CN101400968B - 准线修正系统及其使用方法 - Google Patents

准线修正系统及其使用方法 Download PDF

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Publication number
CN101400968B
CN101400968B CN200780008833.0A CN200780008833A CN101400968B CN 101400968 B CN101400968 B CN 101400968B CN 200780008833 A CN200780008833 A CN 200780008833A CN 101400968 B CN101400968 B CN 101400968B
Authority
CN
China
Prior art keywords
probe
correction system
target location
alignment correction
reflective object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200780008833.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN101400968A (zh
Inventor
R·J·诺顿
C·J·戴维斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gilson Inc
Original Assignee
Gilson Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gilson Inc filed Critical Gilson Inc
Publication of CN101400968A publication Critical patent/CN101400968A/zh
Application granted granted Critical
Publication of CN101400968B publication Critical patent/CN101400968B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
    • G01C15/02—Means for marking measuring points
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37113—Psd position sensitive detector, light spot on surface gives x, y position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39003—Move end effector on ellipse, circle, sphere
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39045—Camera on end effector detects reference pattern
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/21—Geometrical instruments with laser

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Mechanical Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manipulator (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Numerical Control (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
CN200780008833.0A 2006-02-03 2007-01-22 准线修正系统及其使用方法 Expired - Fee Related CN101400968B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/347,355 US7222431B1 (en) 2006-02-03 2006-02-03 Alignment correction system and methods of use thereof
US11/347,355 2006-02-03
PCT/US2007/060847 WO2007090002A2 (en) 2006-02-03 2007-01-22 Alignment correction system and methods of use thereof

Publications (2)

Publication Number Publication Date
CN101400968A CN101400968A (zh) 2009-04-01
CN101400968B true CN101400968B (zh) 2015-06-10

Family

ID=38056652

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200780008833.0A Expired - Fee Related CN101400968B (zh) 2006-02-03 2007-01-22 准线修正系统及其使用方法

Country Status (11)

Country Link
US (1) US7222431B1 (enExample)
EP (1) EP1982145B1 (enExample)
JP (1) JP4664412B2 (enExample)
KR (1) KR100977508B1 (enExample)
CN (1) CN101400968B (enExample)
AU (1) AU2007211197A1 (enExample)
CA (1) CA2641346A1 (enExample)
ES (1) ES2805298T3 (enExample)
RU (1) RU2008134007A (enExample)
TW (1) TWI403688B (enExample)
WO (1) WO2007090002A2 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2939332B1 (fr) * 2008-12-10 2011-01-07 Gilson Sas Dispositif d'aide au pipetage comprenant des moyens ameliores de centrage de plaque de microtitration
JP5571902B2 (ja) 2009-03-17 2014-08-13 川崎重工業株式会社 ロボット、及びオートゼロイング方法
JP5330297B2 (ja) * 2009-05-26 2013-10-30 株式会社ミツトヨ アライメント調整機構、および測定装置
CN102069498B (zh) * 2010-11-29 2012-09-05 楚天科技股份有限公司 用于封口机中的机械手定位机构
WO2012073469A1 (ja) 2010-11-29 2012-06-07 日産自動車株式会社 車両及びその操舵制御方法
WO2012124272A1 (ja) 2011-03-16 2012-09-20 日産自動車株式会社 車両用サスペンション装置、そのジオメトリ調整方法及び自動車
BR112015014984A2 (pt) * 2012-12-21 2017-07-11 Beckman Coulter Inc sistema e método para alinhamento automático com base em laser
TWI632342B (zh) 2016-11-30 2018-08-11 財團法人工業技術研究院 量測設備及量測方法
EP3531062A1 (en) * 2018-02-26 2019-08-28 Renishaw PLC Coordinate positioning machine
JP7239338B2 (ja) * 2019-02-05 2023-03-14 ファナック株式会社 レーザ加工ロボットおよびツール座標系設定方法
CN119354163A (zh) 2019-04-10 2025-01-24 米沃奇电动工具公司 光学激光靶
USD974205S1 (en) 2020-09-17 2023-01-03 Milwaukee Electric Tool Corporation Laser target

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Publication number Priority date Publication date Assignee Title
US5517027A (en) * 1993-06-08 1996-05-14 Mitsubishi Denki Kabushiki Kaisha Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these
US5754299A (en) * 1995-01-13 1998-05-19 Nikon Corporation Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus

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JP2557960B2 (ja) * 1988-09-19 1996-11-27 株式会社日立製作所 高さ測定方法
JP2654206B2 (ja) * 1989-11-27 1997-09-17 ファナック株式会社 タッチアップ方法
JPH0655485A (ja) * 1992-08-11 1994-03-01 Citizen Watch Co Ltd 多関節ロボットのアームたおれ量測定装置
FR2698182B1 (fr) 1992-11-13 1994-12-16 Commissariat Energie Atomique Dispositif de contrôle du centrage d'un faisceau lumineux, application à l'introduction de ce faisceau dans une fibre optique.
JPH08118272A (ja) * 1994-10-20 1996-05-14 Toyota Motor Corp ロボットのキャリブレーション方法
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JP3335826B2 (ja) * 1995-12-05 2002-10-21 株式会社日立製作所 はんだバンプの測定装置
US6042249A (en) 1996-07-30 2000-03-28 Bayer Corporation Illuminator optical assembly for an analytical instrument and methods of alignment and manufacture
US5745308A (en) 1996-07-30 1998-04-28 Bayer Corporation Methods and apparatus for an optical illuminator assembly and its alignment
US5829151A (en) * 1996-12-20 1998-11-03 The Boeing Company Multi-axis part positioning system
JP2000164626A (ja) * 1998-09-25 2000-06-16 Fuji Photo Film Co Ltd 部品のボンディング方法および装置
DE19854011A1 (de) * 1998-11-12 2000-05-25 Knoll Alois Einrichtung und Verfahren zum Vermessen von Mechanismen und ihrer Stellung
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Publication number Priority date Publication date Assignee Title
US5517027A (en) * 1993-06-08 1996-05-14 Mitsubishi Denki Kabushiki Kaisha Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these
US5754299A (en) * 1995-01-13 1998-05-19 Nikon Corporation Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus

Also Published As

Publication number Publication date
TW200736576A (en) 2007-10-01
KR100977508B1 (ko) 2010-08-23
ES2805298T3 (es) 2021-02-11
CN101400968A (zh) 2009-04-01
WO2007090002A9 (en) 2008-01-17
RU2008134007A (ru) 2010-03-10
CA2641346A1 (en) 2007-08-09
EP1982145A4 (en) 2012-10-24
WO2007090002A2 (en) 2007-08-09
JP2009525883A (ja) 2009-07-16
JP4664412B2 (ja) 2011-04-06
KR20080101939A (ko) 2008-11-21
AU2007211197A1 (en) 2007-08-09
TWI403688B (zh) 2013-08-01
US7222431B1 (en) 2007-05-29
WO2007090002A3 (en) 2008-05-08
EP1982145B1 (en) 2020-05-06
EP1982145A2 (en) 2008-10-22

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150610

Termination date: 20210122