CN101331409A - 具有包含非氟化交联剂的含氟弹性体抗反射涂层的复合结构 - Google Patents
具有包含非氟化交联剂的含氟弹性体抗反射涂层的复合结构 Download PDFInfo
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- CN101331409A CN101331409A CNA2006800472792A CN200680047279A CN101331409A CN 101331409 A CN101331409 A CN 101331409A CN A2006800472792 A CNA2006800472792 A CN A2006800472792A CN 200680047279 A CN200680047279 A CN 200680047279A CN 101331409 A CN101331409 A CN 101331409A
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- 239000002131 composite material Substances 0.000 title claims abstract description 9
- 239000006117 anti-reflective coating Substances 0.000 title abstract 3
- 239000003431 cross linking reagent Substances 0.000 title abstract 2
- 239000011248 coating agent Substances 0.000 claims abstract description 146
- 238000000576 coating method Methods 0.000 claims abstract description 146
- 229920001973 fluoroelastomer Polymers 0.000 claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 239000007789 gas Substances 0.000 claims abstract description 26
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000000203 mixture Substances 0.000 claims abstract description 7
- 125000001246 bromo group Chemical group Br* 0.000 claims abstract description 6
- 238000005530 etching Methods 0.000 claims abstract description 6
- 125000001309 chloro group Chemical group Cl* 0.000 claims abstract description 4
- 239000011261 inert gas Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 69
- 239000000126 substance Substances 0.000 claims description 40
- 238000004132 cross linking Methods 0.000 claims description 28
- -1 diene hydrocarbon Chemical class 0.000 claims description 25
- 229910052740 iodine Inorganic materials 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 238000007334 copolymerization reaction Methods 0.000 claims description 9
- 238000002310 reflectometry Methods 0.000 claims description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 239000004215 Carbon black (E152) Substances 0.000 claims description 8
- 229930195733 hydrocarbon Natural products 0.000 claims description 8
- 239000003973 paint Substances 0.000 claims description 8
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical compound FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 8
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 claims description 6
- 150000002170 ethers Chemical class 0.000 claims description 6
- 150000001451 organic peroxides Chemical class 0.000 claims description 6
- 125000000217 alkyl group Chemical group 0.000 claims description 5
- 125000003118 aryl group Chemical group 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 150000005215 alkyl ethers Chemical class 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 230000031709 bromination Effects 0.000 claims description 4
- 238000005893 bromination reaction Methods 0.000 claims description 4
- 229910052801 chlorine Inorganic materials 0.000 claims description 4
- 125000000623 heterocyclic group Chemical group 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 210000002268 wool Anatomy 0.000 claims description 4
- 239000002318 adhesion promoter Substances 0.000 claims description 3
- 150000008378 aryl ethers Chemical class 0.000 claims description 3
- 238000005660 chlorination reaction Methods 0.000 claims description 3
- 238000003851 corona treatment Methods 0.000 claims description 3
- ICIWUVCWSCSTAQ-UHFFFAOYSA-M iodate Chemical compound [O-]I(=O)=O ICIWUVCWSCSTAQ-UHFFFAOYSA-M 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 150000001336 alkenes Chemical class 0.000 claims 2
- HBGGXOJOCNVPFY-UHFFFAOYSA-N diisononyl phthalate Chemical compound CC(C)CCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCC(C)C HBGGXOJOCNVPFY-UHFFFAOYSA-N 0.000 claims 1
- 239000007943 implant Substances 0.000 claims 1
- 239000012780 transparent material Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 14
- 150000001993 dienes Chemical class 0.000 abstract 1
- 238000002360 preparation method Methods 0.000 description 62
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 26
- 229940090181 propyl acetate Drugs 0.000 description 26
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 26
- 239000004342 Benzoyl peroxide Substances 0.000 description 22
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 22
- 235000019400 benzoyl peroxide Nutrition 0.000 description 22
- 239000000178 monomer Substances 0.000 description 18
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 15
- 239000012299 nitrogen atmosphere Substances 0.000 description 13
- GZBSIABKXVPBFY-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)CO GZBSIABKXVPBFY-UHFFFAOYSA-N 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 229920002449 FKM Polymers 0.000 description 10
- 239000004809 Teflon Substances 0.000 description 9
- 229920006362 Teflon® Polymers 0.000 description 9
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 9
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 9
- 239000004810 polytetrafluoroethylene Substances 0.000 description 9
- BAZVSMNPJJMILC-UHFFFAOYSA-N triadimenol Chemical compound C1=NC=NN1C(C(O)C(C)(C)C)OC1=CC=C(Cl)C=C1 BAZVSMNPJJMILC-UHFFFAOYSA-N 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 8
- KOMNUTZXSVSERR-UHFFFAOYSA-N 1,3,5-tris(prop-2-enyl)-1,3,5-triazinane-2,4,6-trione Chemical compound C=CCN1C(=O)N(CC=C)C(=O)N(CC=C)C1=O KOMNUTZXSVSERR-UHFFFAOYSA-N 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 239000003292 glue Substances 0.000 description 7
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- 229920002301 cellulose acetate Polymers 0.000 description 6
- 239000003795 chemical substances by application Substances 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 6
- 238000007598 dipping method Methods 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 6
- 239000011630 iodine Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- 239000007888 film coating Substances 0.000 description 5
- 238000009501 film coating Methods 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- NJSVDVPGINTNGX-UHFFFAOYSA-N [dimethoxy(propyl)silyl]oxymethanamine Chemical compound CCC[Si](OC)(OC)OCN NJSVDVPGINTNGX-UHFFFAOYSA-N 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000002390 adhesive tape Substances 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229920002313 fluoropolymer Polymers 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000004087 circulation Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000004811 fluoropolymer Substances 0.000 description 3
- 230000026030 halogenation Effects 0.000 description 3
- 238000005658 halogenation reaction Methods 0.000 description 3
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 150000003254 radicals Chemical class 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- KDGNCLDCOVTOCS-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy propan-2-yl carbonate Chemical compound CC(C)OC(=O)OOC(C)(C)C KDGNCLDCOVTOCS-UHFFFAOYSA-N 0.000 description 2
- XWJBRBSPAODJER-UHFFFAOYSA-N 1,7-octadiene Chemical compound C=CCCCCC=C XWJBRBSPAODJER-UHFFFAOYSA-N 0.000 description 2
- VXNZUUAINFGPBY-UHFFFAOYSA-N 1-Butene Chemical compound CCC=C VXNZUUAINFGPBY-UHFFFAOYSA-N 0.000 description 2
- BJELTSYBAHKXRW-UHFFFAOYSA-N 2,4,6-triallyloxy-1,3,5-triazine Chemical compound C=CCOC1=NC(OCC=C)=NC(OCC=C)=N1 BJELTSYBAHKXRW-UHFFFAOYSA-N 0.000 description 2
- OUJSWWHXKJQNMJ-UHFFFAOYSA-N 3,3,4,4-tetrafluoro-4-iodobut-1-ene Chemical compound FC(F)(I)C(F)(F)C=C OUJSWWHXKJQNMJ-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- QBTUCBKAWGUMMK-UHFFFAOYSA-N C=CC.[F] Chemical group C=CC.[F] QBTUCBKAWGUMMK-UHFFFAOYSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 125000001118 alkylidene group Chemical group 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- QMKYBPDZANOJGF-UHFFFAOYSA-N benzene-1,3,5-tricarboxylic acid Chemical compound OC(=O)C1=CC(C(O)=O)=CC(C(O)=O)=C1 QMKYBPDZANOJGF-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 125000003709 fluoroalkyl group Chemical group 0.000 description 2
- 125000005843 halogen group Chemical group 0.000 description 2
- WMIYKQLTONQJES-UHFFFAOYSA-N hexafluoroethane Chemical compound FC(F)(F)C(F)(F)F WMIYKQLTONQJES-UHFFFAOYSA-N 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- HITROERJXNWVOI-SOFGYWHQSA-N (5e)-octa-1,5-diene Chemical compound CC\C=C\CCC=C HITROERJXNWVOI-SOFGYWHQSA-N 0.000 description 1
- BLKRGXCGFRXRNQ-SNAWJCMRSA-N (z)-3-carbonoperoxoyl-4,4-dimethylpent-2-enoic acid Chemical compound OC(=O)/C=C(C(C)(C)C)\C(=O)OO BLKRGXCGFRXRNQ-SNAWJCMRSA-N 0.000 description 1
- PRBHEGAFLDMLAL-UHFFFAOYSA-N 1,5-Hexadiene Natural products CC=CCC=C PRBHEGAFLDMLAL-UHFFFAOYSA-N 0.000 description 1
- JMGNVALALWCTLC-UHFFFAOYSA-N 1-fluoro-2-(2-fluoroethenoxy)ethene Chemical compound FC=COC=CF JMGNVALALWCTLC-UHFFFAOYSA-N 0.000 description 1
- GOAHRBQLKIZLKG-UHFFFAOYSA-N 1-tert-butylperoxybutane Chemical compound CCCCOOC(C)(C)C GOAHRBQLKIZLKG-UHFFFAOYSA-N 0.000 description 1
- NOSXUFXBUISMPR-UHFFFAOYSA-N 1-tert-butylperoxyhexane Chemical compound CCCCCCOOC(C)(C)C NOSXUFXBUISMPR-UHFFFAOYSA-N 0.000 description 1
- SZVMZLJAAGWNPG-UHFFFAOYSA-N 1-tert-butylperoxyoctane Chemical compound CCCCCCCCOOC(C)(C)C SZVMZLJAAGWNPG-UHFFFAOYSA-N 0.000 description 1
- XMNIXWIUMCBBBL-UHFFFAOYSA-N 2-(2-phenylpropan-2-ylperoxy)propan-2-ylbenzene Chemical compound C=1C=CC=CC=1C(C)(C)OOC(C)(C)C1=CC=CC=C1 XMNIXWIUMCBBBL-UHFFFAOYSA-N 0.000 description 1
- LFNCSMYARNDZQT-UHFFFAOYSA-N 2-bromo-1,1-difluoro-1-iodoethane Chemical compound FC(F)(I)CBr LFNCSMYARNDZQT-UHFFFAOYSA-N 0.000 description 1
- QZGNGBWAMYFUST-UHFFFAOYSA-N 2-bromo-1,1-difluoroethene Chemical group FC(F)=CBr QZGNGBWAMYFUST-UHFFFAOYSA-N 0.000 description 1
- BGRGXBWMPNEZMS-UHFFFAOYSA-N 3-bromo-1,1-difluoroprop-1-ene Chemical compound FC(F)=CCBr BGRGXBWMPNEZMS-UHFFFAOYSA-N 0.000 description 1
- OXGOEZHUKDEEKS-UHFFFAOYSA-N 3-tert-butylperoxy-1,1,5-trimethylcyclohexane Chemical compound CC1CC(OOC(C)(C)C)CC(C)(C)C1 OXGOEZHUKDEEKS-UHFFFAOYSA-N 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- GXSAFSCLNMQIDS-UHFFFAOYSA-N 6-bromo-5,5,6,6-tetrafluorohex-1-ene Chemical compound FC(F)(Br)C(F)(F)CCC=C GXSAFSCLNMQIDS-UHFFFAOYSA-N 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- NPKBAKGUDPJKEE-UHFFFAOYSA-N CCC(C(CCI)(F)F)(F)F Chemical compound CCC(C(CCI)(F)F)(F)F NPKBAKGUDPJKEE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- FCRIXPYKTZFXMU-UHFFFAOYSA-N FC(C(F)(F)F)(F)F.[I] Chemical compound FC(C(F)(F)F)(F)F.[I] FCRIXPYKTZFXMU-UHFFFAOYSA-N 0.000 description 1
- VVQVXIUJLQFGGS-UHFFFAOYSA-N FC=C(F)F.[I] Chemical group FC=C(F)F.[I] VVQVXIUJLQFGGS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- YCSPYYKKKGWENP-UHFFFAOYSA-N OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCCN1C(=O)NC(=O)NC1=O Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCCN1C(=O)NC(=O)NC1=O YCSPYYKKKGWENP-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- OUUQCZGPVNCOIJ-UHFFFAOYSA-M Superoxide Chemical compound [O-][O] OUUQCZGPVNCOIJ-UHFFFAOYSA-M 0.000 description 1
- XBVBMZBKUKOOKA-UHFFFAOYSA-N [I].FCF Chemical compound [I].FCF XBVBMZBKUKOOKA-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- BHELZAPQIKSEDF-UHFFFAOYSA-N allyl bromide Chemical compound BrCC=C BHELZAPQIKSEDF-UHFFFAOYSA-N 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- INLLPKCGLOXCIV-UHFFFAOYSA-N bromoethene Chemical compound BrC=C INLLPKCGLOXCIV-UHFFFAOYSA-N 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000012662 bulk polymerization Methods 0.000 description 1
- 239000001273 butane Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- LSXWFXONGKSEMY-UHFFFAOYSA-N di-tert-butyl peroxide Chemical compound CC(C)(C)OOC(C)(C)C LSXWFXONGKSEMY-UHFFFAOYSA-N 0.000 description 1
- NZZFYRREKKOMAT-UHFFFAOYSA-N diiodomethane Chemical compound ICI NZZFYRREKKOMAT-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000007720 emulsion polymerization reaction Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000010528 free radical solution polymerization reaction Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- PYGSKMBEVAICCR-UHFFFAOYSA-N hexa-1,5-diene Chemical compound C=CCCC=C PYGSKMBEVAICCR-UHFFFAOYSA-N 0.000 description 1
- 210000004276 hyalin Anatomy 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012442 inert solvent Substances 0.000 description 1
- 239000003999 initiator Substances 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 150000002497 iodine compounds Chemical class 0.000 description 1
- GHXZPUGJZVBLGC-UHFFFAOYSA-N iodoethene Chemical group IC=C GHXZPUGJZVBLGC-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- XJRBAMWJDBPFIM-UHFFFAOYSA-N methyl vinyl ether Chemical compound COC=C XJRBAMWJDBPFIM-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 1
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- QYSGYZVSCZSLHT-UHFFFAOYSA-N octafluoropropane Chemical compound FC(F)(F)C(F)(F)C(F)(F)F QYSGYZVSCZSLHT-UHFFFAOYSA-N 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- QYZLKGVUSQXAMU-UHFFFAOYSA-N penta-1,4-diene Chemical compound C=CCC=C QYZLKGVUSQXAMU-UHFFFAOYSA-N 0.000 description 1
- 229960004065 perflutren Drugs 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000013047 polymeric layer Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000000985 reflectance spectrum Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000010557 suspension polymerization reaction Methods 0.000 description 1
- PNWOTXLVRDKNJA-UHFFFAOYSA-N tert-butylperoxybenzene Chemical compound CC(C)(C)OOC1=CC=CC=C1 PNWOTXLVRDKNJA-UHFFFAOYSA-N 0.000 description 1
- GSECCTDWEGTEBD-UHFFFAOYSA-N tert-butylperoxycyclohexane Chemical compound CC(C)(C)OOC1CCCCC1 GSECCTDWEGTEBD-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- HBZPRQCNASJKHW-UHFFFAOYSA-N trimethoxysilyl prop-2-enoate Chemical compound CO[Si](OC)(OC)OC(=O)C=C HBZPRQCNASJKHW-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D127/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/34—Heterocyclic compounds having nitrogen in the ring
- C08K5/3467—Heterocyclic compounds having nitrogen in the ring having more than two nitrogen atoms in the ring
- C08K5/3477—Six-membered rings
- C08K5/3492—Triazines
- C08K5/34924—Triazines containing cyanurate groups; Tautomers thereof
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D127/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers
- C09D127/02—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment
- C09D127/12—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D127/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers
- C09D127/02—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment
- C09D127/12—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
- C09D127/16—Homopolymers or copolymers of vinylidene fluoride
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/10—Esters; Ether-esters
- C08K5/101—Esters; Ether-esters of monocarboxylic acids
- C08K5/103—Esters; Ether-esters of monocarboxylic acids with polyalcohols
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Paints Or Removers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/303,599 | 2005-12-16 | ||
| US11/303,599 US7553543B2 (en) | 2005-12-16 | 2005-12-16 | Composite structure having a fluoroelastomeric anti-reflective coating with non-fluorinated cross-linking |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101331409A true CN101331409A (zh) | 2008-12-24 |
Family
ID=37943961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006800472792A Pending CN101331409A (zh) | 2005-12-16 | 2006-12-05 | 具有包含非氟化交联剂的含氟弹性体抗反射涂层的复合结构 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7553543B2 (https=) |
| EP (1) | EP1963890A2 (https=) |
| JP (1) | JP2009520054A (https=) |
| KR (1) | KR20080078896A (https=) |
| CN (1) | CN101331409A (https=) |
| TW (1) | TW200724617A (https=) |
| WO (1) | WO2007078539A2 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900944A (zh) * | 2009-02-08 | 2010-12-01 | 罗门哈斯电子材料有限公司 | 适于与外涂的光致抗蚀剂一起使用的涂层组合物 |
| CN110914354A (zh) * | 2017-07-20 | 2020-03-24 | 3M创新有限公司 | 通过光化辐射固化的氟化弹性体及其方法 |
| CN110927832A (zh) * | 2018-09-04 | 2020-03-27 | 爱科来株式会社 | 光学元件和光学元件的制造方法 |
| CN111742005A (zh) * | 2018-02-09 | 2020-10-02 | 索尔维特殊聚合物意大利有限公司 | 氟弹性体可固化的组合物 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7629051B2 (en) * | 2005-06-01 | 2009-12-08 | Fujifilm Corporation | Optical film containing fluorinated photopolymerization initiator, antireflective film, polarizing plate and image display unit including same |
| US20080032053A1 (en) * | 2006-08-04 | 2008-02-07 | Kostantinos Kourtakis | Low refractive index composition |
| US20080032052A1 (en) * | 2006-08-04 | 2008-02-07 | Kostantinos Kourtakis | Low refractive index composition |
| JP2011505465A (ja) * | 2007-11-30 | 2011-02-24 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 低屈折率組成物、耐摩耗性反射防止コーティングおよび耐摩耗性反射防止コーティングを形成する方法 |
| US8784710B2 (en) * | 2009-07-16 | 2014-07-22 | Phillips Scientific Inc. | Expandable polymer membrane and tubes, and a method of manufacturing thereof |
| US20110200826A1 (en) * | 2009-07-23 | 2011-08-18 | E. I. Du Pont De Nemours And Company | Articles containing fluorinated hybrid compositions |
| US20110186790A1 (en) * | 2009-07-23 | 2011-08-04 | E. I. Du Pont De Nemours And Company | Fluorinated hybrid compositions |
| US20110189382A1 (en) * | 2009-07-23 | 2011-08-04 | E. I. Du Pont De Nemours And Company | Method of preparing fluorinated hybrid compositions |
| US20110218319A1 (en) * | 2009-09-02 | 2011-09-08 | E. I. Du Pont De Nemours And Company | Polyaramid films comprising fluorovinylether functionalized aromatic moieties |
| US8623148B2 (en) * | 2009-09-10 | 2014-01-07 | Matheson Tri-Gas, Inc. | NF3 chamber clean additive |
| US8609249B2 (en) | 2011-02-09 | 2013-12-17 | Phillips Scientific Inc. | Thin wall expandable polymer tubes having improved axial and radial strength, and a method of manufacturing thereof |
| CN102352169B (zh) * | 2011-09-05 | 2013-03-20 | 安徽省易达电子有限公司 | 一种多组分金属防腐漆及其制备方法 |
| US9110230B2 (en) | 2013-05-07 | 2015-08-18 | Corning Incorporated | Scratch-resistant articles with retained optical properties |
| TWI821234B (zh) | 2018-01-09 | 2023-11-11 | 美商康寧公司 | 具光改變特徵之塗覆製品及用於製造彼等之方法 |
| US12147009B2 (en) | 2020-07-09 | 2024-11-19 | Corning Incorporated | Textured region to reduce specular reflectance including a low refractive index substrate with higher elevated surfaces and lower elevated surfaces and a high refractive index material disposed on the lower elevated surfaces |
| WO2022123391A1 (en) * | 2020-12-09 | 2022-06-16 | 3M Innovative Properties Company | A coatable curable fluoropolymer and fluoroelastomers therefrom |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1078329B (de) * | 1955-04-27 | 1960-03-24 | Du Pont | Verfahren zur Herstellung eines elastischen Mischpolymerisats aus Vinylidenfluorid und einem anderen Fluorolefin |
| US2968649A (en) * | 1958-12-04 | 1961-01-17 | Du Pont | Elastomeric terpolymers |
| NL281420A (https=) * | 1961-07-27 | |||
| US3682872A (en) * | 1970-03-18 | 1972-08-08 | Du Pont | Perfluoro(3-phenoxypropyl vinyl ether) monomer and copolymers made therefrom |
| US4035565A (en) * | 1975-03-27 | 1977-07-12 | E. I. Du Pont De Nemours And Company | Fluoropolymer containing a small amount of bromine-containing olefin units |
| JPS53125491A (en) * | 1977-04-08 | 1978-11-01 | Daikin Ind Ltd | Fluorine-containing polymer easily curable and its curable composition |
| US4281092A (en) * | 1978-11-30 | 1981-07-28 | E. I. Du Pont De Nemours And Company | Vulcanizable fluorinated copolymers |
| US4694045A (en) * | 1985-12-11 | 1987-09-15 | E. I. Du Pont De Nemours And Company | Base resistant fluoroelastomers |
| DE3689832T2 (de) * | 1985-07-12 | 1994-11-17 | Du Pont | Peroxidhärtbare bromierte Fluorelastomermischungen. |
| US4973633A (en) * | 1989-05-15 | 1990-11-27 | E. I. Du Pont De Nemours And Company | Peroxide-curable fluoroelastomers having bromine an iodine curesites and the preparation thereof |
| JPH04288305A (ja) * | 1991-03-15 | 1992-10-13 | Nippon Mektron Ltd | パーオキサイド加硫可能な含フッ素エラストマ−の製造方法 |
| DE4114598A1 (de) | 1991-05-04 | 1992-11-05 | Bayer Ag | Unvernetzte copolymerisate mit reaktiven doppelbindungen aus fluormonomeren und nicht konjugierten dienen und verfahren zu ihrer herstellung |
| WO1994022930A1 (fr) * | 1993-03-30 | 1994-10-13 | E.I. Du Pont De Nemours And Company | Procede de production de fluoroelastomere |
| JPH07173204A (ja) * | 1993-03-30 | 1995-07-11 | E I Du Pont De Nemours & Co | 含フッ素エラストマーの製造方法 |
| EP0694794B1 (en) * | 1994-07-29 | 2003-02-05 | Bridgestone Corporation | Optical waveguide tube |
| JP3327016B2 (ja) * | 1994-12-06 | 2002-09-24 | ダイキン工業株式会社 | 低温シール性に優れたフッ素ゴム共重合体及びその硬化用組成物 |
| US6383559B1 (en) * | 1995-12-07 | 2002-05-07 | Fuji Photo Film Co., Ltd. | Anti-reflection film and display device having the same |
| JPH10111401A (ja) * | 1996-08-14 | 1998-04-28 | Daikin Ind Ltd | 反射防止処理物品 |
| DE69628465T2 (de) * | 1996-11-25 | 2004-04-01 | E.I. Du Pont De Nemours And Co., Wilmington | Perfluorelastomer zusammensetzung mit verbesserter verarbeitbarkeit |
| US6489420B1 (en) * | 2000-06-27 | 2002-12-03 | Dyneon Llc | Fluoropolymers with improved characteristics |
| JP4179306B2 (ja) * | 2000-08-29 | 2008-11-12 | ダイキン工業株式会社 | 硬化性含フッ素ポリマー、それを用いた硬化性樹脂組成物および反射防止膜 |
| US7351471B2 (en) * | 2000-12-06 | 2008-04-01 | 3M Innovative Properties Company | Fluoropolymer coating compositions with multifunctional fluoroalkyl crosslinkers for anti-reflective polymer films |
| JP4187487B2 (ja) * | 2001-09-04 | 2008-11-26 | 大日本印刷株式会社 | コーティング組成物、その塗膜、反射防止膜、反射防止フィルム、及び、画像表示装置 |
| EP1425352B1 (en) * | 2001-09-11 | 2005-01-12 | 3M Innovative Properties Company | Smudge resistant nanocomposite hardcoats and methods for making same |
| JP3953922B2 (ja) * | 2001-10-18 | 2007-08-08 | 日東電工株式会社 | 反射防止フィルム、光学素子および表示装置 |
| JP4085630B2 (ja) * | 2001-12-21 | 2008-05-14 | Jsr株式会社 | エチレン性不飽和基含有含フッ素重合体、並びにそれを用いた硬化性樹脂組成物及び反射防止膜 |
| JP2005043749A (ja) * | 2003-07-24 | 2005-02-17 | Fuji Photo Film Co Ltd | 反射防止膜、反射防止フィルム、偏光板、画像表示装置およびハードコート処理物品 |
| JP2005234476A (ja) * | 2004-02-23 | 2005-09-02 | Fuji Photo Film Co Ltd | 反射防止膜、反射防止フィルムおよび画像表示装置 |
| US20060148996A1 (en) | 2004-12-30 | 2006-07-06 | Coggio William D | Low refractive index fluoropolymer compositions having improved coating and durability properties |
| US7323514B2 (en) * | 2004-12-30 | 2008-01-29 | 3M Innovative Properties Company | Low refractive index fluoropolymer coating compositions for use in antireflective polymer films |
-
2005
- 2005-12-16 US US11/303,599 patent/US7553543B2/en not_active Expired - Fee Related
-
2006
- 2006-11-29 TW TW095144103A patent/TW200724617A/zh unknown
- 2006-12-05 CN CNA2006800472792A patent/CN101331409A/zh active Pending
- 2006-12-05 EP EP20060839076 patent/EP1963890A2/en not_active Withdrawn
- 2006-12-05 WO PCT/US2006/046509 patent/WO2007078539A2/en not_active Ceased
- 2006-12-05 JP JP2008545648A patent/JP2009520054A/ja active Pending
- 2006-12-05 KR KR1020087017151A patent/KR20080078896A/ko not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900944A (zh) * | 2009-02-08 | 2010-12-01 | 罗门哈斯电子材料有限公司 | 适于与外涂的光致抗蚀剂一起使用的涂层组合物 |
| CN101900944B (zh) * | 2009-02-08 | 2014-02-26 | 罗门哈斯电子材料有限公司 | 适于与外涂的光致抗蚀剂一起使用的涂层组合物 |
| CN110914354A (zh) * | 2017-07-20 | 2020-03-24 | 3M创新有限公司 | 通过光化辐射固化的氟化弹性体及其方法 |
| US11248117B2 (en) | 2017-07-20 | 2022-02-15 | 3M Innovative Properties Company | Fluorinated elastomers cured by actinic radiation and methods thereof |
| CN110914354B (zh) * | 2017-07-20 | 2022-07-19 | 3M创新有限公司 | 通过光化辐射固化的氟化弹性体及其方法 |
| CN111742005A (zh) * | 2018-02-09 | 2020-10-02 | 索尔维特殊聚合物意大利有限公司 | 氟弹性体可固化的组合物 |
| CN111742005B (zh) * | 2018-02-09 | 2023-01-20 | 索尔维特殊聚合物意大利有限公司 | 氟弹性体可固化的组合物 |
| CN110927832A (zh) * | 2018-09-04 | 2020-03-27 | 爱科来株式会社 | 光学元件和光学元件的制造方法 |
| US11619765B2 (en) | 2018-09-04 | 2023-04-04 | Arkray, Inc. | Optical element and method of producing optical element |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007078539A3 (en) | 2008-04-17 |
| KR20080078896A (ko) | 2008-08-28 |
| US20070141357A1 (en) | 2007-06-21 |
| WO2007078539A2 (en) | 2007-07-12 |
| JP2009520054A (ja) | 2009-05-21 |
| US7553543B2 (en) | 2009-06-30 |
| TW200724617A (en) | 2007-07-01 |
| EP1963890A2 (en) | 2008-09-03 |
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