CN101331590A - 用于在有图案基底上取向生长纳米线的方法 - Google Patents
用于在有图案基底上取向生长纳米线的方法 Download PDFInfo
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- CN101331590A CN101331590A CNA2006800453857A CN200680045385A CN101331590A CN 101331590 A CN101331590 A CN 101331590A CN A2006800453857 A CNA2006800453857 A CN A2006800453857A CN 200680045385 A CN200680045385 A CN 200680045385A CN 101331590 A CN101331590 A CN 101331590A
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- C—CHEMISTRY; METALLURGY
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Abstract
Description
Claims (70)
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PCT/US2006/048457 WO2007133271A2 (en) | 2005-12-29 | 2006-12-20 | Methods for oriented growth of nanowires on patterned substrates |
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WO (2) | WO2007133271A2 (zh) |
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CN102040191A (zh) * | 2009-10-15 | 2011-05-04 | 北京邮电大学 | 纳米线异质外延生长方法 |
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US20080038520A1 (en) | 2008-02-14 |
CA2624778A1 (en) | 2007-11-22 |
WO2007136412A2 (en) | 2007-11-29 |
AU2006343556A1 (en) | 2007-11-22 |
KR20080094901A (ko) | 2008-10-27 |
WO2007136412A3 (en) | 2008-11-20 |
WO2007133271A3 (en) | 2008-04-24 |
EP1966847A4 (en) | 2009-09-02 |
KR101287350B1 (ko) | 2013-07-23 |
CN101331590B (zh) | 2011-04-20 |
JP2009522197A (ja) | 2009-06-11 |
US7951422B2 (en) | 2011-05-31 |
AU2006343556B2 (en) | 2012-06-21 |
EP1966847A2 (en) | 2008-09-10 |
WO2007133271A2 (en) | 2007-11-22 |
EP1966847B1 (en) | 2015-03-04 |
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