FR2865946B1 - Procede de realisation d'une couche de materiau sur un support - Google Patents

Procede de realisation d'une couche de materiau sur un support

Info

Publication number
FR2865946B1
FR2865946B1 FR0450227A FR0450227A FR2865946B1 FR 2865946 B1 FR2865946 B1 FR 2865946B1 FR 0450227 A FR0450227 A FR 0450227A FR 0450227 A FR0450227 A FR 0450227A FR 2865946 B1 FR2865946 B1 FR 2865946B1
Authority
FR
France
Prior art keywords
producing
layer
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0450227A
Other languages
English (en)
Other versions
FR2865946A1 (fr
Inventor
Jean Dijon
Francoise Geffraye
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0450227A priority Critical patent/FR2865946B1/fr
Priority to EP05726348A priority patent/EP1713586A1/fr
Priority to PCT/FR2005/050073 priority patent/WO2005075077A1/fr
Priority to US10/588,703 priority patent/US8137763B2/en
Priority to JP2006551895A priority patent/JP5154801B2/ja
Publication of FR2865946A1 publication Critical patent/FR2865946A1/fr
Application granted granted Critical
Publication of FR2865946B1 publication Critical patent/FR2865946B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
    • B01J23/74—Iron group metals
    • B01J23/755—Nickel
    • B01J35/23—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/02—Impregnation, coating or precipitation
    • B01J37/0238—Impregnation, coating or precipitation via the gaseous phase-sublimation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J37/00—Processes, in general, for preparing catalysts; Processes, in general, for activation of catalysts
    • B01J37/34—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation
    • B01J37/349—Irradiation by, or application of, electric, magnetic or wave energy, e.g. ultrasonic waves ; Ionic sputtering; Flame or plasma spraying; Particle radiation making use of flames, plasmas or lasers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/158—Carbon nanotubes
    • C01B32/16—Preparation
    • C01B32/162—Preparation characterised by catalysts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
FR0450227A 2004-02-09 2004-02-09 Procede de realisation d'une couche de materiau sur un support Expired - Fee Related FR2865946B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0450227A FR2865946B1 (fr) 2004-02-09 2004-02-09 Procede de realisation d'une couche de materiau sur un support
EP05726348A EP1713586A1 (fr) 2004-02-09 2005-02-07 Procede de realisation d une couche de materiau sur un suppo rt.
PCT/FR2005/050073 WO2005075077A1 (fr) 2004-02-09 2005-02-07 Procede de realisation d'une couche de materiau sur un support.
US10/588,703 US8137763B2 (en) 2004-02-09 2005-02-07 Method of producing a layer of material on a support
JP2006551895A JP5154801B2 (ja) 2004-02-09 2005-02-07 支持体上への材料層の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0450227A FR2865946B1 (fr) 2004-02-09 2004-02-09 Procede de realisation d'une couche de materiau sur un support

Publications (2)

Publication Number Publication Date
FR2865946A1 FR2865946A1 (fr) 2005-08-12
FR2865946B1 true FR2865946B1 (fr) 2007-12-21

Family

ID=34778715

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0450227A Expired - Fee Related FR2865946B1 (fr) 2004-02-09 2004-02-09 Procede de realisation d'une couche de materiau sur un support

Country Status (5)

Country Link
US (1) US8137763B2 (fr)
EP (1) EP1713586A1 (fr)
JP (1) JP5154801B2 (fr)
FR (1) FR2865946B1 (fr)
WO (1) WO2005075077A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI429585B (zh) 2006-05-29 2014-03-11 Ulvac Inc Carbon nanotubes growth substrate, carbon nanotubes growth method, carbon nanotubes growth catalyst with particle size control method, and nano-carbon tube diameter control method
JP4799623B2 (ja) * 2009-01-19 2011-10-26 株式会社東芝 カーボンナノチューブ成長方法
JP5775705B2 (ja) * 2011-02-25 2015-09-09 東京エレクトロン株式会社 カーボンナノチューブの形成方法及び前処理方法
JP5779439B2 (ja) * 2011-07-29 2015-09-16 東京エレクトロン株式会社 前処理方法及びカーボンナノチューブの形成方法

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JPH0699806B2 (ja) * 1989-01-19 1994-12-07 科学技術庁金属材料技術研究所長 薄膜製造装置
US5084144A (en) * 1990-07-31 1992-01-28 Physical Sciences Inc. High utilization supported catalytic metal-containing gas-diffusion electrode, process for making it, and cells utilizing it
JPH05283411A (ja) * 1992-03-31 1993-10-29 Toshiba Corp 薄膜の形成方法
CA2186102A1 (fr) * 1995-01-23 1996-08-01 Regan W. Stinnett Depot assiste par faisceau d'ions pulse
US6232706B1 (en) * 1998-11-12 2001-05-15 The Board Of Trustees Of The Leland Stanford Junior University Self-oriented bundles of carbon nanotubes and method of making same
EP1061041A1 (fr) * 1999-06-18 2000-12-20 Iljin Nanotech Co., Ltd. Dispositif de dépôt en phase vapeur à basse température et méthode de préparation de nanotubes de carbone l'utilisant
US6538367B1 (en) * 1999-07-15 2003-03-25 Agere Systems Inc. Field emitting device comprising field-concentrating nanoconductor assembly and method for making the same
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GB2364933B (en) * 2000-07-18 2002-12-31 Lg Electronics Inc Method of horizontally growing carbon nanotubes
US6692324B2 (en) * 2000-08-29 2004-02-17 Ut-Battelle, Llc Single self-aligned carbon containing tips
US6755956B2 (en) * 2000-10-24 2004-06-29 Ut-Battelle, Llc Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires
US6649431B2 (en) * 2001-02-27 2003-11-18 Ut. Battelle, Llc Carbon tips with expanded bases grown with simultaneous application of carbon source and etchant gases
US7491634B2 (en) * 2006-04-28 2009-02-17 Asm International N.V. Methods for forming roughened surfaces and applications thereof
US6525453B2 (en) * 2001-05-02 2003-02-25 Huang Chung Cheng Field emitting display
JP2002343280A (ja) * 2001-05-16 2002-11-29 Hitachi Ltd 表示装置とその製造方法
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Also Published As

Publication number Publication date
US8137763B2 (en) 2012-03-20
EP1713586A1 (fr) 2006-10-25
JP2007521949A (ja) 2007-08-09
FR2865946A1 (fr) 2005-08-12
US20070237704A1 (en) 2007-10-11
WO2005075077A1 (fr) 2005-08-18
JP5154801B2 (ja) 2013-02-27

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Effective date: 20161028