07-05 Siemens Schweiz Ag Reguleringsventil
TWI755704B (zh) 2019-05-14 2022-02-21 日商富士金股份有限公司 流量控制裝置、流量控制方法、流量控制裝置的控制程式
CN111495633B (zh) * 2020-04-26 2021-04-27 佛山科学技术学院 一种基于Faster-rcnn的涂料闭环供给系统及控制方法
WO2022056069A1 (en) * 2020-09-09 2022-03-17 Lenovo (United States) Inc. A Corporation Of Delaware Method and apparatus including event triggered goal change for control loops
CN117391404B (zh) * 2023-12-11 2024-05-10 深圳市曼恩斯特科技股份有限公司 锂电池涂布横向面密度的控制方法、装置及电子设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218733A (en) * 1978-11-13 1980-08-19 Sybron Corporation Adaptive gain controller
CN1688948A (zh) * 2002-07-19 2005-10-26 迅捷集团公司 在质量流动控制器中用于压力补偿的方法和装置

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1416401A (en) * 1973-03-06 1975-12-03 Rolls Royce Control systems
JPH03156509A (ja) * 1989-11-14 1991-07-04 Stec Kk マスフローコントローラ
US5394322A (en) * 1990-07-16 1995-02-28 The Foxboro Company Self-tuning controller that extracts process model characteristics
US5410495A (en) * 1993-07-20 1995-04-25 Texas Instruments Incorporated Apparatus, systems, and methods for diagnosing anomalous mass flow controller operation
US5609136A (en) * 1994-06-28 1997-03-11 Cummins Engine Company, Inc. Model predictive control for HPI closed-loop fuel pressure control system
US5875109A (en) * 1995-05-24 1999-02-23 Johnson Service Company Adaptive flow controller for use with a flow control system
US5691896A (en) * 1995-08-15 1997-11-25 Rosemount, Inc. Field based process control system with auto-tuning
JP3240436B2 (ja) * 1997-02-10 2001-12-17 油研工業株式会社 油圧エレベータ装置
US6272401B1 (en) * 1997-07-23 2001-08-07 Dresser Industries, Inc. Valve positioner system
US6466893B1 (en) * 1997-09-29 2002-10-15 Fisher Controls International, Inc. Statistical determination of estimates of process control loop parameters
JP3522535B2 (ja) * 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備
JP3522544B2 (ja) * 1998-08-24 2004-04-26 忠弘 大見 流体可変型流量制御装置
US6575027B1 (en) * 1999-07-09 2003-06-10 Mykrolis Corporation Mass flow sensor interface circuit
US6389364B1 (en) * 1999-07-10 2002-05-14 Mykrolis Corporation System and method for a digital mass flow controller
US6445980B1 (en) * 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6487458B1 (en) * 1999-08-31 2002-11-26 Delphi Technologies, Inc. Adaptive closed-loop servo control
US6422263B1 (en) * 2000-09-05 2002-07-23 Guy Kevin Spicer Nested and cascaded variable bias feedfoward and feedback flow and level control system
US6782906B2 (en) * 2000-12-28 2004-08-31 Young-Chul Chang Time based mass flow controller and method for controlling flow rate using it
JP4864280B2 (ja) * 2001-04-24 2012-02-01 ブルックス・インストルメント・エルエルシー 質量流量コントローラのシステムおよび方法
GB0113627D0 (en) * 2001-06-05 2001-07-25 Univ Stirling Controller and method of controlling an apparatus
US6608516B1 (en) * 2002-01-30 2003-08-19 National Instruments Corporation Adjustable time constant integrator
CN100425955C (zh) 2002-05-24 2008-10-15 迅捷公司 用于物质流检测设备校准的系统和方法
GB2404028B8 (en) 2002-06-24 2008-09-03 Mks Instr Inc Apparatus and method for pressure fluctuation insensitive massflow control
US6810308B2 (en) * 2002-06-24 2004-10-26 Mks Instruments, Inc. Apparatus and method for mass flow controller with network access to diagnostics
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
KR101006537B1 (ko) * 2002-06-24 2011-01-07 엠케이에스 인스트루먼츠 인코포레이티드 압력변동에 영향을 받지 않는 질량 유량 제어장치
US6868862B2 (en) * 2002-06-24 2005-03-22 Mks Instruments, Inc. Apparatus and method for mass flow controller with a plurality of closed loop control code sets
US20040122353A1 (en) * 2002-12-19 2004-06-24 Medtronic Minimed, Inc. Relay device for transferring information between a sensor system and a fluid delivery system
KR100502217B1 (ko) * 2002-12-27 2005-07-19 태산엘시디 주식회사 컨트롤 퍼지용 질량유량 제어기 및 동작방법
JP3801570B2 (ja) * 2003-02-24 2006-07-26 Ｓｍｃ株式会社 流量制御装置
US6955072B2 (en) * 2003-06-25 2005-10-18 Mks Instruments, Inc. System and method for in-situ flow verification and calibration

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218733A (en) * 1978-11-13 1980-08-19 Sybron Corporation Adaptive gain controller
CN1688948A (zh) * 2002-07-19 2005-10-26 迅捷集团公司 在质量流动控制器中用于压力补偿的方法和装置

Also Published As

Publication number Publication date
EP2013672A2 (en) 2009-01-14
WO2007127897A2 (en) 2007-11-08
EP2013672A4 (en) 2010-09-08
KR20090007470A (ko) 2009-01-16
US20070276545A1 (en) 2007-11-29
CN101454735A (zh) 2009-06-10
TW200848967A (en) 2008-12-16
JP5152178B2 (ja) 2013-02-27
JP2009535716A (ja) 2009-10-01
US7603186B2 (en) 2009-10-13
TWI413879B (zh) 2013-11-01
KR101136841B1 (ko) 2012-04-19
WO2007127897A3 (en) 2008-09-18

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