IL190761A - Eliminating inline positional errors for four-point resistance measurement - Google Patents
Eliminating inline positional errors for four-point resistance measurementInfo
- Publication number
- IL190761A IL190761A IL190761A IL19076108A IL190761A IL 190761 A IL190761 A IL 190761A IL 190761 A IL190761 A IL 190761A IL 19076108 A IL19076108 A IL 19076108A IL 190761 A IL190761 A IL 190761A
- Authority
- IL
- Israel
- Prior art keywords
- probe
- point
- current
- arms
- resistance
- Prior art date
Links
- 238000005259 measurement Methods 0.000 title claims description 53
- 239000000523 sample Substances 0.000 claims description 300
- 238000012360 testing method Methods 0.000 claims description 92
- 238000000034 method Methods 0.000 claims description 69
- 238000012937 correction Methods 0.000 claims description 60
- 230000001902 propagating effect Effects 0.000 claims description 12
- 230000009467 reduction Effects 0.000 claims description 6
- 230000008030 elimination Effects 0.000 claims description 4
- 238000003379 elimination reaction Methods 0.000 claims description 4
- 238000004088 simulation Methods 0.000 description 9
- 238000004364 calculation method Methods 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 201000005505 Measles Diseases 0.000 description 1
- 238000012443 analytical study Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012804 iterative process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/08—Measuring resistance by measuring both voltage and current
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP05388087A EP1775594A1 (en) | 2005-10-17 | 2005-10-17 | Eliminating in-line positional errors for four-point resistance measurement |
| PCT/DK2006/000584 WO2007045246A1 (en) | 2005-10-17 | 2006-10-17 | Eliminating inline positional errors for four-point resistance measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL190761A0 IL190761A0 (en) | 2008-11-03 |
| IL190761A true IL190761A (en) | 2012-03-29 |
Family
ID=35822623
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL190761A IL190761A (en) | 2005-10-17 | 2008-04-09 | Eliminating inline positional errors for four-point resistance measurement |
| IL215137A IL215137A (en) | 2005-10-17 | 2011-09-14 | Erase row arrangement locations to measure resistance at four points |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL215137A IL215137A (en) | 2005-10-17 | 2011-09-14 | Erase row arrangement locations to measure resistance at four points |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7852093B2 (enExample) |
| EP (2) | EP1775594A1 (enExample) |
| JP (1) | JP5367371B2 (enExample) |
| KR (1) | KR101341235B1 (enExample) |
| CN (1) | CN101331403B (enExample) |
| IL (2) | IL190761A (enExample) |
| WO (1) | WO2007045246A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2237052A1 (en) | 2009-03-31 | 2010-10-06 | Capres A/S | Automated multi-point probe manipulation |
| US8564308B2 (en) * | 2009-09-30 | 2013-10-22 | Tektronix, Inc. | Signal acquisition system having reduced probe loading of a device under test |
| CN101872002B (zh) * | 2010-05-28 | 2016-01-20 | 上海华虹宏力半导体制造有限公司 | 探针检测装置及其方法 |
| CN102004187B (zh) * | 2010-09-21 | 2013-07-17 | 江苏大学 | 串联附加电阻差值法的特小直流电阻测量方法 |
| KR101913446B1 (ko) | 2010-12-21 | 2018-10-30 | 카프레스 에이/에스 | 단일 위치 홀 효과 측정 |
| EP2469271A1 (en) | 2010-12-21 | 2012-06-27 | Capres A/S | Single-position Hall effect measurements |
| EP2498081A1 (en) | 2011-03-08 | 2012-09-12 | Capres A/S | Single-position hall effect measurements |
| CN103048555B (zh) * | 2011-10-13 | 2015-07-01 | 无锡华润上华科技有限公司 | 薄层电阻等值线图的测试装置 |
| EP2677324A1 (en) | 2012-06-20 | 2013-12-25 | Capres A/S | Deep-etched multipoint probe |
| US10302677B2 (en) * | 2015-04-29 | 2019-05-28 | Kla-Tencor Corporation | Multiple pin probes with support for performing parallel measurements |
| KR102478717B1 (ko) * | 2017-01-09 | 2022-12-16 | 카프레스 에이/에스 | 4개의 프로브 저항 측정에 관한 위치 보정을 위한 위치 보정 방법 및 시스템 |
| JP6985196B2 (ja) * | 2018-03-27 | 2021-12-22 | 日東電工株式会社 | 抵抗測定装置、フィルム製造装置および導電性フィルムの製造方法 |
| CN111239083A (zh) * | 2020-02-26 | 2020-06-05 | 东莞市晶博光电有限公司 | 一种手机玻璃油墨红外线透过率测试设备及相关性算法 |
| CN112461900B (zh) * | 2021-02-04 | 2021-04-20 | 微龛(广州)半导体有限公司 | 基于伪MOS的InGaAs几何因子表征方法及系统 |
| US11946890B2 (en) * | 2021-05-24 | 2024-04-02 | Kla Corporation | Method for measuring high resistivity test samples using voltages or resistances of spacings between contact probes |
| CN116447933A (zh) * | 2023-04-10 | 2023-07-18 | 本溪钢铁（集团）矿业有限责任公司 | 一种爆速管的研究测试方法 |
| CN119310350B (zh) * | 2024-12-16 | 2025-03-18 | 合肥晶合集成电路股份有限公司 | 电阻值的测量设备及测量方法 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2659861A (en) * | 1951-11-01 | 1953-11-17 | Branson Instr | Apparatus for electrical thickness measurement |
| US3456186A (en) * | 1966-10-31 | 1969-07-15 | Collins Radio Co | Circuit for measuring sheet resistivity including an a.c. current source and average reading d.c. voltmeter switchably connected to pairs of a four probe array |
| NL7008274A (enExample) * | 1970-06-06 | 1971-12-08 | ||
| US3676775A (en) * | 1971-05-07 | 1972-07-11 | Ibm | Method for measuring resistivity |
| US4546318A (en) * | 1983-03-11 | 1985-10-08 | Mobil Oil Corporation | Method for regulating current flow through core samples |
| US4703252A (en) | 1985-02-22 | 1987-10-27 | Prometrix Corporation | Apparatus and methods for resistivity testing |
| US4775281A (en) * | 1986-12-02 | 1988-10-04 | Teradyne, Inc. | Apparatus and method for loading and unloading wafers |
| US4989154A (en) * | 1987-07-13 | 1991-01-29 | Mitsubishi Petrochemical Company Ltd. | Method of measuring resistivity, and apparatus therefor |
| US4929893A (en) * | 1987-10-06 | 1990-05-29 | Canon Kabushiki Kaisha | Wafer prober |
| US5691648A (en) | 1992-11-10 | 1997-11-25 | Cheng; David | Method and apparatus for measuring sheet resistance and thickness of thin films and substrates |
| WO1994011745A1 (en) * | 1992-11-10 | 1994-05-26 | David Cheng | Method and apparatus for measuring film thickness |
| US6747445B2 (en) | 2001-10-31 | 2004-06-08 | Agere Systems Inc. | Stress migration test structure and method therefor |
| JP2004125460A (ja) * | 2002-09-30 | 2004-04-22 | Nitto Denko Corp | シート抵抗値測定機器および測定方法 |
| US6745445B2 (en) * | 2002-10-29 | 2004-06-08 | Bard Peripheral Vascular, Inc. | Stent compression method |
| US6943571B2 (en) | 2003-03-18 | 2005-09-13 | International Business Machines Corporation | Reduction of positional errors in a four point probe resistance measurement |
| US7212016B2 (en) * | 2003-04-30 | 2007-05-01 | The Boeing Company | Apparatus and methods for measuring resistance of conductive layers |
| KR100608656B1 (ko) | 2003-09-20 | 2006-08-04 | 엘지전자 주식회사 | 모터의 속도제어장치 |
| US7009414B2 (en) | 2003-10-17 | 2006-03-07 | International Business Machines Corporation | Atomic force microscope and method for determining properties of a sample surface using an atomic force microscope |
| US7034519B2 (en) | 2004-01-08 | 2006-04-25 | International Business Machines Corporation | High frequency measurement for current-in-plane-tunneling |
-
2005
- 2005-10-17 EP EP05388087A patent/EP1775594A1/en not_active Withdrawn
-
2006
- 2006-10-17 WO PCT/DK2006/000584 patent/WO2007045246A1/en not_active Ceased
- 2006-10-17 EP EP06791472A patent/EP1949115A1/en not_active Withdrawn
- 2006-10-17 US US12/090,425 patent/US7852093B2/en active Active
- 2006-10-17 JP JP2008535888A patent/JP5367371B2/ja active Active
- 2006-10-17 CN CN2006800476331A patent/CN101331403B/zh not_active Expired - Fee Related
- 2006-10-17 KR KR1020087011814A patent/KR101341235B1/ko active Active
-
2008
- 2008-04-09 IL IL190761A patent/IL190761A/en active IP Right Grant
-
2010
- 2010-11-08 US US12/941,929 patent/US7944222B2/en active Active
-
2011
- 2011-09-14 IL IL215137A patent/IL215137A/en active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| US7852093B2 (en) | 2010-12-14 |
| CN101331403B (zh) | 2012-09-26 |
| IL190761A0 (en) | 2008-11-03 |
| EP1949115A1 (en) | 2008-07-30 |
| US20080294365A1 (en) | 2008-11-27 |
| JP5367371B2 (ja) | 2013-12-11 |
| US20110084706A1 (en) | 2011-04-14 |
| US7944222B2 (en) | 2011-05-17 |
| KR20080059308A (ko) | 2008-06-26 |
| WO2007045246A1 (en) | 2007-04-26 |
| EP1775594A1 (en) | 2007-04-18 |
| IL215137A0 (en) | 2011-10-31 |
| CN101331403A (zh) | 2008-12-24 |
| JP2009511925A (ja) | 2009-03-19 |
| KR101341235B1 (ko) | 2013-12-12 |
| IL215137A (en) | 2015-10-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FF | Patent granted | ||
| KB | Patent renewed | ||
| KB | Patent renewed | ||
| KB | Patent renewed |