CN101405569B - 惯性力传感器 - Google Patents

惯性力传感器 Download PDF

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Publication number
CN101405569B
CN101405569B CN2007800096464A CN200780009646A CN101405569B CN 101405569 B CN101405569 B CN 101405569B CN 2007800096464 A CN2007800096464 A CN 2007800096464A CN 200780009646 A CN200780009646 A CN 200780009646A CN 101405569 B CN101405569 B CN 101405569B
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CN
China
Prior art keywords
arm
inertial force
arms
force sensor
oscillator
Prior art date
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Expired - Fee Related
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CN2007800096464A
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English (en)
Chinese (zh)
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CN101405569A (zh
Inventor
大内智
相泽宏幸
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Publication of CN101405569A publication Critical patent/CN101405569A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN2007800096464A 2006-04-12 2007-04-10 惯性力传感器 Expired - Fee Related CN101405569B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006109507A JP5208373B2 (ja) 2006-04-12 2006-04-12 慣性力センサ
JP109507/2006 2006-04-12
PCT/JP2007/057871 WO2007117008A1 (ja) 2006-04-12 2007-04-10 慣性力センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201210001632.0A Division CN102589538B (zh) 2006-04-12 2007-04-10 惯性力传感器

Publications (2)

Publication Number Publication Date
CN101405569A CN101405569A (zh) 2009-04-08
CN101405569B true CN101405569B (zh) 2012-07-04

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN2007800096464A Expired - Fee Related CN101405569B (zh) 2006-04-12 2007-04-10 惯性力传感器
CN201210001632.0A Expired - Fee Related CN102589538B (zh) 2006-04-12 2007-04-10 惯性力传感器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201210001632.0A Expired - Fee Related CN102589538B (zh) 2006-04-12 2007-04-10 惯性力传感器

Country Status (5)

Country Link
US (2) US8215190B2 (cg-RX-API-DMAC7.html)
EP (1) EP1978330A4 (cg-RX-API-DMAC7.html)
JP (1) JP5208373B2 (cg-RX-API-DMAC7.html)
CN (2) CN101405569B (cg-RX-API-DMAC7.html)
WO (1) WO2007117008A1 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102589538B (zh) * 2006-04-12 2015-04-08 松下电器产业株式会社 惯性力传感器

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JP5716557B2 (ja) * 2011-06-14 2015-05-13 セイコーエプソン株式会社 振動片、ジャイロセンサー、電子機器、振動片の製造方法
JP2013234873A (ja) * 2012-05-07 2013-11-21 Seiko Epson Corp 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
JP6435596B2 (ja) * 2013-08-09 2018-12-12 セイコーエプソン株式会社 振動素子、振動デバイス、電子機器、および移動体
CN103712720B (zh) * 2014-01-02 2015-08-19 杭州士兰集成电路有限公司 电容式压力传感器和惯性传感器集成器件及其形成方法
CN104826328B (zh) * 2015-06-03 2016-11-09 苏州桀勇不锈钢制品有限公司 一种娱乐球杆
US10190928B1 (en) * 2016-11-17 2019-01-29 X Development Llc Flexible sensor for measuring flex or torque

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JP2006166275A (ja) * 2004-12-10 2006-06-22 Seiko Epson Corp 水晶デバイスの製造方法
JP5208373B2 (ja) * 2006-04-12 2013-06-12 パナソニック株式会社 慣性力センサ
JP4709260B2 (ja) * 2008-10-16 2011-06-22 日本電波工業株式会社 圧電振動片および圧電デバイス

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102589538B (zh) * 2006-04-12 2015-04-08 松下电器产业株式会社 惯性力传感器

Also Published As

Publication number Publication date
US8590403B2 (en) 2013-11-26
JP2007279001A (ja) 2007-10-25
EP1978330A4 (en) 2010-04-14
CN102589538A (zh) 2012-07-18
US20090120187A1 (en) 2009-05-14
CN101405569A (zh) 2009-04-08
US8215190B2 (en) 2012-07-10
JP5208373B2 (ja) 2013-06-12
US20120240678A1 (en) 2012-09-27
EP1978330A1 (en) 2008-10-08
CN102589538B (zh) 2015-04-08
WO2007117008A1 (ja) 2007-10-18

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Granted publication date: 20120704

Termination date: 20200410