CN101428370B - 激光加工方法 - Google Patents

激光加工方法 Download PDF

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Publication number
CN101428370B
CN101428370B CN200810181570XA CN200810181570A CN101428370B CN 101428370 B CN101428370 B CN 101428370B CN 200810181570X A CN200810181570X A CN 200810181570XA CN 200810181570 A CN200810181570 A CN 200810181570A CN 101428370 B CN101428370 B CN 101428370B
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CN
China
Prior art keywords
protective layer
nozzle
processing method
laser processing
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200810181570XA
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English (en)
Chinese (zh)
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CN101428370A (zh
Inventor
松本康成
金冈优
村井融
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication date
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Publication of CN101428370A publication Critical patent/CN101428370A/zh
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Publication of CN101428370B publication Critical patent/CN101428370B/zh
Expired - Fee Related legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
    • B23K2101/35—Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/02—Iron or ferrous alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/02—Iron or ferrous alloys
    • B23K2103/04—Steel or steel alloys
    • B23K2103/05—Stainless steel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/10—Aluminium or alloys thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/12—Copper or alloys thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/36—Wood or similar materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52—Ceramics

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Laser Beam Processing (AREA)
CN200810181570XA 2005-06-27 2006-06-20 激光加工方法 Expired - Fee Related CN101428370B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005-186047 2005-06-27
JP2005186047 2005-06-27
JP2005186047 2005-06-27

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB2006800006425A Division CN100513049C (zh) 2005-06-27 2006-06-20 激光加工方法和激光加工头

Publications (2)

Publication Number Publication Date
CN101428370A CN101428370A (zh) 2009-05-13
CN101428370B true CN101428370B (zh) 2013-05-29

Family

ID=37595169

Family Applications (3)

Application Number Title Priority Date Filing Date
CNB2006800006425A Expired - Fee Related CN100513049C (zh) 2005-06-27 2006-06-20 激光加工方法和激光加工头
CN200810181570XA Expired - Fee Related CN101428370B (zh) 2005-06-27 2006-06-20 激光加工方法
CN2011100381989A Expired - Fee Related CN102151992B (zh) 2005-06-27 2006-06-20 激光加工方法和激光加工头

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CNB2006800006425A Expired - Fee Related CN100513049C (zh) 2005-06-27 2006-06-20 激光加工方法和激光加工头

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2011100381989A Expired - Fee Related CN102151992B (zh) 2005-06-27 2006-06-20 激光加工方法和激光加工头

Country Status (5)

Country Link
JP (3) JP4978195B2 (enExample)
KR (1) KR100853073B1 (enExample)
CN (3) CN100513049C (enExample)
TW (1) TWI295206B (enExample)
WO (1) WO2007000915A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100078418A1 (en) * 2008-09-26 2010-04-01 Electro Scientific Industries, Inc. Method of laser micro-machining stainless steel with high cosmetic quality
WO2011158617A1 (ja) 2010-06-14 2011-12-22 三菱電機株式会社 レーザ加工装置、及びレーザ加工方法
GB2482190A (en) * 2010-07-23 2012-01-25 New Transducers Ltd Methods of generating a desired haptic sensation in a touch sensitive device
JP6260136B2 (ja) * 2013-08-07 2018-01-17 株式会社Ｇｓユアサ 蓄電素子の製造方法および蓄電素子
CN103978312A (zh) * 2014-04-16 2014-08-13 苏州萃田精密机械有限公司 一种铝板表面凹槽加工装置
CN104043904A (zh) * 2014-06-09 2014-09-17 江苏大学 一种背面侧吹气体辅助激光切割的方法及装置
DE102015215316A1 (de) * 2015-08-11 2016-06-30 Schuler Automation Gmbh & Co. Kg Verfahren zur Herstellung einer Blechplatine mittels Laserschneiden und Verwendung einer Kunststofffolie
JP6315634B2 (ja) 2016-05-18 2018-04-25 株式会社アマダホールディングス 複合加工システム及びレーザ切断加工方法
CN109759728B (zh) * 2019-01-23 2020-08-14 西安交通大学 一种利用增加保护层改善微孔形貌的方法
CN109877448A (zh) * 2019-03-20 2019-06-14 大族激光科技产业集团股份有限公司 一种柔性膜材的加工系统及加工方法
CN114888454A (zh) * 2022-05-25 2022-08-12 深圳市杰普特光电股份有限公司 一种电池极片的切割方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1106329A (zh) * 1993-10-21 1995-08-09 三菱电机株式会社 加工头及激光加工装置
CN1333103A (zh) * 2000-07-07 2002-01-30 日本车辆制造株式会社 超薄金属板的激光切断加工装置
JP2002283088A (ja) * 2001-03-23 2002-10-02 Sumitomo Heavy Ind Ltd レーザ加工の裏面傷防止方法及びレーザ加工装置
CN1398211A (zh) * 2000-10-12 2003-02-19 Ase美国公司 薄且脆的材料的气助激光切割
CN1704213A (zh) * 2004-05-28 2005-12-07 宝丽科技集团有限公司 具双喷嘴的脆性工件切割设备

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JPH0543994Y2 (enExample) * 1985-07-19 1993-11-08
JPH02286327A (ja) * 1989-04-28 1990-11-26 Amada Co Ltd レーザ加工用の金属板
JP3405799B2 (ja) * 1994-03-04 2003-05-12 ファナック株式会社 レーザ加工方法
JP3512634B2 (ja) * 1998-05-11 2004-03-31 三菱電機株式会社 レーザ加工方法、被レーザ加工物の生産方法、およびレーザ加工装置、並びに、レーザ加工または被レーザ加工物の生産方法をコンピュータに実行させるプログラムを格納したコンピュータが読取可能な記録媒体
JP4366534B2 (ja) * 2000-02-01 2009-11-18 澁谷工業株式会社 レーザ加工方法
JP4304808B2 (ja) * 2000-02-04 2009-07-29 澁谷工業株式会社 レーザ加工方法
JP4221540B2 (ja) * 2000-06-27 2009-02-12 澁谷工業株式会社 レーザ加工方法およびその装置
TW524726B (en) * 2001-04-23 2003-03-21 Furukawa Electric Co Ltd Adhesive tape for laser dicing
JP2004322157A (ja) * 2003-04-25 2004-11-18 Nitto Denko Corp 被加工物の加工方法、及びこれに用いる粘着シート
CN1579697A (zh) * 2003-08-07 2005-02-16 鸿富锦精密工业（深圳）有限公司 一种激光加工方法
JP4873863B2 (ja) * 2005-01-14 2012-02-08 日東電工株式会社 レーザー加工品の製造方法及びレーザー加工用粘着シート
JP2006255728A (ja) * 2005-03-15 2006-09-28 Amada Co Ltd レーザ加工装置及びレーザ加工方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1106329A (zh) * 1993-10-21 1995-08-09 三菱电机株式会社 加工头及激光加工装置
CN1333103A (zh) * 2000-07-07 2002-01-30 日本车辆制造株式会社 超薄金属板的激光切断加工装置
CN1398211A (zh) * 2000-10-12 2003-02-19 Ase美国公司 薄且脆的材料的气助激光切割
JP2002283088A (ja) * 2001-03-23 2002-10-02 Sumitomo Heavy Ind Ltd レーザ加工の裏面傷防止方法及びレーザ加工装置
CN1704213A (zh) * 2004-05-28 2005-12-07 宝丽科技集团有限公司 具双喷嘴的脆性工件切割设备

Also Published As

Publication number Publication date
JP2011251344A (ja) 2011-12-15
KR100853073B1 (ko) 2008-08-19
CN101428370A (zh) 2009-05-13
CN101005916A (zh) 2007-07-25
JP5360176B2 (ja) 2013-12-04
KR20070061796A (ko) 2007-06-14
CN102151992A (zh) 2011-08-17
JP5360177B2 (ja) 2013-12-04
CN102151992B (zh) 2012-11-21
WO2007000915A1 (ja) 2007-01-04
TWI295206B (enExample) 2008-04-01
JP4978195B2 (ja) 2012-07-18
JP2011251345A (ja) 2011-12-15
CN100513049C (zh) 2009-07-15
JPWO2007000915A1 (ja) 2009-01-22

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