CN101393773B - 非易失性存储器的热载流子注入编程的方法和结构 - Google Patents
非易失性存储器的热载流子注入编程的方法和结构 Download PDFInfo
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- CN101393773B CN101393773B CN200810175677.3A CN200810175677A CN101393773B CN 101393773 B CN101393773 B CN 101393773B CN 200810175677 A CN200810175677 A CN 200810175677A CN 101393773 B CN101393773 B CN 101393773B
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- 230000005669 field effect Effects 0.000 claims abstract description 34
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
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Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/08—Word line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, for word lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7883—Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2216/00—Indexing scheme relating to G11C16/00 and subgroups, for features not directly covered by these groups
- G11C2216/02—Structural aspects of erasable programmable read-only memories
- G11C2216/10—Floating gate memory cells with a single polysilicon layer
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
- Read Only Memory (AREA)
Abstract
Description
Claims (37)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/779,838 US7733700B2 (en) | 2007-07-18 | 2007-07-18 | Method and structures for highly efficient hot carrier injection programming for non-volatile memories |
US11/779,838 | 2007-07-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101393773A CN101393773A (zh) | 2009-03-25 |
CN101393773B true CN101393773B (zh) | 2014-05-07 |
Family
ID=40264723
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200810175677.3A Active CN101393773B (zh) | 2007-07-18 | 2008-07-18 | 非易失性存储器的热载流子注入编程的方法和结构 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7733700B2 (zh) |
JP (1) | JP2009027168A (zh) |
KR (1) | KR20090009163A (zh) |
CN (1) | CN101393773B (zh) |
TW (1) | TW200913281A (zh) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009004535A2 (en) * | 2007-06-29 | 2009-01-08 | Nxp B.V. | Static memory devices |
JP4594973B2 (ja) | 2007-09-26 | 2010-12-08 | 株式会社東芝 | 不揮発性半導体記憶装置 |
KR101566404B1 (ko) * | 2008-11-25 | 2015-11-05 | 삼성전자주식회사 | 반도체 소자의 동작 방법 |
US8139418B2 (en) | 2009-04-27 | 2012-03-20 | Micron Technology, Inc. | Techniques for controlling a direct injection semiconductor memory device |
US8508994B2 (en) * | 2009-04-30 | 2013-08-13 | Micron Technology, Inc. | Semiconductor device with floating gate and electrically floating body |
US9076543B2 (en) * | 2009-07-27 | 2015-07-07 | Micron Technology, Inc. | Techniques for providing a direct injection semiconductor memory device |
WO2011049628A1 (en) * | 2009-10-23 | 2011-04-28 | Aplus Flash Technology, Inc. | Novel punch-through free program scheme for nt-string flash design |
US9779814B2 (en) | 2011-08-09 | 2017-10-03 | Flashsilicon Incorporation | Non-volatile static random access memory devices and methods of operations |
JP2013077780A (ja) * | 2011-09-30 | 2013-04-25 | Seiko Instruments Inc | 半導体記憶装置及び半導体記憶素子 |
CN102411991A (zh) * | 2011-12-20 | 2012-04-11 | 南京大学 | 一种非挥发性存储器低压快速窄注入编程方法 |
US9214465B2 (en) | 2012-07-24 | 2015-12-15 | Flashsilicon Incorporation | Structures and operational methods of non-volatile dynamic random access memory devices |
US8873316B2 (en) | 2012-07-25 | 2014-10-28 | Freescale Semiconductor, Inc. | Methods and systems for adjusting NVM cell bias conditions based upon operating temperature to reduce performance degradation |
US8902667B2 (en) | 2012-07-25 | 2014-12-02 | Freescale Semiconductor, Inc. | Methods and systems for adjusting NVM cell bias conditions for program/erase operations to reduce performance degradation |
US9142315B2 (en) | 2012-07-25 | 2015-09-22 | Freescale Semiconductor, Inc. | Methods and systems for adjusting NVM cell bias conditions for read/verify operations to compensate for performance degradation |
US8879323B2 (en) | 2012-11-21 | 2014-11-04 | Flashsilicon Incorporation | Interconnection matrix using semiconductor non-volatile memory |
CN105931667A (zh) * | 2016-05-11 | 2016-09-07 | 上海华虹宏力半导体制造有限公司 | 一种闪存的编程方法 |
US9685239B1 (en) | 2016-10-12 | 2017-06-20 | Pegasus Semiconductor (Beijing) Co., Ltd | Field sub-bitline nor flash array |
US10685705B2 (en) * | 2018-07-27 | 2020-06-16 | Globalfoundries Inc. | Program and erase memory structures |
KR20200090031A (ko) * | 2019-01-18 | 2020-07-28 | 에스케이하이닉스 주식회사 | 메모리 시스템 및 이의 동작 방법 |
US11869566B2 (en) * | 2021-08-05 | 2024-01-09 | Mellanox Technologies, Ltd. | Memory cell based on self-assembled monolayer polaron |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0762429B1 (en) * | 1995-08-11 | 2002-02-20 | Interuniversitair Microelektronica Centrum Vzw | Method of programming a flash EEPROM memory cell optimized for low power consumption and a method for erasing said cell |
CN1438654A (zh) * | 2002-02-10 | 2003-08-27 | 旺宏电子股份有限公司 | 快闪存储器的数据擦除方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6002611A (en) * | 1998-07-22 | 1999-12-14 | Halo Lsi Design & Device Technology, Inc. | Fast, low current program with auto-program for flash memory |
US6891220B2 (en) * | 2002-04-05 | 2005-05-10 | Silicon Storage Technology, Inc. | Method of programming electrons onto a floating gate of a non-volatile memory cell |
US7221591B1 (en) * | 2002-05-06 | 2007-05-22 | Samsung Electronics Co., Ltd. | Fabricating bi-directional nonvolatile memory cells |
US20040004251A1 (en) * | 2002-07-08 | 2004-01-08 | Madurawe Raminda U. | Insulated-gate field-effect thin film transistors |
US7193900B2 (en) * | 2005-01-18 | 2007-03-20 | Mammen Thomas | CACT-TG (CATT) low voltage NVM cells |
US7352631B2 (en) * | 2005-02-18 | 2008-04-01 | Freescale Semiconductor, Inc. | Methods for programming a floating body nonvolatile memory |
US20070158733A1 (en) * | 2006-01-09 | 2007-07-12 | Yield Microelectronics Corp. | High-speed low-voltage programming and self-convergent high-speed low-voltage erasing schemes for EEPROM |
US7499336B2 (en) * | 2007-05-14 | 2009-03-03 | Skymedi Corporation | Method of programming a nonvolatile memory cell and related memory array |
-
2007
- 2007-07-18 US US11/779,838 patent/US7733700B2/en active Active
-
2008
- 2008-07-17 TW TW097127134A patent/TW200913281A/zh unknown
- 2008-07-18 CN CN200810175677.3A patent/CN101393773B/zh active Active
- 2008-07-18 KR KR1020080070195A patent/KR20090009163A/ko not_active Application Discontinuation
- 2008-07-18 JP JP2008186992A patent/JP2009027168A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0762429B1 (en) * | 1995-08-11 | 2002-02-20 | Interuniversitair Microelektronica Centrum Vzw | Method of programming a flash EEPROM memory cell optimized for low power consumption and a method for erasing said cell |
CN1438654A (zh) * | 2002-02-10 | 2003-08-27 | 旺宏电子股份有限公司 | 快闪存储器的数据擦除方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2009027168A (ja) | 2009-02-05 |
CN101393773A (zh) | 2009-03-25 |
KR20090009163A (ko) | 2009-01-22 |
US7733700B2 (en) | 2010-06-08 |
US20090021984A1 (en) | 2009-01-22 |
TW200913281A (en) | 2009-03-16 |
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Effective date of registration: 20151020 Address after: Beijing City, Chaoyang District Wangjing four district 100102 Building No. 7 East 22 2205-1 room Patentee after: Zhongtian Hongjun Semiconductor Co.,Ltd. Address before: California, USA Patentee before: FlashSilicon, Inc. |
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Address after: Room 2205-1, 22 floors, Building 7, Wangjing Dongyuan District 4, Chaoyang District, Beijing 100102 Patentee after: PEGASUS SEMICONDUCTOR (BEIJING) CO.,LTD. Address before: Room 2205-1, 22 floors, Building 7, Wangjing Dongyuan District 4, Chaoyang District, Beijing 100102 Patentee before: Zhongtian Hongjun Semiconductor Co.,Ltd. |
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Address after: 201306 C, 888, west two road, Nanhui new town, Pudong New Area, Shanghai Patentee after: ZHONGTIAN HONGJUN SEMICONDUCTOR (SHANGHAI) Co.,Ltd. Address before: Room 2205-1, 22 floors, Building 7, Wangjing Dongyuan District 4, Chaoyang District, Beijing 100102 Patentee before: PEGASUS SEMICONDUCTOR (BEIJING) CO.,LTD. |
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Effective date of registration: 20191119 Address after: 201203 Room 201 and 202, 2 / F, No. 1 zhangrun building, Lane 61, shengxia Road, China (Shanghai) pilot Free Trade Zone Patentee after: Zhongtian Hongyu integrated circuit Co.,Ltd. Address before: The new town of Pudong New Area Nanhui lake west two road 201306 Shanghai City No. 888 building C Patentee before: ZHONGTIAN HONGJUN SEMICONDUCTOR (SHANGHAI) Co.,Ltd. |
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Effective date of registration: 20220620 Address after: 201306 building C, No. 888, Huanhu West 2nd Road, Lingang New District, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Patentee after: ZHONGTIAN HONGJUN SEMICONDUCTOR (SHANGHAI) Co.,Ltd. Address before: Room 201 and 202, 2 / F, No.1 zhangrun building, Lane 61, shengxia Road, China (Shanghai) pilot Free Trade Zone, 201203 Patentee before: Zhongtian Hongyu integrated circuit Co.,Ltd. |