CN101423195B - 氟气的提纯方法 - Google Patents
氟气的提纯方法 Download PDFInfo
- Publication number
- CN101423195B CN101423195B CN200810194553XA CN200810194553A CN101423195B CN 101423195 B CN101423195 B CN 101423195B CN 200810194553X A CN200810194553X A CN 200810194553XA CN 200810194553 A CN200810194553 A CN 200810194553A CN 101423195 B CN101423195 B CN 101423195B
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- Prior art keywords
- fluorine gas
- minus
- temperature
- purification
- controlled
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- Separation By Low-Temperature Treatments (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200810194553XA CN101423195B (zh) | 2008-11-17 | 2008-11-17 | 氟气的提纯方法 |
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CN200810194553XA CN101423195B (zh) | 2008-11-17 | 2008-11-17 | 氟气的提纯方法 |
Publications (2)
Publication Number | Publication Date |
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CN101423195A CN101423195A (zh) | 2009-05-06 |
CN101423195B true CN101423195B (zh) | 2010-11-03 |
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CN200810194553XA Expired - Fee Related CN101423195B (zh) | 2008-11-17 | 2008-11-17 | 氟气的提纯方法 |
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CN (1) | CN101423195B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5521372B2 (ja) * | 2009-04-03 | 2014-06-11 | セントラル硝子株式会社 | フッ素ガスのin−situガス混合および希釈システム |
CN108545700B (zh) * | 2018-04-23 | 2020-03-17 | 大连中鼎化学有限公司 | 一种超纯氯化氢的制备装置及方法 |
CN114852966A (zh) * | 2021-01-20 | 2022-08-05 | 欧中电子材料(重庆)有限公司 | 一种脱除氟气中hf的方法及装置 |
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- 2008-11-17 CN CN200810194553XA patent/CN101423195B/zh not_active Expired - Fee Related
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Publication number | Publication date |
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CN101423195A (zh) | 2009-05-06 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
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Owner name: ZHANGJIAGANG YAYUAN HIGH-TECH MATERIAL CO.,LTD. Free format text: FORMER OWNER: YUAN XIANGYUN Effective date: 20130510 |
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Effective date of registration: 20130510 Address after: 215600, Yu Town, Jiangsu, Zhangjiagang Province sand village Patentee after: Zhangjiagang Yayuan High-Tech Material Co.,Ltd. Address before: Jiangsu province Zhangjiagang city yangshe 215600 Yangtze River town building 7 Room 305 Patentee before: Yuan Xiangyun |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101103 Termination date: 20201117 |
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CF01 | Termination of patent right due to non-payment of annual fee |