KR101136841B1 - 적응성 응답 시간 폐 루프 제어 알고리즘 - Google Patents

적응성 응답 시간 폐 루프 제어 알고리즘 Download PDF

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KR101136841B1
KR101136841B1 KR1020087029193A KR20087029193A KR101136841B1 KR 101136841 B1 KR101136841 B1 KR 101136841B1 KR 1020087029193 A KR1020087029193 A KR 1020087029193A KR 20087029193 A KR20087029193 A KR 20087029193A KR 101136841 B1 KR101136841 B1 KR 101136841B1
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loop
control algorithm
closed
sensor
indicator
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KR20090007470A (ko
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알렉세이 스미르노프
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히타치 긴조쿠 가부시키가이샤
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
  • Flow Control (AREA)
KR1020087029193A 2006-04-28 2007-04-27 적응성 응답 시간 폐 루프 제어 알고리즘 Active KR101136841B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/413,780 2006-04-28
US11/413,780 US7603186B2 (en) 2006-04-28 2006-04-28 Adaptive response time closed loop control algorithm
PCT/US2007/067593 WO2007127897A2 (en) 2006-04-28 2007-04-27 Adaptive response time closed loop control algorithm

Publications (2)

Publication Number Publication Date
KR20090007470A KR20090007470A (ko) 2009-01-16
KR101136841B1 true KR101136841B1 (ko) 2012-04-19

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Country Status (7)

Country Link
US (1) US7603186B2 (enExample)
EP (1) EP2013672A4 (enExample)
JP (1) JP5152178B2 (enExample)
KR (1) KR101136841B1 (enExample)
CN (1) CN101454735B (enExample)
TW (1) TWI413879B (enExample)
WO (1) WO2007127897A2 (enExample)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4658200B2 (ja) * 2006-10-03 2011-03-23 株式会社堀場エステック マスフローコントローラ
US7853364B2 (en) 2006-11-30 2010-12-14 Veeco Instruments, Inc. Adaptive controller for ion source
US8079383B2 (en) * 2006-12-07 2011-12-20 Mks Instruments, Inc. Controller gain scheduling for mass flow controllers
US8056579B2 (en) * 2007-06-04 2011-11-15 Horiba Stec, Co., Ltd. Mass flow controller
US8160833B2 (en) * 2009-07-14 2012-04-17 Hitachi Metals, Ltd Thermal mass flow sensor with improved response across fluid types
US8195312B2 (en) * 2009-08-27 2012-06-05 Hitachi Metals, Ltd Multi-mode control loop with improved performance for mass flow controller
JP5499381B2 (ja) * 2009-10-20 2014-05-21 日立金属株式会社 流量制御装置
US8428755B2 (en) * 2010-02-01 2013-04-23 Johnson Controls Technology Company Systems and methods for increasing feedback controller response times
US8131400B2 (en) * 2010-06-10 2012-03-06 Hitachi Metals, Ltd. Adaptive on-tool mass flow controller tuning
US8945094B2 (en) * 2010-09-08 2015-02-03 Honeywell International Inc. Apparatus and method for medication delivery using single input-single output (SISO) model predictive control
CN104220946B (zh) 2012-02-03 2017-03-08 日立金属株式会社 流量控制装置以及流量控制方法
US9411321B2 (en) * 2012-06-20 2016-08-09 Fisher Controls International Llc Methods and system for minor loop feedback fallback
US9004107B2 (en) * 2012-08-21 2015-04-14 Applied Materials, Inc. Methods and apparatus for enhanced gas flow rate control
WO2014160663A1 (en) 2013-03-27 2014-10-02 Schlumberger Canada Limited Interface for automation client
JP6423792B2 (ja) * 2013-08-28 2018-11-14 株式会社堀場エステック 流量制御装置及び流量制御プログラム
EP2910865B1 (en) 2014-02-21 2016-11-23 Plum Sp. z o.o. System amd method for controlling a fan insufflating ait into a protected space, especially in fire ventilation for the protection of escape routes
RU2686797C2 (ru) * 2014-04-11 2019-04-30 Бристоль, Инк., Д/Б/А Ремоут Аутомейшен Солюшенз Контроллер потока нагнетания для воды и пара
US10245608B2 (en) 2014-05-01 2019-04-02 Graco Minnesota Inc. Method for flow control calibration of high-transient systems
EP3137228B1 (en) 2014-05-01 2019-10-16 Graco Minnesota Inc. Method for fluid pressure control in a closed system
JP6001600B2 (ja) * 2014-06-26 2016-10-05 株式会社日本自動車部品総合研究所 ガス供給部を制御するシステムおよびガス充填方法
CA2983310C (en) 2015-05-01 2023-10-17 Graco Minnesota Inc. Adaptive flow control
US9989956B2 (en) 2016-05-11 2018-06-05 Saudi Arabian Oil Company Split range control using proportional-integral control with flow valves
US11107168B2 (en) 2016-05-20 2021-08-31 Moog Inc. Secure and traceable manufactured parts
US11204597B2 (en) 2016-05-20 2021-12-21 Moog Inc. Outer space digital logistics system
JP2018018942A (ja) * 2016-07-27 2018-02-01 東京エレクトロン株式会社 液処理装置及び液処理方法
CN107041282A (zh) * 2017-01-20 2017-08-15 青岛农业大学 一种能够实现闭环控制的水肥一体化算法及控制器
CN109506028B (zh) * 2017-09-15 2020-02-21 武汉海翼科技有限公司 一种压力调节阀的快速随动控制方法
EP3727860B1 (en) * 2017-12-20 2024-02-21 Moog Inc. Outer space digital logistics system
US11209298B2 (en) * 2018-04-27 2021-12-28 Hitachi Metals, Ltd. Thermal mass flow sensor with improved accuracy
US10969797B2 (en) * 2018-08-29 2021-04-06 Illinois Tool Works, Inc. Mass flow valve controller and control method with set point filter and linearization system based on valve model
DK3690592T3 (da) * 2019-01-30 2021-07-05 Siemens Schweiz Ag Reguleringsventil
TWI755704B (zh) * 2019-05-14 2022-02-21 日商富士金股份有限公司 流量控制裝置、流量控制方法、流量控制裝置的控制程式
CN111495633B (zh) * 2020-04-26 2021-04-27 佛山科学技术学院 一种基于Faster-rcnn的涂料闭环供给系统及控制方法
US12184488B2 (en) * 2020-09-09 2024-12-31 Lenovo (Singapore) Pte. Limited Method and apparatus including event triggered goal change for control loops
CN117391404B (zh) * 2023-12-11 2024-05-10 深圳市曼恩斯特科技股份有限公司 锂电池涂布横向面密度的控制方法、装置及电子设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030236592A1 (en) * 2002-06-24 2003-12-25 Ali Shajii Apparatus and method for mass flow controller with network access to diagnostics
KR20050044773A (ko) * 2004-06-24 2005-05-12 엠케이에스 인스트루먼츠 인코포레이티드 압력변동에 영향을 받지 않는 질량 유량 제어장치 및 방법

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1416401A (en) * 1973-03-06 1975-12-03 Rolls Royce Control systems
US4218733A (en) 1978-11-13 1980-08-19 Sybron Corporation Adaptive gain controller
JPH03156509A (ja) 1989-11-14 1991-07-04 Stec Kk マスフローコントローラ
US5394322A (en) * 1990-07-16 1995-02-28 The Foxboro Company Self-tuning controller that extracts process model characteristics
US5410495A (en) 1993-07-20 1995-04-25 Texas Instruments Incorporated Apparatus, systems, and methods for diagnosing anomalous mass flow controller operation
US5609136A (en) * 1994-06-28 1997-03-11 Cummins Engine Company, Inc. Model predictive control for HPI closed-loop fuel pressure control system
US5875109A (en) * 1995-05-24 1999-02-23 Johnson Service Company Adaptive flow controller for use with a flow control system
US5691896A (en) * 1995-08-15 1997-11-25 Rosemount, Inc. Field based process control system with auto-tuning
JP3240436B2 (ja) * 1997-02-10 2001-12-17 油研工業株式会社 油圧エレベータ装置
US6272401B1 (en) * 1997-07-23 2001-08-07 Dresser Industries, Inc. Valve positioner system
US6466893B1 (en) * 1997-09-29 2002-10-15 Fisher Controls International, Inc. Statistical determination of estimates of process control loop parameters
JP3522535B2 (ja) 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備
JP3522544B2 (ja) 1998-08-24 2004-04-26 忠弘 大見 流体可変型流量制御装置
US6575027B1 (en) * 1999-07-09 2003-06-10 Mykrolis Corporation Mass flow sensor interface circuit
US6445980B1 (en) * 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6389364B1 (en) * 1999-07-10 2002-05-14 Mykrolis Corporation System and method for a digital mass flow controller
US6487458B1 (en) * 1999-08-31 2002-11-26 Delphi Technologies, Inc. Adaptive closed-loop servo control
US6422263B1 (en) * 2000-09-05 2002-07-23 Guy Kevin Spicer Nested and cascaded variable bias feedfoward and feedback flow and level control system
US6782906B2 (en) 2000-12-28 2004-08-31 Young-Chul Chang Time based mass flow controller and method for controlling flow rate using it
KR20040024854A (ko) 2001-04-24 2004-03-22 셀레리티 그룹 아이엔씨 질량유량 제어장치를 위한 시스템 및 방법
GB0113627D0 (en) 2001-06-05 2001-07-25 Univ Stirling Controller and method of controlling an apparatus
US6608516B1 (en) * 2002-01-30 2003-08-19 National Instruments Corporation Adjustable time constant integrator
CN100425955C (zh) 2002-05-24 2008-10-15 迅捷公司 用于物质流检测设备校准的系统和方法
US6868862B2 (en) 2002-06-24 2005-03-22 Mks Instruments, Inc. Apparatus and method for mass flow controller with a plurality of closed loop control code sets
GB2419422B8 (en) 2002-06-24 2008-09-03 Mks Instr Inc Mass flow controller
US6712084B2 (en) 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
WO2004010234A2 (en) 2002-07-19 2004-01-29 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
US20040122353A1 (en) 2002-12-19 2004-06-24 Medtronic Minimed, Inc. Relay device for transferring information between a sensor system and a fluid delivery system
KR100502217B1 (ko) 2002-12-27 2005-07-19 태산엘시디 주식회사 컨트롤 퍼지용 질량유량 제어기 및 동작방법
JP3801570B2 (ja) * 2003-02-24 2006-07-26 Ｓｍｃ株式会社 流量制御装置
US6955072B2 (en) 2003-06-25 2005-10-18 Mks Instruments, Inc. System and method for in-situ flow verification and calibration

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030236592A1 (en) * 2002-06-24 2003-12-25 Ali Shajii Apparatus and method for mass flow controller with network access to diagnostics
KR20050044773A (ko) * 2004-06-24 2005-05-12 엠케이에스 인스트루먼츠 인코포레이티드 압력변동에 영향을 받지 않는 질량 유량 제어장치 및 방법

Also Published As

Publication number Publication date
JP5152178B2 (ja) 2013-02-27
EP2013672A4 (en) 2010-09-08
WO2007127897A2 (en) 2007-11-08
WO2007127897A3 (en) 2008-09-18
US7603186B2 (en) 2009-10-13
JP2009535716A (ja) 2009-10-01
TW200848967A (en) 2008-12-16
TWI413879B (zh) 2013-11-01
EP2013672A2 (en) 2009-01-14
KR20090007470A (ko) 2009-01-16
US20070276545A1 (en) 2007-11-29
CN101454735A (zh) 2009-06-10
CN101454735B (zh) 2013-07-17

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