CN101331403B - 消除四点电阻测量的成直线定位误差 - Google Patents

消除四点电阻测量的成直线定位误差 Download PDF

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Publication number
CN101331403B
CN101331403B CN2006800476331A CN200680047633A CN101331403B CN 101331403 B CN101331403 B CN 101331403B CN 2006800476331 A CN2006800476331 A CN 2006800476331A CN 200680047633 A CN200680047633 A CN 200680047633A CN 101331403 B CN101331403 B CN 101331403B
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probe
feeler arm
resistance
feeler
electric current
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CN101331403A (zh
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托尔本·迈克尔·汉森
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Capres AS
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Capres AS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/08—Measuring resistance by measuring both voltage and current

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
CN2006800476331A 2005-10-17 2006-10-17 消除四点电阻测量的成直线定位误差 Expired - Fee Related CN101331403B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP05388087.8 2005-10-17
EP05388087A EP1775594A1 (en) 2005-10-17 2005-10-17 Eliminating in-line positional errors for four-point resistance measurement
PCT/DK2006/000584 WO2007045246A1 (en) 2005-10-17 2006-10-17 Eliminating inline positional errors for four-point resistance measurement

Publications (2)

Publication Number Publication Date
CN101331403A CN101331403A (zh) 2008-12-24
CN101331403B true CN101331403B (zh) 2012-09-26

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CN2006800476331A Expired - Fee Related CN101331403B (zh) 2005-10-17 2006-10-17 消除四点电阻测量的成直线定位误差

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US (2) US7852093B2 (enExample)
EP (2) EP1775594A1 (enExample)
JP (1) JP5367371B2 (enExample)
KR (1) KR101341235B1 (enExample)
CN (1) CN101331403B (enExample)
IL (2) IL190761A (enExample)
WO (1) WO2007045246A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2237052A1 (en) 2009-03-31 2010-10-06 Capres A/S Automated multi-point probe manipulation
US8564308B2 (en) * 2009-09-30 2013-10-22 Tektronix, Inc. Signal acquisition system having reduced probe loading of a device under test
CN101872002B (zh) * 2010-05-28 2016-01-20 上海华虹宏力半导体制造有限公司 探针检测装置及其方法
CN102004187B (zh) * 2010-09-21 2013-07-17 江苏大学 串联附加电阻差值法的特小直流电阻测量方法
KR101913446B1 (ko) 2010-12-21 2018-10-30 카프레스 에이/에스 단일 위치 홀 효과 측정
EP2469271A1 (en) 2010-12-21 2012-06-27 Capres A/S Single-position Hall effect measurements
EP2498081A1 (en) 2011-03-08 2012-09-12 Capres A/S Single-position hall effect measurements
CN103048555B (zh) * 2011-10-13 2015-07-01 无锡华润上华科技有限公司 薄层电阻等值线图的测试装置
EP2677324A1 (en) 2012-06-20 2013-12-25 Capres A/S Deep-etched multipoint probe
US10302677B2 (en) * 2015-04-29 2019-05-28 Kla-Tencor Corporation Multiple pin probes with support for performing parallel measurements
KR102478717B1 (ko) * 2017-01-09 2022-12-16 카프레스 에이/에스 4개의 프로브 저항 측정에 관한 위치 보정을 위한 위치 보정 방법 및 시스템
JP6985196B2 (ja) * 2018-03-27 2021-12-22 日東電工株式会社 抵抗測定装置、フィルム製造装置および導電性フィルムの製造方法
CN111239083A (zh) * 2020-02-26 2020-06-05 东莞市晶博光电有限公司 一种手机玻璃油墨红外线透过率测试设备及相关性算法
CN112461900B (zh) * 2021-02-04 2021-04-20 微龛(广州)半导体有限公司 基于伪MOS的InGaAs几何因子表征方法及系统
US11946890B2 (en) * 2021-05-24 2024-04-02 Kla Corporation Method for measuring high resistivity test samples using voltages or resistances of spacings between contact probes
CN116447933A (zh) * 2023-04-10 2023-07-18 本溪钢铁（集团）矿业有限责任公司 一种爆速管的研究测试方法
CN119310350B (zh) * 2024-12-16 2025-03-18 合肥晶合集成电路股份有限公司 电阻值的测量设备及测量方法

Citations (6)

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US3456186A (en) * 1966-10-31 1969-07-15 Collins Radio Co Circuit for measuring sheet resistivity including an a.c. current source and average reading d.c. voltmeter switchably connected to pairs of a four probe array
US3735254A (en) * 1970-06-06 1973-05-22 Philips Corp Method of determining the sheet resistance and measuring device therefor
US4703252A (en) * 1985-02-22 1987-10-27 Prometrix Corporation Apparatus and methods for resistivity testing
WO1994011745A1 (en) * 1992-11-10 1994-05-26 David Cheng Method and apparatus for measuring film thickness
US5691648A (en) * 1992-11-10 1997-11-25 Cheng; David Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
US6745445B2 (en) * 2002-10-29 2004-06-08 Bard Peripheral Vascular, Inc. Stent compression method

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US2659861A (en) * 1951-11-01 1953-11-17 Branson Instr Apparatus for electrical thickness measurement
US3676775A (en) * 1971-05-07 1972-07-11 Ibm Method for measuring resistivity
US4546318A (en) * 1983-03-11 1985-10-08 Mobil Oil Corporation Method for regulating current flow through core samples
US4775281A (en) * 1986-12-02 1988-10-04 Teradyne, Inc. Apparatus and method for loading and unloading wafers
US4989154A (en) * 1987-07-13 1991-01-29 Mitsubishi Petrochemical Company Ltd. Method of measuring resistivity, and apparatus therefor
US4929893A (en) * 1987-10-06 1990-05-29 Canon Kabushiki Kaisha Wafer prober
US6747445B2 (en) 2001-10-31 2004-06-08 Agere Systems Inc. Stress migration test structure and method therefor
JP2004125460A (ja) * 2002-09-30 2004-04-22 Nitto Denko Corp シート抵抗値測定機器および測定方法
US6943571B2 (en) 2003-03-18 2005-09-13 International Business Machines Corporation Reduction of positional errors in a four point probe resistance measurement
US7212016B2 (en) * 2003-04-30 2007-05-01 The Boeing Company Apparatus and methods for measuring resistance of conductive layers
KR100608656B1 (ko) 2003-09-20 2006-08-04 엘지전자 주식회사 모터의 속도제어장치
US7009414B2 (en) 2003-10-17 2006-03-07 International Business Machines Corporation Atomic force microscope and method for determining properties of a sample surface using an atomic force microscope
US7034519B2 (en) 2004-01-08 2006-04-25 International Business Machines Corporation High frequency measurement for current-in-plane-tunneling

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3456186A (en) * 1966-10-31 1969-07-15 Collins Radio Co Circuit for measuring sheet resistivity including an a.c. current source and average reading d.c. voltmeter switchably connected to pairs of a four probe array
US3735254A (en) * 1970-06-06 1973-05-22 Philips Corp Method of determining the sheet resistance and measuring device therefor
US4703252A (en) * 1985-02-22 1987-10-27 Prometrix Corporation Apparatus and methods for resistivity testing
WO1994011745A1 (en) * 1992-11-10 1994-05-26 David Cheng Method and apparatus for measuring film thickness
US5691648A (en) * 1992-11-10 1997-11-25 Cheng; David Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
US6745445B2 (en) * 2002-10-29 2004-06-08 Bard Peripheral Vascular, Inc. Stent compression method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
HUINA YANG ET AL.Determination of Three-Layer Earth Model from Wenner Four-Probe Test Data.《IEEE TRANSACTIONS ON MAGNETICS》.2001,第37卷(第5期),全文. *

Also Published As

Publication number Publication date
US7852093B2 (en) 2010-12-14
IL190761A0 (en) 2008-11-03
EP1949115A1 (en) 2008-07-30
US20080294365A1 (en) 2008-11-27
JP5367371B2 (ja) 2013-12-11
IL190761A (en) 2012-03-29
US20110084706A1 (en) 2011-04-14
US7944222B2 (en) 2011-05-17
KR20080059308A (ko) 2008-06-26
WO2007045246A1 (en) 2007-04-26
EP1775594A1 (en) 2007-04-18
IL215137A0 (en) 2011-10-31
CN101331403A (zh) 2008-12-24
JP2009511925A (ja) 2009-03-19
KR101341235B1 (ko) 2013-12-12
IL215137A (en) 2015-10-29

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