TWI403688B - 校準系統及其使用方法 - Google Patents

校準系統及其使用方法 Download PDF

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Publication number
TWI403688B
TWI403688B TW096103945A TW96103945A TWI403688B TW I403688 B TWI403688 B TW I403688B TW 096103945 A TW096103945 A TW 096103945A TW 96103945 A TW96103945 A TW 96103945A TW I403688 B TWI403688 B TW I403688B
Authority
TW
Taiwan
Prior art keywords
light
probe
calibration system
substrate
target
Prior art date
Application number
TW096103945A
Other languages
English (en)
Chinese (zh)
Other versions
TW200736576A (en
Inventor
Robert J Norton
Christopher J Davis
Original Assignee
Gilson Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gilson Inc filed Critical Gilson Inc
Publication of TW200736576A publication Critical patent/TW200736576A/zh
Application granted granted Critical
Publication of TWI403688B publication Critical patent/TWI403688B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
    • G01C15/02—Means for marking measuring points
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37113—Psd position sensitive detector, light spot on surface gives x, y position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39003—Move end effector on ellipse, circle, sphere
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39045—Camera on end effector detects reference pattern
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/21—Geometrical instruments with laser

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Mechanical Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manipulator (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Numerical Control (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
TW096103945A 2006-02-03 2007-02-02 校準系統及其使用方法 TWI403688B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/347,355 US7222431B1 (en) 2006-02-03 2006-02-03 Alignment correction system and methods of use thereof

Publications (2)

Publication Number Publication Date
TW200736576A TW200736576A (en) 2007-10-01
TWI403688B true TWI403688B (zh) 2013-08-01

Family

ID=38056652

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096103945A TWI403688B (zh) 2006-02-03 2007-02-02 校準系統及其使用方法

Country Status (11)

Country Link
US (1) US7222431B1 (enExample)
EP (1) EP1982145B1 (enExample)
JP (1) JP4664412B2 (enExample)
KR (1) KR100977508B1 (enExample)
CN (1) CN101400968B (enExample)
AU (1) AU2007211197A1 (enExample)
CA (1) CA2641346A1 (enExample)
ES (1) ES2805298T3 (enExample)
RU (1) RU2008134007A (enExample)
TW (1) TWI403688B (enExample)
WO (1) WO2007090002A2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2939332B1 (fr) * 2008-12-10 2011-01-07 Gilson Sas Dispositif d'aide au pipetage comprenant des moyens ameliores de centrage de plaque de microtitration
JP5571902B2 (ja) 2009-03-17 2014-08-13 川崎重工業株式会社 ロボット、及びオートゼロイング方法
JP5330297B2 (ja) * 2009-05-26 2013-10-30 株式会社ミツトヨ アライメント調整機構、および測定装置
CN102069498B (zh) * 2010-11-29 2012-09-05 楚天科技股份有限公司 用于封口机中的机械手定位机构
WO2012073469A1 (ja) 2010-11-29 2012-06-07 日産自動車株式会社 車両及びその操舵制御方法
WO2012124272A1 (ja) 2011-03-16 2012-09-20 日産自動車株式会社 車両用サスペンション装置、そのジオメトリ調整方法及び自動車
BR112015014984A2 (pt) * 2012-12-21 2017-07-11 Beckman Coulter Inc sistema e método para alinhamento automático com base em laser
TWI632342B (zh) 2016-11-30 2018-08-11 財團法人工業技術研究院 量測設備及量測方法
EP3531062A1 (en) * 2018-02-26 2019-08-28 Renishaw PLC Coordinate positioning machine
JP7239338B2 (ja) * 2019-02-05 2023-03-14 ファナック株式会社 レーザ加工ロボットおよびツール座標系設定方法
CN119354163A (zh) 2019-04-10 2025-01-24 米沃奇电动工具公司 光学激光靶
USD974205S1 (en) 2020-09-17 2023-01-03 Milwaukee Electric Tool Corporation Laser target

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5829151A (en) * 1996-12-20 1998-11-03 The Boeing Company Multi-axis part positioning system
US5920394A (en) * 1995-09-01 1999-07-06 Research Corporation Technologies, Inc. Optical coordinate measuring machine
US6438857B2 (en) * 1999-12-03 2002-08-27 Carl-Zeiss Stiftung Coordinate measurement device
US6519860B1 (en) * 2000-10-19 2003-02-18 Sandia Corporation Position feedback control system
TW552400B (en) * 2002-06-21 2003-09-11 Lite On It Corp Automatic measurement method of optical calibration apparatus
US6931738B2 (en) * 2001-12-06 2005-08-23 A.P. Fixturlaser Ab Device and procedure for aligning of components
TWI239933B (en) * 2004-03-16 2005-09-21 Powerchip Semiconductor Corp Positioning apparatus and positioning method using the same

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4790651A (en) 1987-09-30 1988-12-13 Chesapeake Laser Systems, Inc. Tracking laser interferometer
JP2557960B2 (ja) * 1988-09-19 1996-11-27 株式会社日立製作所 高さ測定方法
JP2654206B2 (ja) * 1989-11-27 1997-09-17 ファナック株式会社 タッチアップ方法
JPH0655485A (ja) * 1992-08-11 1994-03-01 Citizen Watch Co Ltd 多関節ロボットのアームたおれ量測定装置
FR2698182B1 (fr) 1992-11-13 1994-12-16 Commissariat Energie Atomique Dispositif de contrôle du centrage d'un faisceau lumineux, application à l'introduction de ce faisceau dans une fibre optique.
US5517027A (en) * 1993-06-08 1996-05-14 Mitsubishi Denki Kabushiki Kaisha Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these
JPH08118272A (ja) * 1994-10-20 1996-05-14 Toyota Motor Corp ロボットのキャリブレーション方法
US5754299A (en) * 1995-01-13 1998-05-19 Nikon Corporation Inspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatus
JP3335826B2 (ja) * 1995-12-05 2002-10-21 株式会社日立製作所 はんだバンプの測定装置
US6042249A (en) 1996-07-30 2000-03-28 Bayer Corporation Illuminator optical assembly for an analytical instrument and methods of alignment and manufacture
US5745308A (en) 1996-07-30 1998-04-28 Bayer Corporation Methods and apparatus for an optical illuminator assembly and its alignment
JP2000164626A (ja) * 1998-09-25 2000-06-16 Fuji Photo Film Co Ltd 部品のボンディング方法および装置
DE19854011A1 (de) * 1998-11-12 2000-05-25 Knoll Alois Einrichtung und Verfahren zum Vermessen von Mechanismen und ihrer Stellung
US6765647B1 (en) * 1998-11-18 2004-07-20 Nikon Corporation Exposure method and device
US6606798B2 (en) * 2001-02-23 2003-08-19 Black & Decker Inc. Laser level
JP3905771B2 (ja) 2001-03-02 2007-04-18 株式会社ミツトヨ 測定機の校正方法及び装置
US7050620B2 (en) * 2001-03-30 2006-05-23 Heckman Carol A Method of assaying shape and structural features in cells
JP2003243479A (ja) * 2002-02-19 2003-08-29 Tokyo Electron Ltd 搬送手段の停止位置調整機構
US7233841B2 (en) * 2002-04-19 2007-06-19 Applied Materials, Inc. Vision system
JP3837503B2 (ja) * 2002-05-09 2006-10-25 独立行政法人産業技術総合研究所 ３次元座標評価ゲージ
US7522762B2 (en) * 2003-04-16 2009-04-21 Inverness Medical-Biostar, Inc. Detection, resolution, and identification of arrayed elements
US7110106B2 (en) * 2003-10-29 2006-09-19 Coretech Optical, Inc. Surface inspection system
JP4377665B2 (ja) * 2003-12-01 2009-12-02 本田技研工業株式会社 位置検出用マーク、並びに、マーク検出装置、その方法及びそのプログラム
JP2005181135A (ja) * 2003-12-19 2005-07-07 Hitachi High-Technologies Corp ロボットアームを備えた自動分注装置、及びその動作方法
US7262841B2 (en) * 2005-03-17 2007-08-28 Agilent Technologies, Inc. Laser alignment for ion source

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5920394A (en) * 1995-09-01 1999-07-06 Research Corporation Technologies, Inc. Optical coordinate measuring machine
US5829151A (en) * 1996-12-20 1998-11-03 The Boeing Company Multi-axis part positioning system
US6438857B2 (en) * 1999-12-03 2002-08-27 Carl-Zeiss Stiftung Coordinate measurement device
US6519860B1 (en) * 2000-10-19 2003-02-18 Sandia Corporation Position feedback control system
US6931738B2 (en) * 2001-12-06 2005-08-23 A.P. Fixturlaser Ab Device and procedure for aligning of components
TW552400B (en) * 2002-06-21 2003-09-11 Lite On It Corp Automatic measurement method of optical calibration apparatus
TWI239933B (en) * 2004-03-16 2005-09-21 Powerchip Semiconductor Corp Positioning apparatus and positioning method using the same

Also Published As

Publication number Publication date
TW200736576A (en) 2007-10-01
KR100977508B1 (ko) 2010-08-23
ES2805298T3 (es) 2021-02-11
CN101400968A (zh) 2009-04-01
CN101400968B (zh) 2015-06-10
WO2007090002A9 (en) 2008-01-17
RU2008134007A (ru) 2010-03-10
CA2641346A1 (en) 2007-08-09
EP1982145A4 (en) 2012-10-24
WO2007090002A2 (en) 2007-08-09
JP2009525883A (ja) 2009-07-16
JP4664412B2 (ja) 2011-04-06
KR20080101939A (ko) 2008-11-21
AU2007211197A1 (en) 2007-08-09
US7222431B1 (en) 2007-05-29
WO2007090002A3 (en) 2008-05-08
EP1982145B1 (en) 2020-05-06
EP1982145A2 (en) 2008-10-22

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MM4A Annulment or lapse of patent due to non-payment of fees