TWI413879B - 利用適應性閉環控制演算法以控制流體流量之方法和裝置 - Google Patents

利用適應性閉環控制演算法以控制流體流量之方法和裝置 Download PDF

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Publication number
TWI413879B
TWI413879B TW96121084A TW96121084A TWI413879B TW I413879 B TWI413879 B TW I413879B TW 96121084 A TW96121084 A TW 96121084A TW 96121084 A TW96121084 A TW 96121084A TW I413879 B TWI413879 B TW I413879B
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TW
Taiwan
Prior art keywords
control algorithm
loop control
closed
indicator
sensor
Prior art date
Application number
TW96121084A
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English (en)
Chinese (zh)
Other versions
TW200848967A (en
Inventor
Alexei V Smirnov
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Publication of TW200848967A publication Critical patent/TW200848967A/zh
Application granted granted Critical
Publication of TWI413879B publication Critical patent/TWI413879B/zh

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Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • G05D7/0617Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/0205Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system
    • G05B13/024Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric not using a model or a simulator of the controlled system in which a parameter or coefficient is automatically adjusted to optimise the performance
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/0318Processes
    • Y10T137/0324With control of flow by a condition or characteristic of a fluid
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7758Pilot or servo controlled
    • Y10T137/7759Responsive to change in rate of fluid flow

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
  • Flow Control (AREA)
TW96121084A 2006-04-28 2007-06-11 利用適應性閉環控制演算法以控制流體流量之方法和裝置 TWI413879B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/413,780 US7603186B2 (en) 2006-04-28 2006-04-28 Adaptive response time closed loop control algorithm

Publications (2)

Publication Number Publication Date
TW200848967A TW200848967A (en) 2008-12-16
TWI413879B true TWI413879B (zh) 2013-11-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW96121084A TWI413879B (zh) 2006-04-28 2007-06-11 利用適應性閉環控制演算法以控制流體流量之方法和裝置

Country Status (7)

Country Link
US (1) US7603186B2 (enExample)
EP (1) EP2013672A4 (enExample)
JP (1) JP5152178B2 (enExample)
KR (1) KR101136841B1 (enExample)
CN (1) CN101454735B (enExample)
TW (1) TWI413879B (enExample)
WO (1) WO2007127897A2 (enExample)

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JP2018018942A (ja) * 2016-07-27 2018-02-01 東京エレクトロン株式会社 液処理装置及び液処理方法
CN107041282A (zh) * 2017-01-20 2017-08-15 青岛农业大学 一种能够实现闭环控制的水肥一体化算法及控制器
CN109506028B (zh) * 2017-09-15 2020-02-21 武汉海翼科技有限公司 一种压力调节阀的快速随动控制方法
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US11209298B2 (en) * 2018-04-27 2021-12-28 Hitachi Metals, Ltd. Thermal mass flow sensor with improved accuracy
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TWI755704B (zh) 2019-05-14 2022-02-21 日商富士金股份有限公司 流量控制裝置、流量控制方法、流量控制裝置的控制程式
CN111495633B (zh) * 2020-04-26 2021-04-27 佛山科学技术学院 一种基于Faster-rcnn的涂料闭环供给系统及控制方法
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Also Published As

Publication number Publication date
EP2013672A2 (en) 2009-01-14
WO2007127897A2 (en) 2007-11-08
EP2013672A4 (en) 2010-09-08
KR20090007470A (ko) 2009-01-16
US20070276545A1 (en) 2007-11-29
CN101454735A (zh) 2009-06-10
CN101454735B (zh) 2013-07-17
TW200848967A (en) 2008-12-16
JP5152178B2 (ja) 2013-02-27
JP2009535716A (ja) 2009-10-01
US7603186B2 (en) 2009-10-13
KR101136841B1 (ko) 2012-04-19
WO2007127897A3 (en) 2008-09-18

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